Micromachined Thin Film Sensors For Soi Cmos Co Integration

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Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration

Author : Jean Laconte
Publisher : Springer Science & Business Media
ISBN 13 : 0387288430
Total Pages : 293 pages
Book Rating : 4.3/5 (872 download)

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Book Synopsis Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration by : Jean Laconte

Download or read book Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration written by Jean Laconte and published by Springer Science & Business Media. This book was released on 2006-10-11 with total page 293 pages. Available in PDF, EPUB and Kindle. Book excerpt: Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost. Micromachined Thin-Film Sensors for SOI-CMOS Co-integration covers the challenges and interests and demonstrates the successful co-integration of gas-flow sensors on dielectric membrane, with their associated electronics, in CMOS-SOI technology. We firstly investigate the extraction of residual stress in thin layers and in their stacking and the release, in post-processing, of a 1 μm-thick robust and flat dielectric multilayered membrane using Tetramethyl Ammonium Hydroxide (TMAH) silicon micromachining solution. The optimization of its selectivity towards aluminum is largely demonstrated. The second part focuses on sensors design and characteristics. A novel loop-shape polysilicon microheater is designed and built in a CMOS-SOI standard process. High thermal uniformity, low power consumption and high working temperature are confirmed by extensive measurements. The additional gas flow sensing layers are judiciously chosen and implemented. Measurements in the presence of a nitrogen flow and gas reveal fair sensitivity on a large flow velocity range as well as good response to many gases. Finally, MOS transistors suspended on released dielectric membranes are presented and fully characterized as a concluding demonstrator of the co-integration in SOI technology.

Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration

Author : Jean Laconte
Publisher : Springer
ISBN 13 : 9780387509556
Total Pages : 0 pages
Book Rating : 4.5/5 (95 download)

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Book Synopsis Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration by : Jean Laconte

Download or read book Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration written by Jean Laconte and published by Springer. This book was released on 2008-11-01 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost. Micromachined Thin-Film Sensors for SOI-CMOS Co-integration covers the challenges and interests and demonstrates the successful co-integration of gas-flow sensors on dielectric membrane, with their associated electronics, in CMOS-SOI technology. We firstly investigate the extraction of residual stress in thin layers and in their stacking and the release, in post-processing, of a 1 μm-thick robust and flat dielectric multilayered membrane using Tetramethyl Ammonium Hydroxide (TMAH) silicon micromachining solution. The optimization of its selectivity towards aluminum is largely demonstrated. The second part focuses on sensors design and characteristics. A novel loop-shape polysilicon microheater is designed and built in a CMOS-SOI standard process. High thermal uniformity, low power consumption and high working temperature are confirmed by extensive measurements. The additional gas flow sensing layers are judiciously chosen and implemented. Measurements in the presence of a nitrogen flow and gas reveal fair sensitivity on a large flow velocity range as well as good response to many gases. Finally, MOS transistors suspended on released dielectric membranes are presented and fully characterized as a concluding demonstrator of the co-integration in SOI technology.

Optical, Acoustic, Magnetic, and Mechanical Sensor Technologies

Author : Krzysztof Iniewski
Publisher : CRC Press
ISBN 13 : 1351832840
Total Pages : 361 pages
Book Rating : 4.3/5 (518 download)

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Book Synopsis Optical, Acoustic, Magnetic, and Mechanical Sensor Technologies by : Krzysztof Iniewski

Download or read book Optical, Acoustic, Magnetic, and Mechanical Sensor Technologies written by Krzysztof Iniewski and published by CRC Press. This book was released on 2017-12-19 with total page 361 pages. Available in PDF, EPUB and Kindle. Book excerpt: Light on physics and math, with a heavy focus on practical applications, Optical, Acoustic, Magnetic, and Mechanical Sensor Technologies discusses the developments necessary to realize the growth of truly integrated sensors for use in physical, biological, optical, and chemical sensing, as well as future micro- and nanotechnologies. Used to pick up sound, movement, and optical or magnetic signals, portable and lightweight sensors are perpetually in demand in consumer electronics, biomedical engineering, military applications, and a wide range of other sectors. However, despite extensive existing developments in computing and communications for integrated microsystems, we are only just now seeing real transformational changes in sensors, which are critical to conducting so many advanced, integrated tasks. This book is designed in two sections—Optical and Acoustic Sensors and Magnetic and Mechanical Sensors—that address the latest developments in sensors. The first part covers: Optical and acoustic sensors, particularly those based on polymer optical fibers Potential of integrated optical biosensors and silicon photonics Luminescent thermometry and solar cell analyses Description of research from United States Army Research Laboratory on sensing applications using photoacoustic spectroscopy Advances in the design of underwater acoustic modems The second discusses: Magnetic and mechanical sensors, starting with coverage of magnetic field scanning Some contributors’ personal accomplishments in combining MEMS and CMOS technologies for artificial microsystems used to sense airflow, temperature, and humidity MEMS-based micro hot-plate devices Vibration energy harvesting with piezoelectric MEMS Self-powered wireless sensing As sensors inevitably become omnipresent elements in most aspects of everyday life, this book assesses their massive potential in the development of interfacing applications for various areas of product design and sciences—including electronics, photonics, mechanics, chemistry, and biology, to name just a few.

