Phenomenological Modeling of Plasma Generation for the Real-time Control of RIE Systems

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Publisher :
ISBN 13 :
Total Pages : 570 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Phenomenological Modeling of Plasma Generation for the Real-time Control of RIE Systems by : Manish Chandhok

Download or read book Phenomenological Modeling of Plasma Generation for the Real-time Control of RIE Systems written by Manish Chandhok and published by . This book was released on 1996 with total page 570 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Proceedings of the Symposium Om Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing

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Publisher : The Electrochemical Society
ISBN 13 : 9781566770965
Total Pages : 644 pages
Book Rating : 4.7/5 (79 download)

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Book Synopsis Proceedings of the Symposium Om Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing by : M. Meyyappan

Download or read book Proceedings of the Symposium Om Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing written by M. Meyyappan and published by The Electrochemical Society. This book was released on 1995 with total page 644 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Phenomenological Modeling of Reactive Ion Etching for Real-time Feedback Control

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Publisher :
ISBN 13 :
Total Pages : 398 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Phenomenological Modeling of Reactive Ion Etching for Real-time Feedback Control by : Peter Duane Hanish

Download or read book Phenomenological Modeling of Reactive Ion Etching for Real-time Feedback Control written by Peter Duane Hanish and published by . This book was released on 1996 with total page 398 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Proceedings of the 1995 American Control Conference

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ISBN 13 :
Total Pages : 610 pages
Book Rating : 4.3/5 (97 download)

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Book Synopsis Proceedings of the 1995 American Control Conference by :

Download or read book Proceedings of the 1995 American Control Conference written by and published by . This book was released on 1995 with total page 610 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Real-time Feedback Control and Fault Detection in Deep-submicron Plasma Etch

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Publisher :
ISBN 13 :
Total Pages : 294 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Real-time Feedback Control and Fault Detection in Deep-submicron Plasma Etch by : Hyun-Mog Park

Download or read book Real-time Feedback Control and Fault Detection in Deep-submicron Plasma Etch written by Hyun-Mog Park and published by . This book was released on 2000 with total page 294 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Nonlinear Estimation with Applications to In-situ Etch Rate and Film Thickness Measurements in Reactive Ion Etching

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Publisher :
ISBN 13 :
Total Pages : 294 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Nonlinear Estimation with Applications to In-situ Etch Rate and Film Thickness Measurements in Reactive Ion Etching by : Tyrone Lange Vincent

Download or read book Nonlinear Estimation with Applications to In-situ Etch Rate and Film Thickness Measurements in Reactive Ion Etching written by Tyrone Lange Vincent and published by . This book was released on 1997 with total page 294 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Improved Optical Methods for Characterizing Polycrystalline Silicon, with Emphasis on Optical Scattering Losses

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Publisher :
ISBN 13 :
Total Pages : 414 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Improved Optical Methods for Characterizing Polycrystalline Silicon, with Emphasis on Optical Scattering Losses by : Tyrone E. Benson

Download or read book Improved Optical Methods for Characterizing Polycrystalline Silicon, with Emphasis on Optical Scattering Losses written by Tyrone E. Benson and published by . This book was released on 1996 with total page 414 pages. Available in PDF, EPUB and Kindle. Book excerpt:

American Doctoral Dissertations

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ISBN 13 :
Total Pages : 872 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis American Doctoral Dissertations by :

Download or read book American Doctoral Dissertations written by and published by . This book was released on 1996 with total page 872 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Science Abstracts

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ISBN 13 :
Total Pages : 1360 pages
Book Rating : 4.3/5 (243 download)

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Book Synopsis Science Abstracts by :

Download or read book Science Abstracts written by and published by . This book was released on 1995 with total page 1360 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Index to IEEE Publications

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Publisher :
ISBN 13 :
Total Pages : 1168 pages
Book Rating : 4.F/5 ( download)

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Book Synopsis Index to IEEE Publications by : Institute of Electrical and Electronics Engineers

Download or read book Index to IEEE Publications written by Institute of Electrical and Electronics Engineers and published by . This book was released on 1994 with total page 1168 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Physics Briefs

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Publisher :
ISBN 13 :
Total Pages : 1058 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Physics Briefs by :

Download or read book Physics Briefs written by and published by . This book was released on 1993 with total page 1058 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Scientific and Technical Aerospace Reports

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ISBN 13 :
Total Pages : 1024 pages
Book Rating : 4.:/5 (31 download)

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Book Synopsis Scientific and Technical Aerospace Reports by :

Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1975 with total page 1024 pages. Available in PDF, EPUB and Kindle. Book excerpt: Lists citations with abstracts for aerospace related reports obtained from world wide sources and announces documents that have recently been entered into the NASA Scientific and Technical Information Database.

Industrial Plasma Engineering

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Publisher : CRC Press
ISBN 13 : 9780750305440
Total Pages : 1320 pages
Book Rating : 4.3/5 (54 download)

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Book Synopsis Industrial Plasma Engineering by : J Reece Roth

Download or read book Industrial Plasma Engineering written by J Reece Roth and published by CRC Press. This book was released on 2001-08-25 with total page 1320 pages. Available in PDF, EPUB and Kindle. Book excerpt: Written by a leading expert in the field, Industrial Plasma Engineering, Volume 2: Applications to Nonthermal Plasma Processing provides a background in the principles and applications of low temperature, partially ionized Lorentzian plasmas that are used industrially. The book also presents a description of plasma-related processes and devices that are of commercial interest. The text is suitable for students or in-service users with a physics and calculus background at the sophomore level. These two volumes are intended to be used as textbooks at the senior or first-year graduate level by students from all engineering and physical science disciplines and as a reference source by in-service engineers.

Plasma Physics

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Publisher : Springer
ISBN 13 : 9783319875538
Total Pages : 463 pages
Book Rating : 4.8/5 (755 download)

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Book Synopsis Plasma Physics by : Alexander Piel

Download or read book Plasma Physics written by Alexander Piel and published by Springer. This book was released on 2018-05-18 with total page 463 pages. Available in PDF, EPUB and Kindle. Book excerpt: The enlarged new edition of this textbook provides a comprehensive introduction to the basic processes in plasmas and demonstrates that the same fundamental concepts describe cold gas-discharge plasmas, space plasmas, and hot fusion plasmas. Starting from particle drifts in magnetic fields, the principles of magnetic confinement fusion are explained and compared with laser fusion. Collective processes are discussed in terms of plasma waves and instabilities. The concepts of plasma description by magnetohydrodynamics, kinetic theory, and particle simulation are stepwise introduced. Space charge effects in sheath regions, double layers and plasma diodes are given the necessary attention. The novel fundamental mechanisms of dusty plasmas are explored and integrated into the framework of conventional plasmas. The book concludes with a concise description of modern plasma discharges. Written by an internationally renowned researcher in experimental plasma physics, the text keeps the mathematical apparatus simple and emphasizes the underlying concepts. The guidelines of plasma physics are illustrated by a host of practical examples, preferentially from plasma diagnostics. There, Langmuir probe methods, laser interferometry, ionospheric sounding, Faraday rotation, and diagnostics of dusty plasmas are discussed. Though primarily addressing students in plasma physics, the book is easily accessible for researchers in neighboring disciplines, such as space science, astrophysics, material science, applied physics, and electrical engineering. This second edition has been thoroughly revised and contains substantially enlarged chapters on plasma diagnostics, dusty plasmas and plasma discharges. Probe techniques have been rearranged into basic theory and a host of practical examples for probe techniques in dc, rf, and space plasmas. New topics in dusty plasmas, such as plasma crystals, Yukawa balls, phase transitions and attractive forces have been adopted. The chapter on plasma discharges now contains a new section on conventional and high-power impulse magnetron sputtering. The recently discovered electrical asymmetry effect in capacitive rf-discharges is described. The text is based on an introductory course to plasma physics and advanced courses in plasma diagnostics, dusty plasmas, and plasma waves, which the author has taught at Kiel University for three decades. The pedagogical approach combines detailed explanations, a large number of illustrative figures, short summaries of the basics at the end of each chapter, and a selection of problems with detailed solutions.

Principles of Plasma Discharges and Materials Processing

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Publisher : John Wiley & Sons
ISBN 13 : 0471724246
Total Pages : 795 pages
Book Rating : 4.4/5 (717 download)

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Book Synopsis Principles of Plasma Discharges and Materials Processing by : Michael A. Lieberman

Download or read book Principles of Plasma Discharges and Materials Processing written by Michael A. Lieberman and published by John Wiley & Sons. This book was released on 2005-04-08 with total page 795 pages. Available in PDF, EPUB and Kindle. Book excerpt: A Thorough Update of the Industry Classic on Principles of Plasma Processing The first edition of Principles of Plasma Discharges and Materials Processing, published over a decade ago, was lauded for its complete treatment of both basic plasma physics and industrial plasma processing, quickly becoming the primary reference for students and professionals. The Second Edition has been carefully updated and revised to reflect recent developments in the field and to further clarify the presentation of basic principles. Along with in-depth coverage of the fundamentals of plasma physics and chemistry, the authors apply basic theory to plasma discharges, including calculations of plasma parameters and the scaling of plasma parameters with control parameters. New and expanded topics include: * Updated cross sections * Diffusion and diffusion solutions * Generalized Bohm criteria * Expanded treatment of dc sheaths * Langmuir probes in time-varying fields * Electronegative discharges * Pulsed power discharges * Dual frequency discharges * High-density rf sheaths and ion energy distributions * Hysteresis and instabilities * Helicon discharges * Hollow cathode discharges * Ionized physical vapor deposition * Differential substrate charging With new chapters on dusty plasmas and the kinetic theory of discharges, graduate students and researchers in the field of plasma processing should find this new edition more valuable than ever.

Run-to-Run Control in Semiconductor Manufacturing

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Publisher : CRC Press
ISBN 13 : 1420040669
Total Pages : 368 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Run-to-Run Control in Semiconductor Manufacturing by : James Moyne

Download or read book Run-to-Run Control in Semiconductor Manufacturing written by James Moyne and published by CRC Press. This book was released on 2018-10-08 with total page 368 pages. Available in PDF, EPUB and Kindle. Book excerpt: Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.

Lecture Notes on Principles of Plasma Processing

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Publisher : Springer Science & Business Media
ISBN 13 : 1461501814
Total Pages : 213 pages
Book Rating : 4.4/5 (615 download)

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Book Synopsis Lecture Notes on Principles of Plasma Processing by : Francis F. Chen

Download or read book Lecture Notes on Principles of Plasma Processing written by Francis F. Chen and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 213 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these fields, and their collaboration results in the merging of these fields with a common terminology. Basic plasma concepts are introduced painlessly to those who have studied undergraduate electromagnetics but have had no previous exposure to plasmas. Unnecessarily detailed derivations are omitted; yet the reader is led to understand in some depth those concepts, such as the structure of sheaths, that are important in the design and operation of plasma processing reactors. Physicists not accustomed to low-temperature plasmas are introduced to chemical kinetics, surface science, and molecular spectroscopy. The material has been condensed to suit a nine-week graduate course, but it is sufficient to bring the reader up to date on current problems such as copper interconnects, low-k and high-k dielectrics, and oxide damage. Students will appreciate the web-style layout with ample color illustrations opposite the text, with ample room for notes. This short book is ideal for new workers in the semiconductor industry who want to be brought up to speed with minimum effort. It is also suitable for Chemical Engineering students studying plasma processing of materials; Engineers, physicists, and technicians entering the semiconductor industry who want a quick overview of the use of plasmas in the industry.