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Synchrotron Radiation And Precision Mirror Metrology With A Long Trace Profiler
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Book Synopsis Synchrotron Radiation and Precision Mirror Metrology with a Long Trace Profiler by :
Download or read book Synchrotron Radiation and Precision Mirror Metrology with a Long Trace Profiler written by and published by . This book was released on 1997 with total page 22 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Long Trace Profiler (LTP) is in use at several synchrotron radiation (SR) laboratories throughout the world and by a number of manufacturers who specialize in making grazing incidence mirrors for SR customers. Recent improvements in the design and operation of the LTP system have reduced the slope profile error bar to the level of 0.3 microradians RMS over measurement lengths of 0.5 meter. This corresponds to a height error bar on the order of 20 nanometers. This level of performance allows one to measure with confidence the shape of large cylinders and spheres that have kilometer radii of curvature in the axial direction. The LTP is versatile enough to make measurements of a mirror in the face up, sideways, and face down configurations. The authors will illustrate the versatility of the current version of the instrument, the LTP II, and present results from two new versions of the instrument: the in-situ LTP (ISLTP) and the Vertical Scan LTP (VSLTP). Both of them are based on the penta-prism LTP (ppLTP) principle with a stationary optical head and moving penta-prism. The ISLTP is designed to measure the distortion of high heat load mirrors during actual operation in SR beam lines. The VSLTP is designed to measure the complete 3-dimensional shape of x-ray telescope cylinder mirrors and mandrels in a vertical configuration. Scans are done both in the axial direction and in the azimuthal direction.
Book Synopsis 3-D Surface Profile Measurements of Large X-ray Synchrotron Radiation Mirrors Using Stitching Interferometry by :
Download or read book 3-D Surface Profile Measurements of Large X-ray Synchrotron Radiation Mirrors Using Stitching Interferometry written by and published by . This book was released on 2002 with total page 5 pages. Available in PDF, EPUB and Kindle. Book excerpt: Stitching interferometry, using small-aperture, high-resolution, phase-measuring interferometry, has been proposed for quite some time now as a metrology technique to obtain 3-dimensional profiles of surfaces of oversized optical components and substrates. The aim of this work is to apply this method to the specific case of long grazing-incidence x-ray mirrors, such as those used in beamlines at synchrotron radiation facilities around the world. Both fabrication and characterization of these mirrors would greatly benefit from this technique because it offers the potential for providing measurements with accuracy and resolution better than those obtained using existing noncontact laser profilers, such as the long trace profiler (LTP). Measurement data can be used as feedback for computer-controlled fabrication processes to correct for possible topography errors. The data can also be used for simulating and predicting mirror performance under realistic conditions. A semiautomated stitching system was built and tested at the X-ray Optics Metrology Laboratory of the Advanced Photon Source at Argonne National Laboratory. The initial objective was to achieve a measurement sensitivity on the order of 1 [mu]rad rms. Preliminary tests on a 1 m-long x-ray mirror showed system repeatability of less than 0.6 [mu]rad rms. This value is comparable to that of a conventional LTP. The measurement accuracy was mostly affected by environmental perturbations and system calibration effects. With a fully automated and improved system (to be built in the near future), we expect to achieve measurement sensitivity on the order of 0.0 [mu]rad rms or better. In this paper, after a brief review of basic principles and general technical difficulties and challenges of the stitching technique, a detailed description of the measurement setup is given and preliminary results obtained with it are analyzed and discussed.
Author :Society of Photo-optical Instrumentation Engineers Publisher :SPIE-International Society for Optical Engineering ISBN 13 : Total Pages :282 pages Book Rating :4.3/5 (91 download)
Book Synopsis Materials, Manufacturing, and Measurement for Synchrotron Radiation Mirrors by : Society of Photo-optical Instrumentation Engineers
Download or read book Materials, Manufacturing, and Measurement for Synchrotron Radiation Mirrors written by Society of Photo-optical Instrumentation Engineers and published by SPIE-International Society for Optical Engineering. This book was released on 1997 with total page 282 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Modern Metrology Concerns by : Luigi Cocco
Download or read book Modern Metrology Concerns written by Luigi Cocco and published by BoD – Books on Demand. This book was released on 2012-05-16 with total page 474 pages. Available in PDF, EPUB and Kindle. Book excerpt: "What are the recent developments in the field of Metrology?" International leading experts answer this question providing both state of the art presentation and a road map to the future of measurement science. The book is organized in six sections according to the areas of expertise, namely: Introduction; Length, Distance and Surface; Voltage, Current and Frequency; Optics; Time and Relativity; Biology and Medicine. Theoretical basis and applications are explained in accurate and comprehensive manner, providing a valuable reference to researchers and professionals.
