Surface Mechanisms In Low Temperature Plasma Deposition Of Silicon

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Handbook of Physical Vapor Deposition (PVD) Processing

Author : Donald M. Mattox
Publisher : William Andrew
ISBN 13 : 0815520387
Total Pages : 793 pages
Book Rating : 4.8/5 (155 download)

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Book Synopsis Handbook of Physical Vapor Deposition (PVD) Processing by : Donald M. Mattox

Download or read book Handbook of Physical Vapor Deposition (PVD) Processing written by Donald M. Mattox and published by William Andrew. This book was released on 2010-04-29 with total page 793 pages. Available in PDF, EPUB and Kindle. Book excerpt: This updated version of the popular handbook further explains all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the new edition remains on the aspects of the process flow that are critical to economical deposition of films that can meet the required performance specifications, with additional information to support the original material. The book covers subjects seldom treated in the literature: substrate characterization, adhesion, cleaning and the processing. The book also covers the widely discussed subjects of vacuum technology and the fundamentals of individual deposition processes. However, the author uniquely relates these topics to the practical issues that arise in PVD processing, such as contamination control and film growth effects, which are also rarely discussed in the literature. In bringing these subjects together in one book, the reader can understand the interrelationship between various aspects of the film deposition processing and the resulting film properties. The author draws upon his long experience with developing PVD processes and troubleshooting the processes in the manufacturing environment, to provide useful hints for not only avoiding problems, but also for solving problems when they arise. He uses actual experiences, called "war stories", to emphasize certain points. Special formatting of the text allows a reader who is already knowledgeable in the subject to scan through a section and find discussions that are of particular interest. The author has tried to make the subject index as useful as possible so that the reader can rapidly go to sections of particular interest. Extensive references allow the reader to pursue subjects in greater detail if desired. The book is intended to be both an introduction for those who are new to the field and a valuable resource to those already in the field. The discussion of transferring technology between R&D and manufacturing provided in Appendix 1, will be of special interest to the manager or engineer responsible for moving a PVD product and process from R&D into production. Appendix 2 has an extensive listing of periodical publications and professional societies that relate to PVD processing. The extensive Glossary of Terms and Acronyms provided in Appendix 3 will be of particular use to students and to those not fully conversant with the terminology of PVD processing or with the English language. - Fully revised and updated to include the latest developments in PVD process technology - 'War stories' drawn from the author's extensive experience emphasize important points in development and manufacturing - Appendices include listings of periodicals and professional societies, terms and acronyms, and material on transferring technology between R&D and manufacturing

Surface Modification and Mechanisms

Author : George E. Totten
Publisher : CRC Press
ISBN 13 : 0824752686
Total Pages : 922 pages
Book Rating : 4.8/5 (247 download)

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Book Synopsis Surface Modification and Mechanisms by : George E. Totten

Download or read book Surface Modification and Mechanisms written by George E. Totten and published by CRC Press. This book was released on 2004-04-30 with total page 922 pages. Available in PDF, EPUB and Kindle. Book excerpt: Leading readers through an extensive compilation of surface modification reactions and processes for specific tribological results, this reference compiles detailed studies on various residual stresses, reaction processes and mechanisms, heat treatment methods, plasma-based techniques, and more, for a solid understanding of surface structural changes that occur during various engineering procedures. This unique book explores topics previously ignored in other texts on surface engineering and tribology, offers guidelines for the consideration and design of wear life and frictional performance, and sections on laser impingement and nanometer scale surface modification.

Cold Plasma

Author : MDPI
Publisher : MDPI
ISBN 13 : 3039366033
Total Pages : 184 pages
Book Rating : 4.0/5 (393 download)

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Book Synopsis Cold Plasma by : MDPI

Download or read book Cold Plasma written by MDPI and published by MDPI. This book was released on 2021-01-20 with total page 184 pages. Available in PDF, EPUB and Kindle. Book excerpt: Non-equilibrium plasma (or low-temperature plasma, LTP) offers a chemically rich medium without the need for high power and elevated temperatures. This unique characteristic has made LTP very useful for various industrial and biomedical applications where thermal effects are not desirable. In addition, the relative simplicity of the design of sources capable of generating non-equilibrium plasma at atmospheric pressure makes LTP a very attractive technology that can accomplish the same or better results than much more complex and expensive approaches. This book describes various low-temperature plasma sources and some of their environmental and biomedical applications. The plasma sources covered in this book include low-temperature plasma jets which are novel devices that can launch low-power, low-temperature plasma plumes in ambient air. These plasma plumes can accurately and reliably be aimed at a surface to be treated or at a biological target such as cells and tissues. The application of these plasma jets in medicine, including in cancer therapy, are thoroughly discussed in this book. The contents of this book will appeal to engineers, medical experts, academics, and students who work with plasma technology.

