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Proceedings Of The International Workshop On Inelastic Ion Surface Collisions 3
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Book Synopsis Proceedings of the Seventh International Workshop on Inelastic Ion-Surface Collisions by : Marek Szymonski
Download or read book Proceedings of the Seventh International Workshop on Inelastic Ion-Surface Collisions written by Marek Szymonski and published by CRC Press. This book was released on 1989 with total page 358 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Inelastic Particle-Surface Collisions by : E. Taglauer
Download or read book Inelastic Particle-Surface Collisions written by E. Taglauer and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 337 pages. Available in PDF, EPUB and Kindle. Book excerpt: The interaction of particles and photons with solid surfaces is interdisci plinary in character, so that very recent developments in solid-state phys ics, surface physics and atomic physics stimulate progress in the field or profit from results of the "ion-solid" community. Technical interest in the field ranges from catalysis and semiconductor manufacturing to fusion re search, for instance by surface analytical techniques, or interest in phenom ena such as sputtering and radiation damage. The Third International Workshop on Inelastic Ion-Surface Coll isions, held at Feldkirchen-Westerham under the auspices of Max-Planck-Institut fUr Plasmaphysik, Garching, Fed. Rep. of Germany, brought together 63 scientists from 12 countries for three days of very involved discussions. As at the pre vious workshops at Bell Laboratories in 1976 and McMaster University in 1978, the experiment of gathering experts from seemingly different disciplines was very successful in promoting the basic physical ideas. The proceedings contain the 14 major reviews and a smaller number of con tributions presented at the workshop. All papers have been reviewed with little delay, and the reviewer's efforts are gratefully acknowledged. The first group of papers is concerned with theoretical and experimental aspects of secondary electron emission due to ion impact, including the potential emission caused by slow metastables. This is followed by reviews of exper iments and recent theoretical developments of electron- and photon-induced desorption.
Book Synopsis Surface Passivation and Junction Engineering in Silicon by : Gaurav Thareja
Download or read book Surface Passivation and Junction Engineering in Silicon written by Gaurav Thareja and published by Stanford University. This book was released on 2011 with total page 99 pages. Available in PDF, EPUB and Kindle. Book excerpt: The planar silicon MOSFET is facing diminishing performance returns in improvement from device geometry scaling. Two alternative devices are being explored as possible solutions to this problem. The first contender is a multi-gate device (FINFET or surround gate) and the other is a MOSFET with high mobility channel material such as germanium, III-V or carbon. Ge has emerged as an important materials platform during recent years. With its high carrier mobility and the ability to detect and emit photons at telecommunications wavelengths, Ge is an attractive candidate for applications in both high performance electronics and optoelectronics. Moreover due to its compatibility with conventional CMOS fabrication, it can be processed using the standard manufacturing techniques that are currently used for silicon. However Ge does present a number of unique challenges that must be overcome, including issues of surface passivation, low n-type dopant solubility, and high dopant diffusivity. In this work, the unique properties of surface passivation enabled by radical oxidation are discussed. Some of the highlights are low temperature processing, substrate orientation independent growth rate of dielectric and low interface density. Subsequently, this radical oxidation is applied to 3D vertical gate all around (GAA) silicon MOSFET devices. Higher drive current, lower gate leakage and higher gate dielectric breakdown voltage are demonstrated for GAA devices using radical oxidation in comparison to thermal oxidation In the second part, radical oxidation is investigated for GeO2 growth as an interfacial layer in high-k / Ge gate stack. Using MOSCAP and n-MOSFET devices on Ge, low interface state density combined with drive current and electron mobility enhancement is demonstrated for Ge devices. In the third part, the source/drain junctions for Ge are studied. Ultra-shallow junctions using plasma immersion ion implantation are demonstrated. High n-type dopant activation in Ge using laser annealing is realized along with high performance diodes, significant reduction of contact resistance and integration in a MOSFET process flow.
Download or read book INIS Atomindex written by and published by . This book was released on 1988 with total page 948 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Desorption Induced by Electronic Transitions DIET I by : N. H. Tolk
Download or read book Desorption Induced by Electronic Transitions DIET I written by N. H. Tolk and published by Springer. This book was released on 1983-03-01 with total page 292 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Workshop on Desorption Induced by Electronic Transitions (DIET) took place May 12-14, 1982, in Williamsburg, Virginia. The meeting brought together, for the first time, most of the leading workers in the fields of electron and photon stimulated desorption from surfaces, as well as many workers in related fields, including sputtering, gas-phase photodissociation and solid-state theory. The emphasis of the workshop was on the microscopic mechanism of stimu lated desorption. Many possible mechanisms have been proposed, and a few new ones emerged at the meeting. Though no consensus was reached, many views were espoused and criticized, frequently with considerable enthusiasm. The result was an appraisal of our current understanding of DIET, and a focus on the experimental and theoretical efforts most likely to lead to new insights. This volume is an attempt to record the information exchanged in this very successful workshop and, perhaps, convey some of the excitement of the field of DIET. The book is a collection of papers written by participants in the DIET workshop, including in addition a contribution from Dietrich Menzel, who was unable to attend. Thus, this book represents a complete statement of the state of the art of experimental and theoretical studies of DIET and related phenomena. More importantly, it addresses the interesting unsolved problems, and suggests strategies for unraveling them. We acknowledge the assistance given by the other members of the organizing committee, A. E. de Vries, R. Gomer, M. L. Knotek, D. Menzel and D. P.
Book Synopsis Secondary Ion Mass Spectrometry SIMS IV by : A. Benninghoven
Download or read book Secondary Ion Mass Spectrometry SIMS IV written by A. Benninghoven and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 518 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume contains full proceedings of the Fourth International Conference on Secondary Ion Mass Spectrometry (SIMS-IV), held in the Minoo-Kanko Hotel, Osaka, Japan, from November 13th to 19th, 1983. Coordinated by a local or ganizing committee under the auspices of the international organizing com mittee, it followed earlier conferences held in MUnster (1977), Stanford (1979), and Budapest (1981). The conference was attended by about 250 participants from 18 countries, and 130 papers including 24 invited ones were presented. Reflecting the rap idly expanding activities in the SIMS field, informative papers were pre sented containing up-to-date information on SIMS and various related fields. The proceedings focussed upon six main issues: (1) Fundamentals of sput tering and secondary ion formation. (2) Recent progress in instrumentation, including submicron SIMS and image processing. (3) SIMS combined with other surface analysis techniques. (4) Outstanding SIMS-related analytical methods such as laser-microprobe SIMS, sputtered neutral mass spectrometry, mass spectrometry of sputtered neutrals by multi-photon resonance ionization, and accelerator-based SIMS. (5) Organic SIMS and FAB which has recently become a rapidly expanding technique in pharmacy, biotechnology, etc. (6) Appl ica tions of SIMS to various fields such as metallurgy, geology, and biology, including depth profiling of semiconductors, and analysis of inorganic mate rials. As a venue for the exchange of ideas and information concerning all the above issues, the conference proved a great success.
Book Synopsis Energy Meetings by : United States. Department of Energy. Technical Information Center
Download or read book Energy Meetings written by United States. Department of Energy. Technical Information Center and published by . This book was released on 1985 with total page 684 pages. Available in PDF, EPUB and Kindle. Book excerpt: A listing of forthcoming meetings, conventions, etc.
Book Synopsis Ion Implantation And Ion Beam Equipmen - Proceedings Of The International Conference by : Karpuzov D S
Download or read book Ion Implantation And Ion Beam Equipmen - Proceedings Of The International Conference written by Karpuzov D S and published by #N/A. This book was released on 1991-07-16 with total page 604 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Gesamtverzeichnis der Kongress-Schriften in Bibliotheken der Bundesrepublik Deutschland einschliesslich Berlin (West). by : Staatsbibliothek Preussischer Kulturbesitz. Abteilung Gesamtkataloge und Dokumentation
Download or read book Gesamtverzeichnis der Kongress-Schriften in Bibliotheken der Bundesrepublik Deutschland einschliesslich Berlin (West). written by Staatsbibliothek Preussischer Kulturbesitz. Abteilung Gesamtkataloge und Dokumentation and published by . This book was released on 1982 with total page 628 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis The British Library General Catalogue of Printed Books 1976 to 1982 by : British Library
Download or read book The British Library General Catalogue of Printed Books 1976 to 1982 written by British Library and published by . This book was released on 1983 with total page 616 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Index of Conference Proceedings by : British Library. Document Supply Centre
Download or read book Index of Conference Proceedings written by British Library. Document Supply Centre and published by . This book was released on 2003 with total page 870 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book National Union Catalog written by and published by . This book was released on 1979 with total page 1032 pages. Available in PDF, EPUB and Kindle. Book excerpt: Includes entries for maps and atlases.
Book Synopsis Laser Processing and Diagnostics by : D. Bäuerle
Download or read book Laser Processing and Diagnostics written by D. Bäuerle and published by Springer Science & Business Media. This book was released on 2013-11-11 with total page 561 pages. Available in PDF, EPUB and Kindle. Book excerpt: Laser processing is now a rapidly increasing field with many real and potential applications in different areas of technology such as micromecha nics, metallurgy, integrated optics, and semiconductor device fabrication. The neces s ity for such soph i st i cated 1 i ght sources as 1 asers is based on the spatial coherence and the monochromaticity of laser light. The spatial coherence permits extreme focussing of the laser light resulting in the availability of high energy densities which can be used for strongly loca lized heat- and chemical-treatment of materials, with a resolution down to 1 ess than 1 lJIll. When us i ng pul sed or scanned cw-l asers, 1 oca 1 i zat i on in time is also possible. Additionally, the monochromaticity of laser light allows for control of the depth of heat treatment and/or selective, nonthermal bond breaking - within the surface of the material or within the molecules of the surrounding reactive atmosphere - simply by tuning the laser wavelength. These inherent advantages of laser light permit micromachining of materials (drilling, cutting, welding etc.) and also allow single-step controlled area processing of thin films and surfaces. Processes include structural transformation (removal of residual damage, grain growth in polycrystalline material, amorphization, surface hardening etc.), etching, doping, alloying, or deposition. In addition, laser processing is not 1 imited to planar substrates.
Download or read book Energy Research Abstracts written by and published by . This book was released on 1985 with total page 780 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Subject Catalog by : Library of Congress
Download or read book Subject Catalog written by Library of Congress and published by . This book was released on 1978 with total page 1016 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Sputtering by Particle Bombardment I by : R. Behrisch
Download or read book Sputtering by Particle Bombardment I written by R. Behrisch and published by Springer. This book was released on 1981-08-01 with total page 304 pages. Available in PDF, EPUB and Kindle. Book excerpt: With contributions by numerous experts
Book Synopsis Springer Tracts in Modern Physics by :
Download or read book Springer Tracts in Modern Physics written by and published by . This book was released on 1982 with total page 200 pages. Available in PDF, EPUB and Kindle. Book excerpt:
