Read Books Online and Download eBooks, EPub, PDF, Mobi, Kindle, Text Full Free.
Download Rapid Thermal And Related Processing Techniques full books in PDF, epub, and Kindle. Read online Rapid Thermal And Related Processing Techniques ebook anywhere anytime directly on your device. Fast Download speed and no annoying ads. We cannot guarantee that every ebooks is available!
Author : Rajendra Singh
Publisher :
ISBN 13 :
Total Pages : 440 pages
Book Rating : 4.3/5 (91 download)
Download or read book Rapid Thermal and Related Processing Techniques written by Rajendra Singh and published by . This book was released on 1991 with total page 440 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Richard B. Fair
Publisher : Academic Press
ISBN 13 : 0323139809
Total Pages : 441 pages
Book Rating : 4.3/5 (231 download)
Download or read book Rapid Thermal Processing written by Richard B. Fair and published by Academic Press. This book was released on 2012-12-02 with total page 441 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.
Author : Dim-Lee Kwong
Publisher : The Electrochemical Society
ISBN 13 : 9781566773157
Total Pages : 458 pages
Book Rating : 4.7/5 (731 download)
Download or read book Rapid Thermal and Other Short-time Processing Technologies II written by Dim-Lee Kwong and published by The Electrochemical Society. This book was released on 2001 with total page 458 pages. Available in PDF, EPUB and Kindle. Book excerpt: "Electronics, Dielectric Science and Technology, and High Temperature Materials Divisions."
Author : J. C. Gelpey
Publisher :
ISBN 13 :
Total Pages : 416 pages
Book Rating : 4.:/5 (318 download)
Download or read book Rapid Thermal and Integrated Processing V: Volume 429 written by J. C. Gelpey and published by . This book was released on 1996-10-14 with total page 416 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is the latest in a continuing series on rapid thermal processing and related topics. It embraces a diversity of research, development and manufacturing activities that require rapid thermal and integrated processing techniques which are recognized by their acronyms, such as rapid thermal annealing (RTA), rapid thermal processing (RTP), rapid thermal chemical vapor deposition (RTCVP), rapid thermal oxidation (RTO), and others. This fifth anniversary volume reports notable advances in the use of rapid thermal techniques in processing science and technology, and for process control in industrial fabrication facilities. It is organized around progress obtained through: evaluation methodology; equipment and process modelling; temperature control; defects and diffusion associated with annealing; metallizations such as silicidation; novel processing of sol-gel and magnetic films; dielectric growth and deposition; and silicon or silicon-germanium film deposition.
Author : Wielfried Lerch
Publisher : Trans Tech Publications Ltd
ISBN 13 : 3038131733
Total Pages : 448 pages
Book Rating : 4.0/5 (381 download)
Download or read book Rapid Thermal Processing and beyond: Applications in Semiconductor Processing written by Wielfried Lerch and published by Trans Tech Publications Ltd. This book was released on 2008-03-24 with total page 448 pages. Available in PDF, EPUB and Kindle. Book excerpt: Heat-treatment and thermal annealing are very common processing steps which have been employed during semiconductor manufacturing right from the beginning of integrated circuit technology. In order to minimize undesired diffusion, and other thermal budget-dependent effects, the trend has been to reduce the annealing time sharply by switching from standard furnace batch-processing (involving several hours or even days), to rapid thermal processing involving soaking times of just a few seconds. This transition from thermal equilibrium, to highly non-equilibrium, processing was very challenging and is still a field ripe for further development.
Author : Rajendra Singh
Publisher :
ISBN 13 :
Total Pages : 422 pages
Book Rating : 4.:/5 (114 download)
Download or read book Rapid Thermal and Related Processing Techniques written by Rajendra Singh and published by . This book was released on 1990 with total page 422 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : F. Roozeboom
Publisher : Springer Science & Business Media
ISBN 13 : 9401587116
Total Pages : 568 pages
Book Rating : 4.4/5 (15 download)
Download or read book Advances in Rapid Thermal and Integrated Processing written by F. Roozeboom and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 568 pages. Available in PDF, EPUB and Kindle. Book excerpt: Rapid thermal and integrated processing is an emerging single-wafer technology in ULSI semiconductor manufacturing, electrical engineering, applied physics and materials science. Here, the physics and engineering of this technology are discussed at the graduate level. Three interrelated areas are covered. First, the thermophysics of photon-induced annealing of semiconductor and related materials, including fundamental pyrometry and emissivity issues, the modelling of reactor designs and processes, and their relation to temperature uniformity. Second, process integration, treating the advances in basic equipment design, scale-up, integrated cluster-tool equipment, including wafer cleaning and integrated processing. Third, the deposition and processing of thin epitaxial, dielectric and metal films, covering selective deposition and epitaxy, integrated processing of layer stacks, and new areas of potential application, such as the processing of III-V semiconductor structures and thin- film head processing for high-density magnetic data storage.
Author : Rajendra Singh
Publisher :
ISBN 13 : 9780819404626
Total Pages : pages
Book Rating : 4.4/5 (46 download)
Download or read book Rapid Thermal and Related Processing Techniques written by Rajendra Singh and published by . This book was released on 1991 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Fred Roozeboom
Publisher : The Electrochemical Society
ISBN 13 : 9781566772327
Total Pages : 470 pages
Book Rating : 4.7/5 (723 download)
Download or read book Advances in Rapid Thermal Processing written by Fred Roozeboom and published by The Electrochemical Society. This book was released on 1999 with total page 470 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : P Richardson
Publisher : Elsevier
ISBN 13 : 1855739070
Total Pages : 527 pages
Book Rating : 4.8/5 (557 download)
Download or read book Improving the thermal Processing of Foods written by P Richardson and published by Elsevier. This book was released on 2004-07-16 with total page 527 pages. Available in PDF, EPUB and Kindle. Book excerpt: The application of heat is both an important method of preserving foods and a means of developing texture, flavour and colour. It has long been recognised that thermal technologies must ensure the safety of food without compromising food quality. Improving the thermal processing of foods summarises key research both on improving particular thermal processing techniques and measuring their effectiveness. Part one examines how best to optimise thermal processes, with chapters addressing safety and quality, efficiency and productivity and the application of computational fluid dynamics. Part two focuses on developments in technologies for sterilisation and pasteurisation with chapters on modelling retort temperature control and developments in packaging, sous-vide and cook-chill processing. There are chapters covering continuous heat processing, including developments in tubular heat exchangers, aseptic processing and ohmic and air impingement heating. The fourth part considers the validation of thermal processes, modelling heat penetration curves, using data loggers and time-temperature integrators and other new measuring techniques. The final group of chapters detail methods of analysing microbial inactivation in thermal processing and identifying and dealing with heat-resistant bacteria. Improving the thermal processing of foods is a standard reference book for those working in the food processing industry. Concisely explores prevailing developments in thermal technologies Summarises key research for improving food preservation techniques Analyses the effectiveness of methods used to enhance the quality of food
Author : Senate Commission on Food Safety SKLM
Publisher : John Wiley & Sons
ISBN 13 : 3527611509
Total Pages : 294 pages
Book Rating : 4.5/5 (276 download)
Download or read book Thermal Processing of Food written by Senate Commission on Food Safety SKLM and published by John Wiley & Sons. This book was released on 2007-09-24 with total page 294 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the latest and most authoritative documentation of current scientific knowledge regarding the health effects of thermal food processing. Authors from all over Europe and the USA provide an international perspective, weighing up the risks and benefits. In addition, the contributors outline those areas where further research is necessary.
Author : Nuggehalli M. Ravindra
Publisher : Minerals, Metals, & Materials Society
ISBN 13 :
Total Pages : 192 pages
Book Rating : 4.F/5 ( download)
Download or read book Transient Thermal Processing Techniques in Electronic Materials written by Nuggehalli M. Ravindra and published by Minerals, Metals, & Materials Society. This book was released on 1996 with total page 192 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume presents a research update of silicon and non-silicon transient processing techniques such as rapid thermal processing, pulsed laser processes, flash evaporation, jet processes, and more. Also covered are process sensors, equipment issues, and the manufacturing perspective.
Author : A. Slaoui
Publisher : Elsevier Science
ISBN 13 : 9780080436128
Total Pages : 0 pages
Book Rating : 4.4/5 (361 download)
Download or read book Rapid Thermal Processing written by A. Slaoui and published by Elsevier Science. This book was released on 1999-03-17 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Rapid Thermal Processing (RTP) is a well established single-wafer technology in USLI semiconductor manufacturing and electrical engineering, as well as in materials science. The biggest advantage of RTP is that it eliminates the long-ramp-up and ramp-down times associated with furnaces, enabling a significant reduction in the thermal budget. Today, RTP is in production use for source/drain implant annealing, contact alloying, formation of refractory nitrides and silicides and thin gate dielectric (oxide) formation. The aim of Symposium I was to provide an overview of the latest information on research and development in the different topics cited above. The potential applications of RTP in new areas like large area devices such as flat planel displays and solar cells has to be investigated. About 30 papers were presented in this symposium. The contributions of most interest involved modelling and control, junctions formation and thermal oxidation, deposition and recrystallisation and silicide formations. However, the range of topics and the intent to focus on underlying, fundamental issues like dopant diffusion in silicon from solid sources, strain relaxation and photonic effects, nucleation as well as applications to magnetic films and solar cells devices.
Author : S. Donald Holdsworth
Publisher : Springer
ISBN 13 : 3319249045
Total Pages : 525 pages
Book Rating : 4.3/5 (192 download)
Download or read book Thermal Processing of Packaged Foods written by S. Donald Holdsworth and published by Springer. This book was released on 2015-11-30 with total page 525 pages. Available in PDF, EPUB and Kindle. Book excerpt: This new edition discusses the physical and engineering aspects of the thermal processing of packaged foods and examines the methods which have been used to establish the time and temperature of processes suitable to achieve adequate sterilization or pasteurization of the packaged food. The third edition is totally renewed and updated, including new concepts and areas that are relevant for thermal food processing: This edition is formed by 22 chapters—arranged in five parts—that maintain great parts of the first and second editions The First part includes five chapters analyzing different topics associated to heat transfer mechanism during canning process, kinetic of microbial death, sterilization criteria and safety aspect of thermal processing. The second part, entitled Thermal Food Process Evaluation Techniques, includes six chapters and discusses the main process evaluation techniques. The third part includes six chapters treating subjects related with pressure in containers, simultaneous sterilization and thermal food processing equipment. The fourth part includes four chapters including computational fluid dynamics and multi-objective optimization. The fifth part, entitled Innovative Thermal Food Processing, includes a chapter focused on two innovative processes used for food sterilization such high pressure with thermal sterilization and ohmic heating. Thermal Processing of Pa ckaged Foods, Third Edition is intended for a broad audience, from undergraduate to post graduate students, scientists, engineers and professionals working for the food industry.
Author : National Aeronautics and Space Administration (NASA)
Publisher : Createspace Independent Publishing Platform
ISBN 13 : 9781722722807
Total Pages : 30 pages
Book Rating : 4.7/5 (228 download)
Download or read book Rapid Thermal Processing (Rtp) of Semiconductors in Space written by National Aeronautics and Space Administration (NASA) and published by Createspace Independent Publishing Platform. This book was released on 2018-07-10 with total page 30 pages. Available in PDF, EPUB and Kindle. Book excerpt: The progress achieved on the project entitled 'Rapid Thermal Processing of Semiconductors in Space' for a 12 month period of activity ending March 31, 1993 is summarized. The activity of this group is being performed under the direct auspices of the ROMPS program. The main objective of this program is to develop and demonstrate the use of advanced robotics in space with rapid thermal process (RTP) of semiconductors providing the test technology. Rapid thermal processing is an ideal processing step for demonstration purposes since it encompasses many of the characteristics of other processes used in solid state device manufacturing. Furthermore, a low thermal budget is becoming more important in existing manufacturing practice, while a low thermal budget is critical to successful processing in space. A secondary objective of this project is to determine the influence of microgravity on the rapid thermal process for a variety of operating modes. In many instances, this involves one or more fluid phases. The advancement of microgravity processing science is an important ancillary objective. Anderson, T. J. and Jones, K. S. Unspecified Center NAG5-1809...
Author :
Publisher :
ISBN 13 :
Total Pages : 460 pages
Book Rating : 4.3/5 (91 download)
Download or read book Rapid Thermal and Integrated Processing written by and published by . This book was released on 1997 with total page 460 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Yong Jin Lee
Publisher :
ISBN 13 :
Total Pages : 312 pages
Book Rating : 4.:/5 (386 download)
Download or read book Temperature Measurement in Rapid Thermal Processing Using Acoustic Techniques written by Yong Jin Lee and published by . This book was released on 1994 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt:
