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Positron Annihilation Study Of P Implanted Si
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Book Synopsis Positron Annihilation Study of P Implanted Si by :
Download or read book Positron Annihilation Study of P Implanted Si written by and published by . This book was released on 1992 with total page 19 pages. Available in PDF, EPUB and Kindle. Book excerpt: High-energy ion implantation (above 200 keV) is now commonly used in a variety of VLSI processes. The high energy required for these implants is often achieved by implanting multiply charged ions, which inevitably brings in the problem of low-energy ion contamination. The low-energy contamination is difficult to diagnose and detect. Positron annihilation spectroscopy is used to examine the defect distributions in these high energy implants with varying degrees of contamination.
Book Synopsis Positron Annihilation Study of P Implanted Si by :
Download or read book Positron Annihilation Study of P Implanted Si written by and published by . This book was released on 1992 with total page 19 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :Reinhard Krause-Rehberg Publisher :Springer Science & Business Media ISBN 13 :9783540643715 Total Pages :408 pages Book Rating :4.6/5 (437 download)
Book Synopsis Positron Annihilation in Semiconductors by : Reinhard Krause-Rehberg
Download or read book Positron Annihilation in Semiconductors written by Reinhard Krause-Rehberg and published by Springer Science & Business Media. This book was released on 1999 with total page 408 pages. Available in PDF, EPUB and Kindle. Book excerpt: This comprehensive book reports on recent investigations of lattice imperfections in semiconductors by means of positron annihilation. It reviews positron techniques, and describes the application of these techniques to various kinds of defects, such as vacancies, impurity vacancy complexes and dislocations.
Book Synopsis Positron Annihilation Studies of Silicon-based Materials by : Mihail P. Petkov
Download or read book Positron Annihilation Studies of Silicon-based Materials written by Mihail P. Petkov and published by . This book was released on 1998 with total page 354 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis SOME POSITRON ANNIHILATION STU by : King-Fung Ho
Download or read book SOME POSITRON ANNIHILATION STU written by King-Fung Ho and published by Open Dissertation Press. This book was released on 2017-01-27 with total page 268 pages. Available in PDF, EPUB and Kindle. Book excerpt: This dissertation, "Some Positron Annihilation Studies on Highly Doped and Supersaturated N-type Silicon" by King-fung, Ho, 何競豐, was obtained from The University of Hong Kong (Pokfulam, Hong Kong) and is being sold pursuant to Creative Commons: Attribution 3.0 Hong Kong License. The content of this dissertation has not been altered in any way. We have altered the formatting in order to facilitate the ease of printing and reading of the dissertation. All rights not granted by the above license are retained by the author. Abstract: Abstract of thesis entitled SOME POSITRON ANNIHILATION STUDIES ON HIGHLY DOPED AND SUPERSATURATED N-TYPE SILICON Submitted by HO KING FUNG for the degree of Doctor of Philosophy at The University of Hong Kong in July 2004 Positron Annihilation Spectroscopy (PAS) is a non-destructive technique that can be extensively used to probe the point defect structures found in solids. The basic physics behind PAS such as implantation, transport, vacancy trapping and annihilation are reviewed together with the various experimental techniques. Deconvolution algorithms have been applied to Coincidence Doppler Broadening Spectroscopy (CDBS) to improve the effective momentum resolution of the technique. The CDBS system instrumental resolution function is obtained using 85 the 514-keV line from Sr. The generalized least square method with Tikonov-Miller regularization, which incorporates a priori non-negativity constraints, is found to be very effective. Monte-Carlo simulations of CDBS have been used to optimize the deconvolution. The deconvolution technique, when applied to a series of well annealed polycrystalline metals, gives results that are found to be comparable quality-wise to those obtained by one dimensional Angular Correlation of Annihilation Radiation (ACAR). An attempt was made to evaluate the significance of ACAR data from positrons trapped in a crystal defect by defect studying the E-center (vacancy-dopant pair) in silicon. The Fourier transformation of the ACAR momentum distribution coming from positrons trapped at the E-center was studied. This gives in real-space the autocorrelation function of the positron-electron wavefunction product at the site of annihilation. Employing the ratio of the autocorrelation function for the E-center and bulk silicon, the positron binding energy to the E-center was estimated. It has been possible to approximately isolate that part of the E-centers' autocorrelation function that originates from the localized defect orbitals and to see spatial features relating to atomic positions in the E-center. Nonequilibrium processing consisting of ion implantation followed by annealing has been employed to produce supersaturated Antimony doped silicon. The defect structure of the ion implanted region and the post-implanted region have been studied using the Variable Energy Positron Annihilation Spectroscopy (VEPAS) technique. Evidence is given that positrons are trapped into precipitates or get trapped at precipitate boundaries at annealing temperatures less than 600C. Surprisingly, new vacancy defects appear in the implanted region at annealing temperatures over 600C. This is tentatively attributed to the fact that Sb precipitates begin to dissolve at these temperatures into VSb type complexes. DOI: 10.5353/th_b3028710 Subjects: Positron annihilation Electron spectroscopy Silicon crystals - Defects
Book Synopsis Ion Implantation Technology - 92 by : D.F. Downey
Download or read book Ion Implantation Technology - 92 written by D.F. Downey and published by Elsevier. This book was released on 2012-12-02 with total page 716 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ion implantation technology has made a major contribution to the dramatic advances in integrated circuit technology since the early 1970's. The ever-present need for accurate models in ion implanted species will become absolutely vital in the future due to shrinking feature sizes. Successful wide application of ion implantation, as well as exploitation of newly identified opportunities, will require the development of comprehensive implant models. The 141 papers (including 24 invited papers) in this volume address the most recent developments in this field. New structures and possible approaches are described. The implications for ion implantation technology as well as additional observations of needs and opportunities are discussed. The volume will be of value to all those who are interested in acquiring a more complete understanding of the current developments in ion implantation processes and comprehensive implant models.
Book Synopsis Positron Annihilation - ICPA-9 by : Zs. Kajcsos
Download or read book Positron Annihilation - ICPA-9 written by Zs. Kajcsos and published by Trans Tech Publications Ltd. This book was released on 1992-01-01 with total page 2146 pages. Available in PDF, EPUB and Kindle. Book excerpt: The volumes present over 400 reviewed papers on the present state of the art and future prospects in the wide field of research involving positrons. The foreword by Edward Teller and the summaries by Jean-Charles Abbe (Chemistry) and Alfred Seeger (Physics) demonstrate how the field is seen from "outside" and from "inside".
Book Synopsis Positron Annihilation Studies of Defects in Silicon by : Peter J. Simpson
Download or read book Positron Annihilation Studies of Defects in Silicon written by Peter J. Simpson and published by . This book was released on 1992 with total page 274 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Progress in Positron Annihilation by : Rados?aw Zaleski
Download or read book Progress in Positron Annihilation written by Rados?aw Zaleski and published by Trans Tech Publications Ltd. This book was released on 2010-12-30 with total page 172 pages. Available in PDF, EPUB and Kindle. Book excerpt: Volume is indexed by Thomson Reuters CPCI-S (WoS). The aim of this special collection is to present recent progress made, and reflect current ideas, in research fields where positron and positronium are involved. The contents cover a wide range of positron-related research topics; including both fundamental (theoretical calculations, radiation chemistry, hyperfine interactions, positronium physics and chemistry) and applied (metal, polymer, thin film and other materials, development of experimental techniques) aspects.
Book Synopsis Positron Annihilation - ICPA-17 by : Zhi Quan Chen
Download or read book Positron Annihilation - ICPA-17 written by Zhi Quan Chen and published by Trans Tech Publications Ltd. This book was released on 2017-03-24 with total page 350 pages. Available in PDF, EPUB and Kindle. Book excerpt: Some theoretical aspects, practical results and experimental techniques of use of the positron annihilation phenomena in the research of the structure, defects of structure and other properties of different materials and mediums are covered in this journal volume. It comprises the papers presented at the 17th International Conference on Positron Annihilation (ICPA-17, Wuhan, China, 20-25 September, 2015).
Book Synopsis Positron Annihilation by : A.T. Steward
Download or read book Positron Annihilation written by A.T. Steward and published by Elsevier. This book was released on 2012-12-02 with total page 455 pages. Available in PDF, EPUB and Kindle. Book excerpt: Positron Annihilation focuses on the process of positron annihilation in different environments. Partitioned into two parts with 42 chapters, the book contains the contributions of authors who have done research on the annihilation of positrons, which brought about valuable information on the properties of matter. The first part of the book deals with lengthy review articles, including a survey of the physics of positron annihilation; positron annihilation in metals and the theory involved in the process; and positron annihilation in alkali halides and ionic crystals. Positronium formation and interaction in gases, molecular substances, and ionic crystals are also given attention. Gaseous positronics and positron annihilation in condensed gases and liquids are also discussed. The second part of the book focuses on developments on positron annihilation and the direction of research on this field. The studies concentrate on positron annihilation in various crystals, metals, mercury, liquefied gases, helium, and metal oxides. Numerical representations and analyses are presented to support the processes involved. The book can best serve the interest of those who want to explore further the annihilation of positrons.
Book Synopsis Principles and Applications of Positron & Positronium Chemistry by : Y. C. Jean
Download or read book Principles and Applications of Positron & Positronium Chemistry written by Y. C. Jean and published by World Scientific. This book was released on 2003 with total page 426 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a comprehensive description of the principles and applications of positron and positronium chemistry. Pedagogical and tutorial in nature, it will be ideal for graduate students and researchers in the area of positron annihilation spectroscopy. The contributing authors are authoritative scientists prominent in the frontiers of research, actively pursuing positron annihilation research on chemical and applied systems. Contents: Introduction to Positron and Positronium Chemistry (Y C Jean et al.); Compounds of Positrons and Positronium (D M Schrader); Experimental Techniques in Positron Spectroscopy (P G Coleman); Organic and Inorganic Chemistry of the Positron and Positronium (G Duplotre & I Billard); Physical and Radiation Chemistry of the Positron and Positronium (S V Stepanov & V M Byakov); Positrons and Positronium in the Gas Phase (D M Schrader); Positron Porosimetry (M H Weber & K G Lynn); Positron Annihilation Studies on Superconducting Materials (C S Sundar); Positronium in Si and SiO 2 Thin Films (R Suzuki); Applications to Polymers (P E Mallon); Applications of Slow Positrons to Polymeric Surfaces and Coatings (Y C Jean et al.); Positron Annihilation Induced Auger Spectroscopy (S Amdani et al.); Characterization of Nanoparticle and Nanopore Materials (J Xu); AMOC in Positron and Positronium Chemistry (H Stoll et al.). Readership: Materials science researchers; physical chemists; polymer scientists and engineers; chemical and mechanical engineers; solid state physicists; graduate students in chemistry, physics, engineering and polymer science; coating industry researchers."
Book Synopsis Principles And Applications Of Positron And Positronium Chemistry by : Jerry Y C Jean
Download or read book Principles And Applications Of Positron And Positronium Chemistry written by Jerry Y C Jean and published by World Scientific. This book was released on 2003-04-04 with total page 426 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a comprehensive description of the principles and applications of positron and positronium chemistry. Pedagogical and tutorial in nature, it will be ideal for graduate students and researchers in the area of positron annihilation spectroscopy. The contributing authors are authoritative scientists prominent in the frontiers of research, actively pursuing positron annihilation research on chemical and applied systems.
Book Synopsis Some Positron Annihilation Studies on Highly Doped and Supersaturated N-type Silicon by : King-fung Ho
Download or read book Some Positron Annihilation Studies on Highly Doped and Supersaturated N-type Silicon written by King-fung Ho and published by . This book was released on 2004 with total page 508 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Positron Studies of Solids, Surfaces, and Atoms by : Allen P. Mills
Download or read book Positron Studies of Solids, Surfaces, and Atoms written by Allen P. Mills and published by . This book was released on 1986 with total page 360 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Positron Annihilation Investigation of Electron Irradiated Silicon by : Victor P. Avalos
Download or read book Positron Annihilation Investigation of Electron Irradiated Silicon written by Victor P. Avalos and published by . This book was released on 1997 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Positron Annihilation Studies on Porous Silicon and Zeolite by : 黃承智
Download or read book Positron Annihilation Studies on Porous Silicon and Zeolite written by 黃承智 and published by . This book was released on 1997 with total page 112 pages. Available in PDF, EPUB and Kindle. Book excerpt: