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Author : Lawrence Robert Stevens
Publisher :
ISBN 13 :
Total Pages : 268 pages
Book Rating : 4.:/5 (438 download)
Download or read book Thin Film Deposition Chamber Automation written by Lawrence Robert Stevens and published by . This book was released on 2000 with total page 268 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Krishna Seshan
Publisher : William Andrew
ISBN 13 : 0128123125
Total Pages : 472 pages
Book Rating : 4.1/5 (281 download)
Download or read book Handbook of Thin Film Deposition written by Krishna Seshan and published by William Andrew. This book was released on 2018-02-23 with total page 472 pages. Available in PDF, EPUB and Kindle. Book excerpt: Handbook of Thin Film Deposition, Fourth Edition, is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, materials for memory applications and methods for thin film optical processes. The book is broken up into three sections: scaling, equipment and processing, and applications. In this newly revised edition, the handbook will also explore the limits of thin film applications, most notably as they relate to applications in manufacturing, materials, design and reliability. Offers a practical survey of thin film technologies aimed at engineers and managers involved in all stages of the process: design, fabrication, quality assurance, applications and the limitations faced by those processes Covers core processes and applications in the semiconductor industry and new developments within the photovoltaic and optical thin film industries Features a new chapter discussing Gates Dielectrics
Author : Werner Kern
Publisher : Elsevier
ISBN 13 : 0080524214
Total Pages : 881 pages
Book Rating : 4.0/5 (85 download)
Download or read book Thin Film Processes II written by Werner Kern and published by Elsevier. This book was released on 2012-12-02 with total page 881 pages. Available in PDF, EPUB and Kindle. Book excerpt: This sequel to the 1978 classic, Thin Film Processes, gives a clear, practical exposition of important thin film deposition and etching processes that have not yet been adequately reviewed. It discusses selected processes in tutorial overviews with implementation guide lines and an introduction to the literature. Though edited to stand alone, when taken together, Thin Film Processes II and its predecessor present a thorough grounding in modern thin film techniques. Provides an all-new sequel to the 1978 classic, Thin Film Processes Introduces new topics, and several key topics presented in the original volume are updated Emphasizes practical applications of major thin film deposition and etching processes Helps readers find the appropriate technology for a particular application
Author : Krishna Seshan
Publisher : William Andrew
ISBN 13 : 0815517785
Total Pages : 430 pages
Book Rating : 4.8/5 (155 download)
Download or read book Handbook of Thin Film Deposition Processes and Techniques written by Krishna Seshan and published by William Andrew. This book was released on 2001-02-01 with total page 430 pages. Available in PDF, EPUB and Kindle. Book excerpt: New second edition of the popular book on deposition (first edition by Klaus Schruegraf) for engineers, technicians, and plant personnel in the semiconductor and related industries. This book traces the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition techniques and the development of highly specialized equipment to enable this deposition. The book includes much cutting-edge material. Entirely new chapters on contamination and contamination control describe the basics and the issues—as feature sizes shrink to sub-micron dimensions, cleanliness and particle elimination has to keep pace. A new chapter on metrology explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of sub-micron dimensions. The book also covers PVD, laser and e-beam assisted deposition, MBE, and ion beam methods to bring together all the physical vapor deposition techniques. Two entirely new areas receive full treatment: chemical mechanical polishing which helps attain the flatness that is required by modern lithography methods, and new materials used for interconnect dielectric materials, specifically organic polyimide materials.
Author : Krishna Seshan
Publisher : CRC Press
ISBN 13 : 1482269686
Total Pages : 72 pages
Book Rating : 4.4/5 (822 download)
Download or read book Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon written by Krishna Seshan and published by CRC Press. This book was released on 2002-02-01 with total page 72 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Handbook of Thin Film Deposition Techniques: Principles, Methods, Equipment and Applications, Second Edition explores the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition tec
Author : Richard Cadena
Publisher : Taylor & Francis
ISBN 13 : 0240807030
Total Pages : 470 pages
Book Rating : 4.2/5 (48 download)
Download or read book Automated Lighting written by Richard Cadena and published by Taylor & Francis. This book was released on 2006 with total page 470 pages. Available in PDF, EPUB and Kindle. Book excerpt: "Automated Lighting-Technology, Applications, and Design" is a comprehensive text covering everything you will need to know as a working or aspiring lighting professional about automated lighting fixtures, systems, how they are used and design issues you will face. It is written in clear, easy-to-understand language but includes enough detailed information that the most experienced technician and engineer will appreciate and benefit from reading. Subjects covered include the history of automated lighting, DC and AC electricity, basic electronics, power supplies, digital electronics, electro-mechanical systems, optical systems (including dichroic filters, reflectors, lenses, and more), lamp technology, lighting effects (including color mixing, glass gobos, and more), data distribution systems, DMX, RDM, and ACN. State-of-the-art automated lighting fixtures in various applications including theatre, television, concert/touring, and permanent installations are discussed and special design issues are addressed. The text is amply illustrated with drawings and pictures. The newest technology in automated lighting--"digital" lighting or pixel-based automated lighting projection--is also covered in detail. This book is the antithesis of a reference manual or user manual. It is entertaining and educational with lots of graphic illustrations and easy-to-understand concepts. It's the most fun you can have without sitting behind a console.
Author : James Hart Gifford
Publisher :
ISBN 13 :
Total Pages : 87 pages
Book Rating : 4.:/5 (673 download)
Download or read book Optimization of the Automated Spray Layer-by-layer Technique for Thin Film Deposition written by James Hart Gifford and published by . This book was released on 2010 with total page 87 pages. Available in PDF, EPUB and Kindle. Book excerpt: The operational parameters of the automated Spray-LbL technique for thin film deposition have been investigated in order to-identify their effects on film thickness and roughness. We use the automated Spray-LbL system developed at MIT by the Hammond lab to build 25 bilayer films of poly (ally amine hydrochloride) (PAH) and poly (acrylic acid) (PAA). Each of the 10 operational parameters of this system are explored individually to isolate each parameter's effect on film thickness and roughness. The parameter effects are analyzed for apparent trends to determine the parameters best suited for adjusting film thickness and roughness. The optimal parameters for thickness adjustment are polyelectrolyte solution concentration, polyelectrolyte spray time, spraying distance, air pressure and polyelectrolyte charge density. These parameters are independent of the type of species used to construct the film, and thus the trends should apply to any species used to construct thin films. The effect of each of the 10 operational parameters is examined in detail. While researching the parameter effects, polyelectrolyte interdiffusion in the films was observed. This interdiffusion is investigated using both the conventional dipped LbL and Spray-LbL deposition techniques. Interdiffusion is shown to be dependent on 3 factors, the charge density of the polyelectrolytes, the molecular weight of the polyelectrolytes, and the contact time between the polyelectrolyte solutions and the surface of the film. Interdiffusion is observed when the PAH is partially charged, the polyelectrolytes chains have a low molecular weight, and the contact time is sufficiently long enough to allow for interdiffusion. The significantly reduced contact time during the automated Spray-LbL process not only speeds up the film deposition time, but also significantly hinders the interdiffusion of PAH resulting in much thinner films than what is possible from dipping. Finally, the uniformity of the films produced using the automated Spray-LbL system is investigated. Films deposited on substrates greater than 1 in diameter area exhibit more than 20% variance in thickness. Adjustments were made to the setup of the system in an effort to expand this area of film thickness uniformity. However, it is determined that the design of this automated Spray-LbL system limits the film uniformity to an area of 1 in diameter.
Author : Kiyotaka Wasa
Publisher : Springer Science & Business Media
ISBN 13 : 9783540211181
Total Pages : 538 pages
Book Rating : 4.2/5 (111 download)
Download or read book Thin film materials technology written by Kiyotaka Wasa and published by Springer Science & Business Media. This book was released on 2004-09-24 with total page 538 pages. Available in PDF, EPUB and Kindle. Book excerpt: This title contains rich historical coverage of the basics and new experimental and technological information about ceramic thin film and large-area functional coating. Included are principles and examples of making thin-film materials and devices.
Author : NAVAL AVIONICS FACILITY INDIANAPOLIS IND.
Publisher :
ISBN 13 :
Total Pages : 285 pages
Book Rating : 4.:/5 (227 download)
Download or read book The Nafi Thin Film In-line Vacuum Deposition Process and Technology written by NAVAL AVIONICS FACILITY INDIANAPOLIS IND. and published by . This book was released on 1965 with total page 285 pages. Available in PDF, EPUB and Kindle. Book excerpt: The report contains information about the materials, equipment, and processes used in a pilot line production facility designed for the fabrication of thin film microelectronic circuits. The process selected for study utilizes a concept in which passive thin film circuit elements are vaporized in a vacuum chamber and deposited on a Pyrex substrate using a through-mask technique. This process is a semi-automatic operation with a potential of becoming fully automated. The equipment consists of four in-line vacuum deposition chambers, and associated pumping systems. Controls and monitoring devices are an integral part of the semi-automatic model. Materials used for circuit element fabrication are silicon monoxide, chromium, and copper, which are evaporated singly or in combinations. Significant improvements have been made toward the goal of continuous, in-line, semi-automatic fabrication of quality-controlled thin film circuits. A limiting factor in through-mask depositions had been the high cost of mask fabrication. The use of graphite masks has made the through-mask method economically feasible for the size and density of circuits being produced at NAFI.
Author : Joy George
Publisher : CRC Press
ISBN 13 : 9780849306518
Total Pages : 394 pages
Book Rating : 4.3/5 (65 download)
Download or read book Preparation of Thin Films written by Joy George and published by CRC Press. This book was released on 1992-02-26 with total page 394 pages. Available in PDF, EPUB and Kindle. Book excerpt: "Preparation of Thin Films provides a comprehensive account of various deposition techniques for the preparation of thin films of elements, compounds, alloys, ceramics, and semiconductors - emphasizing inorganic compound thin films and discussing high vacuum and chemical deposition methods used for preparing high temperature superconducting oxide thin films. "
Author : Peter M. Martin
Publisher : William Andrew
ISBN 13 : 0815520328
Total Pages : 932 pages
Book Rating : 4.8/5 (155 download)
Download or read book Handbook of Deposition Technologies for Films and Coatings written by Peter M. Martin and published by William Andrew. This book was released on 2009-12-01 with total page 932 pages. Available in PDF, EPUB and Kindle. Book excerpt: This 3e, edited by Peter M. Martin, PNNL 2005 Inventor of the Year, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. This long-awaited revision includes updated and new chapters on atomic layer deposition, cathodic arc deposition, sculpted thin films, polymer thin films and emerging technologies. Extensive material was added throughout the book, especially in the areas concerned with plasma-assisted vapor deposition processes and metallurgical coating applications.
Author : Aicha Elshabini
Publisher : McGraw Hill Professional
ISBN 13 : 9780070190252
Total Pages : 680 pages
Book Rating : 4.1/5 (92 download)
Download or read book Thin Film Technology Handbook written by Aicha Elshabini and published by McGraw Hill Professional. This book was released on 1998 with total page 680 pages. Available in PDF, EPUB and Kindle. Book excerpt: The most comprehensive source available on the preparation, characterization, and emerging applications of thin film. This book features extensive new advances applied in multichip modules (MCMs), and covers the basic principles and applications of thin film deposition techniques for practical use. It provides and develops design guidelines to realize multilayer structures in microcircuits, thus addressing a critical and rapidly growing area.
Author : Rointan Framroze Bunshah
Publisher : William Andrew
ISBN 13 :
Total Pages : 620 pages
Book Rating : 4.3/5 (91 download)
Download or read book Deposition Technologies for Films and Coatings written by Rointan Framroze Bunshah and published by William Andrew. This book was released on 1982 with total page 620 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Fredrick Madaraka Mwema
Publisher : CRC Press
ISBN 13 : 1000597318
Total Pages : 309 pages
Book Rating : 4.0/5 (5 download)
Download or read book Thin Film Coatings written by Fredrick Madaraka Mwema and published by CRC Press. This book was released on 2022-06-19 with total page 309 pages. Available in PDF, EPUB and Kindle. Book excerpt: Thin Film Coatings: Properties, Deposition, and Applications discusses the holistic subject of conventional and emerging thin film technologies without bias to a specific technology based on the existing literature. It covers properties and delves into the various methods of thin film deposition, including the most recent techniques and a direction for future developments. It also discusses the cutting-edge applications of thin film coatings such as self-healing and smart coatings, biomedical, hybrid, and scalable thin films. Finally, the concept of Industry 4.0 in thin film coating technology is examined. This book: Explores a wide range and is not specific to material and method of deposition Demonstrates the application of thin film coatings in nearly all sectors, such as energy and anti-microbial applications Details the preparation and properties of hybrid and scalable (ultra) thin materials for advanced applications Provides detailed bibliometric analyses on applications of thin film coatings Discusses Industry 4.0 and 3D printing in thin film technology With its broad coverage, this comprehensive reference will appeal to a wide audience of materials scientists and engineers and others studying and developing advanced thin film technologies.
Author : Jaydeep Sarkar
Publisher : William Andrew
ISBN 13 : 0815519877
Total Pages : 614 pages
Book Rating : 4.8/5 (155 download)
Download or read book Sputtering Materials for VLSI and Thin Film Devices written by Jaydeep Sarkar and published by William Andrew. This book was released on 2010-12-13 with total page 614 pages. Available in PDF, EPUB and Kindle. Book excerpt: An important resource for students, engineers and researchers working in the area of thin film deposition using physical vapor deposition (e.g. sputtering) for semiconductor, liquid crystal displays, high density recording media and photovoltaic device (e.g. thin film solar cell) manufacturing. This book also reviews microelectronics industry topics such as history of inventions and technology trends, recent developments in sputtering technologies, manufacturing steps that require sputtering of thin films, the properties of thin films and the role of sputtering target performance on overall productivity of various processes. Two unique chapters of this book deal with productivity and troubleshooting issues. The content of the book has been divided into two sections: (a) the first section (Chapter 1 to Chapter 3) has been prepared for the readers from a range of disciplines (e.g. electrical, chemical, chemistry, physics) trying to get an insight into use of sputtered films in various devices (e.g. semiconductor, display, photovoltaic, data storage), basic of sputtering and performance of sputtering target in relation to productivity, and (b) the second section (Chapter 4 to Chapter 8) has been prepared for readers who already have background knowledge of sputter deposition of thin films, materials science principles and interested in the details of sputtering target manufacturing methods, sputtering behavior and thin film properties specific to semiconductor, liquid crystal display, photovoltaic and magnetic data storage applications. In Chapters 5 to 8, a general structure has been used, i.e. a description of the applications of sputtered thin films, sputtering target manufacturing methods (including flow charts), sputtering behavior of targets (e.g. current - voltage relationship, deposition rate) and thin film properties (e.g. microstructure, stresses, electrical properties, in-film particles). While discussing these topics, attempts have been made to include examples from the actual commercial processes to highlight the increased complexity of the commercial processes with the growth of advanced technologies. In addition to personnel working in industry setting, university researchers with advanced knowledge of sputtering would also find discussion of such topics (e.g. attributes of target design, chamber design, target microstructure, sputter surface characteristics, various troubleshooting issues) useful. . Unique coverage of sputtering target manufacturing methods in the light of semiconductor, displays, data storage and photovoltaic industry requirements Practical information on technology trends, role of sputtering and major OEMs Discussion on properties of a wide variety of thin films which include silicides, conductors, diffusion barriers, transparent conducting oxides, magnetic films etc. Practical case-studies on target performance and troubleshooting Essential technological information for students, engineers and scientists working in the semiconductor, display, data storage and photovoltaic industry
Author : Shimon Y. Nof
Publisher : Springer Nature
ISBN 13 : 3030967298
Total Pages : 1533 pages
Book Rating : 4.0/5 (39 download)
Download or read book Springer Handbook of Automation written by Shimon Y. Nof and published by Springer Nature. This book was released on 2023-06-16 with total page 1533 pages. Available in PDF, EPUB and Kindle. Book excerpt: This handbook incorporates new developments in automation. It also presents a widespread and well-structured conglomeration of new emerging application areas, such as medical systems and health, transportation, security and maintenance, service, construction and retail as well as production or logistics. The handbook is not only an ideal resource for automation experts but also for people new to this expanding field.
Author : Rointan Framroze Bunshah
Publisher : Cambridge University Press
ISBN 13 : 9780815513377
Total Pages : 894 pages
Book Rating : 4.5/5 (133 download)
Download or read book Handbook of Deposition Technologies for Films and Coatings written by Rointan Framroze Bunshah and published by Cambridge University Press. This book was released on 1994 with total page 894 pages. Available in PDF, EPUB and Kindle. Book excerpt: This second edition, edited by the world-renowned Dr. Rointain Bunshah, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. Considerably more material was added in Plasma Assisted Vapor Deposition processes, as well as Metallurgical Coating Applications.
