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Rapid Thermal Processing And Beyond
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Book Synopsis Rapid Thermal Processing and beyond: Applications in Semiconductor Processing by : Wielfried Lerch
Download or read book Rapid Thermal Processing and beyond: Applications in Semiconductor Processing written by Wielfried Lerch and published by Trans Tech Publications Ltd. This book was released on 2008-03-24 with total page 427 pages. Available in PDF, EPUB and Kindle. Book excerpt: Special topic volume with invited papers only
Book Synopsis Rapid Thermal Processing by : Richard B. Fair
Download or read book Rapid Thermal Processing written by Richard B. Fair and published by Academic Press. This book was released on 2012-12-02 with total page 441 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.
Book Synopsis Advances in Rapid Thermal Processing by : Fred Roozeboom
Download or read book Advances in Rapid Thermal Processing written by Fred Roozeboom and published by The Electrochemical Society. This book was released on 1999 with total page 470 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Rapid Thermal Processing for Future Semiconductor Devices by : H. Fukuda
Download or read book Rapid Thermal Processing for Future Semiconductor Devices written by H. Fukuda and published by Elsevier. This book was released on 2003-04-02 with total page 161 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume is a collection of papers which were presented at the 2001 International Conference on Rapid Thermal Processing (RTP 2001) held at Ise Shima, Mie, on November 14-16, 2001. This symposium is second conference followed the previous successful first International RTP conference held at Hokkaido in 1997. The RTP 2001 covered the latest developments in RTP and other short-time processing continuously aiming to point out the future direction in the Silicon ULSI devices and II-VI, III-V compound semiconductor devices.This book covers the following areas: advanced MOS gate stack, integration technologies, advancd channel engineering including shallow junction, SiGe, hetero-structure, novel metallization, inter-connect, silicidation, low-k materials, thin dielectrics including gate dielectrics and high-k materials, thin film deposition including SiGe, SOI and SiC, process and device modelling, Laser-assisted crystallization and TFT device fabrication technologies, temperature monitoring and slip-free technologies.
Book Synopsis Advances in Rapid Thermal and Integrated Processing by : F. Roozeboom
Download or read book Advances in Rapid Thermal and Integrated Processing written by F. Roozeboom and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 568 pages. Available in PDF, EPUB and Kindle. Book excerpt: Rapid thermal and integrated processing is an emerging single-wafer technology in ULSI semiconductor manufacturing, electrical engineering, applied physics and materials science. Here, the physics and engineering of this technology are discussed at the graduate level. Three interrelated areas are covered. First, the thermophysics of photon-induced annealing of semiconductor and related materials, including fundamental pyrometry and emissivity issues, the modelling of reactor designs and processes, and their relation to temperature uniformity. Second, process integration, treating the advances in basic equipment design, scale-up, integrated cluster-tool equipment, including wafer cleaning and integrated processing. Third, the deposition and processing of thin epitaxial, dielectric and metal films, covering selective deposition and epitaxy, integrated processing of layer stacks, and new areas of potential application, such as the processing of III-V semiconductor structures and thin- film head processing for high-density magnetic data storage.
Book Synopsis Rapid Thermal Processing of Semiconductors by : Victor E. Borisenko
Download or read book Rapid Thermal Processing of Semiconductors written by Victor E. Borisenko and published by Springer Science & Business Media. This book was released on 2013-11-22 with total page 374 pages. Available in PDF, EPUB and Kindle. Book excerpt: Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.
Book Synopsis Rapid Thermal and Other Short-time Processing Technologies III by : Paul J. Timans
Download or read book Rapid Thermal and Other Short-time Processing Technologies III written by Paul J. Timans and published by The Electrochemical Society. This book was released on 2002 with total page 500 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Rapid Thermal and Other Short-time Processing Technologies II by : Dim-Lee Kwong
Download or read book Rapid Thermal and Other Short-time Processing Technologies II written by Dim-Lee Kwong and published by The Electrochemical Society. This book was released on 2001 with total page 458 pages. Available in PDF, EPUB and Kindle. Book excerpt: "Electronics, Dielectric Science and Technology, and High Temperature Materials Divisions."
Book Synopsis Beyond-CMOS Nanodevices 1 by : Francis Balestra
Download or read book Beyond-CMOS Nanodevices 1 written by Francis Balestra and published by John Wiley & Sons. This book was released on 2014-06-02 with total page 576 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book offers a comprehensive review of the state-of-the-art in innovative Beyond-CMOS nanodevices for developing novel functionalities, logic and memories dedicated to researchers, engineers and students. It particularly focuses on the interest of nanostructures and nanodevices (nanowires, small slope switches, 2D layers, nanostructured materials, etc.) for advanced More than Moore (RF-nanosensors-energy harvesters, on-chip electronic cooling, etc.) and Beyond-CMOS logic and memories applications.
Book Synopsis Rapid Thermal and Other Short-time Processing Technologies by : Fred Roozeboom
Download or read book Rapid Thermal and Other Short-time Processing Technologies written by Fred Roozeboom and published by The Electrochemical Society. This book was released on 2000 with total page 482 pages. Available in PDF, EPUB and Kindle. Book excerpt: The proceedings from this May 2000 symposium illustrate the range of applications in Rapid Thermal Processing (RTP). The refereed papers cover a variety of issues, such as ultra-shallow junctions; contacts for nanoscale CMOS; gate stacks; new applications of RTP, such as for the enhanced crystalization of amorphous silicon thin films; and advances on RTP systems and process monitoring, including optimizing and controlling gas flows in an RTCVD reactor. Most presentations are supported by charts and other graphical data. c. Book News Inc.
Book Synopsis Rapid Thermal and Integrated Processing III: Volume 342 by : Jimmie J. Wortman
Download or read book Rapid Thermal and Integrated Processing III: Volume 342 written by Jimmie J. Wortman and published by . This book was released on 1994-08-02 with total page 472 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Download or read book ISTFA 2010 written by and published by ASM International. This book was released on 2010-01-01 with total page 487 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Flash Lamp Annealing by : Lars Rebohle
Download or read book Flash Lamp Annealing written by Lars Rebohle and published by Springer. This book was released on 2019-07-27 with total page 304 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users.
Book Synopsis Photovoltaics Beyond Silicon by : Senthilarasu Sundaram
Download or read book Photovoltaics Beyond Silicon written by Senthilarasu Sundaram and published by Elsevier. This book was released on 2024-07-01 with total page 819 pages. Available in PDF, EPUB and Kindle. Book excerpt: Photovoltaics Beyond Silicon: Innovative Materials, Sustainable Processing Technologies, and Novel Device Structures presents the latest innovations in materials, processing and devices to produce electricity via advanced, sustainable photovoltaics technologies. The book provides an overview of the novel materials and device architectures that have been developed to optimize energy conversion efficiencies and minimize environmental impacts. Advances in technologies for harnessing solar energy are extensively discussed, with topics including materials processing, device fabrication, sustainability of materials and manufacturing, and the current state-of-the-art. Contributions from leading international experts discuss the applications, challenges and future prospects of research in this increasingly vital field, providing a valuable resource for students and researchers working in this area. - Presents a comprehensive overview and detailed discussion of solar energy technology options for sustainable energy conversion - Provides an understanding of the environmental challenges to be overcome and discusses the importance of efficient materials utilization for clean energy - Looks at how to design materials processing and optimize device fabrication, including metrics such as power-to-weight ratio, effectiveness at EOL compared to BOL, life-cycle analysis
Book Synopsis Making a Semiconductor Superpower by : Dong-Won Kim
Download or read book Making a Semiconductor Superpower written by Dong-Won Kim and published by CRC Press. This book was released on 2023-09-29 with total page 238 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides real stories about the South Korean semiconductor community. It explores the lives and careers of six influential semiconductor engineers who all studied at Korea Advanced Institute of Science and Technology (KAIST) under the mentorship of Dr. Kim Choong-Ki, the most influential semiconductor professor in South Korea during the last quarter of the twentieth century. Kim’s students became known as “Kim’s Mafia” because of the important positions they went on to hold in industry, government, and academia. This book will be of interest to semiconductor engineers and electronics engineers, historians of science and technology, and scholars and students of East Asian studies. “They were called ‘Kim’s Mafia.’ Kim Choong-Ki himself wouldn’t have put it that way. But it was true what semiconductor engineers in South Korea whispered about his former students: They were everywhere. ... Kim was the first professor in South Korea to systematically teach semiconductor engineering. From 1975, when the nation had barely begun producing its first transistors, to 2008, when he retired from teaching, Kim trained more than 100 students, effectively creating the first two generations of South Korean semiconductor experts.” (Source: IEEE Spectrum, October, 2022.)
Book Synopsis Rapid Thermal Processing: Volume 52 by : Thomas O. Sedgwick
Download or read book Rapid Thermal Processing: Volume 52 written by Thomas O. Sedgwick and published by Mrs Proceedings. This book was released on 1986-04-15 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Book Synopsis Advanced Short-time Thermal Processing for Si-based CMOS Devices by : Fred Roozeboom
Download or read book Advanced Short-time Thermal Processing for Si-based CMOS Devices written by Fred Roozeboom and published by The Electrochemical Society. This book was released on 2003 with total page 488 pages. Available in PDF, EPUB and Kindle. Book excerpt:
