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X Ray Scattering From Semiconductors
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Book Synopsis X-ray Scattering from Semiconductors by : Paul F. Fewster
Download or read book X-ray Scattering from Semiconductors written by Paul F. Fewster and published by World Scientific. This book was released on 2000 with total page 303 pages. Available in PDF, EPUB and Kindle. Book excerpt: X-ray scattering is used extensively to provide detailed structural information about materials. Semiconductors have benefited from X-ray scattering techniques as an essential feedback method for crystal growth, including compositional and thickness determination of thin layers. The methods have been developed to reveal very detailed structural information concerning material quality, interface structure, relaxation, defects, surface damage, and more.
Book Synopsis X-ray Scattering From Semiconductors by : Paul F Fewster
Download or read book X-ray Scattering From Semiconductors written by Paul F Fewster and published by World Scientific. This book was released on 2000-10-27 with total page 303 pages. Available in PDF, EPUB and Kindle. Book excerpt: X-ray scattering is used extensively to provide detailed structural information about materials. Semiconductors have benefited from X-ray scattering techniques as an essential feedback method for crystal growth, including compositional and thickness determination of thin layers. The methods have been developed to reveal very detailed structural information concerning material quality, interface structure, relaxation, defects, surface damage, etc.This book provides a thorough description of the techniques involved in obtaining that information, including X-ray diffractometers and their associated instrument functions, data collection methods, and the simulation of the diffraction patterns observed. Also presented are examples and procedures for interpreting the data to build a picture of the sample, much of which will be common to materials other than semiconductors./a
Book Synopsis X-Ray Scattering from Semiconductors and Other Materials by : Paul F. Fewster
Download or read book X-Ray Scattering from Semiconductors and Other Materials written by Paul F. Fewster and published by World Scientific. This book was released on 2015 with total page 510 pages. Available in PDF, EPUB and Kindle. Book excerpt: This third edition has been extended considerably to incorporate more information on instrument influences on the interpretation of X-ray scattering profiles and reciprocal space maps. Another significant inclusion is on the scattering from powder samples, covering a new theoretical approach that explains features that conventional theory cannot. The new edition includes some of the latest methodologies and theoretical treatments, including the latest thinking on dynamical theory and diffuse scattering. Recent advances in detectors also present new opportunities for rapid data collection and some very different approaches in data collection techniques; the possibilities associated with these advances will be included. This edition should be of interest to those who use X-ray scattering to understand more about their samples, so that they can make a better judgment of the parameter and confidence levels in their analyses, and how the combination of instrument, sample and detection should be considered as a whole to ensure this.
Book Synopsis X-Ray Metrology in Semiconductor Manufacturing by : D. Keith Bowen
Download or read book X-Ray Metrology in Semiconductor Manufacturing written by D. Keith Bowen and published by CRC Press. This book was released on 2018-10-03 with total page 304 pages. Available in PDF, EPUB and Kindle. Book excerpt: The scales involved in modern semiconductor manufacturing and microelectronics continue to plunge downward. Effective and accurate characterization of materials with thicknesses below a few nanometers can be achieved using x-rays. While many books are available on the theory behind x-ray metrology (XRM), X-Ray Metrology in Semiconductor Manufacturing is the first book to focus on the practical aspects of the technology and its application in device fabrication and solving new materials problems. Following a general overview of the field, the first section of the book is organized by application and outlines the techniques that are best suited to each. The next section delves into the techniques and theory behind the applications, such as specular x-ray reflectivity, diffraction imaging, and defect mapping. Finally, the third section provides technological details of each technique, answering questions commonly encountered in practice. The authors supply real examples from the semiconductor and magnetic recording industries as well as more than 150 clearly drawn figures to illustrate the discussion. They also summarize the principles and key information about each method with inset boxes found throughout the text. Written by world leaders in the field, X-Ray Metrology in Semiconductor Manufacturing provides real solutions with a focus on accuracy, repeatability, and throughput.
Book Synopsis X-ray Scattering From Semiconductors (2nd Edition) by : Paul F Fewster
Download or read book X-ray Scattering From Semiconductors (2nd Edition) written by Paul F Fewster and published by World Scientific. This book was released on 2003-07-07 with total page 315 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents a practical guide to the analysis of materials and includes a thorough description of the underlying theories and instrumental aberrations caused by real experiments. The main emphasis concerns the analysis of thin films and multilayers, primarily semiconductors, although the techniques are very general. Semiconductors can be very perfect composite crystals and therefore their study can lead to the largest volume of information, since X-ray scattering can assess the deviation from perfection.The description is intentionally conceptual so that the reader can grasp the real processes involved. In this way the analysis becomes significantly easier, making the reader aware of misleading artifacts and assisting in the determination of a more complete and reliable analysis. The theory of scattering is very important and is covered in such a way that the assumptions are clear. Greatest emphasis is placed on the dynamical diffraction theory including new developments extending its applicability to reciprocal space mapping and modelling samples with relaxed and distorted interfaces.A practical guide to the measurement of diffraction patterns, including the smearing effects introduced to the measurement, is also presented.
Book Synopsis X-Ray Diffuse Scattering from Self-Organized Mesoscopic Semiconductor Structures by : Martin Schmidbauer
Download or read book X-Ray Diffuse Scattering from Self-Organized Mesoscopic Semiconductor Structures written by Martin Schmidbauer and published by Springer Science & Business Media. This book was released on 2004-01-09 with total page 224 pages. Available in PDF, EPUB and Kindle. Book excerpt: This monograph represents a critical survey of the outstanding capabilities of X-ray diffuse scattering for the structural characterization of mesoscopic material systems. The mesoscopic regime comprises length scales ranging from a few up to some hundreds of nanometers. It is of particular relevance at semiconductor layer systems where, for example, interface roughness or low-dimensional objects such as quantum dots and quantum wires have attracted much interest. An extensive overview of the present state-of-the-art theory of X-ray diffuse scattering at mesoscopic structures is given followed by a valuable description of various experimental techniques. Selected up-to-date examples are discussed. The aim of the present book is to combine aspects of self-organized growth of mesoscopic structures with corresponding X-ray diffuse scattering experiments.
Book Synopsis X-ray scattering from semiconductor surfaces and interfaces by : Elias Vlieg
Download or read book X-ray scattering from semiconductor surfaces and interfaces written by Elias Vlieg and published by . This book was released on 1988 with total page 141 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis High-Resolution X-Ray Scattering by : Ullrich Pietsch
Download or read book High-Resolution X-Ray Scattering written by Ullrich Pietsch and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 410 pages. Available in PDF, EPUB and Kindle. Book excerpt: During the last 20 years interest in high-resolution x-ray diffractometry and reflectivity has grown as a result of the development of the semiconductor industry and the increasing interest in material research of thin layers of magnetic, organic, and other materials. For example, optoelectronics requires a subsequent epitaxy of thin layers of different semiconductor materials. Here, the individuallayer thicknesses are scaled down to a few atomic layers in order to exploit quantum effects. For reasons of electronic and optical confinement, these thin layers are embedded within much thicker cladding layers or stacks of multilayers of slightly different chemical composition. It is evident that the interface quality of those quantum weHs is quite important for the function of devices. Thin metallic layers often show magnetic properties which do not ap pear for thick layers or in bulk material. The investigation of the mutual interaction of magnetic and non-magnetic layers leads to the discovery of colossal magnetoresistance, for example. This property is strongly related to the thickness and interface roughness of covered layers.
Book Synopsis X-ray Scattering Studies of Compound Semiconductors by : Caroline Dale Moore
Download or read book X-ray Scattering Studies of Compound Semiconductors written by Caroline Dale Moore and published by . This book was released on 1997 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Gamma- and X-ray Spectrometry with Semiconductor Detectors by : Klaus Debertin
Download or read book Gamma- and X-ray Spectrometry with Semiconductor Detectors written by Klaus Debertin and published by North Holland. This book was released on 1988 with total page 420 pages. Available in PDF, EPUB and Kindle. Book excerpt: Hardbound. This book covers the topics essential to gamma- and x-ray spectrometry as it is now practiced with semiconductor detectors in the energy range from 5keV to 3MeV. This includes useful physical and mathematical background information, the components of a standard photon spectrometer, spectrum analysis procedures, the energy and efficiency calibration, energy and emission-rate measurement methods and some application examples.
Book Synopsis Characterization of Semiconductor Heterostructures and Nanostructures by : Tobias Schülli
Download or read book Characterization of Semiconductor Heterostructures and Nanostructures written by Tobias Schülli and published by Elsevier Inc. Chapters. This book was released on 2013-04-11 with total page 93 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis X-Ray Diffraction by : C. Suryanarayana
Download or read book X-Ray Diffraction written by C. Suryanarayana and published by Springer Science & Business Media. This book was released on 2013-06-29 with total page 275 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this, the only book available to combine both theoretical and practical aspects of x-ray diffraction, the authors emphasize a "hands on" approach through experiments and examples based on actual laboratory data. Part I presents the basics of x-ray diffraction and explains its use in obtaining structural and chemical information. In Part II, eight experimental modules enable the students to gain an appreciation for what information can be obtained by x-ray diffraction and how to interpret it. Examples from all classes of materials -- metals, ceramics, semiconductors, and polymers -- are included. Diffraction patterns and Bragg angles are provided for students without diffractometers. 192 illustrations.
Book Synopsis Characterization of Semiconductor Heterostructures and Nanostructures by : Giuseppe Portale
Download or read book Characterization of Semiconductor Heterostructures and Nanostructures written by Giuseppe Portale and published by Elsevier Inc. Chapters. This book was released on 2013-04-11 with total page 87 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Two-dimensional X-ray Diffraction by : Bob B. He
Download or read book Two-dimensional X-ray Diffraction written by Bob B. He and published by John Wiley & Sons. This book was released on 2018-06-26 with total page 488 pages. Available in PDF, EPUB and Kindle. Book excerpt: An indispensable resource for researchers and students in materials science, chemistry, physics, and pharmaceuticals Written by one of the pioneers of 2D X-Ray Diffraction, this updated and expanded edition of the definitive text in the field provides comprehensive coverage of the fundamentals of that analytical method, as well as state-of-the art experimental methods and applications. Geometry convention, x-ray source and optics, two-dimensional detectors, diffraction data interpretation, and configurations for various applications, such as phase identification, texture, stress, microstructure analysis, crystallinity, thin film analysis, and combinatorial screening are all covered in detail. Numerous experimental examples in materials research, manufacture, and pharmaceuticals are provided throughout. Two-dimensional x-ray diffraction is the ideal, non-destructive analytical method for examining samples of all kinds including metals, polymers, ceramics, semiconductors, thin films, coatings, paints, biomaterials, composites, and more. Two-Dimensional X-Ray Diffraction, Second Edition is an up-to-date resource for understanding how the latest 2D detectors are integrated into diffractometers, how to get the best data using the 2D detector for diffraction, and how to interpret this data. All those desirous of setting up a 2D diffraction in their own laboratories will find the author’s coverage of the physical principles, projection geometry, and mathematical derivations extremely helpful. Features new contents in all chapters with most figures in full color to reveal more details in illustrations and diffraction patterns Covers the recent advances in detector technology and 2D data collection strategies that have led to dramatic increases in the use of two-dimensional detectors for x-ray diffraction Provides in-depth coverage of new innovations in x-ray sources, optics, system configurations, applications and data evaluation algorithms Contains new methods and experimental examples in stress, texture, crystal size, crystal orientation and thin film analysis Two-Dimensional X-Ray Diffraction, Second Edition is an important working resource for industrial and academic researchers and developers in materials science, chemistry, physics, pharmaceuticals, and all those who use x-ray diffraction as a characterization method. Users of all levels, instrument technicians and X-ray laboratory managers, as well as instrument developers, will want to have it on hand.
Book Synopsis X-ray Studies of Microstructures in Semiconductor and Superconducting Materials . Performance Report by :
Download or read book X-ray Studies of Microstructures in Semiconductor and Superconducting Materials . Performance Report written by and published by . This book was released on 1993 with total page 9 pages. Available in PDF, EPUB and Kindle. Book excerpt: A summary of research work performed from 11/1/86 to 4/10/93 is presented. Synchrotron x rays were used to probe the short-range-order (SRO) structures in these materials, especially layered semiconductors and high-{Tc} oxide superconductors. X-ray absorption fine structure spectroscopy, grazing incidence x-ray scattering and fluorescence, and total electron yield as probe for surfaces and interfaces were used. A new soft x-ray detector was developed.
Book Synopsis X-Ray Absorption Spectroscopy of Semiconductors by : Claudia S. Schnohr
Download or read book X-Ray Absorption Spectroscopy of Semiconductors written by Claudia S. Schnohr and published by Springer. This book was released on 2014-11-05 with total page 367 pages. Available in PDF, EPUB and Kindle. Book excerpt: X-ray Absorption Spectroscopy (XAS) is a powerful technique with which to probe the properties of matter, equally applicable to the solid, liquid and gas phases. Semiconductors are arguably our most technologically-relevant group of materials given they form the basis of the electronic and photonic devices that now so widely permeate almost every aspect of our society. The most effective utilisation of these materials today and tomorrow necessitates a detailed knowledge of their structural and vibrational properties. Through a series of comprehensive reviews, this book demonstrates the versatility of XAS for semiconductor materials analysis and presents important research activities in this ever growing field. A short introduction of the technique, aimed primarily at XAS newcomers, is followed by twenty independent chapters dedicated to distinct groups of materials. Topics span dopants in crystalline semiconductors and disorder in amorphous semiconductors to alloys and nanometric material as well as in-situ measurements of the effects of temperature and pressure. Summarizing research in their respective fields, the authors highlight important experimental findings and demonstrate the capabilities and applications of the XAS technique. This book provides a comprehensive review and valuable reference guide for both XAS newcomers and experts involved in semiconductor materials research.
Book Synopsis Analytical Techniques for the Characterization of Compound Semiconductors by : G. Bastard
Download or read book Analytical Techniques for the Characterization of Compound Semiconductors written by G. Bastard and published by Elsevier. This book was released on 1991-07-26 with total page 554 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume is a collection of 96 papers presented at the above Conference. The scope of the work includes optical and electrical methods as well as techniques for structural and compositional characterization. The contributed papers report on topics such as X-ray diffraction, TEM, depth profiling, photoluminescence, Raman scattering and various electrical methods. Of particular interest are combinations of different techniques providing complementary information. The compound semiconductors reviewed belong mainly to the III-V and III-VI families. The papers in this volume will provide a useful reference on the implications of new technologies in the characterization of compound semiconductors.
