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Author :
Publisher :
ISBN 13 :
Total Pages : 768 pages
Book Rating : 4.3/5 (91 download)
Download or read book Photomask and Next-generation Lithography Mask Technology written by and published by . This book was released on 2001 with total page 768 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Benjamin Eynon
Publisher : Mcgraw-hill
ISBN 13 : 9780071445634
Total Pages : 0 pages
Book Rating : 4.4/5 (456 download)
Download or read book Photomask Fabrication Technology written by Benjamin Eynon and published by Mcgraw-hill. This book was released on 2005-07-21 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Photomasks are defect-free optical templates -- the printing masters for the fabrication of integrated circuits (ICs). When IC feature sizes fall below the exposure tool’s source wavelength, photomask fabrication becomes difficult: very strict mask critical dimension (CD) and feature placement specifications, intensive capital equipment investment, unique raw materials and applications, and special expertise requirements for photomask fabrication technologists are necessary to fabricate modern microelectronics. Thus the rapid recent growth of the field and the need for this book. This text details the science and technology of industrial photomask production, including fundamental principles, industrial production flows, technological evolution and development, and state of the art technologies. Focusing on industrial applications rather than pure science, the goal of the book is to provide a comprehensive reference for any engineer developing microelectronic manufacturing processes
Author :
Publisher :
ISBN 13 :
Total Pages : 558 pages
Book Rating : 4.F/5 ( download)
Download or read book Photomask and Next-generation Lithography Mask Technology XI. written by and published by . This book was released on 2004 with total page 558 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Photomask and Next-Generation Lithography Mask Technology XI written by and published by . This book was released on 2004 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Syed Rizvi
Publisher : CRC Press
ISBN 13 : 1420028782
Total Pages : 728 pages
Book Rating : 4.4/5 (2 download)
Download or read book Handbook of Photomask Manufacturing Technology written by Syed Rizvi and published by CRC Press. This book was released on 2018-10-03 with total page 728 pages. Available in PDF, EPUB and Kindle. Book excerpt: As the semiconductor industry attempts to increase the number of functions that will fit into the smallest space on a chip, it becomes increasingly important for new technologies to keep apace with these demands. Photomask technology is one of the key areas to achieving this goal. Although brief overviews of photomask technology exist in the literature, the Handbook of Photomask Manufacturing Technology is the first in-depth, comprehensive treatment of existing and emerging photomask technologies available. The Handbook of Photomask Manufacturing Technology features contributions from 40 internationally prominent authors from industry, academia, government, national labs, and consortia. These authors discuss conventional masks and their supporting technologies, as well as next-generation, non-optical technologies such as extreme ultraviolet, electron projection, ion projection, and x-ray lithography. The book begins with an overview of the history of photomask development. It then demonstrates the steps involved in designing, producing, testing, inspecting, and repairing photomasks, following the sequences observed in actual production. The text also includes sections on materials used as well as modeling and simulation. Continued refinements in the photomask-making process have ushered in the sub-wavelength era in nanolithography. This invaluable handbook synthesizes these refinements and provides the tools and possibilities necessary to reach the next generation of microfabrication technologies.
Author : Society of Photo-Optical Instrumentation Engineers
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (841 download)
Download or read book Photomask and Next-generation Lithography Mask Technology XI written by Society of Photo-Optical Instrumentation Engineers and published by . This book was released on 2004 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher :
ISBN 13 :
Total Pages : 580 pages
Book Rating : 4.3/5 (91 download)
Download or read book Photomask and X-ray Mask Technology written by and published by . This book was released on 1995 with total page 580 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Hiroyoshi Tanabe
Publisher : Society of Photo Optical
ISBN 13 : 9780819449962
Total Pages : 1066 pages
Book Rating : 4.4/5 (499 download)
Download or read book Photomask and Next-generation Lithography Mask Technology X written by Hiroyoshi Tanabe and published by Society of Photo Optical. This book was released on 2003 with total page 1066 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Kokoro Kato
Publisher :
ISBN 13 : 9780819491367
Total Pages : 520 pages
Book Rating : 4.4/5 (913 download)
Download or read book Photomask and Next-Generation Lithography Mask Technology XIX written by Kokoro Kato and published by . This book was released on 2012-06-29 with total page 520 pages. Available in PDF, EPUB and Kindle. Book excerpt: Includes Proceedings Vol. 7821
Author : Hiroichi Kawahira
Publisher : Society of Photo Optical
ISBN 13 : 9780819445179
Total Pages : 918 pages
Book Rating : 4.4/5 (451 download)
Download or read book Photomask and Next-generation Lithography Mask Technology IX written by Hiroichi Kawahira and published by Society of Photo Optical. This book was released on 2002 with total page 918 pages. Available in PDF, EPUB and Kindle. Book excerpt: This text examines photomask and next-generation lithography mask technology.
Author : Hiroaki Morimoto
Publisher : Society of Photo Optical
ISBN 13 : 9780819437020
Total Pages : 750 pages
Book Rating : 4.4/5 (37 download)
Download or read book Photomask and Next-generation Lithography Mask Technology VII written by Hiroaki Morimoto and published by Society of Photo Optical. This book was released on 2000 with total page 750 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher :
ISBN 13 : 9780819463586
Total Pages : pages
Book Rating : 4.4/5 (635 download)
Download or read book Photomask and Next-generation Lithography Mask Technology XIII written by and published by . This book was released on 2006 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Photomask and Next-generation Lithography Mask Technology XIII written by and published by . This book was released on 2006 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Toshio Konishi
Publisher : SPIE-International Society for Optical Engineering
ISBN 13 : 9780819486738
Total Pages : 240 pages
Book Rating : 4.4/5 (867 download)
Download or read book Photomask and Next-generation Lithography Mask Technology XVIII written by Toshio Konishi and published by SPIE-International Society for Optical Engineering. This book was released on 2011 with total page 240 pages. Available in PDF, EPUB and Kindle. Book excerpt: Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.
Author : Kunihiro Hosono
Publisher : SPIE-International Society for Optical Engineering
ISBN 13 : 9780819482389
Total Pages : 696 pages
Book Rating : 4.4/5 (823 download)
Download or read book Photomask and Next-generation Lithography Mask Technology XVII written by Kunihiro Hosono and published by SPIE-International Society for Optical Engineering. This book was released on 2010-01-01 with total page 696 pages. Available in PDF, EPUB and Kindle. Book excerpt: Includes Proceedings Vol. 7821
Download or read book Photomask and Next-generation Lithography Mask Technology XVIII : 13-15 April 2011 written by and published by . This book was released on 2011 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Photomask and Next-generation Lithography Mask Technology VII written by and published by . This book was released on 2000 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
