High Power Impulse Magnetron Sputtering

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Author :
Publisher : Elsevier
ISBN 13 : 0128124547
Total Pages : 398 pages
Book Rating : 4.1/5 (281 download)

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Book Synopsis High Power Impulse Magnetron Sputtering by : Daniel Lundin

Download or read book High Power Impulse Magnetron Sputtering written by Daniel Lundin and published by Elsevier. This book was released on 2019-08-30 with total page 398 pages. Available in PDF, EPUB and Kindle. Book excerpt: High Power Impulse Magnetron Sputtering: Fundamentals, Technologies, Challenges and Applications is an in-depth introduction to HiPIMS that emphasizes how this novel sputtering technique differs from conventional magnetron processes in terms of both discharge physics and the resulting thin film characteristics. Ionization of sputtered atoms is discussed in detail for various target materials. In addition, the role of self-sputtering, secondary electron emission and the importance of controlling the process gas dynamics, both inert and reactive gases, are examined in detail with an aim to generate stable HiPIMS processes. Lastly, the book also looks at how to characterize the HiPIMS discharge, including essential diagnostic equipment. Experimental results and simulations based on industrially relevant material systems are used to illustrate mechanisms controlling nucleation kinetics, column formation and microstructure evolution.

Cathodic Arcs

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Publisher : Springer Science & Business Media
ISBN 13 : 0387791086
Total Pages : 555 pages
Book Rating : 4.3/5 (877 download)

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Book Synopsis Cathodic Arcs by : André Anders

Download or read book Cathodic Arcs written by André Anders and published by Springer Science & Business Media. This book was released on 2009-07-30 with total page 555 pages. Available in PDF, EPUB and Kindle. Book excerpt: Cathodic arcs are among the longest studied yet least understood objects in science. Plasma-generating, tiny spots appear on the cathode; they are highly dynamic and hard to control. With an approach emphasizing the fractal character of cathode spots, strongly fluctuating plasma properties are described such as the presence of multiply charged ions that move with supersonic velocity. Richly illustrated, the book also deals with practical issues, such as arc source construction, macroparticle removal, and the synthesis of dense, well adherent coatings. The book spans a bridge from plasma physics to coatings technology based on energetic condensation, appealing to scientists, practitioners and graduate students alike.

Ionized Physical Vapor Deposition

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Publisher : Academic Press
ISBN 13 : 008054293X
Total Pages : 268 pages
Book Rating : 4.0/5 (85 download)

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Book Synopsis Ionized Physical Vapor Deposition by :

Download or read book Ionized Physical Vapor Deposition written by and published by Academic Press. This book was released on 1999-10-14 with total page 268 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume provides the first comprehensive look at a pivotal new technology in integrated circuit fabrication. For some time researchers have sought alternate processes for interconnecting the millions of transistors on each chip because conventional physical vapor deposition can no longer meet the specifications of today's complex integrated circuits. Out of this research, ionized physical vapor deposition has emerged as a premier technology for the deposition of thin metal films that form the dense interconnect wiring on state-of-the-art microprocessors and memory chips.For the first time, the most recent developments in thin film deposition using ionized physical vapor deposition (I-PVD) are presented in a single coherent source. Readers will find detailed descriptions of relevant plasma source technology, specific deposition systems, and process recipes. The tools and processes covered include DC hollow cathode magnetrons, RF inductively coupled plasmas, and microwave plasmas that are used for depositing technologically important materials such as copper, tantalum, titanium, TiN, and aluminum. In addition, this volume describes the important physical processes that occur in I-PVD in a simple and concise way. The physical descriptions are followed by experimentally-verified numerical models that provide in-depth insight into the design and operation I-PVD tools.Practicing process engineers, research and development scientists, and students will find that this book's integration of tool design, process development, and fundamental physical models make it an indispensable reference.Key Features:The first comprehensive volume on ionized physical vapor depositionCombines tool design, process development, and fundamental physical understanding to form a complete picture of I-PVDEmphasizes practical applications in the area of IC fabrication and interconnect technologyServes as a guide to select the most appropriate technology for any deposition application*This single source saves time and effort by including comprehensive information at one's finger tips*The integration of tool design, process development, and fundamental physics allows the reader to quickly understand all of the issues important to I-PVD*The numerous practical applications assist the working engineer to select and refine thin film processes

High Power Impulse Magnetron Sputtering

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Author :
Publisher : Elsevier
ISBN 13 : 0128124555
Total Pages : 400 pages
Book Rating : 4.1/5 (281 download)

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Book Synopsis High Power Impulse Magnetron Sputtering by : Daniel Lundin

Download or read book High Power Impulse Magnetron Sputtering written by Daniel Lundin and published by Elsevier. This book was released on 2019-08-28 with total page 400 pages. Available in PDF, EPUB and Kindle. Book excerpt: High Power Impulse Magnetron Sputtering: Fundamentals, Technologies, Challenges and Applications is an in-depth introduction to HiPIMS that emphasizes how this novel sputtering technique differs from conventional magnetron processes in terms of both discharge physics and the resulting thin film characteristics. Ionization of sputtered atoms is discussed in detail for various target materials. In addition, the role of self-sputtering, secondary electron emission and the importance of controlling the process gas dynamics, both inert and reactive gases, are examined in detail with an aim to generate stable HiPIMS processes. Lastly, the book also looks at how to characterize the HiPIMS discharge, including essential diagnostic equipment. Experimental results and simulations based on industrially relevant material systems are used to illustrate mechanisms controlling nucleation kinetics, column formation and microstructure evolution. - Includes a comprehensive description of the HiPIMS process from fundamental physics to applications - Provides a distinctive link between the process plasma and thin film communities - Discusses the industrialization of HiPIMS and its real world applications

The Foundations of Vacuum Coating Technology

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Author :
Publisher : William Andrew
ISBN 13 : 0128130857
Total Pages : 383 pages
Book Rating : 4.1/5 (281 download)

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Book Synopsis The Foundations of Vacuum Coating Technology by : Donald M. Mattox

Download or read book The Foundations of Vacuum Coating Technology written by Donald M. Mattox and published by William Andrew. This book was released on 2018-08-21 with total page 383 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Foundations of Vacuum Coating Technology, Second Edition, is a revised and expanded version of the first edition, which was published in 2003. The book reviews the histories of the various vacuum coating technologies and expands on the history of the enabling technologies of vacuum technology, plasma technology, power supplies, and low-pressure plasma-enhanced chemical vapor deposition. The melding of these technologies has resulted in new processes and products that have greatly expanded the application of vacuum coatings for use in our everyday lives. The book is unique in that it makes extensive reference to the patent literature (mostly US) and how it relates to the history of vacuum coating. The book includes a Historical Timeline of Vacuum Coating Technology and a Historical Timeline of Vacuum/Plasma Technology, as well as a Glossary of Terms used in the vacuum coating and surface engineering industries. - History and detailed descriptions of Vacuum Deposition Technologies - Review of Enabling Technologies and their importance to current applications - Extensively referenced text - Patents are referenced as part of the history - Historical Timelines for Vacuum Coating Technology and Vacuum/Plasma Technology - Glossary of Terms for vacuum coating

Gas-Phase Synthesis of Nanoparticles

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Publisher : John Wiley & Sons
ISBN 13 : 3527340602
Total Pages : 416 pages
Book Rating : 4.5/5 (273 download)

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Book Synopsis Gas-Phase Synthesis of Nanoparticles by : Yves Huttel

Download or read book Gas-Phase Synthesis of Nanoparticles written by Yves Huttel and published by John Wiley & Sons. This book was released on 2017-06-19 with total page 416 pages. Available in PDF, EPUB and Kindle. Book excerpt: The first overview of this topic begins with some historical aspects and a survey of the principles of the gas aggregation method. The second part covers modifications of this method resulting in different specialized techniques, while the third discusses the post-growth treatment that can be applied to the nanoparticles. The whole is rounded off by a review of future perspectives and the challenges facing the scientific and industrial communities. An excellent resource for anyone working with the synthesis of nanoparticles, both in academia and industry.

Reactive Sputter Deposition

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Author :
Publisher : Springer Science & Business Media
ISBN 13 : 3540766642
Total Pages : 584 pages
Book Rating : 4.5/5 (47 download)

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Book Synopsis Reactive Sputter Deposition by : Diederik Depla

Download or read book Reactive Sputter Deposition written by Diederik Depla and published by Springer Science & Business Media. This book was released on 2008-06-24 with total page 584 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this valuable work, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detail, allowing the reader to understand the complete process. Hence, this book gives necessary information for those who want to start with reactive magnetron sputtering, understand and investigate the technique, control their sputtering process and tune their existing process, obtaining the desired thin films.

Handbook of Physical Vapor Deposition (PVD) Processing

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Author :
Publisher : Cambridge University Press
ISBN 13 : 0080946585
Total Pages : 947 pages
Book Rating : 4.0/5 (89 download)

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Book Synopsis Handbook of Physical Vapor Deposition (PVD) Processing by : D. M. Mattox

Download or read book Handbook of Physical Vapor Deposition (PVD) Processing written by D. M. Mattox and published by Cambridge University Press. This book was released on 2014-09-19 with total page 947 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films that can meet the required performance specifications. The book covers subjects seldom treated in the literature: substrate characterization, adhesion, cleaning and the processing. The book also covers the widely discussed subjects of vacuum technology and the fundamentals of individual deposition processes. However, the author uniquely relates these topics to the practical issues that arise in PVD processing, such as contamination control and film growth effects, which are also rarely discussed in the literature. In bringing these subjects together in one book, the reader can understand the interrelationship between various aspects of the film deposition processing and the resulting film properties. The author draws upon his long experience with developing PVD processes and troubleshooting the processes in the manufacturing environment, to provide useful hints for not only avoiding problems, but also for solving problems when they arise. He uses actual experiences, called ""war stories"", to emphasize certain points. Special formatting of the text allows a reader who is already knowledgeable in the subject to scan through a section and find discussions that are of particular interest. The author has tried to make the subject index as useful as possible so that the reader can rapidly go to sections of particular interest. Extensive references allow the reader to pursue subjects in greater detail if desired. The book is intended to be both an introduction for those who are new to the field and a valuable resource to those already in the field. The discussion of transferring technology between R&D and manufacturing provided in Appendix 1, will be of special interest to the manager or engineer responsible for moving a PVD product and process from R&D into production. Appendix 2 has an extensive listing of periodical publications and professional societies that relate to PVD processing. The extensive Glossary of Terms and Acronyms provided in Appendix 3 will be of particular use to students and to those not fully conversant with the terminology of PVD processing or with the English language.

Glow Discharge Processes

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Author :
Publisher : Wiley-Interscience
ISBN 13 :
Total Pages : 434 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Glow Discharge Processes by : Brian Chapman

Download or read book Glow Discharge Processes written by Brian Chapman and published by Wiley-Interscience. This book was released on 1980 with total page 434 pages. Available in PDF, EPUB and Kindle. Book excerpt: Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.

Lecture Notes on Principles of Plasma Processing

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Publisher : Springer Science & Business Media
ISBN 13 : 1461501814
Total Pages : 213 pages
Book Rating : 4.4/5 (615 download)

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Book Synopsis Lecture Notes on Principles of Plasma Processing by : Francis F. Chen

Download or read book Lecture Notes on Principles of Plasma Processing written by Francis F. Chen and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 213 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these fields, and their collaboration results in the merging of these fields with a common terminology. Basic plasma concepts are introduced painlessly to those who have studied undergraduate electromagnetics but have had no previous exposure to plasmas. Unnecessarily detailed derivations are omitted; yet the reader is led to understand in some depth those concepts, such as the structure of sheaths, that are important in the design and operation of plasma processing reactors. Physicists not accustomed to low-temperature plasmas are introduced to chemical kinetics, surface science, and molecular spectroscopy. The material has been condensed to suit a nine-week graduate course, but it is sufficient to bring the reader up to date on current problems such as copper interconnects, low-k and high-k dielectrics, and oxide damage. Students will appreciate the web-style layout with ample color illustrations opposite the text, with ample room for notes. This short book is ideal for new workers in the semiconductor industry who want to be brought up to speed with minimum effort. It is also suitable for Chemical Engineering students studying plasma processing of materials; Engineers, physicists, and technicians entering the semiconductor industry who want a quick overview of the use of plasmas in the industry.

Diamond Based Composites

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Publisher : Springer Science & Business Media
ISBN 13 : 9401155925
Total Pages : 378 pages
Book Rating : 4.4/5 (11 download)

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Book Synopsis Diamond Based Composites by : Mark A. Prelas

Download or read book Diamond Based Composites written by Mark A. Prelas and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 378 pages. Available in PDF, EPUB and Kindle. Book excerpt: Diamond-based composites, with their advantages of hardness, high Young's modulus and the like, have demonstrated new and unusual features, such as stability to high temperatures and pressure shocks and a large internal surface that can be controlled to offer customised electrical, magnetic and optical properties, leading to efficient filters, absorbents, sensors and other tools for environmental control and monitoring. The current book covers the synthesis of materials, their characterization and properties, trends in high pressure and high temperature technologies, low pressure technologies, basic principles of DBC material science, and future developments in electronics, optics, industrial tools and components, biotechnology, and medicine. Wide band-gap materials are considered, ranging from molecular clusters, nanophase materials, growth, processing and synthesis. The processing of composite based materials can be classified into six basic methods: in situ growth, high pressure/high temperature catalytic conversion; mix and sinter (c-BN plus metal-ceramic polymer mix); direct sintering; direct polymorphic conversion; shock detonation; and SHS sintering.

Inertial Electrostatic Confinement (IEC) Fusion

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Publisher : Springer Science & Business Media
ISBN 13 : 1461493382
Total Pages : 415 pages
Book Rating : 4.4/5 (614 download)

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Book Synopsis Inertial Electrostatic Confinement (IEC) Fusion by : George H. Miley

Download or read book Inertial Electrostatic Confinement (IEC) Fusion written by George H. Miley and published by Springer Science & Business Media. This book was released on 2013-12-12 with total page 415 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides readers with an introductory understanding of Inertial Electrostatic Confinement (IEC), a type of fusion meant to retain plasma using an electrostatic field. IEC provides a unique approach for plasma confinement, as it offers a number of spin-off applications, such as a small neutron source for Neutron Activity Analysis (NAA), that all work towards creating fusion power. The IEC has been identified in recent times as an ideal fusion power unit because of its ability to burn aneutronic fuels like p-B11 as a result of its non-Maxwellian plasma dominated by beam-like ions. This type of fusion also takes place in a simple mechanical structure small in size, which also contributes to its viability as a source of power. This book posits that the ability to study the physics of IEC in very small volume plasmas makes it possible to rapidly investigate a design to create a power-producing device on a much larger scale. Along with this hypothesis the book also includes a conceptual experiment proposed for demonstrating breakeven conditions for using p-B11 in a hydrogen plasma simulation. This book also: Offers an in-depth look, from introductory basics to experimental simulation, of Inertial Electrostatic Confinement, an emerging method for generating fusion power Discusses how the Inertial Electrostatic Confinement method can be applied to other applications besides fusion through theoretical experiments in the text Details the study of the physics of Inertial Electrostatic Confinement in small-volume plasmas and suggests that their rapid reproduction could lead to the creation of a large-scale power-producing device Perfect for researchers and students working with nuclear fusion, Inertial Electrostatic Confinement (IEC) Fusion: Fundamentals and Applications also offers the current experimental status of IEC research, details supporting theories in the field and introduces other potential applications that stem from IEC.

Recent Advances in Technology Research and Education

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Publisher : Springer
ISBN 13 : 3319674595
Total Pages : 352 pages
Book Rating : 4.3/5 (196 download)

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Book Synopsis Recent Advances in Technology Research and Education by : Dumitru Luca

Download or read book Recent Advances in Technology Research and Education written by Dumitru Luca and published by Springer. This book was released on 2017-09-08 with total page 352 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents selected contributions to the 16th International Conference on Global Research and Education Inter-Academia 2017 hosted by Alexandru Ioan Cuza University of Iași, Romania from 25 to 28 September 2017. It is the third volume in the series, following the editions from 2015 and 2016. Fundamental and applied research in natural sciences have led to crucial developments in the ongoing 4th global industrial revolution, in the course of which information technology has become deeply embedded in industrial management, research and innovation – and just as deeply in education and everyday life. Materials science and nanotechnology, plasma and solid state physics, photonics, electrical and electronic engineering, robotics and metrology, signal processing, e-learning, intelligent and soft computing have long since been central research priorities for the Inter-Academia Community (I-AC) – a body comprising 14 universities and research institutes from Japan and Central/East-European countries that agreed, in 2002, to coordinate their research and education programs so as to better address today’s challenges. The book is intended for use in academic, government, and industrial R&D departments as a reference tool in research and technology education. The 42 peer-reviewed papers were written by more than 119 leading scientists from 14 countries, most of them affiliated to the I-AC.

Fundamentals of Electric Propulsion

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Publisher : John Wiley & Sons
ISBN 13 : 0470436263
Total Pages : 528 pages
Book Rating : 4.4/5 (74 download)

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Book Synopsis Fundamentals of Electric Propulsion by : Dan M. Goebel

Download or read book Fundamentals of Electric Propulsion written by Dan M. Goebel and published by John Wiley & Sons. This book was released on 2008-12-22 with total page 528 pages. Available in PDF, EPUB and Kindle. Book excerpt: Throughout most of the twentieth century, electric propulsion was considered the technology of the future. Now, the future has arrived. This important new book explains the fundamentals of electric propulsion for spacecraft and describes in detail the physics and characteristics of the two major electric thrusters in use today, ion and Hall thrusters. The authors provide an introduction to plasma physics in order to allow readers to understand the models and derivations used in determining electric thruster performance. They then go on to present detailed explanations of: Thruster principles Ion thruster plasma generators and accelerator grids Hollow cathodes Hall thrusters Ion and Hall thruster plumes Flight ion and Hall thrusters Based largely on research and development performed at the Jet Propulsion Laboratory (JPL) and complemented with scores of tables, figures, homework problems, and references, Fundamentals of Electric Propulsion: Ion and Hall Thrusters is an indispensable textbook for advanced undergraduate and graduate students who are preparing to enter the aerospace industry. It also serves as an equally valuable resource for professional engineers already at work in the field.

Ion Bombardment Modification of Surfaces

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Publisher :
ISBN 13 :
Total Pages : 494 pages
Book Rating : 4.:/5 (45 download)

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Book Synopsis Ion Bombardment Modification of Surfaces by : Orlando Auciello

Download or read book Ion Bombardment Modification of Surfaces written by Orlando Auciello and published by . This book was released on 1984 with total page 494 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Nano-Energetic Materials

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Author :
Publisher : Springer
ISBN 13 : 981133269X
Total Pages : 297 pages
Book Rating : 4.8/5 (113 download)

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Book Synopsis Nano-Energetic Materials by : Shantanu Bhattacharya

Download or read book Nano-Energetic Materials written by Shantanu Bhattacharya and published by Springer. This book was released on 2018-11-09 with total page 297 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents the latest research on the area of nano-energetic materials, their synthesis, fabrication, patterning, application and integration with various MEMS systems and platforms. Keeping in mind the applications for this field in aerospace and defense sectors, the articles in this volume contain contributions by leading researchers in the field, who discuss the current challenges and future perspectives. This volume will be of use to researchers working on various applications of high-energy research.

Handbook of Manufacturing Engineering and Technology

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Publisher : Springer
ISBN 13 : 9781447146698
Total Pages : 0 pages
Book Rating : 4.1/5 (466 download)

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Book Synopsis Handbook of Manufacturing Engineering and Technology by : Andrew Y. C. Nee

Download or read book Handbook of Manufacturing Engineering and Technology written by Andrew Y. C. Nee and published by Springer. This book was released on 2014-10-31 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Springer Reference Work Handbook of Manufacturing Engineering and Technology provides overviews and in-depth and authoritative analyses on the basic and cutting-edge manufacturing technologies and sciences across a broad spectrum of areas. These topics are commonly encountered in industries as well as in academia. Manufacturing engineering curricula across universities are now essential topics covered in major universities worldwide.