Book Synopsis Advances in Metrology for X-ray and EUV Optics by :
Download or read book Advances in Metrology for X-ray and EUV Optics written by and published by . This book was released on 2005 with total page 192 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis High-precision EUV and X-ray Optics for Advanced Photon Source Facilities by : Qiushi Huang
Download or read book High-precision EUV and X-ray Optics for Advanced Photon Source Facilities written by Qiushi Huang and published by Frontiers Media SA. This book was released on 2023-02-02 with total page 95 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis NANOMETER PRECISION IN LARGE SURFACE PROFILOMETRY. by :
Download or read book NANOMETER PRECISION IN LARGE SURFACE PROFILOMETRY. written by and published by . This book was released on 1999 with total page 10 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Long Trace Profiler (LTP) is in use at many synchrotron radiation (SR) laboratories throughout the world and by a number of manufacturers who specialize in fabricating grazing incidence mirrors for SR and x-ray telescope applications. Recent improvements in the design and operation of the LTP system have reduced the statistical error in slope profile measurement to the 1 standard deviation level of 0.3 microradian for 0.5 meter long mirrors. This corresponds to a height error on the order of 10-20 nanometers. This level of performance allows one to measure with confidence the absolute shape of large cylindrical aspheres and spheres that have kilometer radii of curvature in the axial direction. The LTP is versatile enough to make measurements of a mirror in the face up, sideways, and face down configurations. We will illustrate the versatility of the current version of the instrument, the LTP II, and present results from two new versions of the instrument: the in situ LTP (ISLTP) and the Vertical Scan LTP (VSLTP). Both of them are based on the penta prism LTP (ppLTP) principle that utilizes a stationary optical head and moving penta prism. The ISLTP is designed to measure the distortion of high heat load mirrors during actual operation in SR beam lines. The VSLTP is designed to measure the complete 3-dimensional shape of x-ray telescope cylinder mirrors and mandrels in a vertical configuration. Scans are done both in the axial direction and in the azimuthal direction.
Book Synopsis Development of Metrology Instruments for Grazing Incidence Mirrors by :
Download or read book Development of Metrology Instruments for Grazing Incidence Mirrors written by and published by . This book was released on 1989 with total page 21 pages. Available in PDF, EPUB and Kindle. Book excerpt: The effective utilization of synchrotron radiation (SR) from high-brightness sources requires the use of optical components with very smooth surfaces and extremely precise shapes. Most manufacturers are not capable of measuring the figure and finish quality of the aspheric optics required for use in grazing incidence beam lines. Over the past several years we have developed measurement techniques and metrology instrumentation that have allowed us to measure the surface profile and roughness of large cylinder optics, up to one meter in length. Based on our measurements and feedback, manufacturers have been able to advance the state-of-the-art in mirror fabrication and are now able to produce acceptable components. Our analysis techniques enable designers to write meaningful specifications and predict the performance of real surfaces in their particular beamline configurations. Commercial instruments are now available for measuring surface microroughness with spatial periods smaller than about one millimeter. No commercial instruments are available for measuring the surface figure on cylindrical aspheres over long spatial periods, from one millimeter up to one meter. For that reason we developed a Long Trace Profiler (LTP) that measures surface profile over the long period range in a non-contact manner to extremely high accuracy. Examples of measured surfaces and data analysis techniques will be discussed, and limitations on the quality of optical surfaces related to intrinsic material properties will also be discussed. 15 refs., 14 figs., 2 tabs.
Download or read book Metrology written by Bruce Truax and published by . This book was released on 1987 with total page 140 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Optical Design and Testing written by and published by . This book was released on 2002 with total page 896 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Modern Developments in X-Ray and Neutron Optics by : Alexei Erko
Download or read book Modern Developments in X-Ray and Neutron Optics written by Alexei Erko and published by Springer. This book was released on 2008-04-01 with total page 541 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume describes modern developments in reflective, refractive and diffractive optics for short wavelength radiation. It also covers recent theoretical approaches to modelling and ray-tracing the x-ray and neutron optical systems. It is based on the joint research activities of specialists in x-ray and neutron optics, working together under the framework of the European Programme for Cooperation in Science and Technology (COST, Action P7) in the period 2002-2006.
Book Synopsis A Novel Non-contact Profiler Design for Measuring Synchrotron Radiation Mirrors by :
Download or read book A Novel Non-contact Profiler Design for Measuring Synchrotron Radiation Mirrors written by and published by . This book was released on 1990 with total page 8 pages. Available in PDF, EPUB and Kindle. Book excerpt: A novel optical profiler is described in this paper for measurement of surface profiles of synchrotron radiation (SR) mirrors. The measurement is based on a combination of an optical heterodyne technique and a precise phase measurement procedure without a reference surface. A Zeeman two-frequency He-Ne laser is employed as the light source. The common-path optical system, which uses a birefringent lens as the beam splitter, minimizes the effects of air turbulence, sample vibration and temperature variation. A special autofocus system allows the profiler to measure the roughness and shape of a sample surface. The optical system is mounted on a large linear air-bearing slide, and is capable of scanning over distances covering the spatial period range from several microns to nearly one meter with a high measurement accuracy. 9 refs., 5 figs.
Book Synopsis Error Reduction Techniques for Measuring Long Synchrotron Mirrors by :
Download or read book Error Reduction Techniques for Measuring Long Synchrotron Mirrors written by and published by . This book was released on 1998 with total page 14 pages. Available in PDF, EPUB and Kindle. Book excerpt: Many instruments and techniques are used for measuring long mirror surfaces. A Fizeau interferometer may be used to measure mirrors much longer than the interferometer aperture size by using grazing incidence at the mirror surface and analyzing the light reflected from a flat end mirror. Advantages of this technique are data acquisition speed and use of a common instrument. Disadvantages are reduced sampling interval, uncertainty of tangential position, and sagittal/tangential aspect ratio other than unity. Also, deep aspheric surfaces cannot be measured on a Fizeau interferometer without a specially made fringe nulling holographic plate. Other scanning instruments have been developed for measuring height, slope, or curvature profiles of the surface, but lack accuracy for very long scans required for X-ray synchrotron mirrors. The Long Trace Profiler (LTP) was developed specifically for long x-ray mirror measurement, and still outperforms other instruments, especially for aspheres. Thus, this paper focuses on error reduction techniques for the LTP.
Book Synopsis Metrological Challenges of Synchrotron Radiation Optics by :
Download or read book Metrological Challenges of Synchrotron Radiation Optics written by and published by . This book was released on 1999 with total page 7 pages. Available in PDF, EPUB and Kindle. Book excerpt: Modern third generation storage rings, require state-of-the-art grazing incidence x-ray optics, in order to monochromate the Synchrotrons Radiation (SR) source photons, and focus them into the experimental stations. Slope error tolerances in the order of 0.5 [mu]Rad RMS, and surface roughness well below 5 Å RMS, are frequently specified for mirrors and gratings exceeding 300 mm in length. Non-contact scanning instruments were developed, in order to characterize SR optical surfaces, of spherical and aspherical shape. Among these, the Long Trace Profiler (LTP), a double pencil slope measuring interferometer, has proved to be particularly reliable, and was adopted by several SR optics metrology laboratories. The ELETTRA soft x-rays and optics metrology laboratory, has operated an LTP since 1992. We review the basic operating principles of this instrument, and some major instrumental and environmental improvements, that were developed in order to detect slope errors lower than 1 [mu]Rad RMS on optical surfaces up to one metre in length. A comparison among measurements made on the same reference flat, by different interferometers (most of them were LTPs) can give some helpful indications in order to optimize the quality of measurement.
Download or read book Optical Engineering written by and published by . This book was released on 2004 with total page 984 pages. Available in PDF, EPUB and Kindle. Book excerpt: Publishes papers reporting on research and development in optical science and engineering and the practical applications of known optical science, engineering, and technology.
Book Synopsis Optical Manufacturing and Testing by :
Download or read book Optical Manufacturing and Testing written by and published by . This book was released on 1999 with total page 662 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Optics for High-brightness Synchrotron Radiation Beamlines by :
Download or read book Optics for High-brightness Synchrotron Radiation Beamlines written by and published by . This book was released on 1996 with total page 380 pages. Available in PDF, EPUB and Kindle. Book excerpt:
