Spectral Characterization Of Solid State Laser Driven Plasma Sources Of Euv Light

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Spectral Characterization of Solid-state Laser-driven Plasma Sources of EUV Light

Author :
Publisher :
ISBN 13 : 9789492323484
Total Pages : 0 pages
Book Rating : 4.3/5 (234 download)

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Book Synopsis Spectral Characterization of Solid-state Laser-driven Plasma Sources of EUV Light by :

Download or read book Spectral Characterization of Solid-state Laser-driven Plasma Sources of EUV Light written by and published by . This book was released on 2021 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this thesis, the fundamental limits of converting laser radiation via tin plasmas into EUV light in a 2% bandwidth around 13.5nm, relevant to nanolithographic applications, are experimentally investigated. In particular, plasma generation using near- to mid-infrared lasers is studied. This laser wavelength region, in combination with available energy-efficient solid-state laser technology, shows promising opportunities to achieve high plasma-brightness in combination with high overall efficiencies of converting electrical power to useful EUV radiation. In terms of light source optimization, we investigate the effects of varying target morphologies and laser irradiation parameters, e.g., laser wavelength, laser intensity, and beam spot size on key experimental observables such as EUV spectra, the conversion efficiency of laser energy into industrially useful 13.5nm light (CE), the purity of the spectral emission (SP) and the plasma's optical depth. In Chapter 1, the radiative properties of plasmas formed by irradiating spherical tin droplets with high-energy, 1-um-wavelength laser pulses are investigated. Using pulses of constant intensity in space and time the plasma is homogeneously heated. A significant growth of CE and of the overall efficiency in radiating EUV light is found with increasing laser intensity, droplet size and laser pulse duration. Through optimization of these parameters, CE’s of up to 3.2% are obtained. In Chapter 2, the EUV spectra from Chapter 1 are analyzed in the context of the plasma’s optical depth using a one-dimensional, analytic radiation transport model. Using this model, we find an increase in optical depth with increasing droplet diameter and laser pulse duration. This increase in optical depth is explained in terms of a larger plasma scale length.

EUV Sources for Lithography

Author : Vivek Bakshi
Publisher : SPIE Press
ISBN 13 : 9780819458452
Total Pages : 1104 pages
Book Rating : 4.4/5 (584 download)

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Book Synopsis EUV Sources for Lithography by : Vivek Bakshi

Download or read book EUV Sources for Lithography written by Vivek Bakshi and published by SPIE Press. This book was released on 2006 with total page 1104 pages. Available in PDF, EPUB and Kindle. Book excerpt: This comprehensive volume, edited by a senior technical staff member at SEMATECH, is the authoritative reference book on EUV source technology. The volume contains 38 chapters contributed by leading researchers and suppliers in the EUV source field. Topics range from a state-of-the-art overview and in-depth explanation of EUV source requirements, to fundamental atomic data and theoretical models of EUV sources based on discharge-produced plasmas (DPP) and laser-produced plasmas, to a description of prominent DPP and LPP designs and other technologies for producing EUV radiation. Additional topics include EUV source metrology and components (collectors, electrodes), debris mitigation, and mechanisms of component erosion in EUV sources. The volume is intended to meet the needs of both practitioners of the technology and readers seeking an introduction to the subject.

Developments for Broadband Spectral and Spatial Characterization of Tin Plasma Light Sources for EUV Lithography

Author :
Publisher :
ISBN 13 : 9789464695007
Total Pages : 0 pages
Book Rating : 4.6/5 (95 download)

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Book Synopsis Developments for Broadband Spectral and Spatial Characterization of Tin Plasma Light Sources for EUV Lithography by :

Download or read book Developments for Broadband Spectral and Spatial Characterization of Tin Plasma Light Sources for EUV Lithography written by and published by . This book was released on 2023 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Spectroscopic Studies of Laser Plasmas for EUV Sources

Author : Simi A. George
Publisher :
ISBN 13 :
Total Pages : 200 pages
Book Rating : 4.:/5 (952 download)

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Book Synopsis Spectroscopic Studies of Laser Plasmas for EUV Sources by : Simi A. George

Download or read book Spectroscopic Studies of Laser Plasmas for EUV Sources written by Simi A. George and published by . This book was released on 2007 with total page 200 pages. Available in PDF, EPUB and Kindle. Book excerpt: With the availability of high re ectivity multilayer mirrors and zone plate lenses, the EUV region (5nm-40nm) of the electromagnetic spectrum is currently being explored for applications of nanoscale printing and imaging. Advances made in this area have consequences for many areas of science. Research for producing a compact, bright EUV source for laboratory use has gained momentum in recent years. For this study, EUV radiation is produced by irradiating target materials using a focused laser beam. Focused laser beam ionizes the target to create a hot, dense, pulsed plasma source, where emission is a result of the relaxation of excited levels. Spectroscopy is used as the main diagnostic to obtain the spectral signature of the plasma. Spectral characteristics are used to deduce the physical state of plasma, thus enabling the tuning of laser irradiance conditions to maximize the needed emission bandwidth. Various target materials are studied, as well as di erent target geometries, with spectroscopy below 200 nm on pulsed micro-plasmas being a particularly daunting task. Total range spectroscopy from 1 nm to greater than 1 micron is completed for tin-doped spherical droplet plasma source. Reliable plasma diagnostics require both accurate measurements and solid theoretical support in order to interpret the experimental results. Using existing 1D-hydrocode, temperature and density characteristics of the expanding plasma is simulated for any set of experimental conditions. Existing atomic codes written for calculating one-electron radial wavefunctions with LS-coupling scheme via Hartree-Fock method is used in order to gain details of the ion stages, populations, transitions, etc, contributing to the spectral data.

Spectroscopy of Solid-State Laser-Type Materials

Author : Baldassare Di Bartolo
Publisher : Springer Science & Business Media
ISBN 13 : 1461308992
Total Pages : 607 pages
Book Rating : 4.4/5 (613 download)

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Book Synopsis Spectroscopy of Solid-State Laser-Type Materials by : Baldassare Di Bartolo

Download or read book Spectroscopy of Solid-State Laser-Type Materials written by Baldassare Di Bartolo and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 607 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents an account of the course "Spectroscopy of Solid-State Laser-Type Materials" held in Erice, Italy, from June 16 to 30, 1985. This meeting was organized by the International School of Atomic and Molecular Spectroscopy of the "Ettore Majorana" Centre for Scientific Culture. The objective of the course was to present and examine the recent advances in spectroscopy and theoretical modelling relevant to the interpretation of luminescence and laser phenomena in several classes of solid-state materials. The available solid-state matrices (e.g. halides, oxides, glasses, semiconductors) and the full range of possible activators (transition ions, rare earth ions, post-transition ions, actinides, color centres) were considered. By bringing together specialists in the fields of solid-state luminescence and of solid-state laser materials, this course provided a much-needed forum for the critical . assessment of past developments in the R&D of solid-state lasers. Additional objectives of the meeting were to identify new classes of host/activator systems that show promise of laser operation; to alert researchers in solid-state luminescence to current technological needs for solid-state tunable lasers operating in the visible and infrared spectral regions; and generally to provide the scientific background for advanced work in solid state lasers. A total of 71 participants came from 54 laboratories and 21 nations (Austria, Belgium, Canada, F.R. of Germany, France, Greece, Ireland, Israel, Italy, the Netherlands, P.R. of China, Poland, Rumania, Sweden, Switzerland, South Korea, Spain, Turkey, United Kingdom, U.S.A. and U.S.S.R.).

Spectroscopy of Solid-state Laser and Luminescent Materials

Author : Zundu Luo
Publisher : Nova Publishers
ISBN 13 : 9781600213267
Total Pages : 368 pages
Book Rating : 4.2/5 (132 download)

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Book Synopsis Spectroscopy of Solid-state Laser and Luminescent Materials by : Zundu Luo

Download or read book Spectroscopy of Solid-state Laser and Luminescent Materials written by Zundu Luo and published by Nova Publishers. This book was released on 2007 with total page 368 pages. Available in PDF, EPUB and Kindle. Book excerpt: Solid-state laser and luminescent materials activated by rare-earth or transition metals ions are widely used for solid-state lasers, luminescent lamps, flat displays, optical fibre communication systems, and other photonic devices. The unique solid-state electronic properties enable the activators in solids to emit photons efficiently in visible and IR regions. The rapid advances in both materials science and optoelectronics, particularly, the development of new methods of material synthesis and device fabrication, have been stimulating the growing interests in the deep insights of spectroscopic properties of solid-state laser and luminescent materials. This book brings together essential and practical knowledge of spectroscopic physics. This includes, atomic spectroscopy, mathematical theory, rare earth ions in materials, light emission and absorption, spectral properties, non-radiative transitions and energy migration.

High Energy and Short Pulse Lasers

Author : Richard Viskup
Publisher : BoD – Books on Demand
ISBN 13 : 9535126067
Total Pages : 426 pages
Book Rating : 4.5/5 (351 download)

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Book Synopsis High Energy and Short Pulse Lasers by : Richard Viskup

Download or read book High Energy and Short Pulse Lasers written by Richard Viskup and published by BoD – Books on Demand. This book was released on 2016-09-07 with total page 426 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book gives the readers an introduction to experimental and theoretical knowledge acquired by large-scale laser laboratories that are dealing with extra-high peak power and ultrashort laser pulses for research of terawatt (TW), petawatt (PW), or near-future exawatt (EW) laser interactions, for soft X-ray sources, for acceleration of particles, or for generation of hot dense thermal plasma for the laser fusion. The other part of this book is dealing with the small-scale laser laboratories that are using for its research on commercial sources of laser radiation, nanosecond (ns), picosecond (ps), or femtosecond (fs) laser pulses, either for basic research or for more advanced applications. This book is divided into six main sections dealing with short and ultrashort laser pulses, laser-produced soft X-ray sources, large-scale high-power laser systems, free-electron lasers, fiber-based sources of short optical pulse, and applications of short pulse lasers. In each chapter readers can find fascinating topics related to the high energy and/or short pulse laser technique. Individual chapters should serve the broad spectrum of readers of different expertise, layman, undergraduate and postgraduate students, scientists, and engineers, who may in this book find easily explained fundamentals as well as advanced principles of particular subjects related to these phenomena.

Modern Methods in Collisional-Radiative Modeling of Plasmas

Author : Yuri Ralchenko
Publisher : Springer
ISBN 13 : 3319275143
Total Pages : 220 pages
Book Rating : 4.3/5 (192 download)

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Book Synopsis Modern Methods in Collisional-Radiative Modeling of Plasmas by : Yuri Ralchenko

Download or read book Modern Methods in Collisional-Radiative Modeling of Plasmas written by Yuri Ralchenko and published by Springer. This book was released on 2016-02-25 with total page 220 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a compact yet comprehensive overview of recent developments in collisional-radiative (CR) modeling of laboratory and astrophysical plasmas. It describes advances across the entire field, from basic considerations of model completeness to validation and verification of CR models to calculation of plasma kinetic characteristics and spectra in diverse plasmas. Various approaches to CR modeling are presented, together with numerous examples of applications. A number of important topics, such as atomic models for CR modeling, atomic data and its availability and quality, radiation transport, non-Maxwellian effects on plasma emission, ionization potential lowering, and verification and validation of CR models, are thoroughly addressed. Strong emphasis is placed on the most recent developments in the field, such as XFEL spectroscopy. Written by leading international research scientists from a number of key laboratories, the book offers a timely summary of the most recent progress in this area. It will be a useful and practical guide for students and experienced researchers working in plasma spectroscopy, spectra simulations, and related fields.

Harnessing Light

Author : National Research Council
Publisher : National Academies Press
ISBN 13 : 0309059917
Total Pages : 358 pages
Book Rating : 4.3/5 (9 download)

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Book Synopsis Harnessing Light by : National Research Council

Download or read book Harnessing Light written by National Research Council and published by National Academies Press. This book was released on 1998-09-25 with total page 358 pages. Available in PDF, EPUB and Kindle. Book excerpt: Optical science and engineering affect almost every aspect of our lives. Millions of miles of optical fiber carry voice and data signals around the world. Lasers are used in surgery of the retina, kidneys, and heart. New high-efficiency light sources promise dramatic reductions in electricity consumption. Night-vision equipment and satellite surveillance are changing how wars are fought. Industry uses optical methods in everything from the production of computer chips to the construction of tunnels. Harnessing Light surveys this multitude of applications, as well as the status of the optics industry and of research and education in optics, and identifies actions that could enhance the field's contributions to society and facilitate its continued technical development.

