Nanoindentation Hardness Of Soft Films On Hard Substrates

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Nanoindentation Hardness of Soft Films on Hard Substrates

Author :
Publisher :
ISBN 13 :
Total Pages : 7 pages
Book Rating : 4.:/5 (684 download)

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Download or read book Nanoindentation Hardness of Soft Films on Hard Substrates written by and published by . This book was released on 1997 with total page 7 pages. Available in PDF, EPUB and Kindle. Book excerpt: The ability to accurately measure the mechanical properties of thin metallic films is important in the semiconductor industry as it relates to device reliability issues. One popular technique for measuring thin film mechanical properties is nanoindentation. This technique has the advantage of being able to measure properties such as hardness and elastic modulus without removing a film from its substrate. However, according to a widely-held rule of thumb, intrinsic film properties can be measured in a manner which is not influenced by the substrate only if the indentation depth is kept to less than 10% of the film thickness, which is often not practical. In this work, a method for making substrate independent hardness measurements of soft metallic films on hard substrates is proposed. The primary issue to be addressed is the substrate-induced enhancement of indentation pile-up and the ways in which this pile-up influences the contact area determined from analyses of nanoindentation load- displacement data. Based on experimental observations of soft aluminum films on silicon, glass, and sapphire substrates, a simple empirical relationship is derived which relates the amount of pile-up to the contact depth. From this relationship, a simple method is developed which allows the intrinsic hardness of the film to be measured by nanoindentation methods even when the indenter penetrates through the film into the substrate.

Nanoindentation of Soft Films on Hard Substrates

Author :
Publisher :
ISBN 13 :
Total Pages : 6 pages
Book Rating : 4.:/5 (683 download)

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Download or read book Nanoindentation of Soft Films on Hard Substrates written by and published by . This book was released on 1996 with total page 6 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanoindentation is used for measuring mechanical properties of thin films. This paper addresses potential measurement errors caused by pile-up when soft films deposited on hard substrates are tested this way. Pile-up is exacerbated in soft film/hard substrate systems because of the constraint the substrate exerts on plastic deformation of the film. To examine pile-up effects, Al films 240 and 1700 nm thick were deposited on hard glass and tested by standard nanoindentation. In Al/glass, the film and substrate have similar elastic moduli; thus, any unusual behavior in nanoindentation results may be attributed to differences in plastic flow alone. SEM examination of nanoindentation hardness impressions in the film revealed that common methods for analyzing nanoindentation data underestimate the true contact areas by as much as 80%, which results in overestimations of the hardness and modulus by as much as 80 and 35%, respectively. Sources of these errors and their effect on measurement of hardness and elastic modulus are discussed, and a simple model for the composite hardness of the film/substrate system is developed. This model could prove useful when it is not possible to make indentations shallow enough to avoid substrate effects.

Nanoindentation

Author : Anthony C. Fischer-Cripps
Publisher : Springer Science & Business Media
ISBN 13 : 1475759436
Total Pages : 283 pages
Book Rating : 4.4/5 (757 download)

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Book Synopsis Nanoindentation by : Anthony C. Fischer-Cripps

Download or read book Nanoindentation written by Anthony C. Fischer-Cripps and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 283 pages. Available in PDF, EPUB and Kindle. Book excerpt: This new edition of Nanoindentation includes a dedicated chapter on thin films, new material on dynamic analysis and creep, accounts of recent research, and three new appendices on nonlinear least squares fitting, frequently asked questions, and specifications for a nanoindentation instrument. Nanoindentation Second Edition is intended for those who are entering the field for the first time and to act as a reference for those already conversant with the technique.

Old Glasgow

Author :
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (166 download)

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Download or read book Old Glasgow written by and published by . This book was released on with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Nanoindentation of Soft Films on Hard Substrates

Author :
Publisher :
ISBN 13 :
Total Pages : 12 pages
Book Rating : 4.:/5 (684 download)

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Download or read book Nanoindentation of Soft Films on Hard Substrates written by and published by . This book was released on 1997 with total page 12 pages. Available in PDF, EPUB and Kindle. Book excerpt: Experiments and finite element simulations have been performed to examine error measurement of hardness and elastic modulus caused by pile-up when soft films deposited on hard substrates are tested by nanoindentation methods. Pile-up is exacerbated in soft-film/hard-substrate systems by the constraint imposed on plastic deformation in the film by the relatively non-deformable substrate. To experimentally examine pile-up effects, soft aluminum films with thicknesses of 240, 650, and 1700 nm were deposited on hard soda-lime glass substrates and tested by nanoindentation techniques. This system is attractive because the elastic modulus of the film and the substrate are approximately the same, but the substrate is harder than the film by a factor of about ten. Consequently, substrate influences on the indentation load-displacement behavior are manifested primarily by differences in the plastic flow characteristics alone. The elastic modulus of the film/substrate system, as measured by nanoindentation techniques, exhibits an increase with indenter penetration depth which peaks at a value approximately 30% greater than the true film modulus at a penetration depth close to the film thickness. Finite element simulation shows that this unusual behavior is caused by substrate-induced enhancement of pile-up. Finite element simulation also shows that the amount of pile-up increases with increasing penetration depth, and that the pile-up geometry depends on the work-hardening characteristics of the film. Because of these effects, nanoindentation techniques overestimate the true film hardness and elastic modulus by as much as 68% and 35%, respectively, depending on the work-hardening behavior of the film and the indenter penetration depth. The largest errors occur in non-work-hardening materials at penetration depths close to the film thickness, for which substrate-induced enhancement of pile-up is greatest.

Applied Nanoindentation in Advanced Materials

Author : Atul Tiwari
Publisher : John Wiley & Sons
ISBN 13 : 1119084520
Total Pages : 708 pages
Book Rating : 4.1/5 (19 download)

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Book Synopsis Applied Nanoindentation in Advanced Materials by : Atul Tiwari

Download or read book Applied Nanoindentation in Advanced Materials written by Atul Tiwari and published by John Wiley & Sons. This book was released on 2017-08-30 with total page 708 pages. Available in PDF, EPUB and Kindle. Book excerpt: Research in the area of nanoindentation has gained significant momentum in recent years, but there are very few books currently available which can educate researchers on the application aspects of this technique in various areas of materials science. Applied Nanoindentation in Advanced Materials addresses this need and is a comprehensive, self-contained reference covering applied aspects of nanoindentation in advanced materials. With contributions from leading researchers in the field, this book is divided into three parts. Part one covers innovations and analysis, and parts two and three examine the application and evaluation of soft and ceramic-like materials respectively. Key features: A one stop solution for scholars and researchers to learn applied aspects of nanoindentation Contains contributions from leading researchers in the field Includes the analysis of key properties that can be studied using the nanoindentation technique Covers recent innovations Includes worked examples Applied Nanoindentation in Advanced Materials is an ideal reference for researchers and practitioners working in the areas of nanotechnology and nanomechanics, and is also a useful source of information for graduate students in mechanical and materials engineering, and chemistry. This book also contains a wealth of information for scientists and engineers interested in mathematical modelling and simulations related to nanoindentation testing and analysis.

Nanomechanical Analysis of High Performance Materials

Author : Atul Tiwari
Publisher : Springer Science & Business Media
ISBN 13 : 9400769199
Total Pages : 348 pages
Book Rating : 4.4/5 (7 download)

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Book Synopsis Nanomechanical Analysis of High Performance Materials by : Atul Tiwari

Download or read book Nanomechanical Analysis of High Performance Materials written by Atul Tiwari and published by Springer Science & Business Media. This book was released on 2013-08-13 with total page 348 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is intended for researchers who are interested in investigating the nanomechanical properties of materials using advanced instrumentation techniques. The chapters of the book are written in an easy-to-follow format, just like solved examples. The book comprehensively covers a broad range of materials such as polymers, ceramics, hybrids, biomaterials, metal oxides, nanoparticles, minerals, carbon nanotubes and welded joints. Each chapter describes the application of techniques on the selected material and also mentions the methodology adopted for the extraction of information from the raw data. This is a unique book in which both equipment manufacturers and equipment users have contributed chapters. Novices will learn the techniques directly from the inventors and senior researchers will gain in-depth information on the new technologies that are suitable for advanced analysis. On the one hand, fundamental concepts that are needed to understand the nanomechanical behavior of materials is included in the introductory part of the book. On the other hand, dedicated chapters describe the utilization of advanced numerical modeling in understanding the properties of complex materials. This book is useful for students and researchers from diverse backgrounds including chemistry, physics, materials science & engineering, biotechnology and biomedical engineering. It is well suited as a textbook for students and as a reference book for researchers.

Nanoindentation of Natural Materials

Author : Arjun Dey
Publisher : CRC Press
ISBN 13 : 1351651595
Total Pages : 235 pages
Book Rating : 4.3/5 (516 download)

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Book Synopsis Nanoindentation of Natural Materials by : Arjun Dey

Download or read book Nanoindentation of Natural Materials written by Arjun Dey and published by CRC Press. This book was released on 2018-09-03 with total page 235 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanoindentation of Natural Materials: Hierarchical and Functionally Graded Microstructures provides a systematic introduction and review of state-of-the-art statistical hierarchical and functionally graded structures found in bone, teeth, hair, and scales, from a nanoindentation perspective, including detailed microstructure and composition. It covers the basics of hierarchical and functionally graded structures and nanoindentation techniques and detailed discussion with correlation micro/nano mechanical-structures The book includes practical issues backed with experimental data

Nanoindentation of Brittle Solids

Author : Arjun Dey
Publisher : CRC Press
ISBN 13 : 1466596902
Total Pages : 480 pages
Book Rating : 4.4/5 (665 download)

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Book Synopsis Nanoindentation of Brittle Solids by : Arjun Dey

Download or read book Nanoindentation of Brittle Solids written by Arjun Dey and published by CRC Press. This book was released on 2014-06-25 with total page 480 pages. Available in PDF, EPUB and Kindle. Book excerpt: Understanding the Basics of Nanoindentation and Why It Is Important Contact damage induced brittle fracture is a common problem in the field of brittle solids. In the case of both glass and ceramics—and as it relates to both natural and artificial bio-materials—it has triggered the need for improved fabrication technology and new product development in the industry. The Nanoindentation Technique Is Especially Dedicated to Brittle Materials Nanoindentation of Brittle Solids highlights the science and technology of nanoindentation related to brittle materials, and considers the applicability of the nanoindentation technique. This book provides a thorough understanding of basic contact induced deformation mechanisms, damage initiation, and growth mechanisms. Starting from the basics of contact mechanics and nanoindentation, it considers contact mechanics, addresses contact issues in brittle solids, and explores the concepts of hardness and elastic modulus of a material. It examines a variety of brittle solids and deciphers the physics of deformation and fracture at scale lengths compatible with the microstructural unit block. Discusses nanoindentation data analysis methods and various nanoindentation techniques Includes nanoindentation results from the authors’ recent research on natural biomaterials like tooth, bone, and fish scale materials Considers the nanoindentation response if contact is made too quickly in glass Explores energy issues related to the nanoindentation of glass Describes the nanoindentation response of a coarse grain alumina Examines nanoindentation on microplasma sprayed hydroxyapatite coatings Nanoindentation of Brittle Solids provides a brief history of indentation, and explores the science and technology of nanoindentation related to brittle materials. It also offers an in-depth discussion of indentation size effect; the evolution of shear induced deformation during indentation and scratches, and includes a collection of related research works.

Springer Handbook of Experimental Solid Mechanics

Author : William N. Sharpe, Jr.
Publisher : Springer Science & Business Media
ISBN 13 : 0387268839
Total Pages : 1100 pages
Book Rating : 4.3/5 (872 download)

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Book Synopsis Springer Handbook of Experimental Solid Mechanics by : William N. Sharpe, Jr.

Download or read book Springer Handbook of Experimental Solid Mechanics written by William N. Sharpe, Jr. and published by Springer Science & Business Media. This book was released on 2008-12-04 with total page 1100 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Springer Handbook of Experimental Solid Mechanics documents both the traditional techniques as well as the new methods for experimental studies of materials, components, and structures. The emergence of new materials and new disciplines, together with the escalating use of on- and off-line computers for rapid data processing and the combined use of experimental and numerical techniques have greatly expanded the capabilities of experimental mechanics. New exciting topics are included on biological materials, MEMS and NEMS, nanoindentation, digital photomechanics, photoacoustic characterization, and atomic force microscopy in experimental solid mechanics. Presenting complete instructions to various areas of experimental solid mechanics, guidance to detailed expositions in important references, and a description of state-of-the-art applications in important technical areas, this thoroughly revised and updated edition is an excellent reference to a widespread academic, industrial, and professional engineering audience.

Residual Stresses and Nanoindentation Testing of Films and Coatings

Author : Haidou Wang
Publisher : Springer
ISBN 13 : 9811078416
Total Pages : 215 pages
Book Rating : 4.8/5 (11 download)

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Book Synopsis Residual Stresses and Nanoindentation Testing of Films and Coatings by : Haidou Wang

Download or read book Residual Stresses and Nanoindentation Testing of Films and Coatings written by Haidou Wang and published by Springer. This book was released on 2018-03-12 with total page 215 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book covers the basic principles and application of nanoindentation technology to determine residual stresses in films and coatings. It briefly introduces various detection technologies for measuring residual stresses, while mainly focusing on nanoindentation. Subsequently, nanoindentation is used to determine residual stresses in different types of films and coatings, and to describe them in detail. This book is intended for specialists, engineers and graduate students in mechanical design, manufacturing, maintenance and remanufacturing, and as a guide to the practice of production with social and economic benefits.

Effects of Adhesion on the Measurement of Thin Film Mechanical Properties by Nanoindentation

Author :
Publisher :
ISBN 13 :
Total Pages : 7 pages
Book Rating : 4.:/5 (684 download)

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Book Synopsis Effects of Adhesion on the Measurement of Thin Film Mechanical Properties by Nanoindentation by :

Download or read book Effects of Adhesion on the Measurement of Thin Film Mechanical Properties by Nanoindentation written by and published by . This book was released on 1997 with total page 7 pages. Available in PDF, EPUB and Kindle. Book excerpt: Experiments have been performed on soft aluminum films deposited on hard ceramic substrates to explore the influences of interfacial adhesion on mechanical property measurement by nanoindentation. The substrate materials included soda-lime silicate glass, aluminum oxynitride (ALON), and (100) sapphire. Thin films of high purity aluminum were sputtered onto each substrate to a thickness of 500 nm. Because the films were deposited simultaneously, the only major difference in the specimens was the nature of the substrate, which exerts an important influence on film adhesion through interfacial chemistry. Of the substrates examined, aluminum adheres strongly to glass and sapphire, but poorly to ALON. In addition, two different types of aluminum films on sapphire were examined - one with and the other without a 10 nm interlayer of amorphous carbon which significantly reduces film adhesion. Testing revealed important differences in the hardness of the specimens when measured by standard nanoindentation methods. Characterization of the residual hardness impressions by high resolution scanning electron microscopy showed that the hardness differences arise from an influence of interfacial debonding and film delamination on pile-up in the film. Furthermore, when the pile-up is accounted for in contact area determinations, the film hardness is actually independent of the substrate, thus indicating that the hardness differences observed in nanoindentation testing are an artifact of the testing analysis procedure. Results of the experiments are documented and discussed. 8 refs., 6 figs., 1 tab.

Nanotribology and Nanomechanics

Author : Bharat Bhushan
Publisher : Springer Science & Business Media
ISBN 13 : 3540282483
Total Pages : 1157 pages
Book Rating : 4.5/5 (42 download)

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Book Synopsis Nanotribology and Nanomechanics by : Bharat Bhushan

Download or read book Nanotribology and Nanomechanics written by Bharat Bhushan and published by Springer Science & Business Media. This book was released on 2006-01-27 with total page 1157 pages. Available in PDF, EPUB and Kindle. Book excerpt: The recent emergence and proliferation of proximal probes, e.g. SPM and AFM, and computational techniques for simulating tip-surface interactions has enabled the systematic investigation of interfacial problems on ever smaller scales, as well as created means for modifying and manipulating nanostructures. In short, they have led to the appearance of the new, interdisciplinary fields of micro/nanotribology and micro/nanomechanics. This volume serves as a timely, practical introduction to the principles of nanotribology and nanomechanics and applications to magnetic storage systems and MEMS/NEMS. Assuming some familiarity with macrotribology/mechanics, the book comprises chapters by internationally recognized experts, who integrate knowledge of the field from the mechanics and materials-science perspectives. They cover key measurement techniques, their applications, and theoretical modelling of interfaces, each beginning their contributions with macro- and progressing to microconcepts. After reviewing the fundamental experimental and theoretical aspects in the first part, Nanotribology and Nanomechanics then treats applications. Three groups of readers are likely to find this text valuable: graduate students, research workers, and practicing engineers. It can serve as the basis for a comprehensive, one- or two-semester course in scanning probe microscopy; applied scanning probe techniques; or nanotribology/nanomechanics/nanotechnology, in departments such as mechanical engineering, materials science, and applied physics. With a Foreword by Physics Nobel Laureate Gerd Binnig Dr. Bharat Bhushan is an Ohio Eminent Scholar and The Howard D. Winbigler Professor in the Department of Mechanical Engineering, Graduate Research Faculty Advisor in the Department of Materials Science and Engineering, and the Director of the Nanotribology Laboratory for Information Storage & MEMS/NEMS (NLIM) at the Ohio State University, Columbus, Ohio. He is an internationally recognized expert of tribology and mechanics on the macro- to nanoscales, and is one of the most prolific authors. He is considered by some a pioneer of the tribology and mechanics of magnetic storage devices and a leading researcher in the fields of nanotribology and nanomechanics using scanning probe microscopy and applications to micro/nanotechnology. He is the recipient of various international fellowships including the Alexander von Humboldt Research Prize for Senior Scientists, Max Planck Foundation Research Award for Outstanding Foreign Scientists, and the Fulbright Senior Scholar Award.

Contact Mechanics

Author : K. L. Johnson
Publisher : Cambridge University Press
ISBN 13 : 9780521347969
Total Pages : 472 pages
Book Rating : 4.3/5 (479 download)

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Book Synopsis Contact Mechanics by : K. L. Johnson

Download or read book Contact Mechanics written by K. L. Johnson and published by Cambridge University Press. This book was released on 1987-08-28 with total page 472 pages. Available in PDF, EPUB and Kindle. Book excerpt: This treatise is concerned with the stresses and deformation of solid bodies in contact with each other, along curved surfaces which touch initially at a point or along a line. Examples are a railway wheel and rail, or a pair of gear wheel teeth. Professor Johnson first reviews the development of the theory of contact stresses since the problem was originally addressed by H. Hertz in 1882. Next he discusses the influence of friction and the topographical roughness of surfaces, and this is incorporated into the theory of contact mechanics. An important feature is the treatment of bodies which deform plastically or viscoelastically. In addition to stationary contact, an appreciable section of the book is concerned with bodies which are in sliding or rolling contact, or which collide.

Thin Films Stresses and Mechanical Properties VI

Author : William W. Gerberich
Publisher :
ISBN 13 :
Total Pages : 576 pages
Book Rating : 4.:/5 (31 download)

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Book Synopsis Thin Films Stresses and Mechanical Properties VI by : William W. Gerberich

Download or read book Thin Films Stresses and Mechanical Properties VI written by William W. Gerberich and published by . This book was released on 1997 with total page 576 pages. Available in PDF, EPUB and Kindle. Book excerpt: Interest in the mechanical properties of thin films remains high throughout the world, as evidenced by the large international contingent represented in this book. With regard to stresses, techniques for sorting out residual stress and strain states are becoming more varied and sophisticated. Discussions include Raman scattering, nonlinear acoustic responses and back-scattered electron imaging microscopies, as well as the more standard wafer-bending and X-ray techniques. Spectroscopy, indenting and the burgeoning field of nanoprobe imaging for the characterization of mechanical properties of thin films are also highlighted. Topics include: mechanical properties of films and multilayers; fracture and adhesion; nanoindentation of films and surfaces; mechanical property methods and modelling; tribological properties of thin films; properties of polymer films; stress effects in thin films and interconnects; epitaxy and strain relief mechanisms, measurements.

ASM Handbook

Author :
Publisher :
ISBN 13 :
Total Pages : 1024 pages
Book Rating : 4.:/5 (318 download)

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Book Synopsis ASM Handbook by :

Download or read book ASM Handbook written by and published by . This book was released on 1990 with total page 1024 pages. Available in PDF, EPUB and Kindle. Book excerpt: These volumes cover the properties, processing, and applications of metals and nonmetallic engineering materials. They are designed to provide the authoritative information and data necessary for the appropriate selection of materials to meet critical design and performance criteria.

Materials Science of Thin Films

Author : Milton Ohring
Publisher : Academic Press
ISBN 13 : 0125249756
Total Pages : 817 pages
Book Rating : 4.1/5 (252 download)

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Book Synopsis Materials Science of Thin Films by : Milton Ohring

Download or read book Materials Science of Thin Films written by Milton Ohring and published by Academic Press. This book was released on 2002 with total page 817 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the first book that can be considered a textbook on thin film science, complete with exercises at the end of each chapter. Ohring has contributed many highly regarded reference books to the AP list, including Reliability and Failure of Electronic Materials and the Engineering Science of Thin Films. The knowledge base is intended for science and engineering students in advanced undergraduate or first-year graduate level courses on thin films and scientists and engineers who are entering or require an overview of the field. Since 1992, when the book was first published, the field of thin films has expanded tremendously, especially with regard to technological applications. The second edition will bring the book up-to-date with regard to these advances. Most chapters have been greatly updated, and several new chapters have been added.