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Soft X Ray And Euv Imaging Systems
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Book Synopsis Soft X-Rays and Extreme Ultraviolet Radiation by : David Attwood
Download or read book Soft X-Rays and Extreme Ultraviolet Radiation written by David Attwood and published by Cambridge University Press. This book was released on 2007-02-22 with total page 611 pages. Available in PDF, EPUB and Kindle. Book excerpt: This detailed, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include spectromicroscopy, EUV astronomy, synchrotron radiation, and soft X-ray lasers. The author also provides a wealth of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practising engineers involved in semiconductor fabrication and materials science.
Book Synopsis X-Rays and Extreme Ultraviolet Radiation by : David Attwood
Download or read book X-Rays and Extreme Ultraviolet Radiation written by David Attwood and published by Cambridge University Press. This book was released on 2016 with total page 655 pages. Available in PDF, EPUB and Kindle. Book excerpt: Master the physics and understand the current applications of modern X-ray and EUV sources with this fully updated second edition.
Download or read book EUV Lithography written by Vivek Bakshi and published by SPIE Press. This book was released on 2009 with total page 704 pages. Available in PDF, EPUB and Kindle. Book excerpt: Editorial Review Dr. Bakshi has compiled a thorough, clear reference text covering the important fields of EUV lithography for high-volume manufacturing. This book has resulted from his many years of experience in EUVL development and from teaching this subject to future specialists. The book proceeds from an historical perspective of EUV lithography, through source technology, optics, projection system design, mask, resist, and patterning performance, to cost of ownership. Each section contains worked examples, a comprehensive review of challenges, and relevant citations for those who wish to further investigate the subject matter. Dr. Bakshi succeeds in presenting sometimes unfamiliar material in a very clear manner. This book is also valuable as a teaching tool. It has become an instant classic and far surpasses others in the EUVL field. --Dr. Akira Endo, Chief Development Manager, Gigaphoton Inc. Description Extreme ultraviolet lithography (EUVL) is the principal lithography technology aiming to manufacture computer chips beyond the current 193-nm-based optical lithography, and recent progress has been made on several fronts: EUV light sources, optics, optics metrology, contamination control, masks and mask handling, and resists. This comprehensive volume is comprised of contributions from the world's leading EUVL researchers and provides all of the critical information needed by practitioners and those wanting an introduction to the field. Interest in EUVL technology continues to increase, and this volume provides the foundation required for understanding and applying this exciting technology. About the editor of EUV Lithography Dr. Vivek Bakshi previously served as a senior member of the technical staff at SEMATECH; he is now president of EUV Litho, Inc., in Austin, Texas.
Book Synopsis Radiation characteristics of extreme UV and soft X-ray sources by : Tobias Mey
Download or read book Radiation characteristics of extreme UV and soft X-ray sources written by Tobias Mey and published by Göttingen University Press. This book was released on 2015 with total page 154 pages. Available in PDF, EPUB and Kindle. Book excerpt: Electromagnetic radiation in the extreme UV and soft x-ray spectral range is of steadily increasing importance in fundamental research and industrial applications. An optimum use of the available photons can only be achieved under condition of a comprehensive beam characterization. Following that goal, this work addresses the pathway of extreme UV and soft x-ray radiation from its generation, through the beam transport by the beamline to the probe position. Experimentally, those aspects are optimized at a laser-produced plasma source and at an arrangement for the generation of high-harmonics. Additionally, the coherence of laser beams is analyzed by measurements of the Wigner distribution function. This method is applied to the photon beam of the free-electron laser FLASH, resulting in the entire characterization of its propagation properties.
