Modeling And Simulation Of The Capacitive Accelerometer

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Modeling and simulation of the capacitive accelerometer

Author : Tan Tran Duc
Publisher : GRIN Verlag
ISBN 13 : 3640249593
Total Pages : 83 pages
Book Rating : 4.6/5 (42 download)

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Book Synopsis Modeling and simulation of the capacitive accelerometer by : Tan Tran Duc

Download or read book Modeling and simulation of the capacitive accelerometer written by Tan Tran Duc and published by GRIN Verlag. This book was released on 2009-01-19 with total page 83 pages. Available in PDF, EPUB and Kindle. Book excerpt: Diploma Thesis from the year 2005 in the subject Electrotechnology, grade: Master 9.8/10, , language: English, abstract: Microelectromechanical systems (MEMS) are collection of microsensors and actuators that have the ability to sense its environment and react to changes in that environment with the use of a microcircuit control. They also include the conventional microelectronics packaging, integrating antenna structures for command signals into microelectromechanical structures for desired sensing and actuating functions. The system may also need micropower supply, microrelay, and microsignal processing units. Microcomponents make the system faster, more reliable, cheaper, and capable of incorporating more complex functions. In the beginning of 1990s, MEMS appeared with the aid of the development of integrated circuit fabrication processes, in which sensors, actuators, and control functions are co-fabricated in silicon [1]. Since then, remarkable research progresses have been achieved in MEMS under the strong promotions from both government and industries. In addition to the commercialization of some less integrated MEMS devices, such as microaccelerometers, inkjet printer head, micromirrors for projection, etc., the concepts and feasibility of more complex MEMS devices have been proposed and demonstrated for the applications in such varied fields as microfluidics, aerospace, biomedical, chemical analysis, wireless communications, data storage, display, optics, etc. Some branches of MEMS, appearing as microoptoelectromechanical systems (MOEMS), micro total analysis systems, etc., have attracted a great research since their potential applications’ market.

CMOS - MEMS

Author : Henry Baltes
Publisher : John Wiley & Sons
ISBN 13 : 3527616934
Total Pages : 612 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis CMOS - MEMS by : Henry Baltes

Download or read book CMOS - MEMS written by Henry Baltes and published by John Wiley & Sons. This book was released on 2008-07-11 with total page 612 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microstructures, electronics, nanotechnology - these vast fields of research are growing together as the size gap narrows and many different materials are combined. Current research, engineering sucesses and newly commercialized products hint at the immense innovative potentials and future applications that open up once mankind controls shape and function from the atomic level right up to the visible world without any gaps. Sensor systems, microreactors, nanostructures, nanomachines, functional surfaces, integrated optics, displays, communications technology, biochips, human/machine interfaces, prosthetics, miniaturized medical and surgery equipment and many more opportunities are being explored. This new series, Advanced Micro and Nano Systems, provides cutting-edge reviews from top authors on technologies, devices and advanced systems from the micro and nano worlds.

Design and Modeling of a MEMS-based Accelerometer with Pull in Analysis

Author :
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (68 download)

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Book Synopsis Design and Modeling of a MEMS-based Accelerometer with Pull in Analysis by :

Download or read book Design and Modeling of a MEMS-based Accelerometer with Pull in Analysis written by and published by . This book was released on 2002 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis reports the design and modelling of a MEMS (Micro Electro Mechanical system) based inertial accelerometer. The main motivation to design a differential type of accelerometer is that such a kind of structure allows differential electrostatic actuation and capacitive sensing. They can be operated at the border of stability also so that the "pull in" operation mode can be explored. Such kinds of structures have a wide range of applications because of their high sensitivity. One is in the field of minimally invasive surgery where accelerometers will be combined with gyroscopes to be used in the navigation of surgical tools as a inertial micro unit (IMU). The choice for the design of a structure with 1 Degree ofFreedom(DOF), instead of a 2-DOF device was instigated by the simplicity of the design and by a more efficient 1-DOF dynamic model. The accelerometers were designed and optimized using the MATLAB simulator and COVENTORWARE simulation tool. First set of devices is fabricated using a commercial foundry process called SOIMUMPs. The simulation tests show that the SOl accelerometer system yields 8.8kHz resonant frequency, with a quality factor of 10 and 2.l2mV/g sensitivity. To characterize the accelerometer a new semi automatic tool was formulated for the noise analysis and noise based optimization of the accelerometer design and the analysis estimation shows that there is a trade off between the SIN ratio and the sensitivity and for the given design could be made much better in terms of SIN by tuning its resonant frequency.

