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Sheath Heating In Low Pressure Capacitive Radio Frequency Discharges
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Book Synopsis Radio-Frequency Capacitive Discharges by : Yuri P. Raizer
Download or read book Radio-Frequency Capacitive Discharges written by Yuri P. Raizer and published by CRC Press. This book was released on 2017-12-14 with total page 305 pages. Available in PDF, EPUB and Kindle. Book excerpt: The first publication of its kind in the field, this book describes comprehensively and systematically radio-frequency (rf) capacitive gas discharges of intermediate and low pressure and their application to gas laser excitation and to plasma processing. Text presents the physics underlying rf discharges along with techniques for obtaining such discharges, experimental methods and results, and theoretical and numerical modeling findings. Radio-Frequency Capacitive Discharges is written by well-known specialists in the field, authors of many theoretical and experimental works. They provide simple and clear discussions of complicated physical phenomena. A complete review on the state of the art is included. This interesting new book can be used as a textbook for students and postgraduates and as a comprehensive guidebook by specialists.
Book Synopsis Sheath Heating in Low Pressure Capacitive Radio Frequency Discharges by : Blake Philip Wood
Download or read book Sheath Heating in Low Pressure Capacitive Radio Frequency Discharges written by Blake Philip Wood and published by . This book was released on 1991 with total page 320 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Physics of Radiofrequency Capacitive Discharge by : V. P. Savinov
Download or read book Physics of Radiofrequency Capacitive Discharge written by V. P. Savinov and published by CRC Press. This book was released on 2018-05-23 with total page 322 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The main properties and characteristics of RFCD, the features of electric breakdown in a high-frequency field are also investigated. The properties of near-electrode layers of a spatial discharge, the nature of the electric field in them, and the processes of charge transport to electrodes are explored. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, graduate students and students of physics, physical chemistry, and relevant specialties.
Book Synopsis Mechanism of Electron Heating in Radio Frequency (RF) Capacitive Discharges by : Alan Chung Fai Wu
Download or read book Mechanism of Electron Heating in Radio Frequency (RF) Capacitive Discharges written by Alan Chung Fai Wu and published by . This book was released on 2005 with total page 44 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Principles of Plasma Discharges and Materials Processing by : Michael A. Lieberman
Download or read book Principles of Plasma Discharges and Materials Processing written by Michael A. Lieberman and published by John Wiley & Sons. This book was released on 2005-04-08 with total page 795 pages. Available in PDF, EPUB and Kindle. Book excerpt: A Thorough Update of the Industry Classic on Principles of Plasma Processing The first edition of Principles of Plasma Discharges and Materials Processing, published over a decade ago, was lauded for its complete treatment of both basic plasma physics and industrial plasma processing, quickly becoming the primary reference for students and professionals. The Second Edition has been carefully updated and revised to reflect recent developments in the field and to further clarify the presentation of basic principles. Along with in-depth coverage of the fundamentals of plasma physics and chemistry, the authors apply basic theory to plasma discharges, including calculations of plasma parameters and the scaling of plasma parameters with control parameters. New and expanded topics include: * Updated cross sections * Diffusion and diffusion solutions * Generalized Bohm criteria * Expanded treatment of dc sheaths * Langmuir probes in time-varying fields * Electronegative discharges * Pulsed power discharges * Dual frequency discharges * High-density rf sheaths and ion energy distributions * Hysteresis and instabilities * Helicon discharges * Hollow cathode discharges * Ionized physical vapor deposition * Differential substrate charging With new chapters on dusty plasmas and the kinetic theory of discharges, graduate students and researchers in the field of plasma processing should find this new edition more valuable than ever.
Book Synopsis Electron Kinetics and Applications of Glow Discharges by : Uwe Kortshagen
Download or read book Electron Kinetics and Applications of Glow Discharges written by Uwe Kortshagen and published by Springer. This book was released on 2006-04-11 with total page 553 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book resulted from the NATO Advanced Research Workshop on “Electron Kinetics and Applications of Glow Discharges,” held in St. Petersburg, Russia, on May 19-23, 1997. Glow discharges have found widespread applications in many technological processes from the manufacture of semiconductors, to recent developments in na- technology, to the traditional fields of gas lasers, and discharge lamps. Consequently, the interest in the physics of glow discharges has experienced yet another resurgence of interest. While the non-equilibrium character of glow discharges is widely accepted, the opinion still prevails that the main features can be captured by fluid models, and that kinetic treatments are only required for the understanding of subtle details. The erroneousness of this belief is demonstrated by the failure of fluid models to describe many basic features of glow discharges such as, for instance, electrode phenomena, striations, and collisionless heating effects. An adequate description of glow discharges thus has to be of kinetic nature.
Book Synopsis Radio-frequency Discharge Power Measurement with Emphasis on Collisionless Electron Heating in Capacitive Sheaths by : David Gahan
Download or read book Radio-frequency Discharge Power Measurement with Emphasis on Collisionless Electron Heating in Capacitive Sheaths written by David Gahan and published by . This book was released on 2006 with total page 141 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Physics of Radio-Frequency Plasmas by : Pascal Chabert
Download or read book Physics of Radio-Frequency Plasmas written by Pascal Chabert and published by Cambridge University Press. This book was released on 2011-02-24 with total page 395 pages. Available in PDF, EPUB and Kindle. Book excerpt: Low-temperature radio frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on physics, this book will interest graduate students and researchers in applied physics and electrical engineering. The book incorporates a cutting-edge perspective on RF plasmas. It also covers basic plasma physics including transport in bounded plasmas and electrical diagnostics. Its pedagogic style engages readers, helping them to develop physical arguments and mathematical analyses. Worked examples apply the theories covered to realistic scenarios, and over 100 in-text questions let readers put their newly acquired knowledge to use and gain confidence in applying physics to real laboratory situations.
Book Synopsis Principles of Plasma Discharges and Materials Processing by : Michael A. Lieberman
Download or read book Principles of Plasma Discharges and Materials Processing written by Michael A. Lieberman and published by John Wiley & Sons. This book was released on 2024-08-28 with total page 837 pages. Available in PDF, EPUB and Kindle. Book excerpt: A new edition of this industry classic on the principles of plasma processing Plasma-based technology and materials processes have been central to the revolution of the last half-century in micro- and nano-electronics. From anisotropic plasma etching on microprocessors, memory, and analog chips, to plasma deposition for creating solar panels and flat-panel displays, plasma-based materials processes have reached huge areas of technology. As key technologies scale down in size from the nano- to the atomic level, further developments in plasma materials processing will only become more essential. Principles of Plasma Discharges and Materials Processing is the foundational introduction to the subject. It offers detailed information and procedures for designing plasma-based equipment and analyzing plasma-based processes, with an emphasis on the abiding fundamentals. Now fully updated to reflect the latest research and data, it promises to continue as an indispensable resource for graduate students and industry professionals in a myriad of technological fields. Readers of the third edition of Principles of Plasma Discharges and Materials Processing will also find: Extensive figures and tables to facilitate understanding A new chapter covering the recent development of processes involving high-pressure capacitive discharges New subsections on discharge and processing chemistry, physics, and diagnostics Principles of Plasma Discharges and Materials Processing is ideal for professionals and process engineers in the field of plasma-assisted materials processing with experience in the field of science or engineering. It is the premiere world-wide basic text for graduate courses in the field.
Download or read book Physics Briefs written by and published by . This book was released on 1994 with total page 916 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Plasma Physics written by Alexander Piel and published by Springer Science & Business Media. This book was released on 2010-06-14 with total page 405 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is an outgrowth of courses in plasma physics which I have taught at Kiel University for many years. During this time I have tried to convince my students that plasmas as different as gas dicharges, fusion plasmas and space plasmas can be described in a uni ed way by simple models. The challenge in teaching plasma physics is its apparent complexity. The wealth of plasma phenomena found in so diverse elds makes it quite different from atomic physics, where atomic structure, spectral lines and chemical binding can all be derived from a single equation—the Schrödinger equation. I positively accept the variety of plasmas and refrain from subdividing plasma physics into the traditional, but arti cially separated elds, of hot, cold and space plasmas. This is why I like to confront my students, and the readers of this book, with examples from so many elds. By this approach, I believe, they will be able to become discoverers who can see the commonality between a falling apple and planetary motion. As an experimentalist, I am convinced that plasma physics can be best understood from a bottom-up approach with many illustrating examples that give the students con dence in their understanding of plasma processes. The theoretical framework of plasma physics can then be introduced in several steps of re nement. In the end, the student (or reader) will see that there is something like the Schrödinger equation, namely the Vlasov-Maxwell model of plasmas, from which nearly all phenomena in collisionless plasmas can be derived.
Book Synopsis Dissertation Abstracts International by :
Download or read book Dissertation Abstracts International written by and published by . This book was released on 2003 with total page 860 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Energy Research Abstracts written by and published by . This book was released on 1990 with total page 840 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book ERDA Energy Research Abstracts written by and published by . This book was released on 1989 with total page 848 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Principles of Plasma Discharges and Materials Processing by : Michael A. Lieberman
Download or read book Principles of Plasma Discharges and Materials Processing written by Michael A. Lieberman and published by John Wiley & Sons. This book was released on 2024-10-15 with total page 837 pages. Available in PDF, EPUB and Kindle. Book excerpt: A new edition of this industry classic on the principles of plasma processing Plasma-based technology and materials processes have been central to the revolution of the last half-century in micro- and nano-electronics. From anisotropic plasma etching on microprocessors, memory, and analog chips, to plasma deposition for creating solar panels and flat-panel displays, plasma-based materials processes have reached huge areas of technology. As key technologies scale down in size from the nano- to the atomic level, further developments in plasma materials processing will only become more essential. Principles of Plasma Discharges and Materials Processing is the foundational introduction to the subject. It offers detailed information and procedures for designing plasma-based equipment and analyzing plasma-based processes, with an emphasis on the abiding fundamentals. Now fully updated to reflect the latest research and data, it promises to continue as an indispensable resource for graduate students and industry professionals in a myriad of technological fields. Readers of the third edition of Principles of Plasma Discharges and Materials Processing will also find: Extensive figures and tables to facilitate understanding A new chapter covering the recent development of processes involving high-pressure capacitive discharges New subsections on discharge and processing chemistry, physics, and diagnostics Principles of Plasma Discharges and Materials Processing is ideal for professionals and process engineers in the field of plasma-assisted materials processing with experience in the field of science or engineering. It is the premiere world-wide basic text for graduate courses in the field.
Book Synopsis Gaseous Electronics Conference Radio-Frequency Reference Cell by : James K. Olthoff
Download or read book Gaseous Electronics Conference Radio-Frequency Reference Cell written by James K. Olthoff and published by DIANE Publishing. This book was released on 1996 with total page 181 pages. Available in PDF, EPUB and Kindle. Book excerpt: The GEC RF Reference Cell is a parallel plate, capacity-coupled, rf plasma reactor that, in principle, is suitable for studies of basic discharge phenomena, investigation of industrial-type plasmas, and theoretical modeling. This report contains 12 articles that review nearly all of the experiments and theoretical modeling efforts that have been performed over the last 5 years using GEC cells. Together, they serve as a "users' guide" to the operation and performance of the GEC cell.
Book Synopsis Nonlinear Dynamics: From Lasers To Butterflies: Selected Lectures From The 15th Canberra Int'l Physics Summer School by : Nail Akhmediev
Download or read book Nonlinear Dynamics: From Lasers To Butterflies: Selected Lectures From The 15th Canberra Int'l Physics Summer School written by Nail Akhmediev and published by World Scientific. This book was released on 2003-05-22 with total page 451 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is an inspirational introduction to modern research directions and scholarship in nonlinear dynamics, and will also be a valuable reference for researchers in the field. With the scholarly level aimed at the beginning graduate student, the book will have broad appeal to those with an undergraduate background in mathematical or physical sciences.In addition to pedagogical and new material, each chapter reviews the current state of the area and discusses classic and open problems in engaging, surprisingly non-technical ways. The contributors are Brian Davies (bifurcations in maps), Nalini Joshi (integrable systems and asymptotics), Alan Newell (wave turbulence and pattern formation), Mark Ablowitz (nonlinear waves), Carl Weiss (spatial solitons), Cathy Holmes (Hamiltonian systems), Tony Roberts (dissipative fluid mechanics), Jorgen Frederiksen (two-dimensional turbulence), and Mike Lieberman (Fermi acceleration).