Advances in Resist Technology and Processing

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Publisher :
ISBN 13 :
Total Pages : 834 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Advances in Resist Technology and Processing by :

Download or read book Advances in Resist Technology and Processing written by and published by . This book was released on 2003 with total page 834 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Advances in Resist Technology and Processing IV

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Publisher :
ISBN 13 :
Total Pages : 384 pages
Book Rating : 4.:/5 (318 download)

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Book Synopsis Advances in Resist Technology and Processing IV by : M. J. Bowden

Download or read book Advances in Resist Technology and Processing IV written by M. J. Bowden and published by . This book was released on 1987 with total page 384 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Advances in Resist Technology and Processing VI

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ISBN 13 :
Total Pages : 640 pages
Book Rating : 4.:/5 (318 download)

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Book Synopsis Advances in Resist Technology and Processing VI by : Elsa Reichmanis

Download or read book Advances in Resist Technology and Processing VI written by Elsa Reichmanis and published by . This book was released on 1989 with total page 640 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography

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Publisher : IET
ISBN 13 : 9780852969069
Total Pages : 784 pages
Book Rating : 4.9/5 (69 download)

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Book Synopsis Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography by : P. Rai-Choudhury

Download or read book Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography written by P. Rai-Choudhury and published by IET. This book was released on 1997 with total page 784 pages. Available in PDF, EPUB and Kindle. Book excerpt: Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.

Advances in Resist Technology and Processing III

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ISBN 13 :
Total Pages : 360 pages
Book Rating : 4.:/5 (318 download)

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Book Synopsis Advances in Resist Technology and Processing III by :

Download or read book Advances in Resist Technology and Processing III written by and published by . This book was released on 1986 with total page 360 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Advances in Resist Technology and Processing XXI

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ISBN 13 :
Total Pages : 688 pages
Book Rating : 4.F/5 ( download)

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Book Synopsis Advances in Resist Technology and Processing XXI by :

Download or read book Advances in Resist Technology and Processing XXI written by and published by . This book was released on 2004 with total page 688 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Advances in Resist Technology and Processing II

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ISBN 13 :
Total Pages : 384 pages
Book Rating : 4.:/5 (318 download)

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Book Synopsis Advances in Resist Technology and Processing II by :

Download or read book Advances in Resist Technology and Processing II written by and published by . This book was released on 1985 with total page 384 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Polymeric Materials Encyclopedia, Twelve Volume Set

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Publisher : CRC Press
ISBN 13 : 100071411X
Total Pages : 792 pages
Book Rating : 4.0/5 (7 download)

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Book Synopsis Polymeric Materials Encyclopedia, Twelve Volume Set by : Joseph C. Salamone

Download or read book Polymeric Materials Encyclopedia, Twelve Volume Set written by Joseph C. Salamone and published by CRC Press. This book was released on 2020-07-16 with total page 792 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Polymeric Materials Encyclopedia presents state-of-the-art research and development on the synthesis, properties, and applications of polymeric materials. This groundbreaking work includes the largest number of contributors in the world for a reference publication in polymer science, and examines many fields not covered in any other reference. With multiple articles on many subjects, the encyclopedia offers you a broad-based perspective on a multitude of topics, as well as detailed research information, figures, tables, illustrations, and references. Updates published as new research unfolds will continue to provide you with the latest advances in polymer science, and will keep the encyclopedia at the forefront of the field well into the future. From novices to experienced researchers in the field, anyone and everyone working in polymer science today needs this complete assessment of the state of the art. The entire 12-volume set will be available in your choice of printed or CD-ROM format.

