Microstructure and Nonstoichiometry of Barium Strontium Titanate Thin Films for Dram Applications

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Total Pages : 9 pages
Book Rating : 4.:/5 (683 download)

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Book Synopsis Microstructure and Nonstoichiometry of Barium Strontium Titanate Thin Films for Dram Applications by :

Download or read book Microstructure and Nonstoichiometry of Barium Strontium Titanate Thin Films for Dram Applications written by and published by . This book was released on 1999 with total page 9 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this paper we investigate the microstructural accommodation of nonstoichiometry in (Ba(subscript x)Sr{sub 1-x}Ti{sub 1+y}O{sub 3+z}) thin films grown by chemical vapor deposition. Films with three different (Ba+Sr)/Ti ratios of 49/51 (y=0.04 in the notation of the formula above), of 48/52 (y=0.08) and of 46.5/53.5 (y=O.15), were studied. High-resolution electron microscopy is used to study the microstructure of the BST films. High-spatial resolution electron energy-loss spectroscopy (EELS) is used to reveal changes in chemistry and local atomic environment both at grain boundaries and within grains as a function of titanium excess. We find an amorphous phase at the grain boundaries and grain boundary segregation of excess titanium in the samples with y=0.15. In addition, EELS is also used to show that excess titanium is being partially accommodated in the grain interior. Implications for the film electrical and dielectric properties are outlined.

Microstructure and Electrical Property Characterization of Barium Strontium Titanate Thin Films Prepared by a Sol-gel Technique for Dram Capacitor Applications

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Total Pages : 352 pages
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Book Synopsis Microstructure and Electrical Property Characterization of Barium Strontium Titanate Thin Films Prepared by a Sol-gel Technique for Dram Capacitor Applications by : Danielle Marie Tahan

Download or read book Microstructure and Electrical Property Characterization of Barium Strontium Titanate Thin Films Prepared by a Sol-gel Technique for Dram Capacitor Applications written by Danielle Marie Tahan and published by . This book was released on 1997 with total page 352 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Investigation of Resistive Switching in Barium Strontium Titanate Thin Films for Memory Applications

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Publisher : Forschungszentrum Jülich
ISBN 13 : 3893366083
Total Pages : 129 pages
Book Rating : 4.8/5 (933 download)

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Book Synopsis Investigation of Resistive Switching in Barium Strontium Titanate Thin Films for Memory Applications by : Wan Shen

Download or read book Investigation of Resistive Switching in Barium Strontium Titanate Thin Films for Memory Applications written by Wan Shen and published by Forschungszentrum Jülich. This book was released on 2010 with total page 129 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Microstructural and Electrical Characterization of Barium Strontium Titanate-Based Solid Solution Thin Films Deposited on Ceramic Substrates by Pulsed Laser Deposition

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Total Pages : 6 pages
Book Rating : 4.:/5 (742 download)

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Book Synopsis Microstructural and Electrical Characterization of Barium Strontium Titanate-Based Solid Solution Thin Films Deposited on Ceramic Substrates by Pulsed Laser Deposition by : Costas G. Fountzoulas

Download or read book Microstructural and Electrical Characterization of Barium Strontium Titanate-Based Solid Solution Thin Films Deposited on Ceramic Substrates by Pulsed Laser Deposition written by Costas G. Fountzoulas and published by . This book was released on 2003 with total page 6 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ferroelectrics are multicomponent materials with a wealth of interesting and useful properties, such as piezoelectricity. The dielectric constant of the BSTO ferroelectrics can be changed by applying an electric field. Variable dielectric constant results in a change in phase velocity in the device allowing it to be tuned in real time for a particular application. The microstructure of the film influences the electronic properties which in turn influences the performance of the film. Ba(0.6)Sr(0.4)Ti(1-y)(A(3+), B(5+))(y)O3 thin films, of nominal thickness of 0.65 micrometer, were synthesized initially at substrate temperatures of 400 deg C, and subsequently annealed to 750 deg C, on LaAlO3 (100) substrates, previously coated with LaSrCoO conductive buffer layer, using the pulsed laser deposition technique. The microstructural and physical characteristics of the post-annealed thin films have been studied using x-ray diffraction, scanning electron microscopy, and nano indentation and are reported. Results of capacitance measurements are used to obtain dielectric constant and tunability in the paraelectric (T>Tc) regime.

Mechanical and Microstructural Evaluation of Barium Strontium Titanate Thin Films for Improved Antenna Performance and Reliability

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ISBN 13 :
Total Pages : 14 pages
Book Rating : 4.:/5 (227 download)

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Book Synopsis Mechanical and Microstructural Evaluation of Barium Strontium Titanate Thin Films for Improved Antenna Performance and Reliability by :

Download or read book Mechanical and Microstructural Evaluation of Barium Strontium Titanate Thin Films for Improved Antenna Performance and Reliability written by and published by . This book was released on 1999 with total page 14 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ferroelectric barium strontium titanate (Ba(1-x)SrxTiO3 BSTO) films of 1-micron nominal thickness were deposited on single crystals of sapphire and electroded substrates at substrate temperatures varying from 30 deg C to 700 deg C. The microstructure of the thin films was columnar at all substrate deposition temperatures. The film microhardness showed a trend toward increased hardness with substrate temperature. Furthermore, with the elevation in substrate temperature, there was a parallel increase in film-substrate adhesion measurements, while the cohesion measurements were not influenced by substrate temperature.

Processing and electrical characterization of barium strontium titanate thin films for ULSI DRAM application

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ISBN 13 :
Total Pages : 156 pages
Book Rating : 4.:/5 (396 download)

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Book Synopsis Processing and electrical characterization of barium strontium titanate thin films for ULSI DRAM application by : Shylaja Katakam

Download or read book Processing and electrical characterization of barium strontium titanate thin films for ULSI DRAM application written by Shylaja Katakam and published by . This book was released on 1998 with total page 156 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Synthesis, Characterization and Applications of Barium Strontium Titanate Thin Film Structures

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ISBN 13 :
Total Pages : pages
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Book Synopsis Synthesis, Characterization and Applications of Barium Strontium Titanate Thin Film Structures by : Supriya Ashok Ketkar

Download or read book Synthesis, Characterization and Applications of Barium Strontium Titanate Thin Film Structures written by Supriya Ashok Ketkar and published by . This book was released on 2013 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Barium Strontium Titanate (BST) based ferroelectric thin film devices have been popular over the last decade due to their versatile applications in tunable microwave devices such as delay lines, resonators, phase shifters, and varactors. BST thin films are promising candidates due to their high dielectric constant, tunability and low dielectric loss. Dielectric-tunable properties of BST films deposited by different deposition techniques have been reported which study the effects of factors, such as oxygen vacancies, film thickness, grain size, Ba/Sr ratio, etc. Researchers have also studied doping concentrations, high temperature annealing and multilayer structures to attain higher tunability and lower loss. The aim of this investigation was to study material properties of Barium Strontium Titanate from a comprehensive point of view to establish relations between various growth techniques and the film physical and electrical properties. The primary goal of this investigation was to synthesize and characterize RF magnetron sputtered Barium Strontium Titanate (Ba1-xSrxTiO3), thin film structures and compare their properties with BST thin films deposited by sol-gel method with the aim of determining relationships between the oxide deposition parameters, the film structure, and the electric field dependence. In order to achieve higher thickness and ease of fabrication, and faster turn around time, a [grave]stacked' deposition process was adopted, wherein a thin film (around 200nm) of BST was first deposited by RF magnetron sputtering process followed by a sol-gel deposition process to achieve higher thickness. The investigation intends to bridge the knowledge gap associated with the dependence of thickness variation with respect to the tunability of the films. The film structures obtained using the three different deposition methods were also compared with respect to their analytical and electrical properties.

Processing Science of Barium Titanate

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ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (656 download)

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Book Synopsis Processing Science of Barium Titanate by :

Download or read book Processing Science of Barium Titanate written by and published by . This book was released on 2004 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Barium titanate and barium strontium titanate thin films were deposited on base metal foils via chemical solution deposition and radio frequency magnetron sputtering. The films were processed at elevated temperatures for densification and crystallization. Two unifying research goals underpin all experiments: 1) To improve our fundamental understanding of complex oxide processing science, and 2) to translate those improvements into materials with superior structural and electrical properties. The relationships linking dielectric response, grain size, and thermal budget for sputtered barium strontium titanate were illustrated. (Ba0.6Sr0.4)TiO3 films were sputtered on nickel foils at temperatures ranging between 100-400 Ã'°C. After the top electrode deposition, the films were co-fired at 900 Ã'°C for densification and crystallization. The dielectric properties were observed to improve with increasing sputter temperature reaching a permittivity of 1800, a tunability of 10:1, and a loss tangent of less than 0.015 for the sample sputtered at 400 Ã'°C. The data can be understood using a brick wall model incorporating a high permittivity grain interior with low permittivity grain boundary. However, this high permittivity value was achieved at a grain size of 80 nm, which is typically associated with strong suppression of the dielectric response. These results clearly show that conventional models that parameterize permittivity with crystal diameter or film thickness alone are insufficiently sophisticated. Better models are needed that incorporate the influence of microstructure and crystal structure. This thesis next explores the ability to tune microstructure and properties of chemically solution deposited BaTiO3 thin films by modulation of heat treatment thermal profiles and firing atmosphere composition. Barium titanate films were deposited on copper foils using hybrid-chelate chemistries. An in-situ gas analysis process was developed to probe the organic removal and.

Barium Strontium Titanate Films for Tunable Microwave and Acoustic Wave Applications

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Total Pages : pages
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Book Synopsis Barium Strontium Titanate Films for Tunable Microwave and Acoustic Wave Applications by : Venkataramanan Gurumurthy

Download or read book Barium Strontium Titanate Films for Tunable Microwave and Acoustic Wave Applications written by Venkataramanan Gurumurthy and published by . This book was released on 2007 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: ABSTRACT: The composition-dependent Curie temperature and bias-dependant dielectric permittivity of Barium Strontium Titanate (BST) makes it very attractive for tunable application in the RF/Microwave regime. In this research work, the performance of BST varactors fabricated on the conventional Pt/Ti/SiO2/Si bottom electrode stack were compared with those fabricated using chemical vapor deposited Nanocrystalline Diamond (NCD) as the diffusion barrier layer instead of SiO2. The varactors fabricated on NCD films displayed much better symmetry in capacitance-voltage behavior and better overall quality factors than varactors fabricated on SiO2. The improvement in performance can be attributed to existence of stable interfaces in the devices fabricated on NCD which reduced the bottom electrode losses at high frequencies. The SiO2 based BST varactors on the other hand displayed better reliability and breakdown fields. The main purpose of this research work is to develop a robust Metal Insulator Metal (MIM) structure to achieve better all round performance of BST varactors. In the second part of this research work, the prospect of developing diamond based layered Surface Acoustic Wave (SAW) devices using Ba0.8Sr0.2TiO3 as the piezoelectric layer is investigated. Structural characterization of BST thin films deposited on Si/NCD/Pt and Si/SiO2/Ti/Pt stack were performed using X-Ray Diffraction (XRD) and Atomic Force Microscopy (AFM). Cross-sectional studies on the two stacks were performed using Scanning Electron Microscopy (SEM). X-Ray Mapping (XRM) was then done to ascertain the quality of the interfaces and to check for interdiffusion between layers. MIM structures in the Coplanar Waveguide (CPW) configuration were fabricated using conventional lithography and etching techniques for high frequency measurements. The performance of the fabricated varactors was characterized from 100 MHz to 1 GHz. For the SAW application, structural characterization of Ba0.8Sr0.2TiO3 on Chemical Vapor Deposited (CVD) diamond was done and the deposition procedure was optimized to obtain thick BST films. SAW bandpass filters and resonators were designed wherein the device geometry was varied over a wide range in order to characterize the variation in device performance with geometry. Finally interdigital capacitor structures were fabricated and used for conducting Curie temperature measurements on the deposited BST films in order to determine the operation range of the deposited BST films.

Barium Strontium Titanate Thin Films for Electro-optic Applications

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ISBN 13 :
Total Pages : 370 pages
Book Rating : 4.:/5 (71 download)

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Book Synopsis Barium Strontium Titanate Thin Films for Electro-optic Applications by : Danyang Wang

Download or read book Barium Strontium Titanate Thin Films for Electro-optic Applications written by Danyang Wang and published by . This book was released on 2006 with total page 370 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Barium Strontium Titanate Thin Film Base Multi Layer Structures for Microwave Application

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ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (16 download)

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Book Synopsis Barium Strontium Titanate Thin Film Base Multi Layer Structures for Microwave Application by : Kumaravinothan N. Sanmugaratna Sarma

Download or read book Barium Strontium Titanate Thin Film Base Multi Layer Structures for Microwave Application written by Kumaravinothan N. Sanmugaratna Sarma and published by . This book was released on 2008 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Processing optimization and electrical characterization of niobium-doped strontium titanate thin films for ULSI DRAM application

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ISBN 13 :
Total Pages : 134 pages
Book Rating : 4.:/5 (42 download)

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Book Synopsis Processing optimization and electrical characterization of niobium-doped strontium titanate thin films for ULSI DRAM application by : Chun-hui Wong

Download or read book Processing optimization and electrical characterization of niobium-doped strontium titanate thin films for ULSI DRAM application written by Chun-hui Wong and published by . This book was released on 1999 with total page 134 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Electronic Structure of Barium Strontium Titanate by Soft-x-ray Absorption Spectroscopy

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ISBN 13 :
Total Pages : 2 pages
Book Rating : 4.:/5 (925 download)

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Book Synopsis Electronic Structure of Barium Strontium Titanate by Soft-x-ray Absorption Spectroscopy by :

Download or read book Electronic Structure of Barium Strontium Titanate by Soft-x-ray Absorption Spectroscopy written by and published by . This book was released on 1997 with total page 2 pages. Available in PDF, EPUB and Kindle. Book excerpt: Perovskite-type titanates, such as Strontium Titanate (STO), Barium Titanate (BTO), and Lead Titanate (PTO) have been widely studied because they show good electric and optical properties. In recent years, thin films of Barium Strontium Titanate (BST) have been paid much attention as dielectrics of dynamic random access memory (DRAM) capacitors. BST is a better insulator with a higher dielectric constant than STO and can be controlled in a paraelectric phase with an appropriate ratio of Ba/Sr composition, however, few studies have been done on the electronic structure of the material. Studies of the electronic structure of such materials can be beneficial, both for fundamental physics research and for improving technological applications. BTO is a famous ferroelectric material with a tetragonal structure, in which Ti and Ba atoms are slightly displaced from the lattice points. On the other hand, BST keeps a paraelectric phase, which means that the atoms are still at the cubic lattice points. It should be of great interest to see how this difference of the local structure around Ti atoms between BTO and BST effects the electronic structure of these two materials. In this report, the authors present the Ti L{sub 2,3} absorption spectra of STO, BTO, and BST measured with very high accuracy in energy of the absorption features.

Doping and annealing effects on the electrical properties of strontium titanate thin films for ULSI DRAM application

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ISBN 13 :
Total Pages : 140 pages
Book Rating : 4.:/5 (447 download)

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Book Synopsis Doping and annealing effects on the electrical properties of strontium titanate thin films for ULSI DRAM application by : Patrick Sylvain Champonnois

Download or read book Doping and annealing effects on the electrical properties of strontium titanate thin films for ULSI DRAM application written by Patrick Sylvain Champonnois and published by . This book was released on 2000 with total page 140 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Hydrothermal Synthesis of Barium Strontium Titanate (bst) Powders, and Continuous and Patterned Thin Films

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Total Pages : pages
Book Rating : 4.:/5 (119 download)

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Book Synopsis Hydrothermal Synthesis of Barium Strontium Titanate (bst) Powders, and Continuous and Patterned Thin Films by : Xuezheng Wei

Download or read book Hydrothermal Synthesis of Barium Strontium Titanate (bst) Powders, and Continuous and Patterned Thin Films written by Xuezheng Wei and published by . This book was released on 2004 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Barium strontium titanate (BST) solid-solution oxides represent an important class of ferroelectric materials due to their high dielectric constants, composition dependent Curie temperature, and potential applications in dynamic random access memory (DRAM). Hydrothermal technique is a new low-temperature (

Multicomponent Oxide Films for Electronics: Volume 574

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ISBN 13 :
Total Pages : 408 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Multicomponent Oxide Films for Electronics: Volume 574 by : Marilyn Hawley

Download or read book Multicomponent Oxide Films for Electronics: Volume 574 written by Marilyn Hawley and published by . This book was released on 1999-10-06 with total page 408 pages. Available in PDF, EPUB and Kindle. Book excerpt: The exceptional properties of multicomponent oxides, combined with the inability of simpler materials to meet the increasing demands of the electronics industry, have motivated tremendous interest and activity in utilizing multicomponent oxides for electronic applications. For these applications, it is often desirable to integrate complex oxides in thin-film form with other materials. This book focuses on common materials issues involved in the processing and characterization of multicomponent oxides and how these issues relate to device applications. Papers range from theoretical explanations of the magnetic and electronic properties of transition metal oxides, to integration with silicon technology. Noteworthy is the progress being made in the deposition and characterization of these complex materials, as well as their applicability in ferroelectric memories, MOSFETs, optical devices, infrared imaging arrays, etc. Topics include: epitaxial multicomponent oxide film growth; properties, characterization and modeling; properties of multicomponent oxides; and multicomponent oxide devices.

Ceramic Abstracts

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ISBN 13 :
Total Pages : 950 pages
Book Rating : 4.E/5 ( download)

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Book Synopsis Ceramic Abstracts by :

Download or read book Ceramic Abstracts written by and published by . This book was released on 1999 with total page 950 pages. Available in PDF, EPUB and Kindle. Book excerpt: