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Author : MISUMI
Publisher :
ISBN 13 : 9780750331920
Total Pages : pages
Book Rating : 4.3/5 (319 download)
Download or read book Nanoscale Standards Metrological Afm O written by MISUMI and published by . This book was released on 2021-07-31 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Ichiko Misumi
Publisher :
ISBN 13 : 9780750331913
Total Pages : 0 pages
Book Rating : 4.3/5 (319 download)
Download or read book Nanoscale Standards by Metrological AFM and Other Instruments written by Ichiko Misumi and published by . This book was released on 2021 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: The purpose of this book is to help semiconductor inspection equipment users and manufacturers understand what nano dimensional standards are used to calibrate their equipment and how to employ them effectively. Reviewing trends and developments in nanoscale standards, the book starts with an introductory overview of nanometrological standards before proceeding to detail pitch standard, step height, line width, nano particle size, and surface roughness. This book is essential for users making quantitative nanoscale measurements, be that in a commercial or academic research setting, or involved in engineering nanometrology for quality control in industrial applications. Here the author provides an approachable understanding and application of the nanoscale standards in a practical context across a range of common nanoscale measurement modalities, including 3D, with particular emphasis on applications to AFM, an exceptional and arguably the most common technique used in nanometrology due to the ease of use and versatility of applications.
Author : Günter Wilkening
Publisher : John Wiley & Sons
ISBN 13 : 3527606874
Total Pages : 541 pages
Book Rating : 4.5/5 (276 download)
Download or read book Nanoscale Calibration Standards and Methods written by Günter Wilkening and published by John Wiley & Sons. This book was released on 2006-05-12 with total page 541 pages. Available in PDF, EPUB and Kindle. Book excerpt: The quantitative determination of the properties of micro- and nanostructures is essential in research and development. It is also a prerequisite in process control and quality assurance in industry. The knowledge of the geometrical dimensions of structures in most cases is the base, to which other physical and chemical properties are linked. Quantitative measurements require reliable and stable instruments, suitable measurement procedures as well as appropriate calibration artefacts and methods. The seminar "NanoScale 2004" (6th Seminar on Quantitative Microscopy and 2nd Seminar on Nanoscale Calibration Standards and Methods) at the National Metrology Institute (Physikalisch-Technische Bundesanstalt PTB), Braunschweig, Germany, continues the series of seminars on Quantitative Microscopy. The series stimulates the exchange of information between manufacturers of relevant hard- and software and the users in science and industry. Topics addressed in these proceedings are a) the application of quantitative measurements and measurement problems in: microelectronics, microsystems technology, nano/quantum/molecular electronics, chemistry, biology, medicine, environmental technology, materials science, surface processing b) calibration & correction methods: calibration methods, calibration standards, calibration procedures, traceable measurements, standardization, uncertainty of measurements c) instrumentation and methods: novel/improved instruments and methods, reproducible probe/sample positioning, position-measuring systems, novel/improved probe/detector systems, linearization methods, image processing
Author : Richard Leach
Publisher : Elsevier
ISBN 13 : 1455777501
Total Pages : 384 pages
Book Rating : 4.4/5 (557 download)
Download or read book Fundamental Principles of Engineering Nanometrology written by Richard Leach and published by Elsevier. This book was released on 2014-05-17 with total page 384 pages. Available in PDF, EPUB and Kindle. Book excerpt: Working at the nano-scale demands an understanding of the high-precision measurement techniques that make nanotechnology and advanced manufacturing possible. Richard Leach introduces these techniques to a broad audience of engineers and scientists involved in nanotechnology and manufacturing applications and research. He also provides a routemap and toolkit for metrologists engaging with the rigor of measurement and data analysis at the nano-scale. Starting from the fundamentals of precision measurement, the author progresses into different measurement and characterization techniques. The focus on nanometrology in engineering contexts makes this book an essential guide for the emerging nanomanufacturing / nanofabrication sector, where measurement and standardization requirements are paramount both in product specification and quality assurance. This book provides engineers and scientists with the methods and understanding needed to design and produce high-performance, long-lived products while ensuring that compliance and public health requirements are met. Updated to cover new and emerging technologies, and recent developments in standards and regulatory frameworks, this second edition includes many new sections, e.g. new technologies in scanning probe and e-beam microscopy, recent developments in interferometry and advances in co-ordinate metrology. Demystifies nanometrology for a wide audience of engineers, scientists, and students involved in nanotech and advanced manufacturing applications and research Introduces metrologists to the specific techniques and equipment involved in measuring at the nano-scale or to nano-scale uncertainty Fully updated to cover the latest technological developments, standards, and regulations
Author : Elisabeth Mansfield
Publisher : John Wiley & Sons
ISBN 13 : 3527800050
Total Pages : 630 pages
Book Rating : 4.5/5 (278 download)
Download or read book Metrology and Standardization for Nanotechnology written by Elisabeth Mansfield and published by John Wiley & Sons. This book was released on 2017-01-20 with total page 630 pages. Available in PDF, EPUB and Kindle. Book excerpt: For the promotion of global trading and the reduction of potential risks, the role of international standardization of nanotechnologies has become more and more important. This book gives an overview of the current status of nanotechnology including the importance of metrology and characterization at the nanoscale, international standardization of nanotechnology, and industrial innovation of nano-enabled products. First the field of nanometrology, nanomaterial standardization and nanomaterial innovation is introduced. Second, major concepts in analytical measurements are given in order to provide a basis for the reliable and reproducible characterization of nanomaterials. The role of standards organizations are presented and finally, an overview of risk management and the commercial impact of metrology and standardization for industrial innovations.
Author : Elisabeth Mansfield
Publisher : John Wiley & Sons
ISBN 13 : 3527340394
Total Pages : 626 pages
Book Rating : 4.5/5 (273 download)
Download or read book Metrology and Standardization for Nanotechnology written by Elisabeth Mansfield and published by John Wiley & Sons. This book was released on 2017-04-10 with total page 626 pages. Available in PDF, EPUB and Kindle. Book excerpt: For the promotion of global trading and the reduction of potential risks, the role of international standardization of nanotechnologies has become more and more important. This book gives an overview of the current status of nanotechnology including the importance of metrology and characterization at the nanoscale, international standardization of nanotechnology, and industrial innovation of nano-enabled products. First the field of nanometrology, nanomaterial standardization and nanomaterial innovation is introduced. Second, major concepts in analytical measurements are given in order to provide a basis for the reliable and reproducible characterization of nanomaterials. The role of standards organizations are presented and finally, an overview of risk management and the commercial impact of metrology and standardization for industrial innovations.
Author : Petr Klapetek
Publisher : Elsevier
ISBN 13 : 0128133481
Total Pages : 418 pages
Book Rating : 4.1/5 (281 download)
Download or read book Quantitative Data Processing in Scanning Probe Microscopy written by Petr Klapetek and published by Elsevier. This book was released on 2018-02-03 with total page 418 pages. Available in PDF, EPUB and Kindle. Book excerpt: Quantitative Data Processing in Scanning Probe Microscopy: SPM Applications for Nanometrology, Second Edition describes the recommended practices for measurements and data processing for various SPM techniques, also discussing associated numerical techniques and recommendations for further reading for particular physical quantities measurements. Each chapter has been revised and updated for this new edition to reflect the progress that has been made in SPM techniques in recent years. New features for this edition include more step-by-step examples, better sample data and more links to related documentation in open source software. Scanning Probe Microscopy (SPM) techniques have the potential to produce information on various local physical properties. Unfortunately, there is still a large gap between what is measured by commercial devices and what could be considered as a quantitative result. This book determines to educate and close that gap. Associated data sets can be downloaded from http://gwyddion.net/qspm/ Features step-by-step guidance to aid readers in progressing from a general understanding of SPM principles to a greater mastery of complex data measurement techniques Includes a focus on metrology aspects of measurements, arming readers with a solid grasp of instrumentation and measuring methods accuracy Worked examples show quantitative data processing for different SPM analytical techniques
Author : Richard Leach
Publisher : William Andrew
ISBN 13 : 1437778321
Total Pages : 349 pages
Book Rating : 4.4/5 (377 download)
Download or read book Fundamental Principles of Engineering Nanometrology written by Richard Leach and published by William Andrew. This book was released on 2009-09-03 with total page 349 pages. Available in PDF, EPUB and Kindle. Book excerpt: Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study. Provides a basic introduction to measurement and instruments Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal, variable focus, and scattering instruments) Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties) Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge
Author : Gabor L. Hornyak
Publisher : CRC Press
ISBN 13 : 1420047809
Total Pages : 1635 pages
Book Rating : 4.4/5 (2 download)
Download or read book Introduction to Nanoscience and Nanotechnology written by Gabor L. Hornyak and published by CRC Press. This book was released on 2008-12-22 with total page 1635 pages. Available in PDF, EPUB and Kindle. Book excerpt: The maturation of nanotechnology has revealed it to be a unique and distinct discipline rather than a specialization within a larger field. Its textbook cannot afford to be a chemistry, physics, or engineering text focused on nano. It must be an integrated, multidisciplinary, and specifically nano textbook. The archetype of the modern nano textbook
Author : Vladimir Murashov
Publisher : Springer Science & Business Media
ISBN 13 : 1441978534
Total Pages : 269 pages
Book Rating : 4.4/5 (419 download)
Download or read book Nanotechnology Standards written by Vladimir Murashov and published by Springer Science & Business Media. This book was released on 2011-02-01 with total page 269 pages. Available in PDF, EPUB and Kindle. Book excerpt: Written by a team of experts, Nanotechnology Standards provides the first comprehensive, state-of-the-art reviews of nanotechnology standards development, both in the field of standards development and in specific areas of nanotechnology. It also describes global standards-developing processes for nanotechnology, which can be extended to other emerging technologies. For topics related to nanotechnology, the reviews summarize active areas of standards development, supporting knowledge and future directions in easy-to-understand language aimed at a broad technical audience. This unique book is also an excellent resource for up-to-date information on the growing base of knowledge supporting the introduction of nanotechnology standards and applications into the market. Praise for this volume: “This book provides a valuable and detailed overview of current activities and issues relevant to the area as well as a useful summary of the short history of standardization for nanotechnologies and the somewhat longer history of standardization in general. I have no hesitation in recommending this book to anyone with an interest in nanotechnologies whether it is from a technical or societal perspective.” --Dr. Peter Hatto, Director of Research, IonBond Limited, Durham, UK
Author : Umberto Celano
Publisher : Springer
ISBN 13 : 3030156125
Total Pages : 408 pages
Book Rating : 4.0/5 (31 download)
Download or read book Electrical Atomic Force Microscopy for Nanoelectronics written by Umberto Celano and published by Springer. This book was released on 2019-08-01 with total page 408 pages. Available in PDF, EPUB and Kindle. Book excerpt: The tremendous impact of electronic devices on our lives is the result of continuous improvements of the billions of nanoelectronic components inside integrated circuits (ICs). However, ultra-scaled semiconductor devices require nanometer control of the many parameters essential for their fabrication. Through the years, this created a strong alliance between microscopy techniques and IC manufacturing. This book reviews the latest progress in IC devices, with emphasis on the impact of electrical atomic force microscopy (AFM) techniques for their development. The operation principles of many techniques are introduced, and the associated metrology challenges described. Blending the expertise of industrial specialists and academic researchers, the chapters are dedicated to various AFM methods and their impact on the development of emerging nanoelectronic devices. The goal is to introduce the major electrical AFM methods, following the journey that has seen our lives changed by the advent of ubiquitous nanoelectronics devices, and has extended our capability to sense matter on a scale previously inaccessible.
Author :
Publisher :
ISBN 13 :
Total Pages : 384 pages
Book Rating : 4.3/5 (91 download)
Download or read book Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies written by and published by . This book was released on 2007 with total page 384 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Gabor L. Hornyak
Publisher : CRC Press
ISBN 13 : 142004804X
Total Pages : 812 pages
Book Rating : 4.4/5 (2 download)
Download or read book Fundamentals of Nanotechnology written by Gabor L. Hornyak and published by CRC Press. This book was released on 2018-12-14 with total page 812 pages. Available in PDF, EPUB and Kindle. Book excerpt: WINNER 2009 CHOICE AWARD OUTSTANDING ACADEMIC TITLE! Nanotechnology is no longer a subdiscipline of chemistry, engineering, or any other field. It represents the convergence of many fields, and therefore demands a new paradigm for teaching. This textbook is for the next generation of nanotechnologists. It surveys the field’s broad landscape, exploring the physical basics such as nanorheology, nanofluidics, and nanomechanics as well as industrial concerns such as manufacturing, reliability, and safety. The authors then explore the vast range of nanomaterials and systematically outline devices and applications in various industrial sectors. This color text is an ideal companion to Introduction to Nanoscience by the same group of esteemed authors. Both titles are also available as the single volume Introduction to Nanoscience and Nanotechnology Qualifying instructors who purchase either of these volumes (or the combined set) are given online access to a wealth of instructional materials. These include detailed lecture notes, review summaries, slides, exercises, and more. The authors provide enough material for both one- and two-semester courses.
Author : Umberto Celano
Publisher : Springer
ISBN 13 : 3319395319
Total Pages : 191 pages
Book Rating : 4.3/5 (193 download)
Download or read book Metrology and Physical Mechanisms in New Generation Ionic Devices written by Umberto Celano and published by Springer. This book was released on 2016-06-18 with total page 191 pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis presents the first direct observations of the 3D-shape, size and electrical properties of nanoscale filaments, made possible by a new Scanning Probe Microscopy-based tomography technique referred to as scalpel SPM. Using this innovative technology and nm-scale observations, the author achieves essential insights into the filament formation mechanisms, improves the understanding required for device optimization, and experimentally observes phenomena that had previously been only theoretically proposed.
Author : Wolfgang Osten
Publisher : CRC Press
ISBN 13 : 1498779506
Total Pages : 570 pages
Book Rating : 4.4/5 (987 download)
Download or read book Optical Inspection of Microsystems, Second Edition written by Wolfgang Osten and published by CRC Press. This book was released on 2019-06-21 with total page 570 pages. Available in PDF, EPUB and Kindle. Book excerpt: Where conventional testing and inspection techniques fail at the microscale, optical techniques provide a fast, robust, noninvasive, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems, Second Edition, extends and updates the first comprehensive survey of the most important optical measurement techniques to be successfully used for the inspection of microsystems. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image processing, image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moire techniques, interference microscopy, laser-Doppler vibrometry, digital holography, speckle metrology, spectroscopy, and sensor fusion technologies. They also examine modern approaches to data acquisition and processing, such as the determination of surface features and the estimation of uncertainty of measurement results. The book emphasizes the evaluation of various system properties and considers encapsulated components to increase quality and reliability. Numerous practical examples and illustrations of optical testing reinforce the concepts. Supplying effective tools for increased quality and reliability, this book Provides a comprehensive, up-to-date overview of optical techniques for the measurement and inspection of microsystems Discusses image correlation, displacement and strain measurement, electro-optic holography, and speckle metrology techniques Offers numerous practical examples and illustrations Includes calibration of optical measurement systems for the inspection of MEMS Presents the characterization of dynamics of MEMS
Author : Uwe Behringer
Publisher : Margret Schneider
ISBN 13 : 3800728753
Total Pages : 301 pages
Book Rating : 4.8/5 (7 download)
Download or read book EMLC 2005 written by Uwe Behringer and published by Margret Schneider. This book was released on 2005 with total page 301 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Peter Eaton
Publisher : Oxford University Press
ISBN 13 : 0199570450
Total Pages : 257 pages
Book Rating : 4.1/5 (995 download)
Download or read book Atomic Force Microscopy written by Peter Eaton and published by Oxford University Press. This book was released on 2010-03-25 with total page 257 pages. Available in PDF, EPUB and Kindle. Book excerpt: Atomic force microscopes are very important tools for the advancement of science and technology. This book provides an introduction to the microscopes so that scientists and engineers can learn both how to use them, and what they can do.