Book Synopsis Optical Technologies for Extreme-Ultraviolet and Soft X-ray Coherent Sources by : Federico Canova
Download or read book Optical Technologies for Extreme-Ultraviolet and Soft X-ray Coherent Sources written by Federico Canova and published by Springer. This book was released on 2015-08-17 with total page 205 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book reviews the most recent achievements in optical technologies for XUV and X-ray coherent sources. Particular attention is given to free-electron-laser facilities, but also to other sources available at present, such as synchrotrons, high-order laser harmonics and X-ray lasers. The optical technologies relevant to each type of source are discussed. In addition, the main technologies used for photon handling and conditioning, namely multilayer mirrors, adaptive optics, crystals and gratings are explained. Experiments using coherent light received during the last decades a lot of attention for the X-ray regime. Strong efforts were taken for the realization of almost fully coherent sources, e.g. the free-electron lasers, both as independent sources in the femtosecond and attosecond regimes and as seeding sources for free-electron-lasers and X-ray gas lasers. In parallel to the development of sources, optical technologies for photon handling and conditioning of such coherent and intense X-ray beams advanced. New problems were faced for the realization of optical components of beamlines demanding to manage coherent X-ray photons, e.g. the preservation of coherence and time structure of ultra short pulses.
Book Synopsis Fundamentals and Applications in Aerosol Spectroscopy by : Ruth Signorell
Download or read book Fundamentals and Applications in Aerosol Spectroscopy written by Ruth Signorell and published by CRC Press. This book was released on 2010-12-20 with total page 513 pages. Available in PDF, EPUB and Kindle. Book excerpt: Helping you better understand the processes, instruments, and methods of aerosol spectroscopy, Fundamentals and Applications in Aerosol Spectroscopy provides an overview of the state of the art in this rapidly developing field. It covers fundamental aspects of aerosol spectroscopy, applications to atmospherically and astronomically relevant problem
Book Synopsis Chemistry and Lithography by : Uzodinma Okoroanyanwu
Download or read book Chemistry and Lithography written by Uzodinma Okoroanyanwu and published by SPIE Press. This book was released on 2011-03-08 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Chemistry and Lithography provides a comprehensive treatment of the chemical phenomena in lithography in a manner that is accessible to a wide readership. The book presents topics on the optical and charged particle physics practiced in lithography, with a broader view of how the marriage between chemistry and optics has made possible the print and electronic revolutions of the digital age. The related aspects of lithography are thematically presented to convey a unified view of the developments in the field over time, from the very first recorded reflections on the nature of matter to the latest developments at the frontiers of lithography science and technology. Part I presents several important chemical and physical principles involved in the invention and evolution of lithography. Part II covers the processes for the synthesis, manufacture, usage, and handling of lithographic chemicals and materials. Part III investigates several important chemical and physical principles involved in the practice of lithography. Chemistry and Lithography is a useful reference for anyone working in the semiconductor industry.
Book Synopsis A Study on New Approaches in Coherent X-ray Microscopy of Biological Specimens by : Klaus Giewekemeyer
Download or read book A Study on New Approaches in Coherent X-ray Microscopy of Biological Specimens written by Klaus Giewekemeyer and published by Universitätsverlag Göttingen. This book was released on 2011 with total page 226 pages. Available in PDF, EPUB and Kindle. Book excerpt: The use of coherent x rays for microscopic imaging has seen a rapid and ongoing development within the past decade, driven by an increasing availability of highly brilliant and coherent sources worldwide. Accordingly, novel methods have been developed, which replace the microscope‘s objective lens by a numerical reconstruction scheme. The aim of the present work is to study how very recent experimental and algorithmic developments in the field can be implemented towards a highly sensitive and fully quantitative microscopy method for imaging of biological cells. To this end, different experimental approaches are studied, based on coherent far-field as well as near-field diffraction. At first, an application of the novel ptychographic imaging method to single biological cells is presented. In particular, it is demonstrated how weakly scattering biological specimens can be imaged with fully quantitative density contrast. Alongside, a sueccessful extension of the method towards soft x-ray energies is described.In the second part of the work it is shown how x-ray waveguides can be used as a point source for propagation-based microscopy of single cells in the hard x-ray regime. The specifically devised iterative reconstruction scheme allows for full quantitativity and high sensitivity and thus enables an application to single biological cells. The work contains a thorough introduction into the x-ray optical methods applied and aims at a useful and self-contained overview on aspects of signal and Fourier theory relevant for the used numerical propagation schemes.