MEMS Accelerometers

Author : Mahmoud Rasras
Publisher : MDPI
ISBN 13 : 3038974145
Total Pages : 252 pages
Book Rating : 4.0/5 (389 download)

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Book Synopsis MEMS Accelerometers by : Mahmoud Rasras

Download or read book MEMS Accelerometers written by Mahmoud Rasras and published by MDPI. This book was released on 2019-05-27 with total page 252 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Accelerometers are among the most widely used sensors implemented in MEMS technology. MEMS accelerometers are showing a growing presence in almost all industries ranging from automotive to medical. A traditional MEMS accelerometer employs a proof mass suspended to springs, which displaces in response to an external acceleration. A single proof mass can be used for one- or multi-axis sensing. A variety of transduction mechanisms have been used to detect the displacement. They include capacitive, piezoelectric, thermal, tunneling, and optical mechanisms. Capacitive accelerometers are widely used due to their DC measurement interface, thermal stability, reliability, and low cost. However, they are sensitive to electromagnetic field interferences and have poor performance for high-end applications (e.g., precise attitude control for the satellite). Over the past three decades, steady progress has been made in the area of optical accelerometers for high-performance and high-sensitivity applications but several challenges are still to be tackled by researchers and engineers to fully realize opto-mechanical accelerometers, such as chip-scale integration, scaling, low bandwidth, etc. This Special Issue on "MEMS Accelerometers" seeks to highlight research papers, short communications, and review articles that focus on: Novel designs, fabrication platforms, characterization, optimization, and modeling of MEMS accelerometers. Alternative transduction techniques with special emphasis on opto-mechanical sensing. Novel applications employing MEMS accelerometers for consumer electronics, industries, medicine, entertainment, navigation, etc. Multi-physics design tools and methodologies, including MEMS-electronics co-design. Novel accelerometer technologies and 9DoF IMU integration. Multi-accelerometer platforms and their data fusion.

IoT and Analytics for Sensor Networks

Author : Padmalaya Nayak
Publisher : Springer
ISBN 13 : 9789811629181
Total Pages : 508 pages
Book Rating : 4.6/5 (291 download)

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Book Synopsis IoT and Analytics for Sensor Networks by : Padmalaya Nayak

Download or read book IoT and Analytics for Sensor Networks written by Padmalaya Nayak and published by Springer. This book was released on 2021-09-12 with total page 508 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book includes high-quality research papers presented at the 1st International Conference on Wireless Sensor Networks, Ubiquitous Computing and Applications (ICWSNUCA, 2021), which is held at Gokaraju Rangaraju Institute of Engineering and Technology, Hyderabad, India, during 26–27 February, 2021. This volume focuses on the applications, use-cases, architectures, deployments, and recent advances of wireless sensor networks as well as ubiquious computing. Different research topics are illustrated in this book, like wireless sensor networks for the Internet of Things; IoT applications for eHealth; smart cities; architectures for WSNs and IoT, WSNs hardware and new devices; low-power wireless technologies; wireless ad hoc sensor networks; routing and data transfer in WSNs; multicast communication in WSNs; security management in WSNs and in IoT systems; and power consumption optimization in WSNs.

MEMS Capacitive Accelerometer Model and Analog Control Circuitry

Author : Vijay Seshan
Publisher :
ISBN 13 :
Total Pages : 92 pages
Book Rating : 4.:/5 (687 download)

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Book Synopsis MEMS Capacitive Accelerometer Model and Analog Control Circuitry by : Vijay Seshan

Download or read book MEMS Capacitive Accelerometer Model and Analog Control Circuitry written by Vijay Seshan and published by . This book was released on 2003 with total page 92 pages. Available in PDF, EPUB and Kindle. Book excerpt:

MEMS Silicon Oscillating Accelerometers and Readout Circuits

Author : Xu, Yong Ping
Publisher : River Publishers
ISBN 13 : 877022045X
Total Pages : 312 pages
Book Rating : 4.7/5 (72 download)

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Book Synopsis MEMS Silicon Oscillating Accelerometers and Readout Circuits by : Xu, Yong Ping

Download or read book MEMS Silicon Oscillating Accelerometers and Readout Circuits written by Xu, Yong Ping and published by River Publishers. This book was released on 2019-02-12 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt: Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the capacitive accelerometer, the MEMS SOA is based on the force sensing mechanism, where the input acceleration is converted to a frequency output. MEMS Silicon Oscillating Accelerometers and Readout Circuits consists of six chapters and covers both MEMS sensor and readout circuit, and provides an in-depth coverage on the design and modelling of the MEMS SOA with several recently reported prototypes. The book is not only useful to researchers and engineers who are familiar with the topic, but also appeals to those who have general interests in MEMS inertial sensors. The book includes extensive references that provide further information on this topic.

Sensing and Control of MEMS Accelerometers Using Kalman Filter

Author : Kai Zhang
Publisher :
ISBN 13 :
Total Pages : 77 pages
Book Rating : 4.:/5 (698 download)

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Book Synopsis Sensing and Control of MEMS Accelerometers Using Kalman Filter by : Kai Zhang

Download or read book Sensing and Control of MEMS Accelerometers Using Kalman Filter written by Kai Zhang and published by . This book was released on 2010 with total page 77 pages. Available in PDF, EPUB and Kindle. Book excerpt: Surface micromachined low-capacitance MEMS capacitive accelerometers which integrated CMOS readout circuit generally have a noise above 0.02g. Force-to-rebalance feedback control that is commonly used in MEMS accelerometers can improve the performances of accelerometers such as increasing their stability, bandwidth and dynamic range. However, the controller also increases the noise floor. There are two major sources of the noise in MEMS accelerometer. They are electronic noise from the CMOS readout circuit and thermal-mechanical Brownian noise caused by damping. Kalman filter is an effective solution to the problem of reducing the effects of the noises through estimating and canceling the states contaminated by noise. The design and implementation of a Kalman filter for a MEMS capacitive accelerometer is presented in the thesis in order to filter out the noise mentioned above while keeping its good performance under feedback control. The dynamic modeling of the MEMS accelerometer system and the controller design based on the model are elaborated in the thesis. Simulation results show the Kalman filter gives an excellent noise reduction, increases the dynamic range of the accelerometer, and reduces the displacement of the mass under a closed-loop structure.

Mems Accelerometer Modelling and Noise Analysis

Author : Biter Boga Inaltekin
Publisher : LAP Lambert Academic Publishing
ISBN 13 : 9783846505847
Total Pages : 132 pages
Book Rating : 4.5/5 (58 download)

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Book Synopsis Mems Accelerometer Modelling and Noise Analysis by : Biter Boga Inaltekin

Download or read book Mems Accelerometer Modelling and Noise Analysis written by Biter Boga Inaltekin and published by LAP Lambert Academic Publishing. This book was released on 2011-09 with total page 132 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro Electro Mechanical Systems (MEMS) have an extensive use in different areas of technology. Inertial sensors (accelerometers and gyroscopes) are one of the most widely used devices fabricated using MEMS technology. MEMS accelerometers play an important role in different application areas such as automotive, inertial navigation, guidance, industry, space applications etc. because of low cost, small size, low power, and high reliability. This book presents a detailed SIMULINK model for a conventional capacitive sigma-delta accelerometer system consisting of a MEMS accelerometer, closed-loop readout electronics, and signal processing units (e.g. decimation filters). By using this model, it is possible to estimate the performance of the full accelerometer system including individual noise components, operation range, open loop sensitivity, scale factor, etc. The developed model has been verified through test results using a capacitive MEMS accelerometer, full-custom designed readout electronics, and signal processing unit implemented on a FPGA.

Embedded Computer Systems: Architectures, Modeling, and Simulation

Author : Stamatis Vassiliadis
Publisher : Springer
ISBN 13 : 3540364110
Total Pages : 505 pages
Book Rating : 4.5/5 (43 download)

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Book Synopsis Embedded Computer Systems: Architectures, Modeling, and Simulation by : Stamatis Vassiliadis

Download or read book Embedded Computer Systems: Architectures, Modeling, and Simulation written by Stamatis Vassiliadis and published by Springer. This book was released on 2006-07-18 with total page 505 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book constitutes the refereed proceedings of the 6th International Workshop on Systems, Architectures, Modeling, and Simulation, SAMOS 2006, held in Samos, Greece on July 2006. The 47 revised full papers presented together with 2 keynote talks were thoroughly reviewed and selected from 130 submissions. The papers are organized in topical sections on system design and modeling, wireless sensor networks, processor design, dependable computing, architectures and implementations, and embedded sensor systems.

Modelica. Modeling and Simulation Based on Dymola Program

Author : ِAhmed Jaber
Publisher : GRIN Verlag
ISBN 13 : 3656876274
Total Pages : 98 pages
Book Rating : 4.6/5 (568 download)

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Book Synopsis Modelica. Modeling and Simulation Based on Dymola Program by : ِAhmed Jaber

Download or read book Modelica. Modeling and Simulation Based on Dymola Program written by ِAhmed Jaber and published by GRIN Verlag. This book was released on 2015-01-15 with total page 98 pages. Available in PDF, EPUB and Kindle. Book excerpt: Bachelor Thesis from the year 2013 in the subject Electrotechnology, grade: A, Islamic University of Gaza, language: English, abstract: Modelica is an object-oriented, declarative, multi-domain language for component-oriented modeling of complex systems, e.g., systems containing mechanical, electrical, electronic, hydraulic, thermal, control, electric power or process-oriented subcomponents. Modelica language is a textual description to define all parts of a model and to structure model components in libraries, called packages. Basically, all Modelica language elements are mapped to differential, algebraic and discrete equations. Using Modelica in design process for complex systems is very efficient and provide several benefits results. In Modelica we can model and simulate all types of components such as electrical, mechanical, hydraulic etc. Furthermore, Modelica Association provide standard library which contains a lot of different components.

Design of Two-axis Capacitive Accelerometer Using MEMS

Author :
Publisher :
ISBN 13 :
Total Pages : 43 pages
Book Rating : 4.:/5 (587 download)

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Book Synopsis Design of Two-axis Capacitive Accelerometer Using MEMS by :

Download or read book Design of Two-axis Capacitive Accelerometer Using MEMS written by and published by . This book was released on 2004 with total page 43 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS technology is rapidly taking an important role in today's and future military systems. MEMS are able to lower the device size from millimeter to micrometer and maintain and sometimes surpass the performance of conventional devices. This thesis encompasses the knowledge acquired throughout the MEMS courses to design a two-axis capacitive accelerometer. The required acceleration and operating temperature range were ł50g in each axis and -40ʻC to +80 ʻC, respectively. The accelerometer was also needed to survive within a dynamic shocking environment with accelerations of up to 225g. The parameters of the accelerometer to achieve above specifications were calculated using lumped element approximation and the results were used for initial layout of it. A finite element analysis code (ANSYS) was used to perform simulations of the accelerometer under various operating conditions and to determine the optimum configuration. The simulated results were found to be within about 5% of the calculations indicating the validity of lumped element approach. The response of the designed accelerometer was 7 mV/g and with sensitivity of 1.3g at 3dB. It was also found that the accelerometer was stable in the desired range of operation including under the shock. Two axes sensing can be achieved using two identical accelerometers having their sensing axes perpendicular to each other.

Modeling and Simulation for Microelectronic Packaging Assembly

Author : Shen Liu
Publisher : John Wiley & Sons
ISBN 13 : 0470828412
Total Pages : 586 pages
Book Rating : 4.4/5 (78 download)

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Book Synopsis Modeling and Simulation for Microelectronic Packaging Assembly by : Shen Liu

Download or read book Modeling and Simulation for Microelectronic Packaging Assembly written by Shen Liu and published by John Wiley & Sons. This book was released on 2011-08-24 with total page 586 pages. Available in PDF, EPUB and Kindle. Book excerpt: Although there is increasing need for modeling and simulation in the IC package design phase, most assembly processes and various reliability tests are still based on the time consuming "test and try out" method to obtain the best solution. Modeling and simulation can easily ensure virtual Design of Experiments (DoE) to achieve the optimal solution. This has greatly reduced the cost and production time, especially for new product development. Using modeling and simulation will become increasingly necessary for future advances in 3D package development. In this book, Liu and Liu allow people in the area to learn the basic and advanced modeling and simulation skills to help solve problems they encounter. Models and simulates numerous processes in manufacturing, reliability and testing for the first time Provides the skills necessary for virtual prototyping and virtual reliability qualification and testing Demonstrates concurrent engineering and co-design approaches for advanced engineering design of microelectronic products Covers packaging and assembly for typical ICs, optoelectronics, MEMS, 2D/3D SiP, and nano interconnects Appendix and color images available for download from the book's companion website Liu and Liu have optimized the book for practicing engineers, researchers, and post-graduates in microelectronic packaging and interconnection design, assembly manufacturing, electronic reliability/quality, and semiconductor materials. Product managers, application engineers, sales and marketing staff, who need to explain to customers how the assembly manufacturing, reliability and testing will impact their products, will also find this book a critical resource. Appendix and color version of selected figures can be found at www.wiley.com/go/liu/packaging

Advances in Mechatronics and Control Engineering II

Author : Krzysztof Galkowski
Publisher : Trans Tech Publications Ltd
ISBN 13 : 3038262757
Total Pages : 2614 pages
Book Rating : 4.0/5 (382 download)

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Book Synopsis Advances in Mechatronics and Control Engineering II by : Krzysztof Galkowski

Download or read book Advances in Mechatronics and Control Engineering II written by Krzysztof Galkowski and published by Trans Tech Publications Ltd. This book was released on 2013-10-15 with total page 2614 pages. Available in PDF, EPUB and Kindle. Book excerpt: Collection of selected, peer reviewed papers from the 2013 2nd International Conference on Mechatronics and Control Engineering (ICMCE 2013), August 28-29, 2013, Guangzhou, China. Volume is indexed by Thomson Reuters CPCI-S (WoS). The 485 papers are grouped as follows: Chapter 1: Theory of Mechanisms and Mechanical Dynamics Chapter 2: Industrial Robotics and Automation; Chapter 3: Design and Control in Modern Mechatronics System Engineering; Chapter 4: Sensor Technology; Chapter 5: Voice, Image and Video Processing; Chapter 6: Signal Processing System; Chapter 7: Artificial Intelligence and Computational Algorithms; Chapter 8: Measurement Technology, Testing and Instruments; Chapter 9: Automatic Control Technology; Chapter 10: Electric Automation; Chapter 11: Intelligent Traffic Control; Chapter 12: Electronics Technology and Embedded Systems; Chapter 13: Software Development and Application; Chapter 14: Computer Application in Industry and Engineering; Chapter 15: Fluid Engineering and Hydrodynamics; Chapter 16: Materials; Chapter 17: Research and Design in Mechanical Engineering; Chapter 18: Structural Engineering and Architecture Analysis; Chapter 19: Industrial Engineering and Production Operations Management; Chapter 20: Engineering Education

Design of a Monolithic 3dof Mems Capacitive Accelerometer

Author : Muhammad Shuja Khan
Publisher : LAP Lambert Academic Publishing
ISBN 13 : 9783845409528
Total Pages : 92 pages
Book Rating : 4.4/5 (95 download)

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Book Synopsis Design of a Monolithic 3dof Mems Capacitive Accelerometer by : Muhammad Shuja Khan

Download or read book Design of a Monolithic 3dof Mems Capacitive Accelerometer written by Muhammad Shuja Khan and published by LAP Lambert Academic Publishing. This book was released on 2011-07 with total page 92 pages. Available in PDF, EPUB and Kindle. Book excerpt: Sensors and devices, based on micromachining technology, known as micro-electro-mechanicalsystems or MEMS, have been received increasing attention so far in recent years. Micromachined inertial sensors, consisting of accelerometers and gyroscopes, are one of the most important types of silicon-based sensor. MEMS capacitive accelerometers have been extensively used in automobiles, inertial navigation systems, earth quake detection and many other bio-medical applications. This book deals with the design of a monolithic 3DOF MEMS capacitive accelerometer using both analytical and numerical techniques. Monolithic accelerometer is a single structure having three individual single axis Accelerometers on a single substrate and utilizes a surface micromachining technology using standard PolyMUMPs process. The designed accelerometer is 3mmx3.1mm in size, has low mechanical noise floor, high sense capacitance and high sensitivity along in-plane (x and y) and out-of-plane (z) axes. Performing a detailed finite element analysis in ANSYS 11.o, physical level simulation has been done to verify the deflection for x, y and z axes with respect to the applied acceleration (g).

First International Conference on Artificial Intelligence and Cognitive Computing

Author : Raju Surampudi Bapi
Publisher : Springer
ISBN 13 : 9811315809
Total Pages : 716 pages
Book Rating : 4.8/5 (113 download)

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Book Synopsis First International Conference on Artificial Intelligence and Cognitive Computing by : Raju Surampudi Bapi

Download or read book First International Conference on Artificial Intelligence and Cognitive Computing written by Raju Surampudi Bapi and published by Springer. This book was released on 2018-11-04 with total page 716 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents original research works by researchers, engineers and practitioners in the field of artificial intelligence and cognitive computing. The book is divided into two parts, the first of which focuses on artificial intelligence (AI), knowledge representation, planning, learning, scheduling, perception-reactive AI systems, evolutionary computing and other topics related to intelligent systems and computational intelligence. In turn, the second part focuses on cognitive computing, cognitive science and cognitive informatics. It also discusses applications of cognitive computing in medical informatics, structural health monitoring, computational intelligence, intelligent control systems, bio-informatics, smart manufacturing, smart grids, image/video processing, video analytics, medical image and signal processing, and knowledge engineering, as well as related applications.

Mechatronic Modeling and Simulation Using Bond Graphs

Author : Shuvra Das
Publisher : CRC Press
ISBN 13 : 1439883157
Total Pages : 506 pages
Book Rating : 4.4/5 (398 download)

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Book Synopsis Mechatronic Modeling and Simulation Using Bond Graphs by : Shuvra Das

Download or read book Mechatronic Modeling and Simulation Using Bond Graphs written by Shuvra Das and published by CRC Press. This book was released on 2009-03-17 with total page 506 pages. Available in PDF, EPUB and Kindle. Book excerpt: Bond graphs are especially well-suited for mechatronic systems, as engineering system modeling is best handled using a multidisciplinary approach. Bond graphing permits one to see the separate components of an engineering system as a unified whole, and allows these components to be categorized under a few generalized elements, even when they come f