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Author : Andrew Grenville
Publisher :
ISBN 13 :
Total Pages : 360 pages
Book Rating : 4.F/5 ( download)
Download or read book Short Wavelength Limits to Optical Lithography written by Andrew Grenville and published by . This book was released on 1995 with total page 360 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Harry J. Levinson
Publisher : SPIE Press
ISBN 13 : 9780819456601
Total Pages : 446 pages
Book Rating : 4.4/5 (566 download)
Download or read book Principles of Lithography written by Harry J. Levinson and published by SPIE Press. This book was released on 2005 with total page 446 pages. Available in PDF, EPUB and Kindle. Book excerpt: Lithography is a field in which advances proceed at a swift pace. This book was written to address several needs, and the revisions for the second edition were made with those original objectives in mind. Many new topics have been included in this text commensurate with the progress that has taken place during the past few years, and several subjects are discussed in more detail. This book is intended to serve as an introduction to the science of microlithography for people who are unfamiliar with the subject. Topics directly related to the tools used to manufacture integrated circuits are addressed in depth, including such topics as overlay, the stages of exposure, tools, and light sources. This text also contains numerous references for students who want to investigate particular topics in more detail, and they provide the experienced lithographer with lists of references by topic as well. It is expected that the reader of this book will have a foundation in basic physics and chemistry. No topics will require knowledge of mathematics beyond elementary calculus.
Author : Hyongsok T. Soh
Publisher : Springer Science & Business Media
ISBN 13 : 1475733313
Total Pages : 212 pages
Book Rating : 4.4/5 (757 download)
Download or read book Scanning Probe Lithography written by Hyongsok T. Soh and published by Springer Science & Business Media. This book was released on 2013-03-14 with total page 212 pages. Available in PDF, EPUB and Kindle. Book excerpt: Scanning Probe Lithography (SPL) describes recent advances in the field of scanning probe lithography, a high resolution patterning technique that uses a sharp tip in close proximity to a sample to pattern nanometer-scale features on the sample. SPL is capable of patterning sub-30nm features with nanometer-scale alignment registration. It is a relatively simple, inexpensive, reliable method for patterning nanometer-scale features on various substrates. It has potential applications for nanometer-scale research, for maskless semiconductor lithography, and for photomask patterning. The authors of this book have been key players in this exciting new field. Calvin Quate has been involved since the beginning in the early 1980s and leads the research time that is regarded as the foremost group in this field. Hyongsok Tom Soh and Kathryn Wilder Guarini have been the members of this group who, in the last few years, have brought about remarkable series of advances in SPM lithography. Some of these advances have been in the control of the tip which has allowed the scanning speed to be increased from mum/second to mm/second. Both non-contact and in-contact writing have been demonstrated as has controlled writing of sub-100 nm lines over large steps on the substrate surface. The engineering of a custom-designed MOSFET built into each microcantilever for individual current control is another notable achievement. Micromachined arrays of probes each with individual control have been demonstrated. One of the most intriguing new aspects is the use of directly-grown carbon nanotubes as robust, high-resolution emitters. In this book the authors concisely and authoritatively describe the historical context, the relevant inventions, and the prospects for eventual manufacturing use of this exciting new technology.
Author : Chris Mack
Publisher : John Wiley & Sons
ISBN 13 : 1119965071
Total Pages : 503 pages
Book Rating : 4.1/5 (199 download)
Download or read book Fundamental Principles of Optical Lithography written by Chris Mack and published by John Wiley & Sons. This book was released on 2011-08-10 with total page 503 pages. Available in PDF, EPUB and Kindle. Book excerpt: The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components. By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate. This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter. Additional Information: Visiting http://www.lithoguru.com/textbook/index.html enhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB®, to accompany the textbook. You can also contact the author and find help for instructors.