Scientific and Technical Aerospace Reports

Author :
Publisher :
ISBN 13 :
Total Pages : 892 pages
Book Rating : 4.X/5 (4 download)

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Book Synopsis Scientific and Technical Aerospace Reports by :

Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1964 with total page 892 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Proceedings of the Third International Symposium on Diamond Materials

Author : John P. Dismukes
Publisher : The Electrochemical Society
ISBN 13 : 9781566770606
Total Pages : 1126 pages
Book Rating : 4.7/5 (76 download)

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Book Synopsis Proceedings of the Third International Symposium on Diamond Materials by : John P. Dismukes

Download or read book Proceedings of the Third International Symposium on Diamond Materials written by John P. Dismukes and published by The Electrochemical Society. This book was released on 1993 with total page 1126 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Corrosion Mechanisms in Theory and Practice, Third Edition

Author : Philippe Marcus
Publisher : CRC Press
ISBN 13 : 1420094629
Total Pages : 944 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Corrosion Mechanisms in Theory and Practice, Third Edition by : Philippe Marcus

Download or read book Corrosion Mechanisms in Theory and Practice, Third Edition written by Philippe Marcus and published by CRC Press. This book was released on 2011-08-18 with total page 944 pages. Available in PDF, EPUB and Kindle. Book excerpt: Updated to include recent results from intensive worldwide research efforts in materials science, surface science, and corrosion science, Corrosion Mechanisms in Theory and Practice, Third Edition explores the latest advances in corrosion and protection mechanisms. It presents a detailed account of the chemical and electrochemical surface reactions that govern corrosion as well as the link between microscopic forces and macroscopic behavior. Revised and expanded, this edition includes four new chapters on corrosion fundamentals, the passivity of metals, high temperature corrosion, and the corrosion of aluminum alloys. The first half of the book covers basic aspects of corrosion, such as entry of hydrogen into metals, anodic dissolution, localized corrosion, stress corrosion cracking, and corrosion fatigue. Connecting the theoretical aspects of corrosion mechanisms to practical applications in industry, the second half of the text discusses corrosion inhibition, atmospheric corrosion, microbially induced corrosion, corrosion in nuclear systems, corrosion of microelectronic and magnetic data-storage devices, and organic coatings. With contributions from leading academic and industrial researchers, this bestselling book continues to provide a thorough understanding of corrosion mechanisms—helping you solve existing corrosion challenges and prevent future problems.

Handbook of Semiconductor Manufacturing Technology

Author : Yoshio Nishi
Publisher : CRC Press
ISBN 13 : 1420017667
Total Pages : 1720 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Handbook of Semiconductor Manufacturing Technology by : Yoshio Nishi

Download or read book Handbook of Semiconductor Manufacturing Technology written by Yoshio Nishi and published by CRC Press. This book was released on 2017-12-19 with total page 1720 pages. Available in PDF, EPUB and Kindle. Book excerpt: Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert Doering and Yoshio Nishi have again assembled a team of the world's leading specialists in every area of semiconductor manufacturing to provide the most reliable, authoritative, and industry-leading information available. Stay Current with the Latest Technologies In addition to updates to nearly every existing chapter, this edition features five entirely new contributions on... Silicon-on-insulator (SOI) materials and devices Supercritical CO2 in semiconductor cleaning Low-κ dielectrics Atomic-layer deposition Damascene copper electroplating Effects of terrestrial radiation on integrated circuits (ICs) Reflecting rapid progress in many areas, several chapters were heavily revised and updated, and in some cases, rewritten to reflect rapid advances in such areas as interconnect technologies, gate dielectrics, photomask fabrication, IC packaging, and 300 mm wafer fabrication. While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at hand.

Metallurgical Coatings and Thin Films 1990

Author : B.D. Sartwell
Publisher : Elsevier
ISBN 13 : 0444601104
Total Pages : 1129 pages
Book Rating : 4.4/5 (446 download)

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Book Synopsis Metallurgical Coatings and Thin Films 1990 by : B.D. Sartwell

Download or read book Metallurgical Coatings and Thin Films 1990 written by B.D. Sartwell and published by Elsevier. This book was released on 2012-12-02 with total page 1129 pages. Available in PDF, EPUB and Kindle. Book excerpt: Metallurgical Coatings and Thin Films 1990 presents the Proceedings of the 17th International Conference on Metallurgical Coatings and 8th International Conference on Thin Films, held in San Diego, California on April 2-6, 1990. It contains 219 papers covering a wide range of topics related to metallurgical coatings and thin films, including high temperature coatings, hard coatings, diamond films, tribology, and ion beam modification. Organized into 99 chapters, this volume begins with a discussion of a thermochemical model for diamond growth from the vapor phase and an experiment in large area diamond coating using a combustion flame torch in its traversing mode. It then explores the properties of diamond films, preparation of diamond-like carbon films using various ion-beam-assisted techniques, deposition of diamond-like films by laser ablation, and coating of cubic BN films on different substrates. The book examines surface processes and rate-determining steps in plasma-induced chemical vapor deposition, and addition of rare earths to improve scale adherence on heat-resisting alloys and coatings. The reader is introduced to high temperature wear and clearance control coatings, thermal barrier coatings, and corrosion resistant coatings. The book also discusses modification of coatings/surfaces to reduce friction; the mechanics of the tribology of thin films systems; mechanochemical interactions in the tribological behavior of materials; analysis and micromechanical testing of tribological coatings; surface modification using directed ion beams; and industrial equipment and processes. This book is a valuable resource for students and researchers interested in metallurgical coatings and thin films.

3D Microelectronic Packaging

Author : Yan Li
Publisher : Springer
ISBN 13 : 3319445863
Total Pages : 465 pages
Book Rating : 4.3/5 (194 download)

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Book Synopsis 3D Microelectronic Packaging by : Yan Li

Download or read book 3D Microelectronic Packaging written by Yan Li and published by Springer. This book was released on 2017-01-20 with total page 465 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume provides a comprehensive reference for graduate students and professionals in both academia and industry on the fundamentals, processing details, and applications of 3D microelectronic packaging, an industry trend for future microelectronic packages. Chapters written by experts cover the most recent research results and industry progress in the following areas: TSV, die processing, micro bumps, direct bonding, thermal compression bonding, advanced materials, heat dissipation, thermal management, thermal mechanical modeling, quality, reliability, fault isolation, and failure analysis of 3D microelectronic packages. Numerous images, tables, and didactic schematics are included throughout. This essential volume equips readers with an in-depth understanding of all aspects of 3D packaging, including packaging architecture, processing, thermal mechanical and moisture related reliability concerns, common failures, developing areas, and future challenges, providing insights into key areas for future research and development.

Silicon Nanomaterials Sourcebook

Author : Klaus D. Sattler
Publisher : CRC Press
ISBN 13 : 1498763871
Total Pages : 643 pages
Book Rating : 4.4/5 (987 download)

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Book Synopsis Silicon Nanomaterials Sourcebook by : Klaus D. Sattler

Download or read book Silicon Nanomaterials Sourcebook written by Klaus D. Sattler and published by CRC Press. This book was released on 2017-07-28 with total page 643 pages. Available in PDF, EPUB and Kindle. Book excerpt: This comprehensive tutorial guide to silicon nanomaterials spans from fundamental properties, growth mechanisms, and processing of nanosilicon to electronic device, energy conversion and storage, biomedical, and environmental applications. It also presents core knowledge with basic mathematical equations, tables, and graphs in order to provide the reader with the tools necessary to understand the latest technology developments. From low-dimensional structures, quantum dots, and nanowires to hybrid materials, arrays, networks, and biomedical applications, this Sourcebook is a complete resource for anyone working with this materials: Covers fundamental concepts, properties, methods, and practical applications. Focuses on one important type of silicon nanomaterial in every chapter. Discusses formation, properties, and applications for each material. Written in a tutorial style with basic equations and fundamentals included in an extended introduction. Highlights materials that show exceptional properties as well as strong prospects for future applications. Klaus D. Sattler is professor physics at the University of Hawaii, Honolulu, having earned his PhD at the Swiss Federal Institute of Technology (ETH) in Zurich. He was honored with the Walter Schottky Prize from the German Physical Society, and is the editor of the sister work also published by Taylor & Francis, Carbon Nanomaterials Sourcebook, as well as the acclaimed multi-volume Handbook of Nanophysics.

Application of Particle and Laser Beams in Materials Technology

Author : P. Misaelides
Publisher : Springer Science & Business Media
ISBN 13 : 9401584591
Total Pages : 668 pages
Book Rating : 4.4/5 (15 download)

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Book Synopsis Application of Particle and Laser Beams in Materials Technology by : P. Misaelides

Download or read book Application of Particle and Laser Beams in Materials Technology written by P. Misaelides and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 668 pages. Available in PDF, EPUB and Kindle. Book excerpt: The development of advanced materials with preselected properties is one of the main goals of materials research. Of especial interest are electronics, high-temperature and supemard materials for various applications, as well as alloys with improved wear, corrosion and mechanical resistance properties. The technical challenge connected with the production of these materials is not only associated with the development of new specialised preparation techniques but also with quality control. The energetic charged particle, electron and photon beams offer the possibility of modifying the properties of the near-surface regions of materials without seriously affecting their bulk, and provide unique analytical tools for testing their qUality. This volume includes most of the lectures and contributions delivered at the NATO-funded Advanced Study Institute "Application of Particle and Laser Beams in Materials Technology", which was held in Kallithea, Chalkidiki, in Northern Greece, from the 8th to the 21st of May, 1994 and attended by 73 participants from 21 countries. The aim of this ASI was to provide to the participants an overview of this rapidly expanding field. Fundamental aspects concerning the interactions and collisions on atomic, nuclear and solid state scale were presented in a didactic way, along with the application of a variety of techniques for the solution of problems ranging from the development of electronics materials to corrosion research and from archaeometry to environmental protection.

JJAP

Author :
Publisher :
ISBN 13 :
Total Pages : 710 pages
Book Rating : 4.X/5 (6 download)

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Book Synopsis JJAP by :

Download or read book JJAP written by and published by . This book was released on 1999 with total page 710 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Handbook of Surfaces and Interfaces of Materials, Five-Volume Set

Author : Hari Singh Nalwa
Publisher : Elsevier
ISBN 13 : 0080533825
Total Pages : 1915 pages
Book Rating : 4.0/5 (85 download)

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Book Synopsis Handbook of Surfaces and Interfaces of Materials, Five-Volume Set by : Hari Singh Nalwa

Download or read book Handbook of Surfaces and Interfaces of Materials, Five-Volume Set written by Hari Singh Nalwa and published by Elsevier. This book was released on 2001-10-26 with total page 1915 pages. Available in PDF, EPUB and Kindle. Book excerpt: This handbook brings together, under a single cover, all aspects of the chemistry, physics, and engineering of surfaces and interfaces of materials currently studied in academic and industrial research. It covers different experimental and theoretical aspects of surfaces and interfaces, their physical properties, and spectroscopic techniques that have been applied to a wide class of inorganic, organic, polymer, and biological materials. The diversified technological areas of surface science reflect the explosion of scientific information on surfaces and interfaces of materials and their spectroscopic characterization. The large volume of experimental data on chemistry, physics, and engineering aspects of materials surfaces and interfaces remains scattered in so many different periodicals, therefore this handbook compilation is needed.The information presented in this multivolume reference draws on two decades of pioneering research on the surfaces and interfaces of materials to offer a complete perspective on the topic. These five volumes-Surface and Interface Phenomena; Surface Characterization and Properties; Nanostructures, Micelles, and Colloids; Thin Films and Layers; Biointerfaces and Applications-provide multidisciplinary review chapters and summarize the current status of the field covering important scientific and technological developments made over past decades in surfaces and interfaces of materials and spectroscopic techniques with contributions from internationally recognized experts from all over the world. Fully cross-referenced, this book has clear, precise, and wide appeal as an essential reference source long due for the scientific community. The complete reference on the topic of surfaces and interfaces of materialsThe information presented in this multivolume reference draws on two decades of pioneering researchProvides multidisciplinary review chapters and summarizes the current status of the fieldCovers important scientific and technological developments made over past decades in surfaces and interfaces of materials and spectroscopic techniquesContributions from internationally recognized experts from all over the world

Plasma Catalysis

Author : Annemie Bogaerts
Publisher : MDPI
ISBN 13 : 3038977500
Total Pages : 248 pages
Book Rating : 4.0/5 (389 download)

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Book Synopsis Plasma Catalysis by : Annemie Bogaerts

Download or read book Plasma Catalysis written by Annemie Bogaerts and published by MDPI. This book was released on 2019-04-02 with total page 248 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma catalysis is gaining increasing interest for various gas conversion applications, such as CO2 conversion into value-added chemicals and fuels, N2 fixation for the synthesis of NH3 or NOx, methane conversion into higher hydrocarbons or oxygenates. It is also widely used for air pollution control (e.g., VOC remediation). Plasma catalysis allows thermodynamically difficult reactions to proceed at ambient pressure and temperature, due to activation of the gas molecules by energetic electrons created in the plasma. However, plasma is very reactive but not selective, and thus a catalyst is needed to improve the selectivity. In spite of the growing interest in plasma catalysis, the underlying mechanisms of the (possible) synergy between plasma and catalyst are not yet fully understood. Indeed, plasma catalysis is quite complicated, as the plasma will affect the catalyst and vice versa. Moreover, due to the reactive plasma environment, the most suitable catalysts will probably be different from thermal catalysts. More research is needed to better understand the plasma–catalyst interactions, in order to further improve the applications.

Plasma Technology for Hyperfunctional Surfaces

Author : Hubert Rauscher
Publisher : John Wiley & Sons
ISBN 13 : 9783527630462
Total Pages : 428 pages
Book Rating : 4.6/5 (34 download)

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Book Synopsis Plasma Technology for Hyperfunctional Surfaces by : Hubert Rauscher

Download or read book Plasma Technology for Hyperfunctional Surfaces written by Hubert Rauscher and published by John Wiley & Sons. This book was released on 2010-04-16 with total page 428 pages. Available in PDF, EPUB and Kindle. Book excerpt: Based on a project backed by the European Union, this is a must-have resource for researchers in industry and academia concerned with application-oriented plasma technology research. Clearly divided in three sections, the first part is dedicated to the fundamentals of plasma and offers information about scientific and theoretical plasma topics, plasma production, surface treatment process and characterization. The second section focuses on technological aspects and plasma process applications in textile, food packaging and biomedical sectors, while the final part is devoted to concerns about the environmental sustainability of plasma processes.

Handbook of Thin Film Deposition

Author : Dominic Schepis
Publisher : Elsevier
ISBN 13 : 044313524X
Total Pages : 428 pages
Book Rating : 4.4/5 (431 download)

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Book Synopsis Handbook of Thin Film Deposition by : Dominic Schepis

Download or read book Handbook of Thin Film Deposition written by Dominic Schepis and published by Elsevier. This book was released on 2024-10-08 with total page 428 pages. Available in PDF, EPUB and Kindle. Book excerpt: Handbook of Thin Film Deposition, Fifth Edition, is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry. When pursuing patents, there is a phase called 'reduction to practice' where the idea for a technology transitions from a concept to actual use. The section 'Thin Film Reduction to Practice' includes chapters that review the most relevant methods to fabricate thin films towards practical applications. Then, the latest applications of thin film deposition technologies are discussed. Handbook of Thin Film Deposition, 5th Edition is suitable for materials scientists and engineers in academia and working in semiconductor R&D. - Offers a practical survey of thin film technologies including design, fabrication, and reliability - Covers core processes and applications in the semiconductor industry and discusses latest advances in new thin film development - Features new chapters that review methods on front-end and back-end thin films

Racing for the Surface

Author : Bingyun Li
Publisher : Springer Nature
ISBN 13 : 3030344711
Total Pages : 808 pages
Book Rating : 4.0/5 (33 download)

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Book Synopsis Racing for the Surface by : Bingyun Li

Download or read book Racing for the Surface written by Bingyun Li and published by Springer Nature. This book was released on 2020-02-28 with total page 808 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book covers the key basics of tissue engineering as well as the latest advances in the integration of both antimicrobial and osteoinductive properties. Topics covered include osteoconductive and osteoinductive biomaterials (calcium phosphate, bone morphogenetic protein, peptides, antibodies, bioactive glasses, nanomaterials, etc.) and scaffolds. Research integrating both antimicrobial/biofilm-inhibiting and osteoinductive/osteoconductive properties and their co-delivery is detailed and their roles in clinical success are discussed. Combined with its companion volume, Racing for the Surface: Antimicrobial and Interface Tissue Engineering, this book bridges the gap between infection and tissue engineering, and is an ideal book for academic researchers, clinicians, industrial engineers and scientists, governmental representatives in national laboratories, and advanced undergraduate students and post-doctoral fellows who are interested in tissue engineering and regeneration, infection, and biomaterials and devices.