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Download Understanding The Complex Chemistry Of Fluorocarbon Plasmas In A Long Residence Time Icp Reactor full books in PDF, epub, and Kindle. Read online Understanding The Complex Chemistry Of Fluorocarbon Plasmas In A Long Residence Time Icp Reactor ebook anywhere anytime directly on your device. Fast Download speed and no annoying ads. We cannot guarantee that every ebooks is available!
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ISBN 13 :
Total Pages : 902 pages
Book Rating : 4.F/5 ( download)
Download or read book Dissertation Abstracts International written by and published by . This book was released on 2007 with total page 902 pages. Available in PDF, EPUB and Kindle. Book excerpt:
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Publisher :
ISBN 13 :
Total Pages : 714 pages
Book Rating : 4.3/5 (91 download)
Download or read book Japanese Journal of Applied Physics written by and published by . This book was released on 1999 with total page 714 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Michael A. Lieberman
Publisher : John Wiley & Sons
ISBN 13 : 1394245378
Total Pages : 837 pages
Book Rating : 4.3/5 (942 download)
Download or read book Principles of Plasma Discharges and Materials Processing written by Michael A. Lieberman and published by John Wiley & Sons. This book was released on 2024-10-15 with total page 837 pages. Available in PDF, EPUB and Kindle. Book excerpt: A new edition of this industry classic on the principles of plasma processing Plasma-based technology and materials processes have been central to the revolution of the last half-century in micro- and nano-electronics. From anisotropic plasma etching on microprocessors, memory, and analog chips, to plasma deposition for creating solar panels and flat-panel displays, plasma-based materials processes have reached huge areas of technology. As key technologies scale down in size from the nano- to the atomic level, further developments in plasma materials processing will only become more essential. Principles of Plasma Discharges and Materials Processing is the foundational introduction to the subject. It offers detailed information and procedures for designing plasma-based equipment and analyzing plasma-based processes, with an emphasis on the abiding fundamentals. Now fully updated to reflect the latest research and data, it promises to continue as an indispensable resource for graduate students and industry professionals in a myriad of technological fields. Readers of the third edition of Principles of Plasma Discharges and Materials Processing will also find: Extensive figures and tables to facilitate understanding A new chapter covering the recent development of processes involving high-pressure capacitive discharges New subsections on discharge and processing chemistry, physics, and diagnostics Principles of Plasma Discharges and Materials Processing is ideal for professionals and process engineers in the field of plasma-assisted materials processing with experience in the field of science or engineering. It is the premiere world-wide basic text for graduate courses in the field.
Author : Francis F. Chen
Publisher : Springer Science & Business Media
ISBN 13 : 1461501814
Total Pages : 213 pages
Book Rating : 4.4/5 (615 download)
Download or read book Lecture Notes on Principles of Plasma Processing written by Francis F. Chen and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 213 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these fields, and their collaboration results in the merging of these fields with a common terminology. Basic plasma concepts are introduced painlessly to those who have studied undergraduate electromagnetics but have had no previous exposure to plasmas. Unnecessarily detailed derivations are omitted; yet the reader is led to understand in some depth those concepts, such as the structure of sheaths, that are important in the design and operation of plasma processing reactors. Physicists not accustomed to low-temperature plasmas are introduced to chemical kinetics, surface science, and molecular spectroscopy. The material has been condensed to suit a nine-week graduate course, but it is sufficient to bring the reader up to date on current problems such as copper interconnects, low-k and high-k dielectrics, and oxide damage. Students will appreciate the web-style layout with ample color illustrations opposite the text, with ample room for notes. This short book is ideal for new workers in the semiconductor industry who want to be brought up to speed with minimum effort. It is also suitable for Chemical Engineering students studying plasma processing of materials; Engineers, physicists, and technicians entering the semiconductor industry who want a quick overview of the use of plasmas in the industry.
Author : Kazuo Nojiri
Publisher : Springer
ISBN 13 : 3319102958
Total Pages : 126 pages
Book Rating : 4.3/5 (191 download)
Download or read book Dry Etching Technology for Semiconductors written by Kazuo Nojiri and published by Springer. This book was released on 2014-10-25 with total page 126 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniaturization and integration of semiconductor integrated circuits. The author describes the device manufacturing flow, and explains in which part of the flow dry etching is actually used. The content is designed as a practical guide for engineers working at chip makers, equipment suppliers and materials suppliers, and university students studying plasma, focusing on the topics they need most, such as detailed etching processes for each material (Si, SiO2, Metal etc) used in semiconductor devices, etching equipment used in manufacturing fabs, explanation of why a particular plasma source and gas chemistry are used for the etching of each material, and how to develop etching processes. The latest, key technologies are also described, such as 3D IC Etching, Dual Damascene Etching, Low-k Etching, Hi-k/Metal Gate Etching, FinFET Etching, Double Patterning etc.
Author : Santosh K. Upadhyay
Publisher : Springer Science & Business Media
ISBN 13 : 1402045476
Total Pages : 256 pages
Book Rating : 4.4/5 (2 download)
Download or read book Chemical Kinetics and Reaction Dynamics written by Santosh K. Upadhyay and published by Springer Science & Business Media. This book was released on 2007-04-29 with total page 256 pages. Available in PDF, EPUB and Kindle. Book excerpt: Chemical Kinetics and Reaction Dynamics brings together the major facts and theories relating to the rates with which chemical reactions occur from both the macroscopic and microscopic point of view. This book helps the reader achieve a thorough understanding of the principles of chemical kinetics and includes: Detailed stereochemical discussions of reaction steps Classical theory based calculations of state-to-state rate constants A collection of matters on kinetics of various special reactions such as micellar catalysis, phase transfer catalysis, inhibition processes, oscillatory reactions, solid-state reactions, and polymerization reactions at a single source. The growth of the chemical industry greatly depends on the application of chemical kinetics, catalysts and catalytic processes. This volume is therefore an invaluable resource for all academics, industrial researchers and students interested in kinetics, molecular reaction dynamics, and the mechanisms of chemical reactions.
Author : Annemie Bogaerts
Publisher : MDPI
ISBN 13 : 3038977500
Total Pages : 248 pages
Book Rating : 4.0/5 (389 download)
Download or read book Plasma Catalysis written by Annemie Bogaerts and published by MDPI. This book was released on 2019-04-02 with total page 248 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma catalysis is gaining increasing interest for various gas conversion applications, such as CO2 conversion into value-added chemicals and fuels, N2 fixation for the synthesis of NH3 or NOx, methane conversion into higher hydrocarbons or oxygenates. It is also widely used for air pollution control (e.g., VOC remediation). Plasma catalysis allows thermodynamically difficult reactions to proceed at ambient pressure and temperature, due to activation of the gas molecules by energetic electrons created in the plasma. However, plasma is very reactive but not selective, and thus a catalyst is needed to improve the selectivity. In spite of the growing interest in plasma catalysis, the underlying mechanisms of the (possible) synergy between plasma and catalyst are not yet fully understood. Indeed, plasma catalysis is quite complicated, as the plasma will affect the catalyst and vice versa. Moreover, due to the reactive plasma environment, the most suitable catalysts will probably be different from thermal catalysts. More research is needed to better understand the plasma–catalyst interactions, in order to further improve the applications.
Author : Paul K. Chu
Publisher : CRC Press
ISBN 13 : 1466509902
Total Pages : 497 pages
Book Rating : 4.4/5 (665 download)
Download or read book Low Temperature Plasma Technology written by Paul K. Chu and published by CRC Press. This book was released on 2013-07-15 with total page 497 pages. Available in PDF, EPUB and Kindle. Book excerpt: Written by a team of pioneering scientists from around the world, Low Temperature Plasma Technology: Methods and Applications brings together recent technological advances and research in the rapidly growing field of low temperature plasmas. The book provides a comprehensive overview of related phenomena such as plasma bullets, plasma penetration into biofilms, discharge-mode transition of atmospheric pressure plasmas, and self-organization of microdischarges. It describes relevant technology and diagnostics, including nanosecond pulsed discharge, cavity ringdown spectroscopy, and laser-induced fluorescence measurement, and explores the increasing research on atmospheric pressure nonequilibrium plasma jets. The authors also discuss how low temperature plasmas are used in the synthesis of nanomaterials, environmental applications, the treatment of biomaterials, and plasma medicine. This book provides a balanced and thorough treatment of the core principles, novel technology and diagnostics, and state-of-the-art applications of low temperature plasmas. It is accessible to scientists and graduate students in low-pressure plasma physics, nanotechnology, plasma medicine, and materials science. The book is also suitable as an advanced reference for senior undergraduate students.
