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Author : Mark Edward Greiner
Publisher :
ISBN 13 :
Total Pages : 140 pages
Book Rating : 4.:/5 (386 download)
Download or read book Silicon Diffusion in Gallium Arsenide Using Rapid Thermal Processing written by Mark Edward Greiner and published by . This book was released on 1984 with total page 140 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : James F. Gibbons
Publisher :
ISBN 13 :
Total Pages : 52 pages
Book Rating : 4.:/5 (227 download)
Download or read book Rapid Thermal Processing of III-V Compound Semiconductors with Application to the Fabrication of Microwave Devices written by James F. Gibbons and published by . This book was released on 1988 with total page 52 pages. Available in PDF, EPUB and Kindle. Book excerpt: This research was focused on establishing better techniques for surface doping of III-V semiconductors. The GaAs doping techniques investigated in this work include Si surface diffusions using a solid source, ion implantation following by rapid thermal annealing, and both solid source and vapor phase Zn diffusions. New models for Si diffusion/electrical activation, and Zn diffusion have been developed and implementated in computer simulations. Using these rapid thermal diffusion techniques, it was possible to demonstrate that shallow n+ and p+ layers can be produced reliably while retaining excellent surface morphology. In addition, an improved understanding of the annealing of defects and electrical activation of dopants in ion implanted, amorphized GaAs has been achieved. Keywords: Thermal processing; Semiconductors; Compound semiconductors; Surface doping; Microwave devices; Silicon diffusion; Zinc diffusion; Gallium arsenide. (jhd).
Author : Victor E. Borisenko
Publisher : Springer Science & Business Media
ISBN 13 : 1489918043
Total Pages : 374 pages
Book Rating : 4.4/5 (899 download)
Download or read book Rapid Thermal Processing of Semiconductors written by Victor E. Borisenko and published by Springer Science & Business Media. This book was released on 2013-11-22 with total page 374 pages. Available in PDF, EPUB and Kindle. Book excerpt: Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.
Author : Fankeng Yang
Publisher :
ISBN 13 :
Total Pages : 342 pages
Book Rating : 4.:/5 (256 download)
Download or read book Transient Heating Analysis of Silicon and Gallium Arsenide in Rapid Thermal Processing written by Fankeng Yang and published by . This book was released on 1989 with total page 342 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : LeNore Louise Lehman
Publisher :
ISBN 13 :
Total Pages : 168 pages
Book Rating : 4.:/5 (192 download)
Download or read book The Effects of Rapid Thermal Annealing on Gallium Arsenide Grown by MOCVD on Silicon Substrates written by LeNore Louise Lehman and published by . This book was released on 1988 with total page 168 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : John Stuart Kleine
Publisher :
ISBN 13 :
Total Pages : 122 pages
Book Rating : 4.:/5 (721 download)
Download or read book Rapid Thermal Annealing of Silicon Implanted Gallium Arsenide written by John Stuart Kleine and published by . This book was released on 1986 with total page 122 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Scott Kevin Reynolds
Publisher :
ISBN 13 :
Total Pages : 121 pages
Book Rating : 4.:/5 (386 download)
Download or read book Application of Rapid Thermal Processing to Epitaxy and Doping of Gallium Arsenide written by Scott Kevin Reynolds and published by . This book was released on 1987 with total page 121 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Thomas O. Sedgwick
Publisher : Mrs Proceedings
ISBN 13 :
Total Pages : 512 pages
Book Rating : 4.:/5 (41 download)
Download or read book Rapid Thermal Processing: Volume 52 written by Thomas O. Sedgwick and published by Mrs Proceedings. This book was released on 1986-04-15 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author : Joan Shevaun Whelan
Publisher :
ISBN 13 :
Total Pages : 214 pages
Book Rating : 4.:/5 (33 download)
Download or read book Transmission Electron Microscopy Analysis of Indium Phosphide/Gallium Arsenide Heterostructure After Rapid Thermal Annealing written by Joan Shevaun Whelan and published by . This book was released on 1991 with total page 214 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Steven M. George
Publisher :
ISBN 13 :
Total Pages : 26 pages
Book Rating : 4.:/5 (227 download)
Download or read book Studies of Chemistry and Diffusion on Silicon and Gallium Arsenide Surfaces Using Laser-Induced Thermal Desorption written by Steven M. George and published by . This book was released on 1990 with total page 26 pages. Available in PDF, EPUB and Kindle. Book excerpt: Surface chemistry and surface diffusion play pivotal roles in semiconductor processing and must be understood as electronic device dimensions approach the submicron level. In this project, basic time-dependent processes on silicon surfaces were examined using laser induced thermal desorption (LITD) and Fourier transform infrared (FTIR) spectroscopy. These techniques provided direct, quantitative measurements of surface coverage in real-time. Using LITD and FTIR techniques, emphasis was on a microscopic understanding of semiconductor surface reaction kinetics. (jes).
