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Author : Wolfgang Maximilian Josef Hofmann
Publisher :
ISBN 13 :
Total Pages : 502 pages
Book Rating : 4.E/5 ( download)
Download or read book Three-dimensional Single Crystal Silicon Micromachining written by Wolfgang Maximilian Josef Hofmann and published by . This book was released on 1999 with total page 502 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Zuoying Lisa Zhang
Publisher :
ISBN 13 :
Total Pages : 166 pages
Book Rating : 4.E/5 ( download)
Download or read book Submicron Three-dimensional Single-crystal Electro-mechanical Structures and Actuators Integrated with Field Emitters for Micro-machined Vacuum Electronics Applications written by Zuoying Lisa Zhang and published by . This book was released on 1993 with total page 166 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Markku Tilli
Publisher : William Andrew
ISBN 13 : 0323312233
Total Pages : 827 pages
Book Rating : 4.3/5 (233 download)
Download or read book Handbook of Silicon Based MEMS Materials and Technologies written by Markku Tilli and published by William Andrew. This book was released on 2015-09-02 with total page 827 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, manufacturing, processing, system integration, measurement, and materials characterization techniques, sensors, and multi-scale modeling methods of MEMS structures, silicon crystals, and wafers, also covering micromachining technologies in MEMS and encapsulation of MEMS components. Furthermore, it provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques, shows how to protect devices from the environment, and provides tactics to decrease package size for a dramatic reduction in costs. - Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques - Shows how to protect devices from the environment and decrease package size for a dramatic reduction in packaging costs - Discusses properties, preparation, and growth of silicon crystals and wafers - Explains the many properties (mechanical, electrostatic, optical, etc.), manufacturing, processing, measuring (including focused beam techniques), and multiscale modeling methods of MEMS structures - Geared towards practical applications rather than theory
Author : AMITAVA BOSE
Publisher : PHI Learning Pvt. Ltd.
ISBN 13 : 9788120333536
Total Pages : 420 pages
Book Rating : 4.3/5 (335 download)
Download or read book Modern Inertial Sensors and Systems written by AMITAVA BOSE and published by PHI Learning Pvt. Ltd.. This book was released on 2008-03-09 with total page 420 pages. Available in PDF, EPUB and Kindle. Book excerpt: Modern inertial sensors and systems cover more than five decades of continuous research and development involving various branches of science and engineering. Various technologies have emerged in an evolutionary manner surpassing the earlier ones in performance and reliability. The subject is still growing with proliferation in newer cost effec-tive applications, while its wider usage in aerospace systems continues. This book exposes the readers to the subject of inertial navigation, the inertial sensors and inertial systems in a unified manner while emphasizing the growth areas in emerging technologies such as micro-electromechanical inertial sensors, satellite navigation, satellite navigation integrated inertial navigation, hemispherical resonator gyro, vibrating beam accelerometer, interferometric fibre optic gyro, inertial sensor signal processing, redundant inertial systems and the quite recent emergence of cold atom interferometer based inertial sensors. The contents are imaginatively designed that will of interest to a wide spectrum of readers. The book has been written with utmost lucidity and clarity and explanations provided with a large number of illustrative figures. Besides being an ideal introduction to the principles of inertial sensors and systems for undergraduate and postgraduate students of aerospace engineering, the topics dealt with will also be of benefit to practising engineers and can assist the researchers to locate excellent references for research work. The authors have had three decades of design and application research experience in premier research institutions and have made use of their experience in giving a user-friendly shape to the book.
Author : Alexandros D. Margomenos
Publisher :
ISBN 13 :
Total Pages : 394 pages
Book Rating : 4.3/5 (91 download)
Download or read book Three Dimensional Integration and Packaging Using Silicon Micromachining written by Alexandros D. Margomenos and published by . This book was released on 2003 with total page 394 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Sergey Edward Lyshevski
Publisher : CRC Press
ISBN 13 : 1351835173
Total Pages : 752 pages
Book Rating : 4.3/5 (518 download)
Download or read book Nano- and Micro-Electromechanical Systems written by Sergey Edward Lyshevski and published by CRC Press. This book was released on 2018-10-03 with total page 752 pages. Available in PDF, EPUB and Kindle. Book excerpt: Society is approaching and advancing nano- and microtechnology from various angles of science and engineering. The need for further fundamental, applied, and experimental research is matched by the demand for quality references that capture the multidisciplinary and multifaceted nature of the science. Presenting cutting-edge information that is applicable to many fields, Nano- and Micro-Electromechanical Systems: Fundamentals of Nano and Microengineering, Second Edition builds the theoretical foundation for understanding, modeling, controlling, simulating, and designing nano- and microsystems. The book focuses on the fundamentals of nano- and microengineering and nano- and microtechnology. It emphasizes the multidisciplinary principles of NEMS and MEMS and practical applications of the basic theory in engineering practice and technology development. Significantly revised to reflect both fundamental and technological aspects, this second edition introduces the concepts, methods, techniques, and technologies needed to solve a wide variety of problems related to high-performance nano- and microsystems. The book is written in a textbook style and now includes homework problems, examples, and reference lists in every chapter, as well as a separate solutions manual. It is designed to satisfy the growing demands of undergraduate and graduate students, researchers, and professionals in the fields of nano- and microengineering, and to enable them to contribute to the nanotechnology revolution.
Author : Sergej Fatikow
Publisher : Springer Science & Business Media
ISBN 13 : 3662034506
Total Pages : 420 pages
Book Rating : 4.6/5 (62 download)
Download or read book Microsystem Technology and Microrobotics written by Sergej Fatikow and published by Springer Science & Business Media. This book was released on 2013-04-17 with total page 420 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.
Author : Marc J. Madou
Publisher : CRC Press
ISBN 13 : 1351990616
Total Pages : 3817 pages
Book Rating : 4.3/5 (519 download)
Download or read book Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set written by Marc J. Madou and published by CRC Press. This book was released on 2018-12-14 with total page 3817 pages. Available in PDF, EPUB and Kindle. Book excerpt: Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.
Author : Masayoshi Esashi
Publisher : John Wiley & Sons
ISBN 13 : 3527823255
Total Pages : 528 pages
Book Rating : 4.5/5 (278 download)
Download or read book 3D and Circuit Integration of MEMS written by Masayoshi Esashi and published by John Wiley & Sons. This book was released on 2021-03-16 with total page 528 pages. Available in PDF, EPUB and Kindle. Book excerpt: Explore heterogeneous circuit integration and the packaging needed for practical applications of microsystems MEMS and system integration are important building blocks for the “More-Than-Moore” paradigm described in the International Technology Roadmap for Semiconductors. And, in 3D and Circuit Integration of MEMS, distinguished editor Dr. Masayoshi Esashi delivers a comprehensive and systematic exploration of the technologies for microsystem packaging and heterogeneous integration. The book focuses on the silicon MEMS that have been used extensively and the technologies surrounding system integration. You’ll learn about topics as varied as bulk micromachining, surface micromachining, CMOS-MEMS, wafer interconnection, wafer bonding, and sealing. Highly relevant for researchers involved in microsystem technologies, the book is also ideal for anyone working in the microsystems industry. It demonstrates the key technologies that will assist researchers and professionals deal with current and future application bottlenecks. Readers will also benefit from the inclusion of: A thorough introduction to enhanced bulk micromachining on MIS process, including pressure sensor fabrication and the extension of MIS process for various advanced MEMS devices An exploration of epitaxial poly Si surface micromachining, including process condition of epi-poly Si, and MEMS devices using epi-poly Si Practical discussions of Poly SiGe surface micromachining, including SiGe deposition and LP CVD polycrystalline SiGe A concise treatment of heterogeneously integrated aluminum nitride MEMS resonators and filters Perfect for materials scientists, electronics engineers, and electrical and mechanical engineers, 3D and Circuit Integration of MEMS will also earn a place in the libraries of semiconductor physicists seeking a one-stop reference for circuit integration and the practical application of microsystems.
Author : Volkmar Kose
Publisher : IOS Press
ISBN 13 : 9789051993813
Total Pages : 926 pages
Book Rating : 4.9/5 (938 download)
Download or read book Non-linear Electromagnetic Systems written by Volkmar Kose and published by IOS Press. This book was released on 1998 with total page 926 pages. Available in PDF, EPUB and Kindle. Book excerpt: The contents is dominated by the latest problems of applied electrical engineering, micro electromechanics, biosensor technology and biomagnetism. The book covers the numerical calculation methods for the design and optimization of sensors, actuators and electric machines, as well as the treatment of inverse problems, in materials testing and in the field of medicine in particular. Other central topics are the material properties and their simulation and much consideration is given to micro-electromechanics.
Author : Sergey Edward Lyshevski
Publisher : CRC Press
ISBN 13 : 1351836137
Total Pages : 335 pages
Book Rating : 4.3/5 (518 download)
Download or read book MEMS and NEMS written by Sergey Edward Lyshevski and published by CRC Press. This book was released on 2018-10-03 with total page 335 pages. Available in PDF, EPUB and Kindle. Book excerpt: The development of micro- and nano-mechanical systems (MEMS and NEMS) foreshadows momentous changes not only in the technological world, but in virtually every aspect of human life. The future of the field is bright with opportunities, but also riddled with challenges, ranging from further theoretical development through advances in fabrication technologies, to developing high-performance nano- and microscale systems, devices, and structures, including transducers, switches, logic gates, actuators and sensors. MEMS and NEMS: Systems, Devices, and Structures is designed to help you meet those challenges and solve fundamental, experimental, and applied problems. Written from a multi-disciplinary perspective, this book forms the basis for the synthesis, modeling, analysis, simulation, control, prototyping, and fabrication of MEMS and NEMS. The author brings together the various paradigms, methods, and technologies associated with MEMS and NEMS to show how to synthesize, analyze, design, and fabricate them. Focusing on the basics, he illustrates the development of NEMS and MEMS architectures, physical representations, structural synthesis, and optimization. The applications of MEMS and NEMS in areas such as biotechnology, medicine, avionics, transportation, and defense are virtually limitless. This book helps prepare you to take advantage of their inherent opportunities and effectively solve problems related to their configurations, systems integration, and control.
Author : Marc J. Madou
Publisher : CRC Press
ISBN 13 : 1482274000
Total Pages : 764 pages
Book Rating : 4.4/5 (822 download)
Download or read book Fundamentals of Microfabrication written by Marc J. Madou and published by CRC Press. This book was released on 2018-10-08 with total page 764 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field. Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem. New in the Second Edition Revised chapters that reflect the many recent advances in the field Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs. Many more links to the Web Problem sets in each chapter
Author : Liang-Yuh Chen
Publisher :
ISBN 13 :
Total Pages : 306 pages
Book Rating : 4.E/5 ( download)
Download or read book Integrated Three-dimensional Processing for Novel Micro Electro Mechanical Systems written by Liang-Yuh Chen and published by . This book was released on 1995 with total page 306 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Daniele Mari
Publisher : Newnes
ISBN 13 : 0080965288
Total Pages : 1809 pages
Book Rating : 4.0/5 (89 download)
Download or read book Comprehensive Hard Materials written by Daniele Mari and published by Newnes. This book was released on 2014-02-01 with total page 1809 pages. Available in PDF, EPUB and Kindle. Book excerpt: Comprehensive Hard Materials, Three Volume Set deals with the production, uses and properties of the carbides, nitrides and borides of these metals and those of titanium, as well as tools of ceramics, the superhard boron nitrides and diamond and related compounds. Articles include the technologies of powder production (including their precursor materials), milling, granulation, cold and hot compaction, sintering, hot isostatic pressing, hot-pressing, injection moulding, as well as on the coating technologies for refractory metals, hard metals and hard materials. The characterization, testing, quality assurance and applications are also covered. Comprehensive Hard Materials provides meaningful insights on materials at the leading edge of technology. It aids continued research and development of these materials and as such it is a critical information resource to academics and industry professionals facing the technological challenges of the future. Hard materials operate at the leading edge of technology, and continued research and development of such materials is critical to meet the technological challenges of the future. Users of this work can improve their knowledge of basic principles and gain a better understanding of process/structure/property relationships. With the convergence of nanotechnology, coating techniques, and functionally graded materials to the cognitive science of cemented carbides, cermets, advanced ceramics, super-hard materials and composites, it is evident that the full potential of this class of materials is far from exhausted. This work unites these important areas of research and will provide useful insights to users through its extensive cross-referencing and thematic presentation. To link academic to industrial usage of hard materials and vice versa, this work deals with the production, uses and properties of the carbides, nitrides and borides of these metals and those of titanium, as well as tools of ceramics, the superhard boron nitrides and diamond and related compounds.
Author : National Research Council
Publisher : National Academies Press
ISBN 13 : 0309059801
Total Pages : 76 pages
Book Rating : 4.3/5 (9 download)
Download or read book Microelectromechanical Systems written by National Research Council and published by National Academies Press. This book was released on 1998-01-01 with total page 76 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectromenchanical systems (MEMS) is a revolutionary field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. The silicon-based integrated circuits process is so highly refined it can produce millions of electrical elements on a single chip and define their critical dimensions to tolerances of 100-billionths of a meter. The MEMS revolution harnesses the integrated circuitry know-how to build working microsystems from micromechanical and microelectronic elements. MEMS is a multidisciplinary field involving challenges and opportunites for electrical, mechanical, chemical, and biomedical engineering as well as physics, biology, and chemistry. As MEMS begin to permeate more and more industrial procedures, society as a whole will be strongly affected because MEMS provide a new design technology that could rivalâ€"perhaps surpassâ€"the societal impact of integrated circuits.
Author : Denise Denton
Publisher : The Electrochemical Society
ISBN 13 : 9781566771238
Total Pages : 376 pages
Book Rating : 4.7/5 (712 download)
Download or read book Proceedings of the Second International Symposium on Microstructures and Microfabricated Systems written by Denise Denton and published by The Electrochemical Society. This book was released on 1995 with total page 376 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Bharat Bhushan
Publisher : Springer Science & Business Media
ISBN 13 : 9401150508
Total Pages : 652 pages
Book Rating : 4.4/5 (11 download)
Download or read book Tribology Issues and Opportunities in MEMS written by Bharat Bhushan and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 652 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro Electro Mechanical Systems (MEMS) is already about a billion dollars a year industry and is growing rapidly. So far major emphasis has been placed on the fabrication processes for various devices. There are serious issues related to tribology, mechanics, surfacechemistry and materials science in the operationand manufacturingof many MEMS devices and these issues are preventing an even faster commercialization. Very little is understood about tribology and mechanical properties on micro- to nanoscales of the materials used in the construction of MEMS devices. The MEMS community needs to be exposed to the state-of-the-artoftribology and vice versa. Fundamental understanding of friction/stiction, wear and the role of surface contamination and environmental debris in micro devices is required. There are significantadhesion, friction and wear issues in manufacturing and actual use, facing the MEMS industry. Very little is understood about the tribology of bulk silicon and polysilicon films used in the construction ofthese microdevices. These issues are based on surface phenomenaand cannotbe scaled down linearly and these become increasingly important with the small size of the devices. Continuum theory breaks down in the analyses, e. g. in fluid flow of micro-scale devices. Mechanical properties ofpolysilicon and other films are not well characterized. Roughness optimization can help in tribological improvements. Monolayers of lubricants and other materials need to be developed for ultra-low friction and near zero wear. Hard coatings and ion implantation techniques hold promise.