Handbook of Nanophysics

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Publisher : CRC Press
ISBN 13 : 1420075519
Total Pages : 782 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Handbook of Nanophysics by : Klaus D. Sattler

Download or read book Handbook of Nanophysics written by Klaus D. Sattler and published by CRC Press. This book was released on 2010-09-17 with total page 782 pages. Available in PDF, EPUB and Kindle. Book excerpt: Many bottom-up and top-down techniques for nanomaterial and nanostructure generation have enabled the development of applications in nanoelectronics and nanophotonics. Handbook of Nanophysics: Nanoelectronics and Nanophotonics explores important recent applications of nanophysics in the areas of electronics and photonics. Each peer-reviewed c

Novel Resists for Advanced Lithography

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Publisher :
ISBN 13 :
Total Pages : 596 pages
Book Rating : 4.E/5 ( download)

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Book Synopsis Novel Resists for Advanced Lithography by : Junyan Dai

Download or read book Novel Resists for Advanced Lithography written by Junyan Dai and published by . This book was released on 2004 with total page 596 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Extending Moore's Law through Advanced Semiconductor Design and Processing Techniques

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Publisher : CRC Press
ISBN 13 : 1351248669
Total Pages : 354 pages
Book Rating : 4.3/5 (512 download)

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Book Synopsis Extending Moore's Law through Advanced Semiconductor Design and Processing Techniques by : Wynand Lambrechts

Download or read book Extending Moore's Law through Advanced Semiconductor Design and Processing Techniques written by Wynand Lambrechts and published by CRC Press. This book was released on 2018-09-13 with total page 354 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a methodological understanding of the theoretical and technical limitations to the longevity of Moore’s law. The book presents research on factors that have significant impact on the future of Moore’s law and those factors believed to sustain the trend of the last five decades. Research findings show that boundaries of Moore’s law primarily include physical restrictions of scaling electronic components to levels beyond that of ordinary manufacturing principles and approaching the bounds of physics. The research presented in this book provides essential background and knowledge to grasp the following principles: Traditional and modern photolithography, the primary limiting factor of Moore’s law Innovations in semiconductor manufacturing that makes current generation CMOS processing possible Multi-disciplinary technologies that could drive Moore's law forward significantly Design principles for microelectronic circuits and components that take advantage of technology miniaturization The semiconductor industry economic market trends and technical driving factors The complexity and cost associated with technology scaling have compelled researchers in the disciplines of engineering and physics to optimize previous generation nodes to improve system-on-chip performance. This is especially relevant to participate in the increased attractiveness of the Internet of Things (IoT). This book additionally provides scholarly and practical examples of principles in microelectronic circuit design and layout to mitigate technology limits of previous generation nodes. Readers are encouraged to intellectually apply the knowledge derived from this book to further research and innovation in prolonging Moore’s law and associated principles.

Advanced Processes for 193-nm Immersion Lithography

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Publisher : SPIE Press
ISBN 13 : 0819475572
Total Pages : 338 pages
Book Rating : 4.8/5 (194 download)

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Book Synopsis Advanced Processes for 193-nm Immersion Lithography by : Yayi Wei

Download or read book Advanced Processes for 193-nm Immersion Lithography written by Yayi Wei and published by SPIE Press. This book was released on 2009 with total page 338 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a comprehensive guide to advanced processes and materials used in 193-nm immersion lithography (193i). It is an important text for those new to the field as well as for current practitioners who want to broaden their understanding of this latest technology. The book can be used as course material for graduate students of electrical engineering, material sciences, physics, chemistry, and microelectronics engineering and can also be used to train engineers involved in the manufacture of integrated circuits. It provides techniques for selecting critical materials (topcoats, photoresists, and antireflective coatings) and optimizing immersion processes to ensure higher performance and lower defectivity at lower cost. This book also includes sections on shrinking, trimming, and smoothing of the resist pattern to reduce feature sizes and line-edge roughness. Finally, it describes the recent development of 193i in combination with double exposure and double patterning.

Handbook of VLSI Microlithography

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Publisher : William Andrew
ISBN 13 : 1437728227
Total Pages : 672 pages
Book Rating : 4.4/5 (377 download)

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Book Synopsis Handbook of VLSI Microlithography by : William B. Glendinning

Download or read book Handbook of VLSI Microlithography written by William B. Glendinning and published by William Andrew. This book was released on 2012-12-02 with total page 672 pages. Available in PDF, EPUB and Kindle. Book excerpt: This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings-- including optical lithography, electron beam, ion beam, and x-ray lithography. The book's main theme is the special printing process needed to achieve volume high density IC chip production, especially in the Dynamic Random Access Memory (DRAM) industry. The book leads off with a comparison of various lithography methods, covering the three major patterning parameters of line/space, resolution, line edge and pattern feature dimension control. The book's explanation of resist and resist process equipment technology may well be the first practical description of the relationship between the resist process and equipment parameters. The basics of resist technology are completely covered -- including an entire chapter on resist process defectivity and the potential yield limiting effect on device production. Each alternative lithographic technique and testing method is considered and evaluated: basic metrology including optical, scanning-electron-microscope (SEM) techniques and electrical test devices, along with explanations of actual printing tools and their design, construction and performance. The editor devotes an entire chapter to today's sophisticated, complex electron-beam printers, and to the emerging x-ray printing technology now used in high-density CMOS devices. Energetic ion particle printing is a controllable, steerable technology that does not rely on resist, and occupies a final section of the handbook.

Lithography

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Publisher : John Wiley & Sons
ISBN 13 : 1118621182
Total Pages : 311 pages
Book Rating : 4.1/5 (186 download)

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Book Synopsis Lithography by : Stefan Landis

Download or read book Lithography written by Stefan Landis and published by John Wiley & Sons. This book was released on 2013-03-04 with total page 311 pages. Available in PDF, EPUB and Kindle. Book excerpt: Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.

Lithography for Semiconductor Manufacturing

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Publisher :
ISBN 13 :
Total Pages : 442 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Lithography for Semiconductor Manufacturing by :

Download or read book Lithography for Semiconductor Manufacturing written by and published by . This book was released on 2001 with total page 442 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Chemical Sensors 7 -and- MEMS/NEMS 7

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Publisher : The Electrochemical Society
ISBN 13 : 1566775108
Total Pages : 517 pages
Book Rating : 4.5/5 (667 download)

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Book Synopsis Chemical Sensors 7 -and- MEMS/NEMS 7 by : Peter J. Hesketh

Download or read book Chemical Sensors 7 -and- MEMS/NEMS 7 written by Peter J. Hesketh and published by The Electrochemical Society. This book was released on 2006 with total page 517 pages. Available in PDF, EPUB and Kindle. Book excerpt: The latest developments in chemical and biological sensor research and development. Topics include: 1. new selective species recognition surfaces and materials; 2. molecular recognition materials and approaches to minimize non-specific binding; 3. semi-selective species recognition materials; 4. novel methods for signal processing, signal amplification, and detection; 5. detection systems for multiple analytes in complex samples; 6. sensor arrays; and 7. analytical systems and approaches.

Design Rules in a Semiconductor Foundry

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Publisher : CRC Press
ISBN 13 : 1000631354
Total Pages : 831 pages
Book Rating : 4.0/5 (6 download)

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Book Synopsis Design Rules in a Semiconductor Foundry by : Eitan N. Shauly

Download or read book Design Rules in a Semiconductor Foundry written by Eitan N. Shauly and published by CRC Press. This book was released on 2022-11-30 with total page 831 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nowadays over 50% of integrated circuits are fabricated at wafer foundries. This book presents a foundry-integrated perspective of the field and is a comprehensive and up-to-date manual designed to serve process, device, layout, and design engineers. It comprises chapters carefully selected to cover topics relevant for them to deal with their work. The book provides an insight into the different types of design rules (DRs) and considerations for setting new DRs. It discusses isolation, gate patterning, S/D contacts, metal lines, MOL, air gaps, and so on. It explains in detail the layout rules needed to support advanced planarization processes, different types of dummies, and related utilities as well as presents a large set of guidelines and layout-aware modeling for RF CMOS and analog modules. It also discusses the layout DRs for different mobility enhancement techniques and their related modeling, listing many of the dedicated rules for static random-access memory (SRAM), embedded polyfuse (ePF), and LogicNVM. The book also provides the setting and calibration of the process parameters set and describes the 28~20 nm planar MOSFET process flow for low-power and high-performance mobile applications in a step-by-step manner. It includes FEOL and BEOL physical and environmental tests for qualifications together with automotive qualification and design for automotive (DfA). Written for the professionals, the book belongs to the bookshelf of microelectronic discipline experts.