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Thermoelectrical Effect In Sic For High Temperature Mems Sensors
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Book Synopsis Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors by : Toan Dinh
Download or read book Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors written by Toan Dinh and published by Springer. This book was released on 2018-10-05 with total page 122 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents the fundamentals of the thermoelectrical effect in silicon carbide (SiC), including the thermoresistive, thermoelectric, thermocapacitive and thermoelectronic effects. It summarizes the growth of SiC, its properties and fabrication processes for SiC devices and introduces the thermoelectrical sensing theories in different SiC morphologies and polytypes. Further, it reviews the recent advances in the characterization of the thermoelectrical effect in SiC at high temperatures. Discussing several desirable features of thermoelectrical SiC sensors and recent developments in these sensors, the book provides useful guidance on developing high sensitivity and linearity, fast-response SiC sensing devices based on thermoelectrical effects.
Book Synopsis Silicon Carbide High Temperature Thermoelectric Flow Sensor by : Man I. Lei
Download or read book Silicon Carbide High Temperature Thermoelectric Flow Sensor written by Man I. Lei and published by . This book was released on 2011 with total page 155 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Temperature Dependence of Conductivity and Mobility of −gb−s- and A-Sic for Temperature Sensors by : Nayef Muhammed Abu-Ageel
Download or read book Temperature Dependence of Conductivity and Mobility of −gb−s- and A-Sic for Temperature Sensors written by Nayef Muhammed Abu-Ageel and published by . This book was released on 1996 with total page 326 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Thermal Sensors by : Chandra Mohan Jha
Download or read book Thermal Sensors written by Chandra Mohan Jha and published by Springer. This book was released on 2015-04-15 with total page 139 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a comprehensive guide to both the fundamentals of thermal sensors and their advanced functions. Key topics include sensor materials, CMOS-compatible sensors, measurement capabilities, thermal management and manufacturing processes. The introductory chapter covers the basic principles of thermal sensors from the essentials of heat transfer to smart wireless sensors. Later chapters illustrate the wide range of thermal sensor uses, from microprocessor thermal sensing to energy converter applications. Modeling and simulation techniques are used to explain the future direction of the field. Designed for researchers and practitioners working with wireless sensors and thermal management, Thermal Sensors: Principles and Applications for Semiconductor Industries is a valuable reference to the benefits and challenges these sensors offer. Advanced-level students studying mechanical or electrical engineering and networks will also find the content useful.
Book Synopsis Radiation Effect on SiC Piezoresistive Pressure Sensor by : Peilai Zhang
Download or read book Radiation Effect on SiC Piezoresistive Pressure Sensor written by Peilai Zhang and published by . This book was released on 2008 with total page 236 pages. Available in PDF, EPUB and Kindle. Book excerpt: Abstract: SiC piezoresistive pressure sensors were developed at NASA Glenn Research Center for high temperature applications. They have demonstrated good sensing capabilities up to 600°C. The wide band gap of SiC, its high thermal conductivity and high radiation resistance, compared to other conventional semiconductor materials, makes piezoresistive pressure sensors suitable for high radiation environments. In this thesis, the performance of the SiC piezoresistive pressure has been evaluated in gamma and mixed gamma/neutron irradiation fields.
Book Synopsis Thermal Sensors, by : Gerard C. M. Meijer
Download or read book Thermal Sensors, written by Gerard C. M. Meijer and published by CRC Press. This book was released on 1994-10-27 with total page 328 pages. Available in PDF, EPUB and Kindle. Book excerpt: Thermal Sensors is intended as a comprehensive and accessible reference for designers and users of thermal sensors. Many different physical quantities can be converted easily and accurately into temperature differences using thermal techniques. These temperature differences can be detected with temperature and temperature-difference sensors. In a thermal sensor the thermal converter and the temperature sensor are combined in a single accurate device. This book gives an overview and deals with the design aspects of thermal and temperature sensors, with an emphasis on sensors based on silicon technology. The temperature sensors described are based on the use of various types of sensitive elements, such as platinum resistors, thermistors and special integrated circuits. The thermal sensors described include flow, conductivity, infrared, vacuum, humidity and calorimetric sensors, and ac-dc converters, thus providing a comprehensive overview of all thermal sensors, with practical examples of each type.
Book Synopsis High Temperature Materials and Mechanisms by : Yoseph Bar-Cohen
Download or read book High Temperature Materials and Mechanisms written by Yoseph Bar-Cohen and published by CRC Press. This book was released on 2014-03-03 with total page 586 pages. Available in PDF, EPUB and Kindle. Book excerpt: The use of high-temperature materials in current and future applications, including silicone materials for handling hot foods and metal alloys for developing high-speed aircraft and spacecraft systems, has generated a growing interest in high-temperature technologies. High Temperature Materials and Mechanisms explores a broad range of issues related to high-temperature materials and mechanisms that operate in harsh conditions. While some applications involve the use of materials at high temperatures, others require materials processed at high temperatures for use at room temperature. High-temperature materials must also be resistant to related causes of damage, such as oxidation and corrosion, which are accelerated with increased temperatures. This book examines high-temperature materials and mechanisms from many angles. It covers the topics of processes, materials characterization methods, and the nondestructive evaluation and health monitoring of high-temperature materials and structures. It describes the application of high temperature materials to actuators and sensors, sensor design challenges, as well as various high temperature materials and mechanisms applications and challenges. Utilizing the knowledge of experts in the field, the book considers the multidisciplinary nature of high temperature materials and mechanisms, and covers technology related to several areas including energy, space, aerospace, electronics, and metallurgy. Supplies extensive references at the end of each chapter to enhance further study Addresses related science and engineering disciplines Includes information on drills, actuators, sensors and more A comprehensive resource of information consolidated in one book, this text greatly benefits students in materials science, aerospace and mechanical engineering, and physics. It is also an ideal resource for professionals in the industry.
Book Synopsis From MEMS to Bio-MEMS and Bio-NEMS by : Marc J. Madou
Download or read book From MEMS to Bio-MEMS and Bio-NEMS written by Marc J. Madou and published by CRC Press. This book was released on 2011-06-13 with total page 652 pages. Available in PDF, EPUB and Kindle. Book excerpt: From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. He also discusses scaling laws in MEMS and NEMS, actuators, fluidics, and power and brains in miniature devices. He concludes with coverage of various MEMS and NEMS applications. Fully illustrated in color, the text contains end-of-chapter problems, worked examples, extensive references for further reading, and an extensive glossary of terms. Details the Nanotechnology, Biology, and Manufacturing Techniques Applicable to Bionanotechnology Topics include: Nonlithography manufacturing techniques with lithography-based methods Nature as an engineering guide and contrasts top-down and bottom-up approaches Packaging, assembly, and self-assembly from ICs to DNA and biological cells Selected new MEMS and NEMS processes and materials, metrology techniques, and modeling Scaling laws, actuators, power generation, and the implementation of brains in miniaturizes devices Different strategies for making micromachines smarter The transition out of the laboratory and into the marketplace The third volume in Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set, the book discusses top-down and bottom-up manufacturing methods and explains how to use nature as a guide. It provides a better understanding of how to match different manufacturing options with a given application that students can use to identify additional killer MEMS and NEMS applications. Other volumes in the set include: Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology Manufacturing Techniques for Microfabrication and Nanotechnology
Download or read book MEMS written by Mohamed Gad-el-Hak and published by CRC Press. This book was released on 2005-11-29 with total page 576 pages. Available in PDF, EPUB and Kindle. Book excerpt: As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection
Book Synopsis Ultra-High Temperature Sensors Based on Optical Property by :
Download or read book Ultra-High Temperature Sensors Based on Optical Property written by and published by . This book was released on 2008 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: In this program, Nuonics, Inc. has studied the fundamentals of a new Silicon Carbide (SiC) materials-based optical sensor technology suited for extreme environments of coal-fired engines in power production. The program explored how SiC could be used for sensing temperature, pressure, and potential gas species in a gas turbine environment. The program successfully demonstrated the optical designs, signal processing and experimental data for enabling both temperature and pressure sensing using SiC materials. The program via its sub-contractors also explored gas species sensing using SiC, in this case, no clear commercially deployable method was proven. Extensive temperature and pressure measurement data using the proposed SiC sensors was acquired to 1000 deg-C and 40 atms, respectively. Importantly, a first time packaged all-SiC probe design was successfully operated in a Siemens industrial turbine rig facility with the probe surviving the harsh chemical, pressure, and temperature environment during 28 days of test operations. The probe also survived a 1600 deg-C thermal shock test using an industrial flame.
Book Synopsis SiC Thin Films on Insulating Substrates for Robust Microelectromechanical System (MEMS) Applications by :
Download or read book SiC Thin Films on Insulating Substrates for Robust Microelectromechanical System (MEMS) Applications written by and published by . This book was released on 2003 with total page 170 pages. Available in PDF, EPUB and Kindle. Book excerpt: An increasing demand for robust MEMS devices, such as micro-sensors, that can operate at temperatures well above 300 deg C and often in severe environments has stimulated the search for alternatives to Si. [1] The research in direct formation of SiC thin-films on insulating substrates (SiCOI) has found a very promising technology for producing SiC device structures and providing an excellent alternative material solution for high temperature applications. MEMS applications require that large area of uniform SiC films is formed on insulating substrates or sacrificial layers [2], [3] such as Si3N4, SiO2, polycrystalline Si (poly-Si), glass, quartz and sapphire substrates. The growth of highly uniform SiC films with a highly stable and impermeable thin-film structure as well as a smooth interface of SiC-substrate is the essential step in producing a MEMS device with the required long-term stability. The major portion of this study was devoted to optimize the SiC growth conditions for different device applications.
Book Synopsis MODELING & CHARACTERIZATION OF by : Zhaohui Wu
Download or read book MODELING & CHARACTERIZATION OF written by Zhaohui Wu and published by Open Dissertation Press. This book was released on 2017-01-27 with total page 158 pages. Available in PDF, EPUB and Kindle. Book excerpt: This dissertation, "Modeling and Characterization of High-temperature Silicon-based Thermal Sensors" by Zhaohui, Wu, 吳朝暉, was obtained from The University of Hong Kong (Pokfulam, Hong Kong) and is being sold pursuant to Creative Commons: Attribution 3.0 Hong Kong License. The content of this dissertation has not been altered in any way. We have altered the formatting in order to facilitate the ease of printing and reading of the dissertation. All rights not granted by the above license are retained by the author. Abstract: Abstract of thesis entitled MODELING AND CHARACTERIZATION OF HIGH-TEMPERATURE SILICON-BASED THERMAL SENSORS submitted by Zhaohui Wu for the degree of Doctor of Philosophy at the University of Hong Kong in December 2004 Owing to the minority-carrier exclusion effect, the maximum working temperature T of silicon-based thermal sensors can be raised to 600 C. In this max research, models based on this effect are developed to explain the operating principle of high-temperature silicon-based thermal sensors. Substrates including bulk Si, thick-film silicon-on-insulator (SOI), thin-film SOI, solid-phase crystallization (SPC) polysilicon-on-insulator (POI) and metal-induced lateral-crystallization (MILC) POI are considered. One-dimensional and two-dimensional models are also proposed for rectangular and circular sensors respectively. The theory of minority-carrier exclusion effect is first introduced and investigated by a semiconductor-device simulator. Study shows that this effect can increase the T of the sensors by removing thermally generated charge carriers. In max order to obtain a higher T, a higher current density is needed to provide a stronger max i exclusion effect. This can be achieved by either increasing the operating current or reducing the silicon-film thickness of the sensor. A one-dimensional model is next developed to include the minority-carrier exclusion effect for the rectangular thermal sensors built on bulk Si, thick-film SOI and thin-film SOI, while a two-dimensional model is proposed for the circular sensors. Approximate carrier-mobility models are used to simplify the calculation of the resistance vs temperature characteristics of the sensors, and a two-step integration method is adopted to improve the accuracy of the model. The effects of minority-carrier lifetime and self-heating on the models are also considered. One-dimensional and two-dimensional models for thermal sensors built on SPC and MILC polysilicon films are next developed, based on the grain-boundary trapping theory. Based on these models, the effects of film doping concentration and grain size on the minority-carrier exclusion and electrical conduction of the thermal sensors are discussed. Finally, experiments are performed and compared with the models. Results show that the measured data qualitatively agree with the modeling results. In conclusion, the models developed in this research can be used to explain the operating principles of different high-temperature silicon-based thermal sensors, and hence guide the design of their structures. An abstract of exactly 326 words ii DOI: 10.5353/th_b3105765 Subjects: Silicon diodes - Design and construction
Book Synopsis SiC Device Technology for High Temperature Sensor and Electronics Application by : Joseph S. Shor
Download or read book SiC Device Technology for High Temperature Sensor and Electronics Application written by Joseph S. Shor and published by . This book was released on 1992 with total page 288 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book MEMS/NEMS Sensors written by Goutam Koley and published by MDPI. This book was released on 2019-11-20 with total page 242 pages. Available in PDF, EPUB and Kindle. Book excerpt: Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter changes, such as temperature, mass or stress, caused by changes in desired measurands, to electrical signals that can be further processed. Some common examples of NEMS/MEMS sensors include pressure sensors, accelerometers, magnetic field sensors, microphones, radiation sensors, and particulate matter sensors.
Book Synopsis Physics of Semiconductor Devices by : Simon M. Sze
Download or read book Physics of Semiconductor Devices written by Simon M. Sze and published by John Wiley & Sons. This book was released on 2021-03-19 with total page 944 pages. Available in PDF, EPUB and Kindle. Book excerpt: The new edition of the most detailed and comprehensive single-volume reference on major semiconductor devices The Fourth Edition of Physics of Semiconductor Devices remains the standard reference work on the fundamental physics and operational characteristics of all major bipolar, unipolar, special microwave, and optoelectronic devices. This fully updated and expanded edition includes approximately 1,000 references to original research papers and review articles, more than 650 high-quality technical illustrations, and over two dozen tables of material parameters. Divided into five parts, the text first provides a summary of semiconductor properties, covering energy band, carrier concentration, and transport properties. The second part surveys the basic building blocks of semiconductor devices, including p-n junctions, metal-semiconductor contacts, and metal-insulator-semiconductor (MIS) capacitors. Part III examines bipolar transistors, MOSFETs (MOS field-effect transistors), and other field-effect transistors such as JFETs (junction field-effect-transistors) and MESFETs (metal-semiconductor field-effect transistors). Part IV focuses on negative-resistance and power devices. The book concludes with coverage of photonic devices and sensors, including light-emitting diodes (LEDs), solar cells, and various photodetectors and semiconductor sensors. This classic volume, the standard textbook and reference in the field of semiconductor devices: Provides the practical foundation necessary for understanding the devices currently in use and evaluating the performance and limitations of future devices Offers completely updated and revised information that reflects advances in device concepts, performance, and application Features discussions of topics of contemporary interest, such as applications of photonic devices that convert optical energy to electric energy Includes numerous problem sets, real-world examples, tables, figures, and illustrations; several useful appendices; and a detailed solutions manual for Instructor's only Explores new work on leading-edge technologies such as MODFETs, resonant-tunneling diodes, quantum-cascade lasers, single-electron transistors, real-space-transfer devices, and MOS-controlled thyristors Physics of Semiconductor Devices, Fourth Edition is an indispensable resource for design engineers, research scientists, industrial and electronics engineering managers, and graduate students in the field.
Book Synopsis CVD Diamond for Electronic Devices and Sensors by : Ricardo S. Sussmann
Download or read book CVD Diamond for Electronic Devices and Sensors written by Ricardo S. Sussmann and published by John Wiley & Sons. This book was released on 2009-01-09 with total page 596 pages. Available in PDF, EPUB and Kindle. Book excerpt: Synthetic diamond is diamond produced by using chemical or physical processes. Like naturally occurring diamond it is composed of a three-dimensional carbon crystal. Due to its extreme physical properties, synthetic diamond is used in many industrial applications, such as drill bits and scratch-proof coatings, and has the potential to be used in many new application areas A brand new title from the respected Wiley Materials for Electronic and Optoelectronic Applications series, this title is the most up-to-date resource for diamond specialists. Beginning with an introduction to the properties of diamond, defects, impurities and the growth of CVD diamond with its imminent commercial impact, the remainder of the book comprises six sections: introduction, radiation sensors, active electronic devices, biosensors, MEMs and electrochemistry. Subsequent chapters cover the diverse areas in which diamond applications are having an impact including electronics, sensors and actuators and medicine.
Book Synopsis Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set by : Marc J. Madou
Download or read book Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set written by Marc J. Madou and published by CRC Press. This book was released on 2018-12-14 with total page 1992 pages. Available in PDF, EPUB and Kindle. Book excerpt: Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.
