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Author : Fred Roozeboom
Publisher : The Electrochemical Society
ISBN 13 : 9781566772327
Total Pages : 470 pages
Book Rating : 4.7/5 (723 download)
Download or read book Advances in Rapid Thermal Processing written by Fred Roozeboom and published by The Electrochemical Society. This book was released on 1999 with total page 470 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Materials Research Society. Meeting
Publisher :
ISBN 13 :
Total Pages : 696 pages
Book Rating : 4.:/5 (318 download)
Download or read book Microwave Processing of Materials V: Volume 430 written by Materials Research Society. Meeting and published by . This book was released on 1996-10-28 with total page 696 pages. Available in PDF, EPUB and Kindle. Book excerpt: Based on an international gathering of scientists and engineers from 17 countries, this book, the fifth in a continuing series, assesses microwave processing of materials as an emerging technology. Significant advances in understanding and control of microwave energy and its use in the processing and testing of materials are outlined. Future research and development needs are also explored. Topics include: scale-up and commercialization; microwave nondestructive testing; microwave processing; microwave system design; dielectric properties measurements and analysis; modelling of microwave heating; microwave interactions and mechanisms; microwave processing using variable frequency sources; alternate microwave sources; remediation of hazardous waste; temperature modelling and measurements; microwave processing of polymers; and plasma processing.
Author : J. C. Gelpey
Publisher :
ISBN 13 :
Total Pages : 416 pages
Book Rating : 4.:/5 (318 download)
Download or read book Rapid Thermal and Integrated Processing V: Volume 429 written by J. C. Gelpey and published by . This book was released on 1996-10-14 with total page 416 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is the latest in a continuing series on rapid thermal processing and related topics. It embraces a diversity of research, development and manufacturing activities that require rapid thermal and integrated processing techniques which are recognized by their acronyms, such as rapid thermal annealing (RTA), rapid thermal processing (RTP), rapid thermal chemical vapor deposition (RTCVP), rapid thermal oxidation (RTO), and others. This fifth anniversary volume reports notable advances in the use of rapid thermal techniques in processing science and technology, and for process control in industrial fabrication facilities. It is organized around progress obtained through: evaluation methodology; equipment and process modelling; temperature control; defects and diffusion associated with annealing; metallizations such as silicidation; novel processing of sol-gel and magnetic films; dielectric growth and deposition; and silicon or silicon-germanium film deposition.
Author : Hisham Z. Massoud
Publisher : The Electrochemical Society
ISBN 13 : 9781566771306
Total Pages : 686 pages
Book Rating : 4.7/5 (713 download)
Download or read book ULSI Science and Technology/1997 written by Hisham Z. Massoud and published by The Electrochemical Society. This book was released on 1997 with total page 686 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Walter J. Gray
Publisher :
ISBN 13 :
Total Pages : 1398 pages
Book Rating : 4.:/5 (318 download)
Download or read book Scientific Basis for Nuclear Waste Management XX: Volume 465 written by Walter J. Gray and published by . This book was released on 1997-07 with total page 1398 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book features scientific research that supports the safe and effective disposal of radioactive waste in a geological repository. One highlight of the volume is the opening talk by Rustum Roy, who was instrumental in establishing the first symposium on this topic in 1978. Professor Roy summarizes his views of the past 19 years of progress in the field. A second highlight is the participation by several Russian and Ukrainian scientists who authored papers on nuclear waste disposal aspects of the Chernobyl Unit 4 reactor that exploded in April 1986. Additional topics include: glass formulations and properties; glass/water interactions; cements in radioactive waste management; ceramic and crystalline waste forms; spent nuclear fuel; waste processing and treatment; radiation effects in ceramics, glasses and nuclear waste materials; waste package materials; radionuclide solubility and speciation; radionuclide sorption; radionuclide transport; repository backfill; performance assessment; natural analogues and excess plutonium dispositioning.
Author : Yue Kuo
Publisher : The Electrochemical Society
ISBN 13 : 9781566773850
Total Pages : 324 pages
Book Rating : 4.7/5 (738 download)
Download or read book Thin Film Transistor Technologies VI written by Yue Kuo and published by The Electrochemical Society. This book was released on 2003 with total page 324 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Clyde L. Briant
Publisher :
ISBN 13 :
Total Pages : 546 pages
Book Rating : 4.:/5 (318 download)
Download or read book Interfacial Engineering for Optimized Properties: Volume 458 written by Clyde L. Briant and published by . This book was released on 1997-07-08 with total page 546 pages. Available in PDF, EPUB and Kindle. Book excerpt: The study of interfaces is one of the oldest areas of research in materials science. The presence of grain boundaries in materials has long been recognized, as has its crucial role in determining mechanical properties. Another long-recognized concept is that the properties of a surface are quite different from those of the bulk. In recent years, researchers have been able to study these interfaces, both internal and external, with a detail not before possible. These advances have stemmed from the ability to obtain atomic resolution images of interfaces, to measure accurate chemical compositions of interfaces, and to model these interfaces and their properties. This volume goes a step further, beyond structural and chemical studies, to explore how all of this information can be used to engineer interfaces for improved properties and overall improved material performance. Significant attention is given to the crystallographic nature of grain boundaries and interfaces, and the relationship between this nature and the performance of a material. The versatility of electron back-scattering pattern analysis (EBSP) in solving a number of interface-related problems is also featured.
Author : Fred Roozeboom
Publisher : The Electrochemical Society
ISBN 13 : 9781566772747
Total Pages : 482 pages
Book Rating : 4.7/5 (727 download)
Download or read book Rapid Thermal and Other Short-time Processing Technologies written by Fred Roozeboom and published by The Electrochemical Society. This book was released on 2000 with total page 482 pages. Available in PDF, EPUB and Kindle. Book excerpt: The proceedings from this May 2000 symposium illustrate the range of applications in Rapid Thermal Processing (RTP). The refereed papers cover a variety of issues, such as ultra-shallow junctions; contacts for nanoscale CMOS; gate stacks; new applications of RTP, such as for the enhanced crystalization of amorphous silicon thin films; and advances on RTP systems and process monitoring, including optimizing and controlling gas flows in an RTCVD reactor. Most presentations are supported by charts and other graphical data. c. Book News Inc.
Author : Andrew David Oliver
Publisher :
ISBN 13 :
Total Pages : 448 pages
Book Rating : 4.3/5 (91 download)
Download or read book A Bulk-micromachined Uncooled Infrared Imager for Use in Semiconductor Process Control Applications written by Andrew David Oliver and published by . This book was released on 1997 with total page 448 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : William F. Filter
Publisher :
ISBN 13 :
Total Pages : 616 pages
Book Rating : 4.:/5 (318 download)
Download or read book Materials Reliability in Microelectronics VI: Volume 428 written by William F. Filter and published by . This book was released on 1996-11-18 with total page 616 pages. Available in PDF, EPUB and Kindle. Book excerpt: MRS books on materials reliability in microelectronics have become the snapshot of progress in this field. Reduced feature size, increased speed, and larger area are all factors contributing to the continual performance and functionality improvements in integrated circuit technology. These same factors place demands on the reliability of the individual components that make up the IC. Achieving increased reliability requires an improved understanding of both thin-film and patterned-feature materials properties and their degradation mechanisms, how materials and processes used to fabricate ICs interact, and how they may be tailored to enable reliability improvements. This book focuses on the physics and materials science of microelectronics reliability problems rather than the traditional statistical, accelerated electrical testing aspects. Studies are grouped into three large sections covering electromigration, gate oxide reliability and mechanical stress behavior. Topics include: historical summary; reliability issues for Cu metallization; characterization of electromigration phenomena; modelling; microstructural evolution and influences; oxide and device reliability; thin oxynitride dielectrics; noncontact diagnostics; stress effects in thin films and interconnects and microbeam X-ray techniques for stress measurements.
Author : Yoshio Nishi
Publisher : CRC Press
ISBN 13 : 9780824787837
Total Pages : 1186 pages
Book Rating : 4.7/5 (878 download)
Download or read book Handbook of Semiconductor Manufacturing Technology written by Yoshio Nishi and published by CRC Press. This book was released on 2000-08-09 with total page 1186 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Handbook of Semiconductor Manufacturing Technology describes the individual processes and manufacturing control, support, and infrastructure technologies of silicon-based integrated-circuit manufacturing, many of which are also applicable for building devices on other semiconductor substrates. Discussing ion implantation, rapid thermal processing, photomask fabrication, chip testing, and plasma etching, the editors explore current and anticipated equipment, devices, materials, and practices of silicon-based manufacturing. The book includes a foreword by Jack S. Kilby, cowinner of the Nobel Prize in Physics 2000 "for his part in the invention of the integrated circuit."
Author : C. C. Koch
Publisher :
ISBN 13 :
Total Pages : 818 pages
Book Rating : 4.4/5 (91 download)
Download or read book High-Temperature Ordered Intermetallic Alloys VII: Volume 460 written by C. C. Koch and published by . This book was released on 1997-07-30 with total page 818 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This book focuses specifically on processing and microstructural control, alloy design, mechanical properties and industrial applications. Examples of structural applications of the 'mature' intermetallics, TiAl and Ni3Al are also featured.
Author : J. M. Drake
Publisher :
ISBN 13 :
Total Pages : 408 pages
Book Rating : 4.:/5 (318 download)
Download or read book Dynamics in Small Confining Systems III: Volume 464 written by J. M. Drake and published by . This book was released on 1997-06-03 with total page 408 pages. Available in PDF, EPUB and Kindle. Book excerpt: Interfacial science has rapidly expanded beyond the original realm of chemistry to include physics, mechanical and chemical engineering, biology, materials science, and other specialized subfields. This book in a series from MRS emphasizes the effects of confinement on the physical and chemical properties of equilibrium and nonequilibrium systems. Of particular interest is the question of how nearby surfaces or ultra-small geometries can force a system to behave in ways significantly different than it behaves in bulk. Theoretical, experimental and computational evidence of the effects of confinement on gaseous, liquid and solid systems is presented. Topics include: probing confined systems; structure and dynamics of liquids at interfaces; nanorheology and tribology; adsorption; diffusion in porous systems and reaction dynamics.
Author :
Publisher :
ISBN 13 :
Total Pages : 334 pages
Book Rating : 4.3/5 (91 download)
Download or read book Advanced Catalytic Materials written by and published by . This book was released on 1997 with total page 334 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : André Lagendijk
Publisher :
ISBN 13 :
Total Pages : 224 pages
Book Rating : 4.:/5 (318 download)
Download or read book Low-Dielectric Constant Materials II: Volume 443 written by André Lagendijk and published by . This book was released on 1997-08-19 with total page 224 pages. Available in PDF, EPUB and Kindle. Book excerpt: Low-dielectric constant materials are needed to improve the performance and speed of future integrated circuits. In fact, the diversity of contributors to this book is testimony to the global significance of the topic to the future of semiconductor manufacturing. Presentations include those by semiconductor equipment manufacturers and chemical source suppliers, academia from six countries, four government laboratories and five major device manufacturers. Approaches to designing and implementing reduction in dielectric constant for intermetal dielectric materials are featured and range from the evolution of silicon dioxide to fluorinated silicate glass, to the use of inorganic/organic polymers and spin-on-material, to fluorinated diamond-like carbon and nanoporous silica. The book also addresses the practical aspects of the use of low-dielectric constant materials such as chemical mechanical polishing of these materials and optimization of wiring delays in devices utilizing low-k material.
Author : Fernando A. Ponce
Publisher :
ISBN 13 :
Total Pages : 1290 pages
Book Rating : 4.3/5 (91 download)
Download or read book III-V Nitrides written by Fernando A. Ponce and published by . This book was released on 1997 with total page 1290 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Seshu B. Desu
Publisher :
ISBN 13 :
Total Pages : 480 pages
Book Rating : 4.:/5 (318 download)
Download or read book Ferroelectric Thin Films V: Volume 433 written by Seshu B. Desu and published by . This book was released on 1996-11-08 with total page 480 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