The Physics of Inertial Fusion

Author : Stefano Atzeni
Publisher : OUP Oxford
ISBN 13 : 9780191524059
Total Pages : 488 pages
Book Rating : 4.5/5 (24 download)

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Book Synopsis The Physics of Inertial Fusion by : Stefano Atzeni

Download or read book The Physics of Inertial Fusion written by Stefano Atzeni and published by OUP Oxford. This book was released on 2004-06-03 with total page 488 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is on inertial confinement fusion, an alternative way to produce electrical power from hydrogen fuel by using powerful lasers or particle beams. It involves the compression of tiny amounts (micrograms) of fuel to thousand times solid density and pressures otherwise existing only in the centre of stars. Thanks to advances in laser technology, it is now possible to produce such extreme states of matter in the laboratory. Recent developments have boosted laser intensities again with new possibilities for laser particle accelerators, laser nuclear physics, and fast ignition of fusion targets. This is a reference book for those working on beam plasma physics, be it in the context of fundamental research or applications to fusion energy or novel ultra-bright laser sources. The book combines quite different areas of physics: beam target interaction, dense plasmas, hydrodynamic implosion and instabilities, radiative energy transfer as well as fusion reactions. Particular attention is given to simple and useful modelling, including dimensional analysis and similarity solutions. Both authors have worked in this field for more than 20 years. They want to address in particular those teaching this topic to students and all those interested in understanding the technical basis.

Soft X-Rays and Extreme Ultraviolet Radiation

Author : David Attwood
Publisher : Cambridge University Press
ISBN 13 : 1139643428
Total Pages : 611 pages
Book Rating : 4.1/5 (396 download)

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Book Synopsis Soft X-Rays and Extreme Ultraviolet Radiation by : David Attwood

Download or read book Soft X-Rays and Extreme Ultraviolet Radiation written by David Attwood and published by Cambridge University Press. This book was released on 2007-02-22 with total page 611 pages. Available in PDF, EPUB and Kindle. Book excerpt: This detailed, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include spectromicroscopy, EUV astronomy, synchrotron radiation, and soft X-ray lasers. The author also provides a wealth of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practising engineers involved in semiconductor fabrication and materials science.

The Theory of Atomic Structure and Spectra

Author : Robert D. Cowan
Publisher : Univ of California Press
ISBN 13 : 0520906152
Total Pages : 752 pages
Book Rating : 4.5/5 (29 download)

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Book Synopsis The Theory of Atomic Structure and Spectra by : Robert D. Cowan

Download or read book The Theory of Atomic Structure and Spectra written by Robert D. Cowan and published by Univ of California Press. This book was released on 2023-11-15 with total page 752 pages. Available in PDF, EPUB and Kindle. Book excerpt: Both the interpretation of atomic spectra and the application of atomic spectroscopy to current problems in astrophysics, laser physics, and thermonuclear plasmas require a thorough knowledge of the Slater-Condon theory of atomic structure and spectra. This book gathers together aspects of the theory that are widely scattered in the literature and augments them to produce a coherent set of closed-form equations suitable both for computer calculations on cases of arbitrary complexity and for hand calculations for very simple cases.

Atomic Properties in Hot Plasmas

Author : Jacques Bauche
Publisher : Springer
ISBN 13 : 3319181475
Total Pages : 386 pages
Book Rating : 4.3/5 (191 download)

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Book Synopsis Atomic Properties in Hot Plasmas by : Jacques Bauche

Download or read book Atomic Properties in Hot Plasmas written by Jacques Bauche and published by Springer. This book was released on 2015-08-03 with total page 386 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is devoted to the calculation of hot-plasma properties which generally requires a huge number of atomic data. It is the first book that combines information on the details of the basic atomic physics and its application to atomic spectroscopy with the use of the relevant statistical approaches. Information like energy levels, radiative rates, collisional and radiative cross-sections, etc., must be included in equilibrium or non-equilibrium models in order to describe both the atomic-population kinetics and the radiative properties. From the very large number of levels and transitions involved in complex ions, some statistical (global) properties emerge. The book presents a coherent set of concepts and compact formulas suitable for tractable and accurate calculations. The topics addressed are: radiative emission and absorption, and a dozen of other collisional and radiative processes; transition arrays between level ensembles (configurations, superconfigurations); effective temperatures of configurations, superconfigurations, and ions; charge-state distributions; radiative power losses and opacity. There are many numerical examples and comparisons with experiment presented throughout the book. The plasma properties described in this book are especially relevant to large nuclear fusion facilities such as the NIF (California) and the ITER (France), and to astrophysics. Methods relevant to the central-field configurational model are described in detail in the appendices: tensor-operator techniques, second-quantization formalism, statistical distribution moments, and the algebra of partition functions. Some extra tools are propensity laws, correlations, and fractals. These methods are applied to the analytical derivation of many properties, specially the global ones, through which the complexity is much reduced. The book is intended for graduate-level students, and for physicists working in the field.

Laser Induced Plasma Spectroscopy and Applications

Author :
Publisher :
ISBN 13 :
Total Pages : 250 pages
Book Rating : 4.:/5 (946 download)

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Book Synopsis Laser Induced Plasma Spectroscopy and Applications by :

Download or read book Laser Induced Plasma Spectroscopy and Applications written by and published by . This book was released on 2003 with total page 250 pages. Available in PDF, EPUB and Kindle. Book excerpt: The OSA topical meetings that received support under this grant provided a forum for researchers in various specialty areas to meet and share ideas and technology in their fields. Following are the meetings that were supported by this grant: ̂Advanced Solid State Lasers - This meeting provided a forum for leading edge results in the fields of solid state lasers, laser materials, nonlinear optical materials and high power diode lasers. ̂Laser Applications to Chemical and Environmental Analysis - This meeting presented and discussed advances in the use of lasers for chemical analysis and environmental monitoring. ̂Biomedical Optics - This meeting was composed of three meetings that offered a unique venue to present and discuss recent research activities and developments in the field of lasers and optics in biomedicine. ̂Ultrafast Phenomena - This meeting brought together a multidisciplinary group sharing a common interest in the generation of ultrashort pulses in the picosecond, femtosecond, and attosecond regimes and their application to studies of ultrafast phenomena in physics, chemistry, biology, material sciences and electronics. ̂Nonlinear Optics%- This meeting provided and international forum for discussion of all aspects of nonlinear optics, including new phenomena, novel devices, advanced materials and applications. ̂Nonlinear Guided Waves and their Applications - This meeting emphasized on development of new ideas and novel techniques in the areas of materials, fabrication, devices , applications and nonlinear theory. ̂Laser Induced Plasma Spectroscopy and Applications - This Meetings focused on major advances in LIBS fundamentals, instrumentation and applications and featured new commercial laboratory LIBS systems and advanced components, as well as field portable systems.

Handbook of X-Ray Data

Author : Günter H. Zschornack
Publisher : Springer Science & Business Media
ISBN 13 : 3540286187
Total Pages : 969 pages
Book Rating : 4.5/5 (42 download)

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Book Synopsis Handbook of X-Ray Data by : Günter H. Zschornack

Download or read book Handbook of X-Ray Data written by Günter H. Zschornack and published by Springer Science & Business Media. This book was released on 2007-01-24 with total page 969 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the only handbook available on X-ray data. In a concise and informative manner, the most important data connected with the emission of characteristic X-ray lines are tabulated for all elements up to Z = 95 (Americium). The tabulated data are characterized and, in most cases, evaluated. Furthermore, all important processes and phenomena connected with the production, emission and detection of characteristic X-rays are discussed.

Controlling the Quantum World

Author : National Research Council
Publisher : National Academies Press
ISBN 13 : 0309102707
Total Pages : 245 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Controlling the Quantum World by : National Research Council

Download or read book Controlling the Quantum World written by National Research Council and published by National Academies Press. This book was released on 2007-06-21 with total page 245 pages. Available in PDF, EPUB and Kindle. Book excerpt: As part of the Physics 2010 decadal survey project, the Department of Energy and the National Science Foundation requested that the National Research Council assess the opportunities, over roughly the next decade, in atomic, molecular, and optical (AMO) science and technology. In particular, the National Research Council was asked to cover the state of AMO science, emphasizing recent accomplishments and identifying new and compelling scientific questions. Controlling the Quantum World, discusses both the roles and challenges for AMO science in instrumentation; scientific research near absolute zero; development of extremely intense x-ray and laser sources; exploration and control of molecular processes; photonics at the nanoscale level; and development of quantum information technology. This book also offers an assessment of and recommendations about critical issues concerning maintaining U.S. leadership in AMO science and technology.

NEXAFS Spectroscopy

Author : Joachim Stöhr
Publisher : Springer Science & Business Media
ISBN 13 : 3662028530
Total Pages : 415 pages
Book Rating : 4.6/5 (62 download)

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Book Synopsis NEXAFS Spectroscopy by : Joachim Stöhr

Download or read book NEXAFS Spectroscopy written by Joachim Stöhr and published by Springer Science & Business Media. This book was released on 2013-04-17 with total page 415 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the first ever comprehensive treatment of NEXAFS spectroscopy. It is suitable for novice researchers as an introduction to the field, while experts will welcome the detailed description of state-of-the-art instrumentation and analysis techniques, along with the latest experimental and theoretical results.