Author : R. Szweda
Publisher : Elsevier
ISBN 13 : 0080532284
Total Pages : 429 pages
Book Rating : 4.0/5 (85 download)
Download or read book Gallium Arsenide, Electronics Materials and Devices. A Strategic Study of Markets, Technologies and Companies Worldwide 1999-2004 written by R. Szweda and published by Elsevier. This book was released on 2000-12-05 with total page 429 pages. Available in PDF, EPUB and Kindle. Book excerpt: The third edition of this highly respected market study provides a detailed insight into the global developments of the GaAs industry to 2004, and the implications for both suppliers and users of GaAs technology. The report has been completely revised and updated with a new chapter added on competitive technologies. The report also supplies market analysis by component type and application sectors. For a PDF version of the report please call Tina Enright on +44 (0) 1865 843008 for price details.
Author : Shiban Tiku
Publisher : CRC Press
ISBN 13 : 9814669318
Total Pages : 706 pages
Book Rating : 4.8/5 (146 download)
Download or read book III-V Integrated Circuit Fabrication Technology written by Shiban Tiku and published by CRC Press. This book was released on 2016-04-27 with total page 706 pages. Available in PDF, EPUB and Kindle. Book excerpt: GaAs processing has reached a mature stage. New semiconductor compounds are emerging that will dominate future materials and device research, although the processing techniques used for GaAs will still remain relevant. This book covers all aspects of the current state of the art of III-V processing, with emphasis on HBTs. It is aimed at practicing
Author :
Publisher :
ISBN 13 :
Total Pages : 702 pages
Book Rating : 4.:/5 (31 download)
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1995 with total page 702 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Alison Schary
Publisher :
ISBN 13 :
Total Pages : 654 pages
Book Rating : 4.E/5 ( download)
Download or read book A Comparison of Epitaxial Layers and Undoped Semi-insulating Substrates for Use in Silicon Implantation Into Gallium Arsenide written by Alison Schary and published by . This book was released on 1988 with total page 654 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Venkataramana Reddy Chavva
Publisher : Open Dissertation Press
ISBN 13 : 9781374766358
Total Pages : 164 pages
Book Rating : 4.7/5 (663 download)
Download or read book DEEP LEVEL TRANSIENT SPECTROSC written by Venkataramana Reddy Chavva and published by Open Dissertation Press. This book was released on 2017-01-27 with total page 164 pages. Available in PDF, EPUB and Kindle. Book excerpt: This dissertation, "Deep Level Transient Spectroscopy Studies of Gallium Arsenide and Silicon Carbide" by Venkataramana Reddy, Chavva, was obtained from The University of Hong Kong (Pokfulam, Hong Kong) and is being sold pursuant to Creative Commons: Attribution 3.0 Hong Kong License. The content of this dissertation has not been altered in any way. We have altered the formatting in order to facilitate the ease of printing and reading of the dissertation. All rights not granted by the above license are retained by the author. DOI: 10.5353/th_b3123559 Subjects: Gallium arsenide Silicon carbide Spectrum analysis Rapid thermal processing
Author : National Research Council
Publisher : National Academies Press
ISBN 13 : 0309176050
Total Pages : 135 pages
Book Rating : 4.3/5 (91 download)
Download or read book Materials for High-Temperature Semiconductor Devices written by National Research Council and published by National Academies Press. This book was released on 1995-09-14 with total page 135 pages. Available in PDF, EPUB and Kindle. Book excerpt: Major benefits to system architecture would result if cooling systems for components could be eliminated without compromising performance. This book surveys the state-of-the-art for the three major wide bandgap materials (silicon carbide, nitrides, and diamond), assesses the national and international efforts to develop these materials, identifies the technical barriers to their development and manufacture, determines the criteria for successfully packaging and integrating these devices into existing systems, and recommends future research priorities.
Author :
Publisher :
ISBN 13 :
Total Pages : 676 pages
Book Rating : 4.:/5 (31 download)
Download or read book ERDA Energy Research Abstracts written by and published by . This book was released on 1985 with total page 676 pages. Available in PDF, EPUB and Kindle. Book excerpt:
