Rare Earth Oxide Thin Films from Solution Based Inorganic Precursor Deposition as Potential Candidates for Insulators in Advanced Gate Stacks

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ISBN 13 :
Total Pages : 774 pages
Book Rating : 4.:/5 (865 download)

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Book Synopsis Rare Earth Oxide Thin Films from Solution Based Inorganic Precursor Deposition as Potential Candidates for Insulators in Advanced Gate Stacks by : Maraike Ahlf

Download or read book Rare Earth Oxide Thin Films from Solution Based Inorganic Precursor Deposition as Potential Candidates for Insulators in Advanced Gate Stacks written by Maraike Ahlf and published by . This book was released on 2012 with total page 774 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Rare Earth Oxide Thin Films from Solution Based Inorganic Precursor Deposition as Potential Candidates for Insulators in Advanced Gate Stacks

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ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (863 download)

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Book Synopsis Rare Earth Oxide Thin Films from Solution Based Inorganic Precursor Deposition as Potential Candidates for Insulators in Advanced Gate Stacks by : Maraike Ahlf

Download or read book Rare Earth Oxide Thin Films from Solution Based Inorganic Precursor Deposition as Potential Candidates for Insulators in Advanced Gate Stacks written by Maraike Ahlf and published by . This book was released on 2012 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Thin Films and Heterostructures for Oxide Electronics

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Publisher : Springer Science & Business Media
ISBN 13 : 0387260897
Total Pages : 416 pages
Book Rating : 4.3/5 (872 download)

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Book Synopsis Thin Films and Heterostructures for Oxide Electronics by : Satishchandra B. Ogale

Download or read book Thin Films and Heterostructures for Oxide Electronics written by Satishchandra B. Ogale and published by Springer Science & Business Media. This book was released on 2005-11-21 with total page 416 pages. Available in PDF, EPUB and Kindle. Book excerpt: Oxides form a broad subject area of research and technology development which encompasses different disciplines such as materials science, solid state chemistry, physics etc. The aim of this book is to demonstrate the interplay of these fields and to provide an introduction to the techniques and methodologies involving film growth, characterization and device processing. The literature in this field is thus fairly scattered in different research journals covering one or the other aspect of the specific activity. This situation calls for a book that will consolidate this information and thus enable a beginner as well as an expert to get an overall perspective of the field, its foundations, and its projected progress.

Chemical Solution Deposition of Functional Oxide Thin Films

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Publisher : Springer Science & Business Media
ISBN 13 : 3211993118
Total Pages : 801 pages
Book Rating : 4.2/5 (119 download)

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Book Synopsis Chemical Solution Deposition of Functional Oxide Thin Films by : Theodor Schneller

Download or read book Chemical Solution Deposition of Functional Oxide Thin Films written by Theodor Schneller and published by Springer Science & Business Media. This book was released on 2014-01-24 with total page 801 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the first text to cover all aspects of solution processed functional oxide thin-films. Chemical Solution Deposition (CSD) comprises all solution based thin- film deposition techniques, which involve chemical reactions of precursors during the formation of the oxide films, i. e. sol-gel type routes, metallo-organic decomposition routes, hybrid routes, etc. While the development of sol-gel type processes for optical coatings on glass by silicon dioxide and titanium dioxide dates from the mid-20th century, the first CSD derived electronic oxide thin films, such as lead zirconate titanate, were prepared in the 1980’s. Since then CSD has emerged as a highly flexible and cost-effective technique for the fabrication of a very wide variety of functional oxide thin films. Application areas include, for example, integrated dielectric capacitors, ferroelectric random access memories, pyroelectric infrared detectors, piezoelectric micro-electromechanical systems, antireflective coatings, optical filters, conducting-, transparent conducting-, and superconducting layers, luminescent coatings, gas sensors, thin film solid-oxide fuel cells, and photoelectrocatalytic solar cells. In the appendix detailed “cooking recipes” for selected material systems are offered.

Rare Earth Oxide Thin Films

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Publisher : Springer Science & Business Media
ISBN 13 :
Total Pages : 460 pages
Book Rating : 4.F/5 ( download)

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Book Synopsis Rare Earth Oxide Thin Films by : Marco Fanciulli

Download or read book Rare Earth Oxide Thin Films written by Marco Fanciulli and published by Springer Science & Business Media. This book was released on 2007 with total page 460 pages. Available in PDF, EPUB and Kindle. Book excerpt: Thin rare earth (RE) oxide films are emerging materials for microelectronic, nanoelectronic, and spintronic applications. The state-of-the-art of thin film deposition techniques as well as the structural, physical, chemical, and electrical properties of thin RE oxide films and of their interface with semiconducting substrates are discussed. The aim is to identify proper methodologies for the development of RE oxides thin films and to evaluate their effectiveness as innovative materials in different applications.

