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Thin Film Resistive Sensors
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Book Synopsis Thin Film Resistive Sensors, by : Petru Ciureanu
Download or read book Thin Film Resistive Sensors, written by Petru Ciureanu and published by CRC Press. This book was released on 1992 with total page 520 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a complete overview of thin film resistive sensors.devoted to thin-film devices. Each type of input energy is discussed in a separate chapter. Detailed descriptions are given of the materials, properties, structure and principles of operation of the sensors as well as their main applications. Results of the authors' research and comprehensive reviews of the current literature are included. The scope of this book and its accessible style make it a valuable reference work to graduate scientists and engineers in many disciplines. Written for scientists and engineers using or developing thin film sensors.
Book Synopsis Thin Film Resistive Sensors by : P. Ciureanu
Download or read book Thin Film Resistive Sensors written by P. Ciureanu and published by . This book was released on with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Thin Film Magnetoresistive Sensors by : S Tumanski
Download or read book Thin Film Magnetoresistive Sensors written by S Tumanski and published by CRC Press. This book was released on 2001-06-08 with total page 446 pages. Available in PDF, EPUB and Kindle. Book excerpt: Thin Film Magnetoresistive Sensors presents a comprehensive review of thin film magnetoresistive (MR) sensors, including the theory of MR effects as well as the design, fabrication, properties, and applications of MR sensors. With over 1,000 references, the book fully reviews the theory, development, and use of these sensors. It provides essential information about the performance of various kinds of sensors, including permalloy magnetoresistors, spin valve sensors, multilayer sensors, colossal effect sensors, spin dependent tunneling sensors, and magnetoimpedance sensors.
Book Synopsis Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration by : Jean Laconte
Download or read book Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration written by Jean Laconte and published by Springer Science & Business Media. This book was released on 2006-10-11 with total page 293 pages. Available in PDF, EPUB and Kindle. Book excerpt: Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost. Micromachined Thin-Film Sensors for SOI-CMOS Co-integration covers the challenges and interests and demonstrates the successful co-integration of gas-flow sensors on dielectric membrane, with their associated electronics, in CMOS-SOI technology. We firstly investigate the extraction of residual stress in thin layers and in their stacking and the release, in post-processing, of a 1 μm-thick robust and flat dielectric multilayered membrane using Tetramethyl Ammonium Hydroxide (TMAH) silicon micromachining solution. The optimization of its selectivity towards aluminum is largely demonstrated. The second part focuses on sensors design and characteristics. A novel loop-shape polysilicon microheater is designed and built in a CMOS-SOI standard process. High thermal uniformity, low power consumption and high working temperature are confirmed by extensive measurements. The additional gas flow sensing layers are judiciously chosen and implemented. Measurements in the presence of a nitrogen flow and gas reveal fair sensitivity on a large flow velocity range as well as good response to many gases. Finally, MOS transistors suspended on released dielectric membranes are presented and fully characterized as a concluding demonstrator of the co-integration in SOI technology.
Book Synopsis Preparation and Analysis of Platinum Thin Films for High Temperature Sensor Applications by : John D. Wrbanek
Download or read book Preparation and Analysis of Platinum Thin Films for High Temperature Sensor Applications written by John D. Wrbanek and published by BiblioGov. This book was released on 2013-07 with total page 30 pages. Available in PDF, EPUB and Kindle. Book excerpt: A study has been made of platinum thin films for application as high temperature resistive sensors. To support NASA Glenn Research Center s high temperature thin film sensor effort, a magnetron sputtering system was installed recently in the GRC Microsystems Fabrication Clean Room Facility. Several samples of platinum films were prepared using various system parameters to establish run conditions. These films were characterized with the intended application of being used as resistive sensing elements, either for temperature or strain measurement. The resistances of several patterned sensors were monitored to document the effect of changes in parameters of deposition and annealing. The parameters were optimized for uniformity and intrinsic strain. The evaporation of platinum via oxidation during annealing over 900 C was documented, and a model for the process developed. The film adhesion was explored on films annealed to 1000 C with various bondcoats on fused quartz and alumina. From this compiled data, a list of optimal parameters and characteristics determined for patterned platinum thin films is given.
Book Synopsis Thick Film Sensors by : Maria Prudenziati
Download or read book Thick Film Sensors written by Maria Prudenziati and published by . This book was released on 1994 with total page 498 pages. Available in PDF, EPUB and Kindle. Book excerpt: Inaugurating a new Elsevier series, this volume presents the state of the art in thick-film technology. It disseminates the data identifying the actual performances and applications of thick-film sensors manufactured all over the world, and presents ideas underlying current activities in the research and development of new devices. Three major areas are explored in which thick-film technology contributes as a sensor technology, namely hybrid circuits for signal processing, creation of architectural structures, and transducing elements derived from thick-film pastes. Annotation copyright by Book News, Inc., Portland, OR
Book Synopsis STUDY OF INTEGRATED SEMICONDUC by : Bin Li
Download or read book STUDY OF INTEGRATED SEMICONDUC written by Bin Li and published by Open Dissertation Press. This book was released on 2017-01-27 with total page 166 pages. Available in PDF, EPUB and Kindle. Book excerpt: This dissertation, "A study of integrated semiconductor thin-film sensors on sio2/si substrate" by Bin, Li, 李斌, was obtained from The University of Hong Kong (Pokfulam, Hong Kong) and is being sold pursuant to Creative Commons: Attribution 3.0 Hong Kong License. The content of this dissertation has not been altered in any way. We have altered the formatting in order to facilitate the ease of printing and reading of the dissertation. All rights not granted by the above license are retained by the author. Abstract: Abstract of thesis entitled A STUDY OF INTERGATED SEMICONDUCTOR THIN-FILM SENSORS ON SiO /Si SUBSTRATE submitted by Bin Li for the degree of Doctor of Philosophy at the University of Hong Kong in April 2001 With the development of the information technology, the need for miniaturized, intelligent and programmable sensors is rapidly increasing. To meet this trend, developing thin-film sensors on silicon substrate is of great importance. In this thesis, two areas are focused on. One is spreading-resistance temperature (SRT) sensor on silicon on insulator (SOI), while the other is the multi-function thin-film microsensor on SiO /Si substrate. Based on the principle of minority-carrier exclusion effect, SRT sensor on bulk Si is intensively studied. Optimizations of structural parameters and processing conditions on thermal characteristics of SRT sensors are carried out. With appropriately small electrode and high substrate doping, bulk SRT sensor can function at temperatures up to 400 C at a low current of 2 mA. ii SRT sensor on SOI is then investigated with emphasis on its resistance versus temperature (R-T), low-temperature and AC characteristics. Moreover, the effect of Si- film thickness on the maximum operating temperature (T ) is simulated and verified by max experiment results. When the silicon film is sufficiently thin, i.e. 0.1 μm, T can be max significantly raised up to 550 C, even at a very low bias current of 1 μA. Measurements under low-temperature or AC condition reveal that SRT sensor behaves like a conventional resistor. A new microsensor consisting of a thin-film resistor and a metal-insulator- semiconductor (MIS) capacitor is developed by depositing perovskite-type thin film on SiO /Si substrate. SrNb Ti O, Ba La TiO and Ba La Nb Ti O chosen as the 2 x 1-x 3 1-x x 3 1-x x y 1-y 3 sensing film present reasonable multi-function sensitivities to light, heat and humidity. Differences in the sensing properties of the films are related to their chemical compositions and grain boundaries. It is hoped that by varying the chemical composition, processing conditions of the film, better performance could be obtained. Finally, the effects of device structure on the sensitivities of perovskite thin-film microsensors are discussed. A new physical model is proposed for humidity-sensitive MIS capacitor with a metal-perovskite-SiO -Si structure. Based on this model, it is deduced that higher sensitivity of thinner film is due to higher porosity of the film. However, thinner film results in lower sensitivity to illumination due to poorer absorption, iii while the film thickness only has minor effects on the thermal sensitivity. The effects of SiO thickness are studied and experimental results demonstrate that an optimal value of 250 A gives rise to good multi-function sensitivities. The dependence of electrical properties of photoresistor on device dimension is investigated. Devices with smaller electrode spacings show reasonably linear I-V characteristics. Moreover, heat treatment in O for an optimal time can increase the photo sensitivity by suppressing dark current. In conclusion, SOI SRT sensors and perovskite-oxide thin-film microsensors are promising candidates for integrated sensor applications.
Book Synopsis Microscale Acoustofluidics by : Thomas Laurell
Download or read book Microscale Acoustofluidics written by Thomas Laurell and published by Royal Society of Chemistry. This book was released on 2014-12-08 with total page 593 pages. Available in PDF, EPUB and Kindle. Book excerpt: The manipulation of cells and microparticles within microfluidic systems using external forces is valuable for many microscale analytical and bioanalytical applications. Acoustofluidics is the ultrasound-based external forcing of microparticles with microfluidic systems. It has gained much interest because it allows for the simple label-free separation of microparticles based on their mechanical properties without affecting the microparticles themselves. Microscale Acoustofluidics provides an introduction to the field providing the background to the fundamental physics including chapters on governing equations in microfluidics and perturbation theory and ultrasound resonances, acoustic radiation force on small particles, continuum mechanics for ultrasonic particle manipulation, and piezoelectricity and application to the excitation of acoustic fields for ultrasonic particle manipulation. The book also provides information on the design and characterization of ultrasonic particle manipulation devices as well as applications in acoustic trapping and immunoassays. Written by leading experts in the field, the book will appeal to postgraduate students and researchers interested in microfluidics and lab-on-a-chip applications.
Book Synopsis Thermally Activated Reactions in Thin-film Magnetoresistive Sensors by : Peter F. Ladwig
Download or read book Thermally Activated Reactions in Thin-film Magnetoresistive Sensors written by Peter F. Ladwig and published by . This book was released on 2003 with total page 298 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Resistive, Capacitive, Inductive, and Magnetic Sensor Technologies by : Winncy Y. Du
Download or read book Resistive, Capacitive, Inductive, and Magnetic Sensor Technologies written by Winncy Y. Du and published by CRC Press. This book was released on 2014-12-09 with total page 412 pages. Available in PDF, EPUB and Kindle. Book excerpt: Sensor technologies have experienced dramatic growth in recent years, making a significant impact on national security, health care, environmental improvement, energy management, food safety, construction monitoring, manufacturing and process control, and more. However, education on sensor technologies has not kept pace with this rapid development ... until now. Resistive, Capacitive, Inductive, and Magnetic Sensor Technologies examines existing, new, and novel sensor technologies and—through real-world examples, sample problems, and practical exercises—illustrates how the related science and engineering principles can be applied across multiple disciplines, offering greater insight into various sensors’ operating mechanisms and practical functions. The book assists readers in understanding resistive, capacitive, inductive, and magnetic (RCIM) sensors, as well as sensors with similar design concepts, characteristics, and circuitry. Resistive, Capacitive, Inductive, and Magnetic Sensor Technologies is a complete and comprehensive overview of RCIM sensing technologies. It takes a unique approach in describing a broad range of sensing technologies and their diverse applications by first reviewing the necessary physics, and then explaining the sensors’ intrinsic mechanisms, distinctive designs, materials and manufacturing methods, associated noise types, signal conditioning circuitry, and practical applications. The text not only covers silicon and metallic sensors but also those made of modern and specialized materials such as ceramics, polymers, and organic substances. It provides cutting-edge information useful to students, researchers, scientists, and practicing professionals involved in the design and application of sensor-based products in fields such as biomedical engineering, mechatronics, robotics, aerospace, and beyond.
Book Synopsis Sensors for Mechatronics by : P. P. L. Regtien
Download or read book Sensors for Mechatronics written by P. P. L. Regtien and published by Elsevier. This book was released on 2012-01-17 with total page 323 pages. Available in PDF, EPUB and Kindle. Book excerpt: This title offers an overview of various sensors and sensor systems as required and applied in mechatronics. Emphasis lies on the physical background of the operating principles, illustrated with examples of commercially available sensors and of recent and future developments.
Book Synopsis Rolling Contacts by : T. A. Stolarski
Download or read book Rolling Contacts written by T. A. Stolarski and published by . This book was released on 2000 with total page 472 pages. Available in PDF, EPUB and Kindle. Book excerpt: Inspired by their many years of research collaboration, Stolarski (mechanical engineering, Brunel U., UK) and Tobe (Ashikaga Institute of Technology, Japan) have created this text with the aim of helping practicing designers, researchers, and postgraduate students (especially of engineering) to better understand, select, and design rolling contacts for mechanical devices and systems. The text presents the fundamentals of rolling friction, emphasizing the important engineering applications of rolling contacts. Applications described include rolling bearings, gears, road-tire and rail-wheel interactions, cam-tappet systems, and roll-forming of materials. Distributed by ASME. Annotation copyrighted by Book News, Inc., Portland, OR
Book Synopsis Thin Film Colour Sensors by : Daniel Puiu Poenar
Download or read book Thin Film Colour Sensors written by Daniel Puiu Poenar and published by . This book was released on 1996 with total page 260 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Functional Thin Films and Nanostructures for Sensors by : Anis Zribi
Download or read book Functional Thin Films and Nanostructures for Sensors written by Anis Zribi and published by Springer Science & Business Media. This book was released on 2009-04-05 with total page 224 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book discusses advances in functional thin films for sensors and novel concepts for future breakthroughs. The focus is on guidelines and design rules for sensor systems, interaction between functional thin films and other sensor subsystems, fundamentals behind the intrinsic functionality in sensing thin films and nanostructures, state-of-the-art technologies used to develop sensors today and concrete examples of sensor designs.
Book Synopsis Paper-based Anisotropic Magneto-resistive Thin Film Sensor for Educational Applications by : Meriem Akin
Download or read book Paper-based Anisotropic Magneto-resistive Thin Film Sensor for Educational Applications written by Meriem Akin and published by . This book was released on 2019 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Understanding Position Sensors by : David Nyce
Download or read book Understanding Position Sensors written by David Nyce and published by CRC Press. This book was released on 2023-06-27 with total page 432 pages. Available in PDF, EPUB and Kindle. Book excerpt: As the definitive resource on position sensing technology, Understanding Position Sensors encompasses all aspects necessary for a full understanding of the field, with topics of background, operational theory, design, and application. While grasping the theory of technologies used in the measurement of linear and angular/rotary position sensors, the reader will also learn about terminology, interfacing, testing, and other valuable concepts that are useful in the understanding of sensors in general. The first three chapters provide readers with the necessary background information on sensors. These chapters review the working definitions and conventions used in sensing technology; specification of position sensors and the effect on performance; and sensor output types, plus an extensive section covering communication protocols. The remaining chapters describe each separate sensor technology in detail. These include resistive sensors, cable extension transducers, capacitive sensors, inductive sensors, LVDT and RVDT sensors, distributed impedance sensors, Hall effect sensors, magnetoresistive sensors, magnetostrictive sensors, linear and rotary encoders, optical triangulation position sensors, and ultrasonic position sensors. Presents sensor specification, theory of operation, sensor design, and application criteria Reviews the background history of position sensors as well as the underlying engineering techniques Includes end-of-chapter exercises Understanding Position Sensors is written for electrical, mechanical, and material engineers, as well as for engineering students who are interested in understanding sensor technologies, and can be used as a textbook for an engineering course on sensor technology.
Book Synopsis Polymer Films in Sensor Applications by : Gabor Harsanyi
Download or read book Polymer Films in Sensor Applications written by Gabor Harsanyi and published by Routledge. This book was released on 2017-10-19 with total page 468 pages. Available in PDF, EPUB and Kindle. Book excerpt: Polymer films now play an essential and growing role in sensors. Recent advances in polymer science and film preparation have made polymer films useful, practical and economical in a wide range of sensor designs and applications. Further, the continuing miniaturization of microelectronics favors the use of polymer thin films in sensors. This new book is the first comprehensive presentation of this technology. It covers both scientific fundamentals and practical engineering aspects. Included is an extensive survey of all types of sensors and applications. The very detailed table of contents in the next pages provides full information on content. More than 200 schematics illustrate a wide variety of sensor structures and their function.