Advances in Microelectronics: Reviews, Vol. 2

Author : Sergey Yurish
Publisher : Lulu.com
ISBN 13 : 8409081601
Total Pages : 516 pages
Book Rating : 4.4/5 (9 download)

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Book Synopsis Advances in Microelectronics: Reviews, Vol. 2 by : Sergey Yurish

Download or read book Advances in Microelectronics: Reviews, Vol. 2 written by Sergey Yurish and published by Lulu.com. This book was released on 2019-02-07 with total page 516 pages. Available in PDF, EPUB and Kindle. Book excerpt: The 2nd volume of 'Advances in Microelectronics: Reviews' Book Series is written by 57 contributors from academy and industry from 11 countries (Bulgaria, Hungary, Iran, Japan, Malaysia, Romania, Russia, Slovak Republic, Spain, Ukraine and USA). The book contains 13 chapters from different areas of microelectronics: MEMS, materials characterization, and various microelectronic devices. With unique combination of information in each volume, the Book Series will be of value for scientists and engineers in industry and at universities. Each of chapter is ending by well selected list of references with books, journals, conference proceedings and web sites. This book ensures that readers will stay at the cutting edge of the field and get the right and effective start point and road map for the further researches and developments.

Labs on Chip

Author : Eugenio Iannone
Publisher : CRC Press
ISBN 13 : 1351832069
Total Pages : 1351 pages
Book Rating : 4.3/5 (518 download)

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Book Synopsis Labs on Chip by : Eugenio Iannone

Download or read book Labs on Chip written by Eugenio Iannone and published by CRC Press. This book was released on 2018-09-03 with total page 1351 pages. Available in PDF, EPUB and Kindle. Book excerpt: Labs on Chip: Principles, Design and Technology provides a complete reference for the complex field of labs on chip in biotechnology. Merging three main areas— fluid dynamics, monolithic micro- and nanotechnology, and out-of-equilibrium biochemistry—this text integrates coverage of technology issues with strong theoretical explanations of design techniques. Analyzing each subject from basic principles to relevant applications, this book: Describes the biochemical elements required to work on labs on chip Discusses fabrication, microfluidic, and electronic and optical detection techniques Addresses planar technologies, polymer microfabrication, and process scalability to huge volumes Presents a global view of current lab-on-chip research and development Devotes an entire chapter to labs on chip for genetics Summarizing in one source the different technical competencies required, Labs on Chip: Principles, Design and Technology offers valuable guidance for the lab-on-chip design decision-making process, while exploring essential elements of labs on chip useful both to the professional who wants to approach a new field and to the specialist who wants to gain a broader perspective.

Chemical Sensors

Author : Ghenadii Korotcenkov
Publisher : Momentum Press
ISBN 13 : 1606502352
Total Pages : 798 pages
Book Rating : 4.6/5 (65 download)

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Book Synopsis Chemical Sensors by : Ghenadii Korotcenkov

Download or read book Chemical Sensors written by Ghenadii Korotcenkov and published by Momentum Press. This book was released on 2011-05-06 with total page 798 pages. Available in PDF, EPUB and Kindle. Book excerpt: Chemical sensors are integral to the automation of myriad industrial processes, as well as everyday monitoring of such activities as public safety, engine performance, medical therapeutics, and many more. This massive reference work will cover all major categories of chemical sensor materials and devices, and their general functional usage...from monitoring and analyzing gases, to analyzing liquids and compounds of all kinds. This is THE reference work on sensors used for chemical detection and analysis. In this fourth volume will be found detailed background on all major classes of solid-state-based chemical sensors including metal oxide-based conductometric gas sensors; Schottky-, FET-, and work-function chemical sensors; capacitance-type chemical sensors; pyroelectric (thermoelectric) gas sensors; some new views on Pellistors; mass-sensitive chemical sensors; acoustic-wave-chemical sensors; and integrated chemical sensors.

Manufacturing Intelligence for Industrial Engineering: Methods for System Self-Organization, Learning, and Adaptation

Author : Zhou, Zude
Publisher : IGI Global
ISBN 13 : 1605668656
Total Pages : 405 pages
Book Rating : 4.6/5 (56 download)

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Book Synopsis Manufacturing Intelligence for Industrial Engineering: Methods for System Self-Organization, Learning, and Adaptation by : Zhou, Zude

Download or read book Manufacturing Intelligence for Industrial Engineering: Methods for System Self-Organization, Learning, and Adaptation written by Zhou, Zude and published by IGI Global. This book was released on 2010-03-31 with total page 405 pages. Available in PDF, EPUB and Kindle. Book excerpt: "This book focuses on the latest innovations in the process of manufacturing in engineering"--Provided by publisher.

Microwave and Millimeter-Wave Electronic Packaging

Author : Rick Sturdivant
Publisher : Artech House
ISBN 13 : 1608076970
Total Pages : 281 pages
Book Rating : 4.6/5 (8 download)

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Book Synopsis Microwave and Millimeter-Wave Electronic Packaging by : Rick Sturdivant

Download or read book Microwave and Millimeter-Wave Electronic Packaging written by Rick Sturdivant and published by Artech House. This book was released on 2013-12-01 with total page 281 pages. Available in PDF, EPUB and Kindle. Book excerpt: Packaging of electronic components at microwave and millimeter-wave frequencies requires the same level of engineering effort for lower frequency electronics plus a set of additional activities which are unique due to the higher frequency of operation. This resource presents you with the electronic packaging issues unique to microwave and millimeter-wave frequencies and reviews lower frequency packaging techniques so they can be adapted to higher frequency designs. You are provided with 30 practical examples throughout the book, as well as three free downloadable software analysis programs.

Topics in Nonlinear Mechanics and Physics

Author : Mohamed Belhaq
Publisher : Springer
ISBN 13 : 9811394636
Total Pages : 312 pages
Book Rating : 4.8/5 (113 download)

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Book Synopsis Topics in Nonlinear Mechanics and Physics by : Mohamed Belhaq

Download or read book Topics in Nonlinear Mechanics and Physics written by Mohamed Belhaq and published by Springer. This book was released on 2019-08-14 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents a selection of contributions from the 4th International Conference on Structural Nonlinear Dynamics and Diagnostics, reflecting diverse aspects of nonlinear and complex dynamics. Fifteen chapters discuss the latest findings and applications in active research areas in nonlinear mechanics and physics. These includes the dynamics of ships with liquid sloshing interaction, dynamics of drops and bubbles, nonlinear drying processes, suppression of time-delayed induced vibrations, dynamics of robotic systems, chaos detection in rolling element, dynamics of a planetary gear system with faults, vibro-impact systems, complex fractional moments for nonlinear systems, oscillations under hysteretic conditions, as well as topics in nonlinear energy harvesting and control.

Semiconductor-On-Insulator Materials for Nanoelectronics Applications

Author : Alexei Nazarov
Publisher : Springer Science & Business Media
ISBN 13 : 3642158684
Total Pages : 437 pages
Book Rating : 4.6/5 (421 download)

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Book Synopsis Semiconductor-On-Insulator Materials for Nanoelectronics Applications by : Alexei Nazarov

Download or read book Semiconductor-On-Insulator Materials for Nanoelectronics Applications written by Alexei Nazarov and published by Springer Science & Business Media. This book was released on 2011-03-03 with total page 437 pages. Available in PDF, EPUB and Kindle. Book excerpt: "Semiconductor-On-Insulator Materials for NanoElectronics Applications” is devoted to the fast evolving field of modern nanoelectronics, and more particularly to the physics and technology of nanoelectronic devices built on semiconductor-on-insulator (SemOI) systems. The book contains the achievements in this field from leading companies and universities in Europe, USA, Brazil and Russia. It is articulated around four main topics: 1. New semiconductor-on-insulator materials; 2. Physics of modern SemOI devices; 3. Advanced characterization of SemOI devices; 4. Sensors and MEMS on SOI. "Semiconductor-On-Insulator Materials for NanoElectonics Applications” is useful not only to specialists in nano- and microelectronics but also to students and to the wider audience of readers who are interested in new directions in modern electronics and optoelectronics.

Frontiers In Electronics - Selected Papers From The Workshop On Frontiers In Electronics 2015 (Wofe-15)

Author : Sorin Cristoloveanu
Publisher : World Scientific
ISBN 13 : 981322083X
Total Pages : 174 pages
Book Rating : 4.8/5 (132 download)

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Book Synopsis Frontiers In Electronics - Selected Papers From The Workshop On Frontiers In Electronics 2015 (Wofe-15) by : Sorin Cristoloveanu

Download or read book Frontiers In Electronics - Selected Papers From The Workshop On Frontiers In Electronics 2015 (Wofe-15) written by Sorin Cristoloveanu and published by World Scientific. This book was released on 2017-01-13 with total page 174 pages. Available in PDF, EPUB and Kindle. Book excerpt: Rapid pace of electronic technology evolution and current economic climate compel a merger of such technical areas as low-power digital electronics, microwave power circuits, optoelectronics, etc., which collectively have become the foundation of today's electronic technology.This Workshop aims at encouraging active cross-fertilization of the different 'species' in this electronic planet. The WOFE2015 had gather experts from academia, industry, and government agencies to review the recent exciting breakthroughs and their underlying physical mechanisms.This Monographs includes ten invited articles; cover topics ranging from Ultra-thin silicon nanowire solar cells, to hydrogen generation under illumination of GaN-based structures and from ultrafast response of nanoscale device structures to Power device optimization.

CMOS Hotplate Chemical Microsensors

Author : Markus Graf
Publisher : Springer Science & Business Media
ISBN 13 : 3540695621
Total Pages : 131 pages
Book Rating : 4.5/5 (46 download)

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Book Synopsis CMOS Hotplate Chemical Microsensors by : Markus Graf

Download or read book CMOS Hotplate Chemical Microsensors written by Markus Graf and published by Springer Science & Business Media. This book was released on 2007-04-19 with total page 131 pages. Available in PDF, EPUB and Kindle. Book excerpt: The first comprehensive text on microhotplate-based chemical sensor systems in CMOS-technology covers all aspects of successful sensor prototyping: theoretical considerations for modelling, controller- and system design, simulation of circuits and microsensors, design considerations, microfabrication, packaging and testing. A whole family of metal-oxide based microsensor systems with increasing complexity is presented, including fully integrated sensor arrays. This represents one of the first examples of integrated nanomaterials, microtechnology and embedded circuitry.

Chemical Abstracts

Author :
Publisher :
ISBN 13 :
Total Pages : 2540 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Chemical Abstracts by :

Download or read book Chemical Abstracts written by and published by . This book was released on 2002 with total page 2540 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Semiconductor Gas Sensors

Author : Raivo Jaaniso
Publisher : Woodhead Publishing
ISBN 13 : 0081025602
Total Pages : 512 pages
Book Rating : 4.0/5 (81 download)

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Book Synopsis Semiconductor Gas Sensors by : Raivo Jaaniso

Download or read book Semiconductor Gas Sensors written by Raivo Jaaniso and published by Woodhead Publishing. This book was released on 2019-09-24 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: Semiconductor Gas Sensors, Second Edition, summarizes recent research on basic principles, new materials and emerging technologies in this essential field. Chapters cover the foundation of the underlying principles and sensing mechanisms of gas sensors, include expanded content on gas sensing characteristics, such as response, sensitivity and cross-sensitivity, present an overview of the nanomaterials utilized for gas sensing, and review the latest applications for semiconductor gas sensors, including environmental monitoring, indoor monitoring, medical applications, CMOS integration and chemical warfare agents. This second edition has been completely updated, thus ensuring it reflects current literature and the latest materials systems and applications. - Includes an overview of key applications, with new chapters on indoor monitoring and medical applications - Reviews developments in gas sensors and sensing methods, including an expanded section on gas sensor theory - Discusses the use of nanomaterials in gas sensing, with new chapters on single-layer graphene sensors, graphene oxide sensors, printed sensors, and much more

Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set

Author : Marc J. Madou
Publisher : CRC Press
ISBN 13 : 1482274663
Total Pages : 1983 pages
Book Rating : 4.4/5 (822 download)

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Book Synopsis Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set by : Marc J. Madou

Download or read book Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set written by Marc J. Madou and published by CRC Press. This book was released on 2018-12-14 with total page 1983 pages. Available in PDF, EPUB and Kindle. Book excerpt: Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.

Applied Mechanics Reviews

Author :
Publisher :
ISBN 13 :
Total Pages : 742 pages
Book Rating : 4.:/5 (31 download)

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Book Synopsis Applied Mechanics Reviews by :

Download or read book Applied Mechanics Reviews written by and published by . This book was released on 1998 with total page 742 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Green Electronics

Author : Cristian Ravariu
Publisher : BoD – Books on Demand
ISBN 13 : 1789233046
Total Pages : 254 pages
Book Rating : 4.7/5 (892 download)

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Book Synopsis Green Electronics by : Cristian Ravariu

Download or read book Green Electronics written by Cristian Ravariu and published by BoD – Books on Demand. This book was released on 2018-06-20 with total page 254 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Green Electronics book is intended to stimulate people's thinking toward the new concepts of an environment-friendly electronics - the main challenge in the future. The book offers multiple solutions to push the classical electronic industry toward green concepts, aided by nanotechnologies, with revolutionary features that provide low power consumption in electronics, use biomaterials for integrated structures, and include environmental monitoring tools. Based on organic semiconductors/insulators without toxic precursors, green electronic technologies launched promising devices like OLED, OTFT, or nano-core-shell transistors. The Green Electronics book successfully presents the recent directions collected worldwide and leaves free space for continuing year by year with new subtopics.