Book Synopsis High Energy and Short Pulse Lasers by : Richard Viskup
Download or read book High Energy and Short Pulse Lasers written by Richard Viskup and published by BoD – Books on Demand. This book was released on 2016-09-07 with total page 426 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book gives the readers an introduction to experimental and theoretical knowledge acquired by large-scale laser laboratories that are dealing with extra-high peak power and ultrashort laser pulses for research of terawatt (TW), petawatt (PW), or near-future exawatt (EW) laser interactions, for soft X-ray sources, for acceleration of particles, or for generation of hot dense thermal plasma for the laser fusion. The other part of this book is dealing with the small-scale laser laboratories that are using for its research on commercial sources of laser radiation, nanosecond (ns), picosecond (ps), or femtosecond (fs) laser pulses, either for basic research or for more advanced applications. This book is divided into six main sections dealing with short and ultrashort laser pulses, laser-produced soft X-ray sources, large-scale high-power laser systems, free-electron lasers, fiber-based sources of short optical pulse, and applications of short pulse lasers. In each chapter readers can find fascinating topics related to the high energy and/or short pulse laser technique. Individual chapters should serve the broad spectrum of readers of different expertise, layman, undergraduate and postgraduate students, scientists, and engineers, who may in this book find easily explained fundamentals as well as advanced principles of particular subjects related to these phenomena.
Book Synopsis EUV Sources for Lithography by : Vivek Bakshi
Download or read book EUV Sources for Lithography written by Vivek Bakshi and published by SPIE Press. This book was released on 2006 with total page 1104 pages. Available in PDF, EPUB and Kindle. Book excerpt: This comprehensive volume, edited by a senior technical staff member at SEMATECH, is the authoritative reference book on EUV source technology. The volume contains 38 chapters contributed by leading researchers and suppliers in the EUV source field. Topics range from a state-of-the-art overview and in-depth explanation of EUV source requirements, to fundamental atomic data and theoretical models of EUV sources based on discharge-produced plasmas (DPP) and laser-produced plasmas, to a description of prominent DPP and LPP designs and other technologies for producing EUV radiation. Additional topics include EUV source metrology and components (collectors, electrodes), debris mitigation, and mechanisms of component erosion in EUV sources. The volume is intended to meet the needs of both practitioners of the technology and readers seeking an introduction to the subject.
Book Synopsis Nanoscale Photonic Imaging by : Tim Salditt
Download or read book Nanoscale Photonic Imaging written by Tim Salditt and published by Springer Nature. This book was released on 2020-06-09 with total page 634 pages. Available in PDF, EPUB and Kindle. Book excerpt: This open access book, edited and authored by a team of world-leading researchers, provides a broad overview of advanced photonic methods for nanoscale visualization, as well as describing a range of fascinating in-depth studies. Introductory chapters cover the most relevant physics and basic methods that young researchers need to master in order to work effectively in the field of nanoscale photonic imaging, from physical first principles, to instrumentation, to mathematical foundations of imaging and data analysis. Subsequent chapters demonstrate how these cutting edge methods are applied to a variety of systems, including complex fluids and biomolecular systems, for visualizing their structure and dynamics, in space and on timescales extending over many orders of magnitude down to the femtosecond range. Progress in nanoscale photonic imaging in Göttingen has been the sum total of more than a decade of work by a wide range of scientists and mathematicians across disciplines, working together in a vibrant collaboration of a kind rarely matched. This volume presents the highlights of their research achievements and serves as a record of the unique and remarkable constellation of contributors, as well as looking ahead at the future prospects in this field. It will serve not only as a useful reference for experienced researchers but also as a valuable point of entry for newcomers.
Download or read book The Solar Corona written by Leon Golub and published by Cambridge University Press. This book was released on 2010 with total page 405 pages. Available in PDF, EPUB and Kindle. Book excerpt: Second edition graduate level textbook giving an up-to-date treatment of our understanding of the solar corona.
Book Synopsis Handbook of Nanophysics by : Klaus D. Sattler
Download or read book Handbook of Nanophysics written by Klaus D. Sattler and published by CRC Press. This book was released on 2010-09-17 with total page 782 pages. Available in PDF, EPUB and Kindle. Book excerpt: Many bottom-up and top-down techniques for nanomaterial and nanostructure generation have enabled the development of applications in nanoelectronics and nanophotonics. Handbook of Nanophysics: Nanoelectronics and Nanophotonics explores important recent applications of nanophysics in the areas of electronics and photonics. Each peer-reviewed c
Book Synopsis Modern Developments in X-Ray and Neutron Optics by : Alexei Erko
Download or read book Modern Developments in X-Ray and Neutron Optics written by Alexei Erko and published by Springer Science & Business Media. This book was released on 2008-04-14 with total page 540 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume describes modern developments in reflective, refractive and diffractive optics for short wavelength radiation. It also covers recent theoretical approaches to modelling and ray-tracing the x-ray and neutron optical systems. It is based on the joint research activities of specialists in x-ray and neutron optics, working together under the framework of the European Programme for Cooperation in Science and Technology (COST, Action P7) in the period 2002-2006.
Book Synopsis X-Ray and Inner-Shell Processes by : Antonio Bianconi
Download or read book X-Ray and Inner-Shell Processes written by Antonio Bianconi and published by American Inst. of Physics. This book was released on 2003-02-06 with total page 556 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book addresses both fundamental issues and applications in the field of x-ray and inner-shell processes induced by photons, particles, or nuclear conversion. The volume contains the invited talks and all papers have been peer reviewed. This meeting brings scientists together from different disciplines of x-ray science and technology. Focus has been given to the applications of the high brilliance synchrotron x- ray sources in physics, chemistry, biology, engineering and related fields. The book is of interest to scientists in atomic, molecular and solid state physics using synchrotron radiation sources, plasma and x-ray lasers, manufacturers of x-ray equipment, electron and ion analysis apparatus, semiconductor industry chemical industry requiring advanced analytical equipment. Topics include: historical reviews; new x-ray sources and techniques; advances in x-ray optics; photoionization processes and highly charged ions; atomic and nuclear x-ray processes; x-ray scattering; x-ray applications to solids and surfaces; and biological applications.
Book Synopsis Scientific and Technical Aerospace Reports by :
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1995 with total page 704 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Physics of Solar and Stellar Coronae: G.S. Vaiana Memorial Symposium by : Jeffrey L. Linsky
Download or read book Physics of Solar and Stellar Coronae: G.S. Vaiana Memorial Symposium written by Jeffrey L. Linsky and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 646 pages. Available in PDF, EPUB and Kindle. Book excerpt: The original plans for a meeting to celebrate the second centenary of the As tronomical Observatory of Palermo were for a celebration with a double character. The gathering was to have both a historical character, appropriate for a bicenten nial, and a technical character, to note and chronicle the new phase of the history of the Observatory, which has prospered in parallel with the development of this fairly recent topic in astronomical research, the physics of stellar and solar coronae. After the untimely death of the Observatory's Director, Giuseppe S. Vaiana (Pippo to his many friends), a number of colleagues and friends insisted that the celebration should nevertheless be held and should be dedicated to this farsighted scientist who stimulated the development of coronal physics from the early x-ray observations of the solar corona to the recognition of coronae as an observable feature of nearly all stars. This memorial dedication did not change the character of the meeting, which was held in Palermo from 22 to 26 June 1992; as his contributions are very alive in the papers presented at the meeting and collected here, Pippo Vaiana has certainly achieved his place in the history of Astronomy.