Author : Dongqing Li
Publisher : Springer Science & Business Media
ISBN 13 : 0387324682
Total Pages : 2242 pages
Book Rating : 4.3/5 (873 download)
Download or read book Encyclopedia of Microfluidics and Nanofluidics written by Dongqing Li and published by Springer Science & Business Media. This book was released on 2008-08-06 with total page 2242 pages. Available in PDF, EPUB and Kindle. Book excerpt: Covering all aspects of transport phenomena on the nano- and micro-scale, this encyclopedia features over 750 entries in three alphabetically-arranged volumes including the most up-to-date research, insights, and applied techniques across all areas. Coverage includes electrical double-layers, optofluidics, DNC lab-on-a-chip, nanosensors, and more.
Author : W. Gissler
Publisher : Springer Science & Business Media
ISBN 13 : 9780792320067
Total Pages : 416 pages
Book Rating : 4.3/5 (2 download)
Download or read book Advanced Techniques for Surface Engineering written by W. Gissler and published by Springer Science & Business Media. This book was released on 1992-10-31 with total page 416 pages. Available in PDF, EPUB and Kindle. Book excerpt: The hardest requirements on a material are in general imposed at the surface: it has to be wear resistant for tools and bearings; corrosion resistant for turbine blades; antireflecting for solar cells; and it must combine several of these properties in other applications. `Surface engineering' is the general term that incorporates all the techniques by which a surface modification can be accomplished. These techniques include both the more traditional methods, such as nitriding, boriding and carburizing, and the newer ones, such as ion implantation, laser beam melting and, in particular, coating. This book comprises and compares in a unique way all these techniques of surface engineering. It is a compilation of lectures which were held by renowned scientists and engineers in the frame of the well known `EuroCourses' of the Joint Research Centre of the Commission of the European Communities. The book is principally addressed to material and surface scientists, physicists and chemists, engineers and technicians of industries and institutes where surface engineering problems arise.
Author : David J. Cole-Hamilton
Publisher : Springer Science & Business Media
ISBN 13 : 9781402040863
Total Pages : 270 pages
Book Rating : 4.0/5 (48 download)
Download or read book Catalyst Separation, Recovery and Recycling written by David J. Cole-Hamilton and published by Springer Science & Business Media. This book was released on 2006-01-13 with total page 270 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book looks at new ways of tackling the problem of separating reaction products from homogeneous catalytic solutions. The new processes involve low leaching supported catalysts, soluble supports such as polymers and dendrimers and unusual solvents such as water, fluorinated organics, ionic liquids and supercritical fluids. The advantages of the different possibilities are discussed alongside suggestions for further research that will be required for commercialisation. Unlike other books, in addition to the chemistry involved, the book looks at the process design that would be required to bring the new approaches to fruition. Comparisons are given with existing processes that have already been successfully applied and examples are given where these approaches are not suitable. The book includes: - New processes for the separation of products from solutions containing homogeneous catalysts - Catalysts on insoluble or soluble supports – fixed bed catalysts - continuous flow or ultrafiltration - Biphasic systems: water - organic, fluorous - organic, ionic liquid – organic, supercritical fluids (monophasic or biphasic with water, organic or ionic liquid) - Comparisons with current processes involving atmospheric or low temperature distillation - Consideration of Chemistry and Process Design - Advantages and disadvantages of each process exposed - Consideration of what else is need for commercialisation
Author : Riccardo d'Agostino
Publisher : John Wiley & Sons
ISBN 13 : 3527605576
Total Pages : 545 pages
Book Rating : 4.5/5 (276 download)
Download or read book Plasma Processes and Polymers written by Riccardo d'Agostino and published by John Wiley & Sons. This book was released on 2006-03-06 with total page 545 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume compiles essential contributions to the most innovative fields of Plasma Processes and Polymers. High-quality contributions cover the fields of plasma deposition, plasma treatment of polymers and other organic compounds, plasma processes under partial vacuum and at atmospheric pressure, biomedical, textile, automotive, and optical applications as well as surface treatment of bulk materials, clusters, particles and powders. This unique collection of refereed papers is based on the best contributions presented at the 16th International Symposium on Plasma Chemistry in Taormina, Italy (ISPC-16, June 2003). A high class reference of relevance to a large audience in plasma community as well as in the area of its industrial applications.
Author : Antonio Lopez
Publisher : IWA Publishing
ISBN 13 : 1843393433
Total Pages : 285 pages
Book Rating : 4.8/5 (433 download)
Download or read book Innovative and Integrated Technologies for the Treatment of Industrial Wastewater written by Antonio Lopez and published by IWA Publishing. This book was released on 2011-12-15 with total page 285 pages. Available in PDF, EPUB and Kindle. Book excerpt: Innovative and Integrated Technologies for the Treatment of Industrial Wastewater deals with advanced technological solutions for the treatment of industrial wastewater such as aerobic granular biomass based systems, advanced oxidation processes integrated with biological treatments, membrane contactors and membrane chemical reactors. Wastewater from pharmaceutical, chemical and food industries as well as landfill leachates are specifically considered as representative of major problems encountered when treating industrial streams. The economic and environmental sustainability of the above solutions are also reported in the book and compared with the alternatives currently available in the market by life cycle assessment (LCA) and life cycle costing (LCC) methodologies. The implementation of the considered solutions at large scale could support and enhance the competitiveness of different industrial sectors, including the water technology sector, in the global market. Innovative and Integrated Technologies for the Treatment of Industrial Wastewater also makes a contribution towards defining: new concepts, processes and technologies in wastewater treatment with potential benefits for the stable quality of effluents, energy and operational costs saving, and the protection of the environment new sets of advanced standards for wastewater treatment new methodologies for the definition of wastewater treatment needs and framework conditions new information supporting development and implementation of water legislation.
Author : Klaus Grasshoff
Publisher : John Wiley & Sons
ISBN 13 : 3527613994
Total Pages : 632 pages
Book Rating : 4.5/5 (276 download)
Download or read book Methods of Seawater Analysis written by Klaus Grasshoff and published by John Wiley & Sons. This book was released on 2009-07-30 with total page 632 pages. Available in PDF, EPUB and Kindle. Book excerpt: Since the book first appeared in 1976, Methods of Seawater Analysis has found widespread acceptance as a reliable and detailed source of information. Its second extended and revised edition published in 1983 reflected the rapid pace of instrumental and methodological evolution in the preceding years. The development has lost nothing of its momentum, and many methods and procedures still suffering their teething troubles then have now matured into dependable tools for the analyst. This is especially evident for trace and ultra-trace analyses of organic and inorganic seawater constituents which have diversified considerably and now require more space for their description than before. Methods to determine volatile halocarbons, dimethyl sulphide, photosynthetic pigments and natural radioactive tracers have been added as well as applications of X-ray fluorescence spectroscopy and various electrochemical methods for trace metal analysis. Another method not previously described deals with the determination of the partial pressure of carbon dioxide as part of standardised procedures to describe the marine CO2 system.
Author : Gernot Friedbacher
Publisher : Wiley-VCH
ISBN 13 : 9783527320479
Total Pages : 0 pages
Book Rating : 4.3/5 (24 download)
Download or read book Surface and Thin Film Analysis written by Gernot Friedbacher and published by Wiley-VCH. This book was released on 2011-06-07 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Surveying and comparing all techniques relevant for practical applications in surface and thin film analysis, this second edition of a bestseller is a vital guide to this hot topic in nano- and surface technology. This new book has been revised and updated and is divided into four parts - electron, ion, and photon detection, as well as scanning probe microscopy. New chapters have been added to cover such techniques as SNOM, FIM, atom probe (AP),and sum frequency generation (SFG). Appendices with a summary and comparison of techniques and a list of equipment suppliers make this book a rapid reference for materials scientists, analytical chemists, and those working in the biotechnological industry. From a Review of the First Edition (edited by Bubert and Jenett) "... a useful resource..." (Journal of the American Chemical Society)
Author : Michael D. Holloway
Publisher : John Wiley & Sons
ISBN 13 : 1118589092
Total Pages : 460 pages
Book Rating : 4.1/5 (185 download)
Download or read book Dictionary of Industrial Terms written by Michael D. Holloway and published by John Wiley & Sons. This book was released on 2013-01-07 with total page 460 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the most comprehensive dictionary of maintenance and reliability terms ever compiled, covering the process, manufacturing, and other related industries, every major area of engineering used in industry, and more. The over 15,000 entries are all alphabetically arranged and include special features to encourage usage and understanding. They are supplemented by hundreds of figures and tables that clearly demonstrate the principles & concepts behind important process control, instrumentation, reliability, machinery, asset management, lubrication, corrosion, and much much more. With contributions by leading researchers in the field: Zaki Yamani Bin Zakaria Department, Chemical Engineering, Faculty Universiti Teknologi Malaysia, Malaysia Prof. Jelenka B. Savkovic-Stevanovic, Chemical Engineering Dept, University of Belgrade, Serbia Jim Drago, PE, Garlock an EnPro Industries family of companies, USA Robert Perez, President of Pumpcalcs, USA Luiz Alberto Verri, Independent Consultatnt, Verri Veritatis Consultoria, Brasil Matt Tones, Garlock an EnPro Industries family of companies, USA Dr. Reza Javaherdashti, formerly with Qatar University, Doha-Qatar Prof. Semra Bilgic, Faculty of Sciences, Department of Physical Chemistry, Ankara University, Turkey Dr. Mazura Jusoh , Chemical Engineering Department, Universiti Teknologi Malaysia Jayesh Ramesh Tekchandaney, Unique Mixers and Furnaces Pvt. Ltd. Dr. Henry Tan, Senior Lecturer in Safety & Reliability Engineering, and Subsea Engineering, School of Engineering, University of Aberdeen Fiddoson Fiddo, School of Engineering, University of Aberdeen Prof. Roy Johnsen, NTNU, Norway Prof. N. Sitaram , Thermal Turbomachines Laboratory, Department of Mechanical Engineering, IIT Madras, Chennai India Ghazaleh Mohammadali, IranOilGas Network Members' Services Greg Livelli, ABB Instrumentation, Warminster, Pennsylvania, USA Gas Processors Suppliers Association (GPSA)
Author : J. M. Haile
Publisher : Wiley-Interscience
ISBN 13 : 9780471184393
Total Pages : 0 pages
Book Rating : 4.1/5 (843 download)
Download or read book Molecular Dynamics Simulation written by J. M. Haile and published by Wiley-Interscience. This book was released on 1997-03-14 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: "Provides a lot of reading pleasure and many new insights." -Journal of Molecular Structure "This is the most entertaining, stimulating and useful book which can be thoroughly recommended to anyone with an interest in computer simulation." -Contemporary Physics "A very useful introduction . . . more interesting to read than the often dry equation-based texts." -Journal of the American Chemical Society Written especially for the novice, Molecular Dynamics Simulation demonstrates how molecular dynamics simulations work and how to perform them, focusing on how to devise a model for specific molecules and then how to simulate their movements using a computer. This book provides a collection of methods that until now have been scattered through the literature of the last 25 years. It reviews elements of sampling theory and discusses how modern notions of chaos and nonlinear dynamics explain the workings of molecular dynamics. Stresses easy-to-use molecules * Provides sample calculations and figures * Includes four complete FORTRAN codes
