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Using Grazing Incidence Small Angle X Ray Scattering Gisaxs For Semiconductor Nanometrology And Defect Quantification
Download Using Grazing Incidence Small Angle X Ray Scattering Gisaxs For Semiconductor Nanometrology And Defect Quantification full books in PDF, epub, and Kindle. Read online Using Grazing Incidence Small Angle X Ray Scattering Gisaxs For Semiconductor Nanometrology And Defect Quantification ebook anywhere anytime directly on your device. Fast Download speed and no annoying ads. We cannot guarantee that every ebooks is available!
Book Synopsis Ellipsometry of Functional Organic Surfaces and Films by : Karsten Hinrichs
Download or read book Ellipsometry of Functional Organic Surfaces and Films written by Karsten Hinrichs and published by Springer Science & Business Media. This book was released on 2013-10-24 with total page 369 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ellipsometry is the method of choice to determine the properties of surfaces and thin films. It provides comprehensive and sensitive characterization in contactless and non-invasive measurements. This book gives a state-of-the-art survey of ellipsometric investigations of organic films and surfaces, from laboratory to synchrotron applications, with a special focus on in-situ use in processing environments and at solid-liquid interfaces. In conjunction with the development of functional organic, meta- and hybrid materials for new optical, electronic, sensing and biotechnological devices and fabrication advances, the ellipsometric analysis of their optical and material properties has progressed rapidly in the recent years.
Book Synopsis Small Angle X-ray Scattering by : O. Glatter
Download or read book Small Angle X-ray Scattering written by O. Glatter and published by . This book was released on 1982 with total page 540 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis X-Ray Metrology in Semiconductor Manufacturing by : D. Keith Bowen
Download or read book X-Ray Metrology in Semiconductor Manufacturing written by D. Keith Bowen and published by CRC Press. This book was released on 2018-10-03 with total page 296 pages. Available in PDF, EPUB and Kindle. Book excerpt: The scales involved in modern semiconductor manufacturing and microelectronics continue to plunge downward. Effective and accurate characterization of materials with thicknesses below a few nanometers can be achieved using x-rays. While many books are available on the theory behind x-ray metrology (XRM), X-Ray Metrology in Semiconductor Manufacturing is the first book to focus on the practical aspects of the technology and its application in device fabrication and solving new materials problems. Following a general overview of the field, the first section of the book is organized by application and outlines the techniques that are best suited to each. The next section delves into the techniques and theory behind the applications, such as specular x-ray reflectivity, diffraction imaging, and defect mapping. Finally, the third section provides technological details of each technique, answering questions commonly encountered in practice. The authors supply real examples from the semiconductor and magnetic recording industries as well as more than 150 clearly drawn figures to illustrate the discussion. They also summarize the principles and key information about each method with inset boxes found throughout the text. Written by world leaders in the field, X-Ray Metrology in Semiconductor Manufacturing provides real solutions with a focus on accuracy, repeatability, and throughput.
Book Synopsis Industrial Moisture and Humidity Measurement by : Roland Wernecke
Download or read book Industrial Moisture and Humidity Measurement written by Roland Wernecke and published by John Wiley & Sons. This book was released on 2013-12-18 with total page 476 pages. Available in PDF, EPUB and Kindle. Book excerpt: Moisture analysis covers a variety of methods for measuring high levels of moisture, as well as trace amounts, in solids, liquids, or gases. There are many applications where trace moisture measurements are indispensable for manufacturing and for process quality assurance. Trace moisture in solids must be controlled for plastics, pharmaceuticals and heat treatment processes. Measurement applications in gases and liquids include, for example, drying processes, hydrocarbon processing, pure gases in the semiconductor industry, natural gas pipeline transport, the conditioning of food and other products. Written by experts with over 20 years of experience in the field, this one-stop guide covers all aspects of these measurements, including both the theory and a wealth of practical know-how. As such, it includes guidelines on installation, on the realization of standards for absolute and relative humidity, verification and traceability measurements, equipment calibration methods and the latest research developments. Backed by numerous case studies, this practical book serves the needs of those working in the industry tasked with performing or developing new techniques and processes for moisture and humidity measurement. As a result, the scientist or engineer has all the information required for accurate, reliable, economically viable and efficient moisture measurement.
Book Synopsis Sample Preparation Handbook for Transmission Electron Microscopy by : Jeanne Ayache
Download or read book Sample Preparation Handbook for Transmission Electron Microscopy written by Jeanne Ayache and published by Springer Science & Business Media. This book was released on 2010-07-03 with total page 267 pages. Available in PDF, EPUB and Kindle. Book excerpt: Successful transmission electron microscopy in all of its manifestations depends on the quality of the specimens examined. Biological specimen preparation protocols have usually been more rigorous and time consuming than those in the physical sciences. For this reason, there has been a wealth of scienti?c literature detailing speci?c preparation steps and numerous excellent books on the preparation of b- logical thin specimens. This does not mean to imply that physical science specimen preparation is trivial. For the most part, most physical science thin specimen pre- ration protocols can be executed in a matter of a few hours using straightforward steps. Over the years, there has been a steady stream of papers written on various aspects of preparing thin specimens from bulk materials. However, aside from s- eral seminal textbooks and a series of book compilations produced by the Material Research Society in the 1990s, no recent comprehensive books on thin spe- men preparation have appeared until this present work, ?rst in French and now in English. Everyone knows that the data needed to solve a problem quickly are more imp- tant than ever. A modern TEM laboratory with supporting SEMs, light microscopes, analytical spectrometers, computers, and specimen preparation equipment is an investment of several million US dollars. Fifty years ago, electropolishing, chemical polishing, and replication methods were the principal specimen preparation me- ods.
Book Synopsis Run-to-Run Control in Semiconductor Manufacturing by : James Moyne
Download or read book Run-to-Run Control in Semiconductor Manufacturing written by James Moyne and published by CRC Press. This book was released on 2018-10-08 with total page 368 pages. Available in PDF, EPUB and Kindle. Book excerpt: Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.
Book Synopsis Electron Microscopy by : S. Amelinckx
Download or read book Electron Microscopy written by S. Amelinckx and published by John Wiley & Sons. This book was released on 2008-09-26 with total page 527 pages. Available in PDF, EPUB and Kindle. Book excerpt: Derived from the successful three-volume Handbook of Microscopy, this book provides a broad survey of the physical fundamentals and principles of all modern techniques of electron microscopy. This reference work on the method most often used for the characterization of surfaces offers a competent comparison of the feasibilities of the latest developments in this field of research. Topics include: * Stationary Beam Methods: Transmission Electron Microscopy/ Electron Energy Loss Spectroscopy/ Convergent Electron Beam Diffraction/ Low Energy Electron Microscopy/ Electron Holographic Methods * Scanning Beam Methods: Scanning Transmission Electron Microscopy/ Scanning Auger and XPS Microscopy/ Scanning Microanalysis/ Imaging Secondary Ion Mass Spectrometry * Magnetic Microscopy: Scanning Electron Microscopy with Polarization Analysis/ Spin Polarized Low Energy Electron Microscopy Materials scientists as well as any surface scientist will find this book an invaluable source of information for the principles of electron microscopy.
Book Synopsis X-Ray Scattering from Soft-Matter Thin Films by : Metin Tolan
Download or read book X-Ray Scattering from Soft-Matter Thin Films written by Metin Tolan and published by Springer. This book was released on 2014-03-12 with total page 198 pages. Available in PDF, EPUB and Kindle. Book excerpt: The properties of soft-matter thin films (e.g. liquid films, polymer coatings, Langmuir-Blodgett multilayers) nowadays play an important role in materials science. They are also very exciting with respect to fundamental questions: In thin films, liquids and polymers may be considered as trapped in a quasi-two-dimensional geometry. This confined geometry is expected to alter the properties and structures of these materials considerably. This volume is dedicated to the scattering of x-rays by soft-matter interfaces. X-ray scattering under grazing angles is the only tool to investigating these materials on atomic and mesoscopic length scales. A review of the field is presented with many examples.
Download or read book X-Ray Diffraction written by A. Guinier and published by Courier Corporation. This book was released on 2013-01-17 with total page 404 pages. Available in PDF, EPUB and Kindle. Book excerpt: Exploration of fundamentals of x-ray diffraction theory using Fourier transforms applies general results to various atomic structures, amorphous bodies, crystals, and imperfect crystals. 154 illustrations. 1963 edition.
Book Synopsis Synchrotron Radiation in Materials Science by : Chunhai Fan
Download or read book Synchrotron Radiation in Materials Science written by Chunhai Fan and published by John Wiley & Sons. This book was released on 2018-05-29 with total page 846 pages. Available in PDF, EPUB and Kindle. Book excerpt: Meeting the long-felt need for in-depth information on one of the most advanced material characterization methods, a top team of editors and authors from highly prestigious facilities and institutions covers a range of synchrotron techniques that have proven useful for materials research. Following an introduction to synchrotron radiation and its sources, the second part goes on to describe the various techniques that benefit from this especially bright light, including X-ray absorption, diffraction, scattering, imaging, and lithography. The thrid and final part provides an overview of the applications of synchrotron radiation in materials science. bridging the gap between specialists in synchrotron research and material scientists, this is a unique and indispensable resource for academic and industrial researchers alike.
Book Synopsis Introduction to Particle Physics by : DezsÅ' Horvàth
Download or read book Introduction to Particle Physics written by DezsÅ' Horvàth and published by Cambridge Scholars Publishing. This book was released on 2019-05 with total page 382 pages. Available in PDF, EPUB and Kindle. Book excerpt: This textbook is a unique treatise on the present status of particle physics summarised for physics students at an introductory level: it provides insights into the essential experimental and theoretical techniques needed to start research at modern high energy accelerators such as the Large Hadron Collider at CERN. The first three parts of the book discuss the experimental and phenomenological aspects at a level suitable for MSc students, but BSc students interested in particle physics will also find useful information there. The fourth part is oriented to advanced MSc or PhD students to make them acquainted with the precise formulation of the standard model of particle interactions, as well as with the mathematical background needed for the correct interpretation of the experimental results. In this two-step approach, the book offers a gradually deepening understanding of particle physics, building up the standard model and providing an overview of its verification, together with the necessary theoretical and experimental techniques. Using the example of the simplest present-day experiments, it is explained how one can obtain experimental results and theoretical estimations for measurable quantities from clear basic principles. The sources of uncertainties and the methods of improving precision are also discussed.
Book Synopsis Fundamental Principles of Optical Lithography by : Chris Mack
Download or read book Fundamental Principles of Optical Lithography written by Chris Mack and published by John Wiley & Sons. This book was released on 2011-08-10 with total page 503 pages. Available in PDF, EPUB and Kindle. Book excerpt: The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components. By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate. This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter. Additional Information: Visiting http://www.lithoguru.com/textbook/index.html enhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB®, to accompany the textbook. You can also contact the author and find help for instructors.
Book Synopsis The Optical Principles of the Diffraction of X-rays by : R. W. James
Download or read book The Optical Principles of the Diffraction of X-rays written by R. W. James and published by . This book was released on 1967 with total page 664 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Theory of Reflection of Electromagnetic and Particle Waves by : John Lekner
Download or read book Theory of Reflection of Electromagnetic and Particle Waves written by John Lekner and published by Springer Science & Business Media. This book was released on 1987-02-28 with total page 298 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is written for scientists and engineers whose work involves wave reflec tion or transmission. Most of the book is written in the language of electromagnetic theory, but, as the title suggests, many of the results can be applied to particle waves, specifically to those satisfying the Schr6dinger equation. The mathematical connection between electromagnetic s (or TE) waves and quantum particle waves is established in Chapter 1. The main results for s waves are translated into quantum mechanical language in the Appendix. There is also a close analogy between acoustic waves and electromagnetic p (or TM) waves, as shown in Section 1-4. Thus the book, though primarily intended for those working in optics, microwaves and radio, will be of use to physicists, chemists and electrical engineers studying reflection and transmission of particles at potential barriers. The tech niques developed here can also be used by those working in acoustics, ocean ography and seismology. Chapter 1 is recommended for all readers: it introduces reflection phenomena, defines the notation, and previews (in Section 1-6) the contents of the rest of the book. This preview will not be duplicated here. We note only that applied topics do appear: two examples are the important phenomenon of attenuated total reflection in Chapter 8, and the reflectivity of multilayer dielectric mirrors in Chapter 12. The subject matter is restricted to linear classical electrodynamics in non-magnetic media, and the corresponding particle analogues.
Book Synopsis Ellipsometry at the Nanoscale by : Maria Losurdo
Download or read book Ellipsometry at the Nanoscale written by Maria Losurdo and published by Springer Science & Business Media. This book was released on 2013-03-12 with total page 740 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents and introduces ellipsometry in nanoscience and nanotechnology making a bridge between the classical and nanoscale optical behaviour of materials. It delineates the role of the non-destructive and non-invasive optical diagnostics of ellipsometry in improving science and technology of nanomaterials and related processes by illustrating its exploitation, ranging from fundamental studies of the physics and chemistry of nanostructures to the ultimate goal of turnkey manufacturing control. This book is written for a broad readership: materials scientists, researchers, engineers, as well as students and nanotechnology operators who want to deepen their knowledge about both basics and applications of ellipsometry to nanoscale phenomena. It starts as a general introduction for people curious to enter the fields of ellipsometry and polarimetry applied to nanomaterials and progresses to articles by experts on specific fields that span from plasmonics, optics, to semiconductors and flexible electronics. The core belief reflected in this book is that ellipsometry applied at the nanoscale offers new ways of addressing many current needs. The book also explores forward-looking potential applications.
Book Synopsis Glow Discharge Optical Emission Spectrometry by : Richard Payling
Download or read book Glow Discharge Optical Emission Spectrometry written by Richard Payling and published by John Wiley & Sons. This book was released on 1997-12-08 with total page 904 pages. Available in PDF, EPUB and Kindle. Book excerpt: Glow Discharge Optical Emission Spectrometry (GD-OES) is rapidly becoming one of the most important techniques for the direct analysis of solids. This, the first book entirely devoted to the subject, represents the combined contributions of over 30 specialists from around the world. All contributors are active in the field and recognised internationally for their expertise and knowledge in GD-OES. The book begins with an introductory overview of the subjects, deals with the design of the instrument, its operation and analytical methods and describes in detail the complex plasma processes which occur inside the glow discharge source. The second part of the book is more practically orientated, showing the full range of uses for GD-OES from the bulk analysis of virtually any solid material to depth profiling within the first tens of micrometres of a variety of surfaces and coatings. Glow Discharge Optical Emission Spectrometry is intended for a wide audience of scientists, engineers and postgraduate students and will be a valuable and challenging reference work for both experienced users of the technique and newcomers alike.
Book Synopsis Photoferroelectrics by : Vladimir M. Fridkin
Download or read book Photoferroelectrics written by Vladimir M. Fridkin and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 179 pages. Available in PDF, EPUB and Kindle. Book excerpt: Since Valasek's discovery of the ferroelectric properties of Rochelle salt nearly 60 years ago, ferroelectricity has been regarded as one of the tradi tional branches of dielectric physics. It has had important applications in lattice dynamics, quantum electronics, and nonlinear optics. The study of electron processes in ferroelectrics was begun with VUL's investigations of the ferroelectric properties of barium titanate [1.1]. In trinsic and extrinsic optical absorption, band structure, conductivity and photoconductivity, carrier mobility. and transport mechanisms were examined in this compound, and in other perovskite ferroelectric semiconductors. An important discovery was that of the highly photosensitive photoconducting ferroelectrics of type AVBVICVIII (e.g. SbSI) by MERZ et al. in 1962 [1.2,3]. A large number of ferroelectric semiconductors (some photosensitive, some not) are now known, including broad-band materials (e.g. lithium niobate, lithium tantalate, barium and strontium niobate, and type-A~B~I compounds), BI and narrow-band semiconductors (e.g. type_AIVB compounds). A series of improper ferroelectric semiconductors and photosensitive ferroelastics have been discovered, of which Sb 0 I is an example. s 7 Owing to the uncertainty of their band structure, the difficulty in deter mining the nature of the levels, the complexity of alloying, and their gen erally low mobility values, ferroelectrics are rarely of interest regarded as nonlinear semiconductors. The most fruitful approach has been the study of the influence of electrons (especially nonequilibrium electrons) and electron excitations on phase transitions and ferroelectric properties. A large group of phenomena have recently been discovered and investigated.