Development and Applications of Oxide Thin Films Using Atomic Layer Deposition and Prompt Inorganic Condensation

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ISBN 13 :
Total Pages : 117 pages
Book Rating : 4.:/5 (914 download)

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Book Synopsis Development and Applications of Oxide Thin Films Using Atomic Layer Deposition and Prompt Inorganic Condensation by : Sean Weston Smith

Download or read book Development and Applications of Oxide Thin Films Using Atomic Layer Deposition and Prompt Inorganic Condensation written by Sean Weston Smith and published by . This book was released on 2015 with total page 117 pages. Available in PDF, EPUB and Kindle. Book excerpt: In the first part of this work, thin films of Al2O3 deposited via atomic layer deposition (ALD) are demonstrated to improve the thermal stability of cellulose nanocrystal (CNC) aerogels. ALD is a chemical vapor deposition (CVD) like method in which sequential precursor exposures and self-limited surface reactions produce a conformal thin film with precise thickness control. The conformal nature of ALD is well suited to coating the porous microstructure of aerogels. SEM micrographs of coating thickness depth profiles are shown to agree with trends predicted by precursor penetration models. Thermogravimetric analysis shows samples coated with ALD Al2O3 have increased decomposition temperatures. In the second part of this work, ALD zinc tin oxide (ZTO) is used to demonstrate a technique for measuring the substrate inhibited growth in multicomponent and laminate ALD systems. The thickness control of ALD makes it attractive for multicomponent and laminate systems. However, the surface reactions of ALD mean that the first few cycles, while the film nucleates, may have a different growth per cycle (GPC) than when the film is growing on itself in a bulk growth regime. A model for the substrate inhibited ALD of ZTO is derived from two complementary sets of laminates. The thickness and composition predictions of our model are tested against the bulk GPC of ZnO and SnO2. In the final part of this work, prompt inorganic condensation (PIC) is explored as a potentially more environmentally friendly alternative to ALD for planar thin film applications. Whereas ALD requires expensive vacuum systems and has low precursor utilization, solution based methods, such as PIC, allow atmospheric processing and precursor recycling. The water based PIC solutions use nitrate counter ions which evaporate at low temperatures. Combined with the low energy required to convert the hydroxide precursor clusters into an oxide film makes PIC a promising low temperature route to dense solution processed thin films. The dielectric performance of PIC Al2O3 is shown to be comparable to ALD Al2O3 films on Si though a large interfacial SiO2 layer is found to be dominating the behavior of the PIC films. This interfacial layer is shown to form very quickly (≤ 2 min) at low temperatures (≤ 50°C). This low temperature interfacial oxide growth could be a benefit in passivating solar cells.

Solution Deposition and Characterization of the Thin Film Inorganic Materials

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Publisher :
ISBN 13 :
Total Pages : 112 pages
Book Rating : 4.:/5 (159 download)

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Book Synopsis Solution Deposition and Characterization of the Thin Film Inorganic Materials by : Bahar Özmen

Download or read book Solution Deposition and Characterization of the Thin Film Inorganic Materials written by Bahar Özmen and published by . This book was released on 2008 with total page 112 pages. Available in PDF, EPUB and Kindle. Book excerpt: The general emphasis of this work has been synthesis, characterization, and applications of n- and p-type inorganic oxide thin films that are deposited from solutions. In particular, a study of n-type transparent semiconductor films of tin (IV) oxide and zinc-doped tin (IV) oxide has been performed by spin coating. Solution deposition of antimony-doped to tin (IV) oxide films was also examined for the production of a conductor. The solution deposition of p-type cuprous oxide thin films has been achieved by spin coating an aqueous precursor of copper (II) formate tetrahydrate (aq) and annealing under nitrogen atmosphere. UV curing has also been used to prepare the films. The solution deposition of silver films is performed with the aim of obtaining a conductive contact for a TFT device. Silver metal films were deposited from solutions of Ag2O(s) in aqueous ammonia by spin coating method and annealing in air at temperatures as low as 120°C.

Metallorganic Chemical Vapor Deposition and Atomic Layer Deposition Approaches for the Growth of HF-based Thin Films from Dialkylamide Precursors for Advanced CMOs Gate Stack Applications

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Publisher :
ISBN 13 :
Total Pages : 155 pages
Book Rating : 4.:/5 (18 download)

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Book Synopsis Metallorganic Chemical Vapor Deposition and Atomic Layer Deposition Approaches for the Growth of HF-based Thin Films from Dialkylamide Precursors for Advanced CMOs Gate Stack Applications by : Steven P. Consiglio

Download or read book Metallorganic Chemical Vapor Deposition and Atomic Layer Deposition Approaches for the Growth of HF-based Thin Films from Dialkylamide Precursors for Advanced CMOs Gate Stack Applications written by Steven P. Consiglio and published by . This book was released on 2007 with total page 155 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Processing Oxide Thin Films with Light

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ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (122 download)

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Book Synopsis Processing Oxide Thin Films with Light by : Trey Benjamin Daunis

Download or read book Processing Oxide Thin Films with Light written by Trey Benjamin Daunis and published by . This book was released on 2019 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: High-throughput roll-to-roll manufacturing of solution-deposited metal oxide electronics has the potential to enable the widespread and low-cost availability of thin film electronic devices including solar panels, large-area displays and lighting, and flexible medical devices and sensors. However, several challenges have prevented the realization of this potential: (1) The processing speed of solution-deposited oxides is severely limited by the length of the annealing process, usually greater than 20 minutes, which is typically necessary to convert solution-deposited precursor films into metal oxides, (2) the quality of the resultant metal oxide films is limited by the low upper operating temperatures of low-cost, roll-to-roll compatible, plastic substrates, typically much less than 250 °C, and (3) equilibrium heating of devices to these temperatures often results in mechanical failure of the thin films due to the different thermal responses of the films and substrates. In this dissertation, we address these challenges by using light, rather than heat, as a source of energy for curing solution-deposited metal oxide thin films. We use this method to develop solution-deposited oxide thin film transistors (TFTs) on shape memory polymer (SMP) substrates. We demonstrate the direct patterning of Al2O3 and In2O3 precursor films on SMP by exposure to UV light through a shadow mask as a method to overcome the mechanical failure of blanket-coverage films during thermal annealing. The patterned precursors are then converted to oxides for the gate dielectric and the channel semiconductor of the TFTs by thermal annealing without causing damage to the films. The unexpectedly high mobility displayed by these TFTs is studied and the absorption of water from the atmosphere by the gate dielectric is identified as the cause. Finally, we demonstrate the high-speed photonic curing of ZrO2 dielectric films on polyethylene naphthalate substrates. Using intense pulsed light to both heat and cure the oxide film in as little as 100 milliseconds without significantly heating the substrate, we achieve a process for fabricating metal oxide electronic devices that is compatible with roll-to-roll processing speeds exceeding 30 m/min.

Atomic Layer Deposition for Semiconductors

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Publisher : Springer Science & Business Media
ISBN 13 : 146148054X
Total Pages : 266 pages
Book Rating : 4.4/5 (614 download)

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Book Synopsis Atomic Layer Deposition for Semiconductors by : Cheol Seong Hwang

Download or read book Atomic Layer Deposition for Semiconductors written by Cheol Seong Hwang and published by Springer Science & Business Media. This book was released on 2013-10-18 with total page 266 pages. Available in PDF, EPUB and Kindle. Book excerpt: Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.

Physics of Manganites

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Publisher : Springer Science & Business Media
ISBN 13 : 0306461323
Total Pages : 299 pages
Book Rating : 4.3/5 (64 download)

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Book Synopsis Physics of Manganites by : T.A. Kaplan

Download or read book Physics of Manganites written by T.A. Kaplan and published by Springer Science & Business Media. This book was released on 1999-05-31 with total page 299 pages. Available in PDF, EPUB and Kindle. Book excerpt: This series of books, which is published at the rate of about one per year, addresses fundamental problems in materials science. The contents cover a broad range of topics from small clusters of atoms to engineering materials and involves chemistry, physics, materials science and engineering, with length scales ranging from Ångstroms up to millimeters. The emphasis is on basic science rather than on applications. Each book focuses on a single area of current interest and brings together leading experts to give an up to date discussion of their work and the work of others. Each article contains enough references that the interested reader can access the relevant literature. Thanks are given to the Center for Fundamental Materials Research at Michigan State University for supporting this series. M. F. Thorpe, Series Editor E mail: thorpe@pa. msu. edu V PREFACE This book records invited lectures given at the workshop on Physics of Manganites, held at Michigan State University, July 26 29, 1998. Doped manganites are an interesting class of compounds that show both metal insulator and ferromagnetic to paramagnetic transitions at the same temperature. This was discovered in the early 1950s by Jonker and van Santen and basic theoretical ideas were developed by Zener (1951), Anderson and Hasegawa (1955), and deGennes (1960) to explain these transitions and related interesting observations.

Chemically Deposited Nanocrystalline Metal Oxide Thin Films

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Publisher : Springer Nature
ISBN 13 : 3030684628
Total Pages : 926 pages
Book Rating : 4.0/5 (36 download)

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Book Synopsis Chemically Deposited Nanocrystalline Metal Oxide Thin Films by : Fabian I. Ezema

Download or read book Chemically Deposited Nanocrystalline Metal Oxide Thin Films written by Fabian I. Ezema and published by Springer Nature. This book was released on 2021-06-26 with total page 926 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book guides beginners in the areas of thin film preparation, characterization, and device making, while providing insight into these areas for experts. As chemically deposited metal oxides are currently gaining attention in development of devices such as solar cells, supercapacitors, batteries, sensors, etc., the book illustrates how the chemical deposition route is emerging as a relatively inexpensive, simple, and convenient solution for large area deposition. The advancement in the nanostructured materials for the development of devices is fully discussed.

Oxide Electronics

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Publisher : John Wiley & Sons
ISBN 13 : 1119529476
Total Pages : 628 pages
Book Rating : 4.1/5 (195 download)

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Book Synopsis Oxide Electronics by : Asim K. Ray

Download or read book Oxide Electronics written by Asim K. Ray and published by John Wiley & Sons. This book was released on 2021-04-12 with total page 628 pages. Available in PDF, EPUB and Kindle. Book excerpt: Oxide Electronics Multiple disciplines converge in this insightful exploration of complex metal oxides and their functions and properties Oxide Electronics delivers a broad and comprehensive exploration of complex metal oxides designed to meet the multidisciplinary needs of electrical and electronic engineers, physicists, and material scientists. The distinguished author eschews complex mathematics whenever possible and focuses on the physical and functional properties of metal oxides in each chapter. Each of the sixteen chapters featured within the book begins with an abstract and an introduction to the topic, clear explanations are presented with graphical illustrations and relevant equations throughout the book. Numerous supporting references are included, and each chapter is self-contained, making them perfect for use both as a reference and as study material. Readers will learn how and why the field of oxide electronics is a key area of research and exploitation in materials science, electrical engineering, and semiconductor physics. The book encompasses every application area where the functional and electronic properties of various genres of oxides are exploited. Readers will also learn from topics like: Thorough discussions of High-k gate oxide for silicon heterostructure MOSFET devices and semiconductor-dielectric interfaces An exploration of printable high-mobility transparent amorphous oxide semiconductors Treatments of graphene oxide electronics, magnetic oxides, ferroelectric oxides, and materials for spin electronics Examinations of the calcium aluminate binary compound, perovoksites for photovoltaics, and oxide 2Degs Analyses of various applications for oxide electronics, including data storage, microprocessors, biomedical devices, LCDs, photovoltaic cells, TFTs, and sensors Suitable for researchers in semiconductor technology or working in materials science, electrical engineering, and physics, Oxide Electronics will also earn a place in the libraries of private industry researchers like device engineers working on electronic applications of oxide electronics. Engineers working on photovoltaics, sensors, or consumer electronics will also benefit from this book.

Design and Development of Nanostructured Thin Films

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Publisher : MDPI
ISBN 13 : 3039287389
Total Pages : 386 pages
Book Rating : 4.0/5 (392 download)

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Book Synopsis Design and Development of Nanostructured Thin Films by : Antonella Macagnano

Download or read book Design and Development of Nanostructured Thin Films written by Antonella Macagnano and published by MDPI. This book was released on 2020-05-13 with total page 386 pages. Available in PDF, EPUB and Kindle. Book excerpt: Due to their unique size-dependent physicochemical properties, nanostructured thin films are used in a wide range of applications from smart coating and drug delivery to electrocatalysis and highly-sensitive sensors. Depending on the targeted application and the deposition technique, these materials have been designed and developed by tuning their atomic-molecular 2D- and/or 3D-aggregation, thickness, crystallinity, and porosity, having effects on their optical, mechanical, catalytic, and conductive properties. Several open questions remain about the impact of nanomaterial production and use on environment and health. Many efforts are currently being made not only to prevent nanotechnologies and nanomaterials from contributing to environmental pollution but also to design nanomaterials to support, control, and protect the environment. This Special Issue aims to cover the recent advances in designing nanostructured films focusing on environmental issues related to their fabrication processes (e.g., low power and low cost technologies, the use of environmentally friendly solvents), their precursors (e.g., waste-recycled, bio-based, biodegradable, and natural materials), their applications (e.g., controlled release of chemicals, mimicking of natural processes, and clean energy conversion and storage), and their use in monitoring environment pollution (e.g., sensors optically- or electrically-sensitive to pollutants)

Sol-Gel Technologies for Glass Producers and Users

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Publisher : Springer Science & Business Media
ISBN 13 : 0387889531
Total Pages : 474 pages
Book Rating : 4.3/5 (878 download)

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Book Synopsis Sol-Gel Technologies for Glass Producers and Users by : Michel Andre Aegerter

Download or read book Sol-Gel Technologies for Glass Producers and Users written by Michel Andre Aegerter and published by Springer Science & Business Media. This book was released on 2013-03-19 with total page 474 pages. Available in PDF, EPUB and Kindle. Book excerpt: Sol-Gel Techniques for Glass Producers and Users provides technological information, descriptions and characterizations of prototypes, or products already on the market, and illustrates advantages and disadvantages of the sol-gel process in comparison to other methods. The first chapter entitled "Wet Chemical Technology" gives a summary of the basic principles of the sol-gel chemistry. The most promising applications are related to coatings. Chapter 2 describes the various "Wet Chemical Coating Technologies" from glass cleaning to many deposition and post-coating treatment techniques. These include patterning of coatings through direct or indirect techniques which have became very important and for which the sol-gel processing is particularly well adapted. Chapter 3 entitled "Bulk Glass Technologies" reports on the preparation of special glasses for different applications. Chapter 4 entitled "Coatings and Materials Properties" describes the properties of the different coatings and the sol-gel materials, fibers and powders. The chapter also includes a section dedicated to the characterization techniques especially applied to sol-gel coatings and products.

High-k Gate Dielectric Materials

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Publisher : CRC Press
ISBN 13 : 1000527441
Total Pages : 248 pages
Book Rating : 4.0/5 (5 download)

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Book Synopsis High-k Gate Dielectric Materials by : Niladri Pratap Maity

Download or read book High-k Gate Dielectric Materials written by Niladri Pratap Maity and published by CRC Press. This book was released on 2020-12-18 with total page 248 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume explores and addresses the challenges of high-k gate dielectric materials, one of the major concerns in the evolving semiconductor industry and the International Technology Roadmap for Semiconductors (ITRS). The application of high-k gate dielectric materials is a promising strategy that allows further miniaturization of microelectronic components. This book presents a broad review of SiO2 materials, including a brief historical note of Moore’s law, followed by reliability issues of the SiO2 based MOS transistor. It goes on to discuss the transition of gate dielectrics with an EOT ~ 1 nm and a selection of high-k materials. A review of the various deposition techniques of different high-k films is also discussed. High-k dielectrics theories (quantum tunneling effects and interface engineering theory) and applications of different novel MOSFET structures, like tunneling FET, are also covered in this book. The volume also looks at the important issues in the future of CMOS technology and presents an analysis of interface charge densities with the high-k material tantalum pentoxide. The issue of CMOS VLSI technology with the high-k gate dielectric materials is covered as is the advanced MOSFET structure, with its working structure and modeling. This timely volume will prove to be a valuable resource on both the fundamentals and the successful integration of high-k dielectric materials in future IC technology.

Nanoscale Materials

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Publisher : Springer Science & Business Media
ISBN 13 : 0306481081
Total Pages : 506 pages
Book Rating : 4.3/5 (64 download)

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Book Synopsis Nanoscale Materials by : Luis M. Liz-Marzán

Download or read book Nanoscale Materials written by Luis M. Liz-Marzán and published by Springer Science & Business Media. This book was released on 2007-05-08 with total page 506 pages. Available in PDF, EPUB and Kindle. Book excerpt: Organized nanoassemblies of inorganic nanoparticles and organic molecules are building blocks of nanodevices, whether they are designed to perform molecular level computing, sense the environment or improve the catalytic properties of a material. The key to creation of these hybrid nanostructures lies in understanding the chemistry at a fundamental level. This book serves as a reference book for researchers by providing fundamental understanding of many nanoscopic materials.