Methodologies To Enhance The Resolution Of Electron Beam Lithography For Nanostructure Fabrication

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Nanofabrication

Author : Maria Stepanova
Publisher : Springer Science & Business Media
ISBN 13 : 3709104246
Total Pages : 344 pages
Book Rating : 4.7/5 (91 download)

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Book Synopsis Nanofabrication by : Maria Stepanova

Download or read book Nanofabrication written by Maria Stepanova and published by Springer Science & Business Media. This book was released on 2011-11-08 with total page 344 pages. Available in PDF, EPUB and Kindle. Book excerpt: Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.

Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication

Author : P. Rai-Choudhury
Publisher : SPIE Press
ISBN 13 : 9780819423795
Total Pages : 706 pages
Book Rating : 4.4/5 (237 download)

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Book Synopsis Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication by : P. Rai-Choudhury

Download or read book Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication written by P. Rai-Choudhury and published by SPIE Press. This book was released on 1997 with total page 706 pages. Available in PDF, EPUB and Kindle. Book excerpt: Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.

Ultimate Limits of Fabrication and Measurement

Author : M.E. Welland
Publisher : Springer Science & Business Media
ISBN 13 : 9401100411
Total Pages : 253 pages
Book Rating : 4.4/5 (11 download)

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Book Synopsis Ultimate Limits of Fabrication and Measurement by : M.E. Welland

Download or read book Ultimate Limits of Fabrication and Measurement written by M.E. Welland and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 253 pages. Available in PDF, EPUB and Kindle. Book excerpt: An extensive body of research is involved in pushing miniaturisation to its physical limit, encompassing the miniaturisation of electronic devices, the manipulation of single atoms by scanning tunnelling microscopy, bio-engineering, the chemical synthesis of complex molecules, microsensor technology, and information storage and retrieval. In parallel to these practical aspects of miniaturisation there is also the necessity to understand the physics of small structures. Ultimate Limits of Fabrication and Measurement brings together a number of leading articles from a variety of fields with the common aim of ultimate miniaturisation and measurement.

Principles of Lithography

Author : Harry J. Levinson
Publisher : SPIE Press
ISBN 13 : 9780819456601
Total Pages : 446 pages
Book Rating : 4.4/5 (566 download)

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Book Synopsis Principles of Lithography by : Harry J. Levinson

Download or read book Principles of Lithography written by Harry J. Levinson and published by SPIE Press. This book was released on 2005 with total page 446 pages. Available in PDF, EPUB and Kindle. Book excerpt: Lithography is a field in which advances proceed at a swift pace. This book was written to address several needs, and the revisions for the second edition were made with those original objectives in mind. Many new topics have been included in this text commensurate with the progress that has taken place during the past few years, and several subjects are discussed in more detail. This book is intended to serve as an introduction to the science of microlithography for people who are unfamiliar with the subject. Topics directly related to the tools used to manufacture integrated circuits are addressed in depth, including such topics as overlay, the stages of exposure, tools, and light sources. This text also contains numerous references for students who want to investigate particular topics in more detail, and they provide the experienced lithographer with lists of references by topic as well. It is expected that the reader of this book will have a foundation in basic physics and chemistry. No topics will require knowledge of mathematics beyond elementary calculus.

Nanolithography

Author : M Feldman
Publisher : Woodhead Publishing
ISBN 13 : 0857098756
Total Pages : 599 pages
Book Rating : 4.8/5 (57 download)

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Book Synopsis Nanolithography by : M Feldman

Download or read book Nanolithography written by M Feldman and published by Woodhead Publishing. This book was released on 2014-02-13 with total page 599 pages. Available in PDF, EPUB and Kindle. Book excerpt: Integrated circuits, and devices fabricated using the techniques developed for integrated circuits, have steadily gotten smaller, more complex, and more powerful. The rate of shrinking is astonishing – some components are now just a few dozen atoms wide. This book attempts to answer the questions, "What comes next? and "How do we get there?Nanolithography outlines the present state of the art in lithographic techniques, including optical projection in both deep and extreme ultraviolet, electron and ion beams, and imprinting. Special attention is paid to related issues, such as the resists used in lithography, the masks (or lack thereof), the metrology needed for nano-features, modeling, and the limitations caused by feature edge roughness. In addition emerging technologies are described, including the directed assembly of wafer features, nanostructures and devices, nano-photonics, and nano-fluidics.This book is intended as a guide to the researcher new to this field, reading related journals or facing the complexities of a technical conference. Its goal is to give enough background information to enable such a researcher to understand, and appreciate, new developments in nanolithography, and to go on to make advances of his/her own. - Outlines the current state of the art in alternative nanolithography technologies in order to cope with the future reduction in size of semiconductor chips to nanoscale dimensions - Covers lithographic techniques, including optical projection, extreme ultraviolet (EUV), nanoimprint, electron beam and ion beam lithography - Describes the emerging applications of nanolithography in nanoelectronics, nanophotonics and microfluidics

Nanostructured Materials in Electrochemistry

Author : Ali Eftekhari
Publisher : John Wiley & Sons
ISBN 13 : 3527621512
Total Pages : 489 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis Nanostructured Materials in Electrochemistry by : Ali Eftekhari

Download or read book Nanostructured Materials in Electrochemistry written by Ali Eftekhari and published by John Wiley & Sons. This book was released on 2008-06-25 with total page 489 pages. Available in PDF, EPUB and Kindle. Book excerpt: Providing the unique and vital link between the worlds of electrochemistry and nanomaterials, this reference and handbook covers advances in electrochemistry through the nanoscale control of electrode structures, as well as advances in nanotechnology through electrochemical synthesis strategies. It demonstrates how electrochemical methods are of great scientific and commercial interest due to their low cost and high efficiency, and includes the synthesis of nanowires, nanoparticles, nanoporous and layered nanomaterials of various compositions, as well as their applications -- ranging from superior electrode materials to energy storage, biosensors, and electroanalytical devices.

Metal-Enhanced Fluorescence

Author : Chris D. Geddes
Publisher : John Wiley & Sons
ISBN 13 : 0470642785
Total Pages : 655 pages
Book Rating : 4.4/5 (76 download)

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Book Synopsis Metal-Enhanced Fluorescence by : Chris D. Geddes

Download or read book Metal-Enhanced Fluorescence written by Chris D. Geddes and published by John Wiley & Sons. This book was released on 2010-06-22 with total page 655 pages. Available in PDF, EPUB and Kindle. Book excerpt: Discover how metal-enhanced fluorescence is changing traditional concepts of fluorescence This book collects and analyzes all the current trends, opinions, and emerging hot topics in the field of metal-enhanced fluorescence (MEF). Readers learn how this emerging technology enhances the utility of current fluorescence-based approaches. For example, MEF can be used to better detect and track specific molecules that may be present in very low quantities in either clinical samples or biological systems. Author Chris Geddes, a noted pioneer in the field, not only explains the fundamentals of metal-enhanced fluorescence, but also the significance of all the most recent findings and models in the field. Metal-enhanced fluorescence refers to the use of metal colloids and nanoscale metallic particles in fluorescence systems. It offers researchers the opportunity to modify the basic properties of fluorophores in both near- and far-field fluorescence formats. Benefits of metal-enhanced fluorescence compared to traditional fluorescence include: Increased efficiency of fluorescence emission Increased detection sensitivity Protect against fluorophore photobleaching Applicability to almost any molecule, including both intrinsic and extrinsic chromophores Following a discussion of the principles and fundamentals, the author examines the process and applications of metal-enhanced fluorescence. Throughout the book, references lead to the primary literature, facilitating in-depth investigations into particular topics. Guiding readers from the basics to state-of-the-technology applications, this book is recommended for all chemists, physicists, and biomedical engineers working in the field of fluorescence.

Fundamentals of Friction and Wear on the Nanoscale

Author : Enrico Gnecco
Publisher : Springer Nature
ISBN 13 : 3031630653
Total Pages : 463 pages
Book Rating : 4.0/5 (316 download)

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Book Synopsis Fundamentals of Friction and Wear on the Nanoscale by : Enrico Gnecco

Download or read book Fundamentals of Friction and Wear on the Nanoscale written by Enrico Gnecco and published by Springer Nature. This book was released on with total page 463 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Nanofabrication Using Focused Ion and Electron Beams

Author : Ivo Utke
Publisher : OUP USA
ISBN 13 : 0199734216
Total Pages : 830 pages
Book Rating : 4.1/5 (997 download)

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Book Synopsis Nanofabrication Using Focused Ion and Electron Beams by : Ivo Utke

Download or read book Nanofabrication Using Focused Ion and Electron Beams written by Ivo Utke and published by OUP USA. This book was released on 2012-05 with total page 830 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book comprehensively reviews the achievements and potentials of a minimally invasive, three-dimensional, and maskless surface structuring technique operating at nanometer scale by using the interaction of focused ion and electron beams (FIB/FEB) with surfaces and injected molecules.

Springer Handbook of Nanotechnology

Author : Bharat Bhushan
Publisher : Springer Science & Business Media
ISBN 13 : 3642025250
Total Pages : 1968 pages
Book Rating : 4.6/5 (42 download)

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Book Synopsis Springer Handbook of Nanotechnology by : Bharat Bhushan

Download or read book Springer Handbook of Nanotechnology written by Bharat Bhushan and published by Springer Science & Business Media. This book was released on 2010-04-23 with total page 1968 pages. Available in PDF, EPUB and Kindle. Book excerpt: Since 2004 and with the 2nd edition in 2006, the Springer Handbook of Nanotechnology has established itself as the definitive reference in the nanoscience and nanotechnology area. It integrates the knowledge from nanofabrication, nanodevices, nanomechanics, Nanotribology, materials science, and reliability engineering in just one volume. Beside the presentation of nanostructures, micro/nanofabrication, and micro/nanodevices, special emphasis is on scanning probe microscopy, nanotribology and nanomechanics, molecularly thick films, industrial applications and microdevice reliability, and on social aspects. In its 3rd edition, the book grew from 8 to 9 parts now including a part with chapters on biomimetics. More information is added to such fields as bionanotechnology, nanorobotics, and (bio)MEMS/NEMS, bio/nanotribology and bio/nanomechanics. The book is organized by an experienced editor with a universal knowledge and written by an international team of over 150 distinguished experts. It addresses mechanical and electrical engineers, materials scientists, physicists and chemists who work either in the nano area or in a field that is or will be influenced by this new key technology.

Ultrathin Two-Dimensional Semiconductors for Novel Electronic Applications

Author : Mohammad Karbalaei Akbari
Publisher : CRC Press
ISBN 13 : 1000072525
Total Pages : 277 pages
Book Rating : 4.0/5 ( download)

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Book Synopsis Ultrathin Two-Dimensional Semiconductors for Novel Electronic Applications by : Mohammad Karbalaei Akbari

Download or read book Ultrathin Two-Dimensional Semiconductors for Novel Electronic Applications written by Mohammad Karbalaei Akbari and published by CRC Press. This book was released on 2020-07-30 with total page 277 pages. Available in PDF, EPUB and Kindle. Book excerpt: Offering perspective on both the scientific and engineering aspects of 2D semiconductors, Ultrathin Two-Dimensional Semiconductors for Novel Electronic Applications discusses how to successfully engineer 2D materials for practical applications. It also covers several novel topics regarding 2D semiconductors which have not yet been discussed in any other publications. Features: Provides comprehensive information and data about wafer-scale deposition of 2D semiconductors, ranging from scientific discussions up to the planning of experiments and reliability testing of the fabricated samples Precisely discusses wafer-scale ALD and CVD of 2D semiconductors and investigates various aspects of deposition techniques Covers the new group of 2D materials synthesized from surface oxide of liquid metals and also explains the device fabrication and post-treatment of these 2D nanostructures Addresses a wide range of scientific and practical applications of 2D semiconductors and electronic and optoelectronic devices based on these nanostructures Offers novel coverage of 2D heterostructures and heterointerfaces and provides practical information about fabrication and application of these heterostructures Introduces the latest advancement in fabrication of novel memristors, artificial synapses and sensorimotor devices based on 2D semiconductors This work offers practical information valuable for engineering applications that will appeal to researchers, academics, and scientists working with and interested in developing an array of semiconductor electronic devices.

Functional Thin Films and Nanostructures for Sensors

Author : Anis Zribi
Publisher : Springer Science & Business Media
ISBN 13 : 0387686096
Total Pages : 224 pages
Book Rating : 4.3/5 (876 download)

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Book Synopsis Functional Thin Films and Nanostructures for Sensors by : Anis Zribi

Download or read book Functional Thin Films and Nanostructures for Sensors written by Anis Zribi and published by Springer Science & Business Media. This book was released on 2009-04-05 with total page 224 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book discusses advances in functional thin films for sensors and novel concepts for future breakthroughs. The focus is on guidelines and design rules for sensor systems, interaction between functional thin films and other sensor subsystems, fundamentals behind the intrinsic functionality in sensing thin films and nanostructures, state-of-the-art technologies used to develop sensors today and concrete examples of sensor designs.

Nanofabrication

Author : Ampere A. Tseng
Publisher : World Scientific
ISBN 13 : 9812790896
Total Pages : 583 pages
Book Rating : 4.8/5 (127 download)

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Book Synopsis Nanofabrication by : Ampere A. Tseng

Download or read book Nanofabrication written by Ampere A. Tseng and published by World Scientific. This book was released on 2008 with total page 583 pages. Available in PDF, EPUB and Kindle. Book excerpt: Many of the devices and systems used in modern industry are becoming progressively smaller and have reached the nanoscale domain. Nanofabrication aims at building nanoscale structures, which can act as components, devices, or systems, in large quantities at potentially low cost. Nanofabrication is vital to all nanotechnology fields, especially for the realization of nanotechnology that involves the traditional areas across engineering and science. This is the first book solely dedicated to the manufacturing technology in nanoscale structures, devices, and systems and is designed to satisfy the growing demands of researchers, professionals, and graduate students. Both conventional and non-conventional fabrication technologies are introduced with emphasis on multidisciplinary principles, methodologies, and practical applications. While conventional technologies consider the emerging techniques developed for next generation lithography, non-conventional techniques include scanning probe microscopy lithography, self-assembly, and imprint lithography, as well as techniques specifically developed for making carbon tubes and molecular circuits and devices. Sample Chapter(s). Chapter 1: Atom, Molecule, and Nanocluster Manipulations for Nanostructure Fabrication Using Scanning Probe Microscopy (3,320 KB). Contents: Atomic Force Microscope Lithography (N Kawasegi et al.); Nanowire Assembly and Integration (Z Gu & D H Gracias); Extreme Ultraviolet Lithography (H Kinoshita); Electron Projection Lithography (T Miura et al.); Electron Beam Direct Writing (K Yamazaki); Electron Beam Induced Deposition (K Mitsuishi); Focused Ion Beams and Interaction with Solids (T Ishitani et al.); Nanofabrication of Nanoelectromechanical Systems (NEMS): Emerging Techniques (K L Ekinci & J Brugger); and other papers. Readership: Researchers, professionals, and graduate students in the fields of nanoengineering and nanoscience.

Recent Developments In Plasmon-supported Raman Spectroscopy: 45 Years Of Enhanced Raman Signals

Author : Katrin Kneipp
Publisher : World Scientific
ISBN 13 : 1786344254
Total Pages : 513 pages
Book Rating : 4.7/5 (863 download)

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Book Synopsis Recent Developments In Plasmon-supported Raman Spectroscopy: 45 Years Of Enhanced Raman Signals by : Katrin Kneipp

Download or read book Recent Developments In Plasmon-supported Raman Spectroscopy: 45 Years Of Enhanced Raman Signals written by Katrin Kneipp and published by World Scientific. This book was released on 2017-12-12 with total page 513 pages. Available in PDF, EPUB and Kindle. Book excerpt: Surface enhanced Raman scattering (SERS) might be one of the most impressive effects to demonstrate the power of plasmonic approaches in spectroscopy and became one of the 'triggers' for the rapidly emerging field of plasmonics.This book provides a review of some recent developments in SERS, such as tip enhanced Raman scattering (TERS), reports new experimental observations, sophisticated new SERS-active structures and substrates, new theoretical insight to explain the effect as well as exciting applications in various fields such as analytical science, biomedicine and nanotechnology.Written for graduate students and established researchers looking for inspiration for future work, its interdisciplinary nature makes the book suitable for readers in the fields of chemistry, physics, biology, medicine, nanotechnology and materials science.

Surface Electromagnetics

Author : Fan Yang
Publisher : Cambridge University Press
ISBN 13 : 1108654207
Total Pages : 489 pages
Book Rating : 4.1/5 (86 download)

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Book Synopsis Surface Electromagnetics by : Fan Yang

Download or read book Surface Electromagnetics written by Fan Yang and published by Cambridge University Press. This book was released on 2019-06-20 with total page 489 pages. Available in PDF, EPUB and Kindle. Book excerpt: Written by the leading experts in the field, this text provides systematic coverage of the theory, physics, functional designs, and engineering applications of advanced engineered electromagnetic surfaces. All the essential topics are included, from the fundamental theorems of surface electromagnetics, to analytical models, general sheet transmission conditions (GSTC), metasurface synthesis, and quasi-periodic analysis. A plethora of examples throughout illustrate the practical applications of surface electromagnetics, including gap waveguides, modulated metasurface antennas, transmit arrays, microwave imaging, cloaking, and orbital angular momentum (OAM ) beam generation, allowing readers to develop their own surface electromagnetics-based devices and systems. Enabling a fully comprehensive understanding of surface electromagnetics, this is an invaluable text for researchers, practising engineers and students working in electromagnetics antennas, metasurfaces and optics.

Nanofabrication Handbook

Author : Stefano Cabrini
Publisher : CRC Press
ISBN 13 : 1420090526
Total Pages : 548 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Nanofabrication Handbook by : Stefano Cabrini

Download or read book Nanofabrication Handbook written by Stefano Cabrini and published by CRC Press. This book was released on 2012-02-24 with total page 548 pages. Available in PDF, EPUB and Kindle. Book excerpt: While many books are dedicated to individual aspects of nanofabrication, there is no single source that defines and explains the total vision of the field. Filling this gap, Nanofabrication Handbook presents a unique collection of new and the most important established approaches to nanofabrication. Contributors from leading research facilities and academic institutions around the world define subfields, offer practical instructions and examples, and pave the way for future research. Helping readers to select the proper fabricating technique for their experiments, the book provides a broad vision of the most critical problems and explains how to solve them. It includes basic definitions and introduces the main underlying concepts of nanofabrication. The book also discusses the major advantages and disadvantages of each approach and offers a wide variety of examples of cutting-edge applications. Each chapter focuses on a particular method or aspect of study. For every method, the contributors describe the underlying theoretical basis, resolution, patterns and substrates used, and applications. They show how applications at the nanoscale require a different process and understanding than those at the microscale. For each experiment, they elucidate key solutions to problems relating to materials, methods, and surface considerations. A complete resource for this rapidly emerging interdisciplinary field, this handbook provides practical information for planning the experiments of any project that employs nanofabrication techniques. It gives readers a foundation to enter the complex world of nanofabrication and inspires the scientific community at large to push the limits of nanometer resolution.

Atomic Force Microscopy in Molecular and Cell Biology

Author : Jiye Cai
Publisher : Springer
ISBN 13 : 9811315108
Total Pages : 244 pages
Book Rating : 4.8/5 (113 download)

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Book Synopsis Atomic Force Microscopy in Molecular and Cell Biology by : Jiye Cai

Download or read book Atomic Force Microscopy in Molecular and Cell Biology written by Jiye Cai and published by Springer. This book was released on 2018-11-03 with total page 244 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book addresses new achievements in AFM instruments – e.g. higher speed and higher resolution – and how AFM is being combined with other new methods like NSOM, STED, STORM, PALM, and Raman. This book explores the latest advances in atomic force microscopy and related techniques in molecular and cell biology. Atomic force microscopy (AFM) can be used to detect the superstructures of the cell membrane, cell morphology, cell skeletons and their mechanical properties. Opening up new fields of in-situ dynamic study for living cells, enzymatic reactions, fibril growth and biomedical research, these combined techniques will yield valuable new insights into molecule and cell biology. This book offers a valuable resource for students and researchers in the fields of biochemistry, cell research and chemistry etc.