Author : A. V. Narlikar
Publisher : OUP Oxford
ISBN 13 : 019157967X
Total Pages : 936 pages
Book Rating : 4.1/5 (915 download)
Download or read book Oxford Handbook of Nanoscience and Technology written by A. V. Narlikar and published by OUP Oxford. This book was released on 2010-02-11 with total page 936 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is an agenda-setting and high-profile book that presents an authoritative and cutting-edge analysis of nanoscience and technology. The Oxford Handbook of Nanoscience and Technology provides a comprehensive and accessible overview of the major achievements in different aspects of this field. The Handbook comprises 3 volumes, structured thematically, with 25 chapters each. Volume I presents fundamental issues of basic physics, chemistry, biochemistry, tribology etc. of nanomaterials. Volume II focuses on the progress made with host of nanomaterials including DNA and protein based nanostructures. Volume III highlights engineering and related developments, with a focus on frontal application areas. All chapters are written by noted international experts in the field. The book should be useful for final year undergraduates specializing in the field. It should prove indispensable to graduate students, and serious researchers from academic and industrial sectors working in the field of Nanoscience and Technology from different disciplines including Physics, Chemistry, Biochemistry, Biotechnology, Medicine, Materials Science, Metallurgy, Ceramics, Information Technology as well as Electrical, Electronic and Computational Engineering.
Author : Saburo Nonogaki
Publisher : CRC Press
ISBN 13 : 1482273764
Total Pages : 336 pages
Book Rating : 4.4/5 (822 download)
Download or read book Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology written by Saburo Nonogaki and published by CRC Press. This book was released on 2018-10-08 with total page 336 pages. Available in PDF, EPUB and Kindle. Book excerpt: "Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."
Author : Alfred Kwok-Kit Wong
Publisher : SPIE Press
ISBN 13 : 9780819439956
Total Pages : 238 pages
Book Rating : 4.4/5 (399 download)
Download or read book Resolution Enhancement Techniques in Optical Lithography written by Alfred Kwok-Kit Wong and published by SPIE Press. This book was released on 2001 with total page 238 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ever-smaller IC devices are pushing the optical lithography envelope, increasing the importance of resolution enhancement techniques. This tutorial encompasses two decades of research. It discusses theoretical and practical aspects of commonly used techniques, including optical imaging and resolution, modified illumination, optical proximity correction, alternating and attenuating phase-shifting masks, selecting RETs, and second-generation RETs. Useful for students and practicing lithographers
Author : Manoj Kumar Majumder
Publisher : CRC Press
ISBN 13 : 1000223078
Total Pages : 373 pages
Book Rating : 4.0/5 (2 download)
Download or read book Introduction to Microelectronics to Nanoelectronics written by Manoj Kumar Majumder and published by CRC Press. This book was released on 2020-11-24 with total page 373 pages. Available in PDF, EPUB and Kindle. Book excerpt: Focussing on micro- and nanoelectronics design and technology, this book provides thorough analysis and demonstration, starting from semiconductor devices to VLSI fabrication, designing (analog and digital), on-chip interconnect modeling culminating with emerging non-silicon/ nano devices. It gives detailed description of both theoretical as well as industry standard HSPICE, Verilog, Cadence simulation based real-time modeling approach with focus on fabrication of bulk and nano-devices. Each chapter of this proposed title starts with a brief introduction of the presented topic and ends with a summary indicating the futuristic aspect including practice questions. Aimed at researchers and senior undergraduate/graduate students in electrical and electronics engineering, microelectronics, nanoelectronics and nanotechnology, this book: Provides broad and comprehensive coverage from Microelectronics to Nanoelectronics including design in analog and digital electronics. Includes HDL, and VLSI design going into the nanoelectronics arena. Discusses devices, circuit analysis, design methodology, and real-time simulation based on industry standard HSPICE tool. Explores emerging devices such as FinFETs, Tunnel FETs (TFETs) and CNTFETs including their circuit co-designing. Covers real time illustration using industry standard Verilog, Cadence and Synopsys simulations.
Author : Kenichi Takahata
Publisher : BoD – Books on Demand
ISBN 13 : 9535110853
Total Pages : 238 pages
Book Rating : 4.5/5 (351 download)
Download or read book Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies written by Kenichi Takahata and published by BoD – Books on Demand. This book was released on 2013-05-29 with total page 238 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS technology is increasingly penetrating into our lives and improving our quality of life. In parallel to this, advances in nanotechnology and nanomaterials have been catalyzing the rise of NEMS. Consisting of nine chapters reviewing state-of-the-art technologies and their future trends, this book focuses on the latest development of devices and fabrication processes in the field of these extremely miniaturized electromechanical systems. The book offers new knowledge and insight into design, fabrication, and packaging, as well as solutions in these aspects for targeted applications, aiming to support scientists, engineers and academic trainees who are engaged in relevant research. In the chapters, practical issues and advances are discussed for flexible microdevices, bioMEMS, intelligent implants, optical MEMS, nanomachined structures and NEMS, and others. Most of the chapters also focus on novel fabrication/packaging processes, including silicon bulk micromachining, laser micromachining, nanolithography, and packaging for implantable microelectronics enabled by nanomaterials.
Author : Bernd O. Kolbesen
Publisher : The Electrochemical Society
ISBN 13 : 9781566773485
Total Pages : 572 pages
Book Rating : 4.7/5 (734 download)
Download or read book Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes written by Bernd O. Kolbesen and published by The Electrochemical Society. This book was released on 2003 with total page 572 pages. Available in PDF, EPUB and Kindle. Book excerpt: .".. ALTECH 2003 was Symposium J1 held at the 203rd Meeting of the Electrochemical Society in Paris, France from April 27 to May 2, 2003 ... Symposium M1, Diagnostic Techniques for Semiconductor Materials and Devices, was part of the 202nd Meeting of the Electrochemical Society held in Salt Lake City, Utah, from October 21 to 25, 2002 ..."--p. iii.
Author : Boris Ildusovich Kharisov
Publisher : CRC Press
ISBN 13 : 1466580895
Total Pages : 1203 pages
Book Rating : 4.4/5 (665 download)
Download or read book CRC Concise Encyclopedia of Nanotechnology written by Boris Ildusovich Kharisov and published by CRC Press. This book was released on 2016-01-06 with total page 1203 pages. Available in PDF, EPUB and Kindle. Book excerpt: The CRC Concise Encyclopedia of Nanotechnology sets the standard against which all other references of this nature are measured. As such, it is a major resource for both skilled professionals and novices to nanotechnology.The book examines the design, application, and utilization of devices, techniques, and technologies critical to research at the
Author : Bruce W. Smith
Publisher : CRC Press
ISBN 13 : 1420051539
Total Pages : 864 pages
Book Rating : 4.4/5 (2 download)
Download or read book Microlithography written by Bruce W. Smith and published by CRC Press. This book was released on 2018-10-03 with total page 864 pages. Available in PDF, EPUB and Kindle. Book excerpt: This new edition of the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational considerations, from elementary concepts to advanced aspects of modern submicron microlithography. Each chapter reflects the current research and practices from the world's leading academic and industrial laboratories detailed by a stellar panel of international experts. New in the Second Edition In addition to updated information on existing material, this new edition features coverage of technologies developed over the last decade since the first edition appeared, including: Immersion Lithography 157nm Lithography Electron Projection Lithography (EPL) Extreme Ultraviolet (EUV) Lithography Imprint Lithography Photoresists for 193nm and Immersion Lithography Scatterometry Microlithography: Science and Technology, Second Edition authoritatively covers the physics, chemistry, optics, metrology tools and techniques, resist processing and materials, and fabrication methods involved in the latest generations of microlithography such as immersion lithography and extreme ultraviolet (EUV) lithography. It also looks ahead to the possible future systems and technologies that will bring the next generations to fruition. Loaded with illustrations, equations, tables, and time-saving references to the most current literature, this book is the most comprehensive and reliable source for anyone, from student to seasoned professional, looking to achieve robust, accurate, and cost-effective microlithography processes and systems.
Author : Gabor L. Hornyak
Publisher : CRC Press
ISBN 13 : 1420048066
Total Pages : 852 pages
Book Rating : 4.4/5 (2 download)
Download or read book Introduction to Nanoscience written by Gabor L. Hornyak and published by CRC Press. This book was released on 2008-05-15 with total page 852 pages. Available in PDF, EPUB and Kindle. Book excerpt: Tomorrow's nanoscientist will have a truly interdisciplinary and nano-centric education, rather than, for example, a degree in chemistry with a specialization in nanoscience. For this to happen, the field needs a truly focused and dedicated textbook. This full-color masterwork is such a textbook. It introduces the nanoscale along with the societal
Author : Rainer Waser
Publisher : John Wiley & Sons
ISBN 13 : 3527409270
Total Pages : 1041 pages
Book Rating : 4.5/5 (274 download)
Download or read book Nanoelectronics and Information Technology written by Rainer Waser and published by John Wiley & Sons. This book was released on 2012-05-29 with total page 1041 pages. Available in PDF, EPUB and Kindle. Book excerpt: Fachlich auf höchstem Niveau, visuell überzeugend und durchgängig farbig illustriert: Das ist die neue Auflage der praxisbewährten Einführung in spezialisierte elektronische Materialien und Bauelemente aus der Informationstechnologie. Über ein Drittel des Inhalts ist neu, alle anderen Beiträge wurden gründlich überarbeitet und aktualisiert.
Author : Gabor L. Hornyak
Publisher : CRC Press
ISBN 13 : 1420047809
Total Pages : 1635 pages
Book Rating : 4.4/5 (2 download)
Download or read book Introduction to Nanoscience and Nanotechnology written by Gabor L. Hornyak and published by CRC Press. This book was released on 2008-12-22 with total page 1635 pages. Available in PDF, EPUB and Kindle. Book excerpt: The maturation of nanotechnology has revealed it to be a unique and distinct discipline rather than a specialization within a larger field. Its textbook cannot afford to be a chemistry, physics, or engineering text focused on nano. It must be an integrated, multidisciplinary, and specifically nano textbook. The archetype of the modern nano textbook
Author : Joachim Bargon
Publisher : Springer Science & Business Media
ISBN 13 : 1468448471
Total Pages : 367 pages
Book Rating : 4.4/5 (684 download)
Download or read book Methods and Materials in Microelectronic Technology written by Joachim Bargon and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 367 pages. Available in PDF, EPUB and Kindle. Book excerpt: The papers collected in this volume were presented at the International Symposium on Methods and Materials in Microelectronic Technology. This symposium was sponsored by IBM Germany, and it was held September 29 - October 1, 1982, in Bad Neuenahr, West Germany. The progress of semiconductor and microelectronic technology has become so rapid and the field so sophisticated that it is imperative to exchange the latest insight gained as frequently as it can be accomplished. In addition, it is peculiar for this field that the bulk of the investigations are carried out at industrial research and development laboratories, which makes some of the results less readily accessible. Because of these circumstances, the academic community, which among other things, is supposed to communicate the prog ress in this field to students of different disciplines, finds it rather difficult to stay properly informed. It was the intent of this IBM sponsored symposium to bring together key scientists from academic institutions, primarily from Europe, with principal investigators of the industrial scene. Accordingly, this symposium exposed technologists to scientists and vice versa. Scientific advances often lead directly to technological innovations. In turn, new technologies are often arrived at empirically and, because of that, are initially poorly understood. Scientific inquiry then attempts to probe these processes and phenomena in order to achieve a better understanding. Thus science and technology are intricately interconnected, and it is important that technical exchange between technolo gists and scientists is facilitated, since the problems are typically interdiscipli nary in nature.
Author : Vinod Kumar Khanna
Publisher : CRC Press
ISBN 13 : 1000331350
Total Pages : 790 pages
Book Rating : 4.0/5 (3 download)
Download or read book Nanosensors written by Vinod Kumar Khanna and published by CRC Press. This book was released on 2021-02-25 with total page 790 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanosensors are innovative devices that exploit the unique properties exhibited by matter at the nanoscale. A growing and exciting field, nanosensors have recently spurred considerable research endeavors across the globe, driving a need for the development of new device concepts and engineering nanostructured materials with controlled properties. Nanosensors: Physical, Chemical, and Biological, Second Edition offers a panoramic view of the field and related nanotechnologies with extraordinary clarity and depth. Presenting an interdisciplinary approach, blending physics, chemistry and biology, this new edition is broad in scope and organised into six parts; beginning with the fundamentals before moving onto nanomaterials and nanofabrication technologies in the second part. The third and fourth parts provide a critical appraisal of physical nanosensors, and explore the chemical and biological categories of nanosensors. The fifth part sheds light on the emerging applications of nanosensors in the sectors of society, industry, and defense and details the cutting-edge applications of state-of-the-art nanosensors in environmental science, food technology, medical diagnostics, and biotechnology. The final part addresses self-powering and networking issues of nanosensors, and provides glimpses of future trends. This is an ideal reference for researchers and industry professionals engaged in the frontier areas of material science and semiconductor fabrication as well as graduate students in physics and engineering pursuing electrical engineering and electronics courses with a focus on nanoscience and nanotechnology. Key features: Provides an updated, all-encompassing exploration of contemporary nanosensors and highlights the exclusive nanoscale properties on which nanosensors are designed. Presents an accessible approach with a question-and-answer format to allow an easy grasp of the intricacies involved in the complex working mechanisms of devices. Contains clear, illustrative diagrams enabling the visualization of nanosensor operations, along with worked examples, end of chapter questions, and exhaustive up-to-date bibliographies appended to each chapter.
