Tuneable Film Bulk Acoustic Wave Resonators

Download Tuneable Film Bulk Acoustic Wave Resonators PDF Online Free

Author :
Publisher : Springer Science & Business Media
ISBN 13 : 1447149440
Total Pages : 255 pages
Book Rating : 4.4/5 (471 download)

DOWNLOAD NOW!


Book Synopsis Tuneable Film Bulk Acoustic Wave Resonators by : Spartak Gevorgian

Download or read book Tuneable Film Bulk Acoustic Wave Resonators written by Spartak Gevorgian and published by Springer Science & Business Media. This book was released on 2013-02-14 with total page 255 pages. Available in PDF, EPUB and Kindle. Book excerpt: To handle many standards and ever increasing bandwidth requirements, large number of filters and switches are used in transceivers of modern wireless communications systems. It makes the cost, performance, form factor, and power consumption of these systems, including cellular phones, critical issues. At present, the fixed frequency filter banks based on Film Bulk Acoustic Resonators (FBAR) are regarded as one of the most promising technologies to address performance -form factor-cost issues. Even though the FBARs improve the overall performances the complexity of these systems remains high. Attempts are being made to exclude some of the filters by bringing the digital signal processing (including channel selection) as close to the antennas as possible. However handling the increased interference levels is unrealistic for low-cost battery operated radios. Replacing fixed frequency filter banks by one tuneable filter is the most desired and widely considered scenario. As an example, development of the software based cognitive radios is largely hindered by the lack of adequate agile components, first of all tuneable filters. In this sense the electrically switchable and tuneable FBARs are the most promising components to address the complex cost-performance issues in agile microwave transceivers, smart wireless sensor networks etc. Tuneable Film Bulk Acoustic Wave Resonators discusses FBAR need, physics, designs, modelling, fabrication and applications. Tuning of the resonant frequency of the FBARs is considered. Switchable and tuneable FBARs based on electric field induced piezoelectric effect in paraelectric phase ferroelectrics are covered. The resonance of these resonators may be electrically switched on and off and tuned without hysteresis. The book is aimed at microwave and sensor specialists in the industry and graduate students. Readers will learn about principles of operation and possibilities of the switchable and tuneable FBARs, and will be given general guidelines for designing, fabrication and applications of these devices.

Multilayer Integrated Film Bulk Acoustic Resonators

Download Multilayer Integrated Film Bulk Acoustic Resonators PDF Online Free

Author :
Publisher : Springer Science & Business Media
ISBN 13 : 3642317766
Total Pages : 159 pages
Book Rating : 4.6/5 (423 download)

DOWNLOAD NOW!


Book Synopsis Multilayer Integrated Film Bulk Acoustic Resonators by : Yafei Zhang

Download or read book Multilayer Integrated Film Bulk Acoustic Resonators written by Yafei Zhang and published by Springer Science & Business Media. This book was released on 2012-08-28 with total page 159 pages. Available in PDF, EPUB and Kindle. Book excerpt: Mulilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators, acoustic resonators, micro-nano manufacturing, multilayer integration, device theory and design principles, etc. These devices can work at very high frequencies by using the newly developed theory, design, and fabrication technology of nano and micro devices. Readers in fields of IC, electronic devices, sensors, materials, and films etc. will benefit from this book by learning the detailed fundamentals and potential applications of these advanced devices. Prof. Yafei Zhang is the director of the Ministry of Education’s Key Laboratory for Thin Films and Microfabrication Technology, PRC; Dr. Da Chen was a PhD student in Prof. Yafei Zhang’s research group.

Tunable Bulk Acoustic Wave Resonators Based on BaxSr1-xTiO3 Thin Films

Download Tunable Bulk Acoustic Wave Resonators Based on BaxSr1-xTiO3 Thin Films PDF Online Free

Author :
Publisher :
ISBN 13 :
Total Pages : 41 pages
Book Rating : 4.:/5 (395 download)

DOWNLOAD NOW!


Book Synopsis Tunable Bulk Acoustic Wave Resonators Based on BaxSr1-xTiO3 Thin Films by : John Berge

Download or read book Tunable Bulk Acoustic Wave Resonators Based on BaxSr1-xTiO3 Thin Films written by John Berge and published by . This book was released on 2009 with total page 41 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Acoustic Wave and Electromechanical Resonators

Download Acoustic Wave and Electromechanical Resonators PDF Online Free

Author :
Publisher : Artech House
ISBN 13 : 1607839784
Total Pages : 364 pages
Book Rating : 4.6/5 (78 download)

DOWNLOAD NOW!


Book Synopsis Acoustic Wave and Electromechanical Resonators by : Humberto Campanella

Download or read book Acoustic Wave and Electromechanical Resonators written by Humberto Campanella and published by Artech House. This book was released on 2010 with total page 364 pages. Available in PDF, EPUB and Kindle. Book excerpt: This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensing and RF systems. Moreover, this one-stop resource looks at the main characteristics, differences, and limitations of FBAR, MEMS, and NEMS devices, helping you to choose the right approaches for your projects. Over 280 illustrations and more than 130 equations support key topics throughout the book.

Switchable and Tunable Bulk Acoustic Wave Resonators Based on BaxSr1_xTiO3 Thin Films

Download Switchable and Tunable Bulk Acoustic Wave Resonators Based on BaxSr1_xTiO3 Thin Films PDF Online Free

Author :
Publisher :
ISBN 13 : 9789173856430
Total Pages : 101 pages
Book Rating : 4.8/5 (564 download)

DOWNLOAD NOW!


Book Synopsis Switchable and Tunable Bulk Acoustic Wave Resonators Based on BaxSr1_xTiO3 Thin Films by : John Berge

Download or read book Switchable and Tunable Bulk Acoustic Wave Resonators Based on BaxSr1_xTiO3 Thin Films written by John Berge and published by . This book was released on 2012 with total page 101 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Thin-film Bulk Acoustic Wave Resonators (FBAR)

Download Thin-film Bulk Acoustic Wave Resonators (FBAR) PDF Online Free

Author :
Publisher :
ISBN 13 : 9788469165409
Total Pages : 234 pages
Book Rating : 4.1/5 (654 download)

DOWNLOAD NOW!


Book Synopsis Thin-film Bulk Acoustic Wave Resonators (FBAR) by : Humberto Campanella Pineda

Download or read book Thin-film Bulk Acoustic Wave Resonators (FBAR) written by Humberto Campanella Pineda and published by . This book was released on 2008 with total page 234 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Multilayer Integrated Film Bulk Acoustic Resonators

Download Multilayer Integrated Film Bulk Acoustic Resonators PDF Online Free

Author :
Publisher :
ISBN 13 : 9783642317774
Total Pages : 164 pages
Book Rating : 4.3/5 (177 download)

DOWNLOAD NOW!


Book Synopsis Multilayer Integrated Film Bulk Acoustic Resonators by : Springer

Download or read book Multilayer Integrated Film Bulk Acoustic Resonators written by Springer and published by . This book was released on 2012-08-29 with total page 164 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Simulation and Fabrication of Thin Film Bulk Acoustic Wave Resonator*Project Supported by the National Natural Science Foundation of China (Nos. 61274119, 61306141, 61335008) and the Natural Science Foundation of Jiangsu Province (No. BK20131099).

Download Simulation and Fabrication of Thin Film Bulk Acoustic Wave Resonator*Project Supported by the National Natural Science Foundation of China (Nos. 61274119, 61306141, 61335008) and the Natural Science Foundation of Jiangsu Province (No. BK20131099). PDF Online Free

Author :
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (15 download)

DOWNLOAD NOW!


Book Synopsis Simulation and Fabrication of Thin Film Bulk Acoustic Wave Resonator*Project Supported by the National Natural Science Foundation of China (Nos. 61274119, 61306141, 61335008) and the Natural Science Foundation of Jiangsu Province (No. BK20131099). by :

Download or read book Simulation and Fabrication of Thin Film Bulk Acoustic Wave Resonator*Project Supported by the National Natural Science Foundation of China (Nos. 61274119, 61306141, 61335008) and the Natural Science Foundation of Jiangsu Province (No. BK20131099). written by and published by . This book was released on 2016 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Abstract: In this paper, we present the simulation and fabrication of a thin film bulk acoustic resonator (FBAR). In order to improve the accuracy of simulation, an improved Mason model was introduced to design the resonator by taking the coupling effect between electrode and substrate into consideration. The resonators were fabricated by the eight inch CMOS process, and the measurements show that the improved Mason model is more accurate than a simple Mason model. The Q s ( Q at series resonance), Q p ( Q at parallel resonance), Q max and k t 2 of the FBAR were measured to be 695, 814, 1049, and 7.01% respectively, showing better performance than previous reports.

High Coupling Materials for Thin Film Bulk Acoustic Wave Resonators

Download High Coupling Materials for Thin Film Bulk Acoustic Wave Resonators PDF Online Free

Author :
Publisher :
ISBN 13 :
Total Pages : 157 pages
Book Rating : 4.:/5 (638 download)

DOWNLOAD NOW!


Book Synopsis High Coupling Materials for Thin Film Bulk Acoustic Wave Resonators by : Janine Conde

Download or read book High Coupling Materials for Thin Film Bulk Acoustic Wave Resonators written by Janine Conde and published by . This book was released on 2009 with total page 157 pages. Available in PDF, EPUB and Kindle. Book excerpt:

High Frequency Thin-film Bulk Acoustic Wave Resonators for Gas- and Bio-analytical Applications

Download High Frequency Thin-film Bulk Acoustic Wave Resonators for Gas- and Bio-analytical Applications PDF Online Free

Author :
Publisher :
ISBN 13 :
Total Pages : 380 pages
Book Rating : 4.:/5 (11 download)

DOWNLOAD NOW!


Book Synopsis High Frequency Thin-film Bulk Acoustic Wave Resonators for Gas- and Bio-analytical Applications by : G. M. Ashley

Download or read book High Frequency Thin-film Bulk Acoustic Wave Resonators for Gas- and Bio-analytical Applications written by G. M. Ashley and published by . This book was released on 2005 with total page 380 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Design and Fabrication of Tunable Thickness Excitation Film Bulk Acoustic Resonators and Stacked Crystal Filters for High Frequency Communication Systems

Download Design and Fabrication of Tunable Thickness Excitation Film Bulk Acoustic Resonators and Stacked Crystal Filters for High Frequency Communication Systems PDF Online Free

Author :
Publisher :
ISBN 13 :
Total Pages : 194 pages
Book Rating : 4.:/5 (18 download)

DOWNLOAD NOW!


Book Synopsis Design and Fabrication of Tunable Thickness Excitation Film Bulk Acoustic Resonators and Stacked Crystal Filters for High Frequency Communication Systems by : Hasnain Lakdawala

Download or read book Design and Fabrication of Tunable Thickness Excitation Film Bulk Acoustic Resonators and Stacked Crystal Filters for High Frequency Communication Systems written by Hasnain Lakdawala and published by . This book was released on 1997 with total page 194 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Dual Mode Thin Film Bulk Acoustic Resonators (FBARs) Based on AlN, ZnO and GaN Films with Tilted C-Axis Orientation

Download Dual Mode Thin Film Bulk Acoustic Resonators (FBARs) Based on AlN, ZnO and GaN Films with Tilted C-Axis Orientation PDF Online Free

Author :
Publisher :
ISBN 13 :
Total Pages : 91 pages
Book Rating : 4.:/5 (713 download)

DOWNLOAD NOW!


Book Synopsis Dual Mode Thin Film Bulk Acoustic Resonators (FBARs) Based on AlN, ZnO and GaN Films with Tilted C-Axis Orientation by :

Download or read book Dual Mode Thin Film Bulk Acoustic Resonators (FBARs) Based on AlN, ZnO and GaN Films with Tilted C-Axis Orientation written by and published by . This book was released on 2010 with total page 91 pages. Available in PDF, EPUB and Kindle. Book excerpt: Thin film bulk acoustic wave resonators (FBAR) using piezoelectric AlN, ZnO and GaN thin films have attracted extensive research activities in the past years. Highly c-axis oriented (normal-plane orientation) binary semiconductor piezoelectric thin films are particularly investigated for resonators operating at the fundamental thickness longitudinal mode. Depending on the processing conditions, tilted polarization (c-axis off the normal direction to the substrate surface) is often found in the as-deposited piezoelectric thin films, which leads to the coexistence of thickness longitudinal mode and shear mode for the thin film resonators.

The Analysis and Design of Film Bulk Acoustic-Wave Resonators

Download The Analysis and Design of Film Bulk Acoustic-Wave Resonators PDF Online Free

Author :
Publisher :
ISBN 13 :
Total Pages : 169 pages
Book Rating : 4.:/5 (84 download)

DOWNLOAD NOW!


Book Synopsis The Analysis and Design of Film Bulk Acoustic-Wave Resonators by : 戴國圓

Download or read book The Analysis and Design of Film Bulk Acoustic-Wave Resonators written by 戴國圓 and published by . This book was released on 2005 with total page 169 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Investigation of Spurious Waves in Thin-film Bulk Acoustic Wave Resonators

Download Investigation of Spurious Waves in Thin-film Bulk Acoustic Wave Resonators PDF Online Free

Author :
Publisher :
ISBN 13 :
Total Pages : 176 pages
Book Rating : 4.:/5 (869 download)

DOWNLOAD NOW!


Book Synopsis Investigation of Spurious Waves in Thin-film Bulk Acoustic Wave Resonators by : Wenxia Yang

Download or read book Investigation of Spurious Waves in Thin-film Bulk Acoustic Wave Resonators written by Wenxia Yang and published by . This book was released on 2013 with total page 176 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Lateral-field-excitation Film Bulk Acoustic Wave Resonator for High Frequency Wireless Communications

Download Lateral-field-excitation Film Bulk Acoustic Wave Resonator for High Frequency Wireless Communications PDF Online Free

Author :
Publisher :
ISBN 13 :
Total Pages : 104 pages
Book Rating : 4.:/5 (18 download)

DOWNLOAD NOW!


Book Synopsis Lateral-field-excitation Film Bulk Acoustic Wave Resonator for High Frequency Wireless Communications by : Woo Wai Lau

Download or read book Lateral-field-excitation Film Bulk Acoustic Wave Resonator for High Frequency Wireless Communications written by Woo Wai Lau and published by . This book was released on 1996 with total page 104 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Lateral Field Excitation Film Bulk Acoustic Wave Resonator Using Interdigitated Electrodes

Download Lateral Field Excitation Film Bulk Acoustic Wave Resonator Using Interdigitated Electrodes PDF Online Free

Author :
Publisher :
ISBN 13 :
Total Pages : 148 pages
Book Rating : 4.:/5 (18 download)

DOWNLOAD NOW!


Book Synopsis Lateral Field Excitation Film Bulk Acoustic Wave Resonator Using Interdigitated Electrodes by : Kuok Chun Lou

Download or read book Lateral Field Excitation Film Bulk Acoustic Wave Resonator Using Interdigitated Electrodes written by Kuok Chun Lou and published by . This book was released on 1998 with total page 148 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Design, Fabrication, and Characterization of Beam - Supported Aluminum Nitride Thin Film Bulk Acoustic Resonators

Download Design, Fabrication, and Characterization of Beam - Supported Aluminum Nitride Thin Film Bulk Acoustic Resonators PDF Online Free

Author :
Publisher :
ISBN 13 :
Total Pages : 340 pages
Book Rating : 4.:/5 (759 download)

DOWNLOAD NOW!


Book Synopsis Design, Fabrication, and Characterization of Beam - Supported Aluminum Nitride Thin Film Bulk Acoustic Resonators by : Lori Ann Callaghan

Download or read book Design, Fabrication, and Characterization of Beam - Supported Aluminum Nitride Thin Film Bulk Acoustic Resonators written by Lori Ann Callaghan and published by . This book was released on 2005 with total page 340 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro-mechanical filters comprised of bulk acoustic resonators are being fabricated and studied as a solution to the demands for low power consumption, high functionality devices in the telecommunication industry. A novel, suspended thin Film Bulk Acoustic wave Resonator (SFBAR) has been fabricated using an aluminum nitride film sputtered directly on a 100 silicon substrate. The suspended membrane design uses thin beams to support, as well as electrically connect, the resonator. The SFBAR has been fabricated by combining both thin film processing and bulk silicon micro machining. The AlN was etched in an Inductively Coupled Plasma (ICP) chlorine etch, using titanium dioxide as the masking material. A silicon Deep Reactive Ion Etch (DRIE) was used to create an open ended air cavity with a novel circular shape. A representative resonator, designated here as sample W9HS8 resonator 10018, was characterized with a Quality Factor values at resonance and anti-resonance of 68 and 151,