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Photolithography
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Book Synopsis Fundamental Principles of Optical Lithography by : Chris Mack
Download or read book Fundamental Principles of Optical Lithography written by Chris Mack and published by John Wiley & Sons. This book was released on 2011-08-10 with total page 503 pages. Available in PDF, EPUB and Kindle. Book excerpt: The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components. By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate. This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter. Additional Information: Visiting http://www.lithoguru.com/textbook/index.html enhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB®, to accompany the textbook. You can also contact the author and find help for instructors.
Download or read book Photolithography written by Bruce E. Tory and published by Sydney : [s.n.]. This book was released on 1959 with total page 264 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Encyclopedia of Nineteenth-Century Photography by : John Hannavy
Download or read book Encyclopedia of Nineteenth-Century Photography written by John Hannavy and published by Routledge. This book was released on 2013-12-16 with total page 1630 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Encyclopedia of Nineteenth-Century Photography is the first comprehensive encyclopedia of world photography up to the beginning of the twentieth century. It sets out to be the standard, definitive reference work on the subject for years to come. Its coverage is global – an important ‘first’ in that authorities from all over the world have contributed their expertise and scholarship towards making this a truly comprehensive publication. The Encyclopedia presents new and ground-breaking research alongside accounts of the major established figures in the nineteenth century arena. Coverage includes all the key people, processes, equipment, movements, styles, debates and groupings which helped photography develop from being ‘a solution in search of a problem’ when first invented, to the essential communication tool, creative medium, and recorder of everyday life which it had become by the dawn of the twentieth century. The sheer breadth of coverage in the 1200 essays makes the Encyclopedia of Nineteenth-Century Photography an essential reference source for academics, students, researchers and libraries worldwide.
Book Synopsis The Bodleian Facsimile Series of Reproductions in Collotype Or Photolithography of Remarkable Manuscripts and Exceptionally Rare Printed Books Contained in the Bodleian Library, Oxford by :
Download or read book The Bodleian Facsimile Series of Reproductions in Collotype Or Photolithography of Remarkable Manuscripts and Exceptionally Rare Printed Books Contained in the Bodleian Library, Oxford written by and published by . This book was released on 1888 with total page 52 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Fundamentals of Semiconductor Manufacturing and Process Control by : Gary S. May
Download or read book Fundamentals of Semiconductor Manufacturing and Process Control written by Gary S. May and published by John Wiley & Sons. This book was released on 2006-05-26 with total page 428 pages. Available in PDF, EPUB and Kindle. Book excerpt: A practical guide to semiconductor manufacturing from processcontrol to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Controlcovers all issues involved in manufacturing microelectronic devicesand circuits, including fabrication sequences, process control,experimental design, process modeling, yield modeling, and CIM/CAMsystems. Readers are introduced to both the theory and practice ofall basic manufacturing concepts. Following an overview of manufacturing and technology, the textexplores process monitoring methods, including those that focus onproduct wafers and those that focus on the equipment used toproduce wafers. Next, the text sets forth some fundamentals ofstatistics and yield modeling, which set the foundation for adetailed discussion of how statistical process control is used toanalyze quality and improve yields. The discussion of statistical experimental design offers readers apowerful approach for systematically varying controllable processconditions and determining their impact on output parameters thatmeasure quality. The authors introduce process modeling concepts,including several advanced process control topics such asrun-by-run, supervisory control, and process and equipmentdiagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and managementof overall manufacturing systems * Chapters include case studies, sample problems, and suggestedexercises * Instructor support includes electronic copies of the figures andan instructor's manual Graduate-level students and industrial practitioners will benefitfrom the detailed exami?nation of how electronic materials andsupplies are converted into finished integrated circuits andelectronic products in a high-volume manufacturingenvironment. An Instructor's Manual presenting detailed solutions to all theproblems in the book is available from the Wiley editorialdepartment. An Instructor Support FTP site is also available.
Book Synopsis A Comparison of Three Dimensional Photolithography Simulators by : John Joseph Helmsen
Download or read book A Comparison of Three Dimensional Photolithography Simulators written by John Joseph Helmsen and published by . This book was released on 1994 with total page 448 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Semiconductor Manufacturing Technology by : Chue San Yoo
Download or read book Semiconductor Manufacturing Technology written by Chue San Yoo and published by World Scientific. This book was released on 2008 with total page 483 pages. Available in PDF, EPUB and Kindle. Book excerpt: This textbook contains all the materials that an engineer needs to know to start a career in the semiconductor industry. It also provides readers with essential background information for semiconductor research. It is written by a professional who has been working in the field for over two decades and teaching the material to university students for the past 15 years. It includes process knowledge from raw material preparation to the passivation of chips in a modular format.
Book Synopsis Nanostructures & Nanomaterials by : Guozhong Cao
Download or read book Nanostructures & Nanomaterials written by Guozhong Cao and published by Imperial College Press. This book was released on 2004 with total page 452 pages. Available in PDF, EPUB and Kindle. Book excerpt: This important book focuses on the synthesis and fabrication of nanostructures and nanomaterials, but also includes properties and applications of nanostructures and nanomaterials, particularly inorganic nanomaterials. It provides balanced and comprehensive coverage of the fundamentals and processing techniques with regard to synthesis, characterization, properties, and applications of nanostructures and nanomaterials. Both chemical processing and lithographic techniques are presented in a systematic and coherent manner for the synthesis and fabrication of 0-D, 1-D, and 2-D nanostructures, as well as special nanomaterials such as carbon nanotubes and ordered mesoporous oxides. The book will serve as a general introduction to nanomaterials and nanotechnology for teaching and self-study purposes.
Book Synopsis Information Technology for Balanced Manufacturing Systems by : Weiming Shen
Download or read book Information Technology for Balanced Manufacturing Systems written by Weiming Shen and published by Springer. This book was released on 2007-03-07 with total page 509 pages. Available in PDF, EPUB and Kindle. Book excerpt: BASYS conferences were initially organized to promote the development of balanced automation systems. The first BASYS conference was successfully launched in Victoria, Brazil, in 1995. BASYS'06 is the 7th edition in this series. This book comprises three invited keynote papers and forty-nine regular papers accepted for presentation at the conference. All together, these papers will make significant contributions to the literature of Intelligent Technology for Balanced Manufacturing Systems.
Book Synopsis Microlithography by : Bruce W. Smith
Download or read book Microlithography written by Bruce W. Smith and published by CRC Press. This book was released on 1998-05-27 with total page 800 pages. Available in PDF, EPUB and Kindle. Book excerpt: This self-contained text details both elementary and advanced aspects of submicron microlithography - providing a balanced treatment of theoretical and operating practices as well as complete information on current research in the field. Including discussions on electron beam, x-ray, and proximal probe techniques and enhanced with timesaving citations to key sources in the literature and more than 600 tables, equations, drawings, and photographs that clarify the material, the book covers mechanical systems, optics, excimer laser light sources, alignment techniques and analysis, resist chemistry, processing, multilayer lithography, plasma and reactive ion etching, metrology, and more.
Book Synopsis Advances in Applied Artificial Intelligence by : Moonis Ali
Download or read book Advances in Applied Artificial Intelligence written by Moonis Ali and published by Springer Science & Business Media. This book was released on 2006-06-27 with total page 1374 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book constitutes the refereed proceedings of the 19th International Conference on Industrial and Engineering Applications of Artificial Intelligence and Expert Systems, IEA/AIE 2006, held in Annecy, France, June 2006. The book presents 134 revised full papers together with 3 invited contributions, organized in topical sections on multi-agent systems, decision-support, genetic algorithms, data-mining and knowledge discovery, fuzzy logic, knowledge engineering, machine learning, speech recognition, systems for real life applications, and more.
Book Synopsis Modern Physical Organic Chemistry by : Eric V. Anslyn
Download or read book Modern Physical Organic Chemistry written by Eric V. Anslyn and published by University Science Books. This book was released on 2006 with total page 1148 pages. Available in PDF, EPUB and Kindle. Book excerpt: In additionto covering thoroughly the core areas of physical organic chemistry -structure and mechanism - this book will escortthe practitioner of organic chemistry into a field that has been thoroughlyupdated.
Author :Robert W. Johnstone Publisher :Springer Science & Business Media ISBN 13 :9781402080203 Total Pages :210 pages Book Rating :4.0/5 (82 download)
Book Synopsis An Introduction to Surface-Micromachining by : Robert W. Johnstone
Download or read book An Introduction to Surface-Micromachining written by Robert W. Johnstone and published by Springer Science & Business Media. This book was released on 2004-06-03 with total page 210 pages. Available in PDF, EPUB and Kindle. Book excerpt: An Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. An Introduction to Surface-Micromachining connects the manufacturing process, microscale phenomena, and design data to physical form and function. This book will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining.
Book Synopsis Principles of Lithography by : Harry J. Levinson
Download or read book Principles of Lithography written by Harry J. Levinson and published by SPIE Press. This book was released on 2005 with total page 446 pages. Available in PDF, EPUB and Kindle. Book excerpt: Lithography is a field in which advances proceed at a swift pace. This book was written to address several needs, and the revisions for the second edition were made with those original objectives in mind. Many new topics have been included in this text commensurate with the progress that has taken place during the past few years, and several subjects are discussed in more detail. This book is intended to serve as an introduction to the science of microlithography for people who are unfamiliar with the subject. Topics directly related to the tools used to manufacture integrated circuits are addressed in depth, including such topics as overlay, the stages of exposure, tools, and light sources. This text also contains numerous references for students who want to investigate particular topics in more detail, and they provide the experienced lithographer with lists of references by topic as well. It is expected that the reader of this book will have a foundation in basic physics and chemistry. No topics will require knowledge of mathematics beyond elementary calculus.
Book Synopsis Solid State and Quantum Theory for Optoelectronics by : Michael A. Parker
Download or read book Solid State and Quantum Theory for Optoelectronics written by Michael A. Parker and published by CRC Press. This book was released on 2009-12-16 with total page 850 pages. Available in PDF, EPUB and Kindle. Book excerpt: While applications rapidly change one to the next in our commercialized world, fundamental principles behind those applications remain constant. So if one understands those principles well enough and has ample experience in applying them, he or she will be able to develop a capacity for reaching results via conceptual thinking rather than having to
Book Synopsis Microelectronics Technology and Devices by :
Download or read book Microelectronics Technology and Devices written by and published by The Electrochemical Society. This book was released on 2005 with total page 574 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Green Materials for Electronics by : Mihai Irimia-Vladu
Download or read book Green Materials for Electronics written by Mihai Irimia-Vladu and published by John Wiley & Sons. This book was released on 2017-09-12 with total page 350 pages. Available in PDF, EPUB and Kindle. Book excerpt: Combining the materials science, technological, and device aspects of organic bioelectronics based on green materials, this is the first overview of the emerging concepts involving fabrication techniques for sustainable electronics with low energy and material consumption. With contributions from top-notch editors and authors, in one focus, the book covers a collection of natural materials suited for electronics applications such as paper, silk, melanin, DNA and nucleobases, resins, gums, saccharides, cellulose, gelatine and peptides. In another thrust, the book focuses on device fabrication based on these materials, including processing aspects, and applications such as sensors, signal transducers, transient, implantable and digestible electronics. With its interdisciplinary approach this text will appeal to the chemistry, physics, materials science, and engineering communities.
