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MEMS: A Practical Guide of Design, Analysis, and Applications

Author : Jan Korvink
Publisher : Springer Science & Business Media
ISBN 13 : 3540336559
Total Pages : 981 pages
Book Rating : 4.5/5 (43 download)

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Book Synopsis MEMS: A Practical Guide of Design, Analysis, and Applications by : Jan Korvink

Download or read book MEMS: A Practical Guide of Design, Analysis, and Applications written by Jan Korvink and published by Springer Science & Business Media. This book was released on 2010-05-28 with total page 981 pages. Available in PDF, EPUB and Kindle. Book excerpt: A new generation of MEMS books has emerged with this cohesive guide on the design and analysis of micro-electro-mechanical systems (MEMS). Leading experts contribute to its eighteen chapters that encompass a wide range of innovative and varied applications. This publication goes beyond fabrication techniques covered by earlier books and fills a void created by a lack of industry standards. Subjects such as transducer operations and free-space microsystems are contained in its chapters. Satisfying a demand for literature on analysis and design of microsystems the book deals with a broad array of industrial applications. This will interest engineering and research scientists in industry and academia.

An Introduction to Microelectromechanical Systems Engineering

Author : Nadim Maluf
Publisher : Artech House
ISBN 13 : 9781580535915
Total Pages : 312 pages
Book Rating : 4.5/5 (359 download)

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Book Synopsis An Introduction to Microelectromechanical Systems Engineering by : Nadim Maluf

Download or read book An Introduction to Microelectromechanical Systems Engineering written by Nadim Maluf and published by Artech House. This book was released on 2004 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt: Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of MEMS materials, design, and manufacturing, and learn how it is being applied in industrial, optical, medical and electronic markets. The second edition features brand new sections on RF MEMS, photo MEMS, micromachining on materials other than silicon, reliability analysis, plus an expanded reference list. With an emphasis on commercialized products, this unique resource helps you determine whether your application can benefit from a MEMS solution, understand how other applications and companies have benefited from MEMS, and select and define a manufacturable MEMS process for your application. You discover how to use MEMS technology to enable new functionality, improve performance, and reduce size and cost. The book teaches you the capabilities and limitations of MEMS devices and processes, and helps you communicate the relative merits of MEMS to your company's management. From critical discussions on design operation and process fabrication of devices and systems, to a thorough explanation of MEMS packaging, this easy-to-understand book clearly explains the basics of MEMS engineering, making it an invaluable reference for your work in the field.

MEMS

Author : Mohamed Gad-el-Hak
Publisher : CRC Press
ISBN 13 : 1420036556
Total Pages : 576 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis MEMS by : Mohamed Gad-el-Hak

Download or read book MEMS written by Mohamed Gad-el-Hak and published by CRC Press. This book was released on 2005-11-29 with total page 576 pages. Available in PDF, EPUB and Kindle. Book excerpt: As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection

Modeling MEMS and NEMS

Author : John A. Pelesko
Publisher : CRC Press
ISBN 13 : 1420035290
Total Pages : 382 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Modeling MEMS and NEMS by : John A. Pelesko

Download or read book Modeling MEMS and NEMS written by John A. Pelesko and published by CRC Press. This book was released on 2002-11-25 with total page 382 pages. Available in PDF, EPUB and Kindle. Book excerpt: Designing small structures necessitates an a priori understanding of various device behaviors. The way to gain such understanding is to construct, analyze, and interpret the proper mathematical model. Through such models, Modeling MEMS and NEMS illuminates microscale and nanoscale phenomena, thereby facilitating the design and optimization o

RF MEMS Circuit Design for Wireless Communications

Author : Héctor J. de los Santos
Publisher : Artech House
ISBN 13 : 9781580535571
Total Pages : 298 pages
Book Rating : 4.5/5 (355 download)

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Book Synopsis RF MEMS Circuit Design for Wireless Communications by : Héctor J. de los Santos

Download or read book RF MEMS Circuit Design for Wireless Communications written by Héctor J. de los Santos and published by Artech House. This book was released on 2002 with total page 298 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the first comprehensive book to address the design of RF MEMS-based circuits for use in high performance wireless systems. A groundbreaking research and reference tool, the book enables you to understand the realm of applications of RF MEMS technology; become knowledgeable of the wide variety and performance levels of RF MEMS devices; and partition the architecture of wireless systems to achieve greater levels of performance. This innovative resource also guides you through the design process of RF MEMS-based circuits, and establishes a practical knowledge base for the design of high-yield RF MEMS-based circuits. The book features exercises and detailed case studies on working RF MEMS circuits that help you decide what approaches best fit your design constraints. This unified treatment of RF MEMS-based circuit technology opens up a new world of solutions for meeting the unique challenges of low power/portable wireless products.

MEMS Packaging

Author : Tai-Ran Hsu
Publisher : IET
ISBN 13 : 9780863413353
Total Pages : 310 pages
Book Rating : 4.4/5 (133 download)

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Book Synopsis MEMS Packaging by : Tai-Ran Hsu

Download or read book MEMS Packaging written by Tai-Ran Hsu and published by IET. This book was released on 2004 with total page 310 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book covers the entire spectrum of assembly, packaging and testing of MEMs (microelectro-mechanical systems) and microsystems, from essential enabling technologies to applications in key industries of life sciences, telecommunications and aerospace engineering.

2002 International Symposium on Microelectronics

Author :
Publisher :
ISBN 13 :
Total Pages : 988 pages
Book Rating : 4.:/5 (318 download)

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Book Synopsis 2002 International Symposium on Microelectronics by :

Download or read book 2002 International Symposium on Microelectronics written by and published by . This book was released on 2002 with total page 988 pages. Available in PDF, EPUB and Kindle. Book excerpt:

MEMS Materials and Processes Handbook

Author : Reza Ghodssi
Publisher : Springer Science & Business Media
ISBN 13 : 0387473181
Total Pages : 1211 pages
Book Rating : 4.3/5 (874 download)

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Book Synopsis MEMS Materials and Processes Handbook by : Reza Ghodssi

Download or read book MEMS Materials and Processes Handbook written by Reza Ghodssi and published by Springer Science & Business Media. This book was released on 2011-03-18 with total page 1211 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.

Mechanical Engineers' Handbook, Volume 2

Author : Myer Kutz
Publisher : John Wiley & Sons
ISBN 13 : 1118930835
Total Pages : 1010 pages
Book Rating : 4.1/5 (189 download)

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Book Synopsis Mechanical Engineers' Handbook, Volume 2 by : Myer Kutz

Download or read book Mechanical Engineers' Handbook, Volume 2 written by Myer Kutz and published by John Wiley & Sons. This book was released on 2015-02-06 with total page 1010 pages. Available in PDF, EPUB and Kindle. Book excerpt: Full coverage of electronics, MEMS, and instrumentation and control in mechanical engineering This second volume of Mechanical Engineers' Handbook covers electronics, MEMS, and instrumentation and control, giving you accessible and in-depth access to the topics you'll encounter in the discipline: computer-aided design, product design for manufacturing and assembly, design optimization, total quality management in mechanical system design, reliability in the mechanical design process for sustainability, life-cycle design, design for remanufacturing processes, signal processing, data acquisition and display systems, and much more. The book provides a quick guide to specialized areas you may encounter in your work, giving you access to the basics of each and pointing you toward trusted resources for further reading, if needed. The accessible information inside offers discussions, examples, and analyses of the topics covered, rather than the straight data, formulas, and calculations you'll find in other handbooks. Presents the most comprehensive coverage of the entire discipline of Mechanical Engineering anywhere in four interrelated books Offers the option of being purchased as a four-book set or as single books Comes in a subscription format through the Wiley Online Library and in electronic and custom formats Engineers at all levels will find Mechanical Engineers' Handbook, Volume 2 an excellent resource they can turn to for the basics of electronics, MEMS, and instrumentation and control.

RF MEMS and Their Applications

Author : Vijay K. Varadan
Publisher : John Wiley & Sons
ISBN 13 : 0470846194
Total Pages : 406 pages
Book Rating : 4.4/5 (78 download)

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Book Synopsis RF MEMS and Their Applications by : Vijay K. Varadan

Download or read book RF MEMS and Their Applications written by Vijay K. Varadan and published by John Wiley & Sons. This book was released on 2003-07-25 with total page 406 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectromechanical systems (MEMS) refer to a collection of micro-sensors and actuators, which can react to environmental change under micro- circuit control. The integration of MEMS into traditional Radio Frequency (RF) circuits has resulted in systems with superior performance levels and lower manufacturing costs. The incorporation of MEMS based fabrication technologies into micro and millimeter wave systems offers viable routes to ICs with MEMS actuators, antennas, switches and transmission lines. The resultant systems operate with an increased bandwidth and increased radiation efficiency and have considerable scope for implementation within the expanding area of wireless personal communication devices. This text provides leading edge coverage of this increasingly important area and highlights the overlapping information requirements of the RF and MEMS research and development communities. * Provides an introduction to micromachining techniques and their use in the fabrication of micro switches, capacitors and inductors * Includes coverage of MEMS devices for wireless and Bluetooth enabled systems Essential reading for RF Circuit design practitioners and researchers requiring an introduction to MEMS technologies, as well as practitioners and researchers in MEMS and silicon technology requiring an introduction to RF circuit design.

The Europa World Year Book 2003

Author : Europa Publications
Publisher : Taylor & Francis
ISBN 13 : 9781857432275
Total Pages : 2470 pages
Book Rating : 4.4/5 (322 download)

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Book Synopsis The Europa World Year Book 2003 by : Europa Publications

Download or read book The Europa World Year Book 2003 written by Europa Publications and published by Taylor & Francis. This book was released on 2003 with total page 2470 pages. Available in PDF, EPUB and Kindle. Book excerpt: First published in 2003. Routledge is an imprint of Taylor & Francis, an informa company.

System-level Modeling of MEMS

Author : Oliver Brand
Publisher : John Wiley & Sons
ISBN 13 : 3527647120
Total Pages : 562 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis System-level Modeling of MEMS by : Oliver Brand

Download or read book System-level Modeling of MEMS written by Oliver Brand and published by John Wiley & Sons. This book was released on 2012-12-20 with total page 562 pages. Available in PDF, EPUB and Kindle. Book excerpt: System-level modeling of MEMS - microelectromechanical systems - comprises integrated approaches to simulate, understand, and optimize the performance of sensors, actuators, and microsystems, taking into account the intricacies of the interplay between mechanical and electrical properties, circuitry, packaging, and design considerations. Thereby, system-level modeling overcomes the limitations inherent to methods that focus only on one of these aspects and do not incorporate their mutual dependencies. The book addresses the two most important approaches of system-level modeling, namely physics-based modeling with lumped elements and mathematical modeling employing model order reduction methods, with an emphasis on combining single device models to entire systems. At a clearly understandable and sufficiently detailed level the readers are made familiar with the physical and mathematical underpinnings of MEMS modeling. This enables them to choose the adequate methods for the respective application needs. This work is an invaluable resource for all materials scientists, electrical engineers, scientists working in the semiconductor and/or sensor industry, physicists, and physical chemists.

Smart Sensors and MEMS

Author : Sergey Y. Yurish
Publisher : Springer Science & Business Media
ISBN 13 : 1402029292
Total Pages : 489 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Smart Sensors and MEMS by : Sergey Y. Yurish

Download or read book Smart Sensors and MEMS written by Sergey Y. Yurish and published by Springer Science & Business Media. This book was released on 2007-11-12 with total page 489 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book Smart Sensors and MEMS provides an unique collection of contributions on latest achievements in sensors area and technologies that have made by eleven internationally recognized leading experts from Czech Republic, Germany, Italy, Israel, Portugal, Switzerland, Ukraine and USA during the NATO Advanced Study Institute (ASI) in Povoa de Varzim, Portugal, from 8 to 19 September 2003. The aims of this volume are to disseminate wider and in-depth theoretical and practical knowledge about smart sensors and its applications, to create a clear consciousness about the effectiveness of MEMS technologies, advanced signal processing and conversion methods, to stimulate the theoretical and applied research in these areas, and promote the practical using of these techniques in the industry. With that in mind, a broad range of physical, chemical and biosensors design principles, technologies and applications were included in the book. It is a first attempt to describe in the same book different physical, chemical, biological sensors and MEMS technologies suitable for smart sensors creation. The book presents the state-of-the-art and gives an excellent opportunity to provide a systematic, in-depth treatment of the new and rapidly developing field of smart sensors and MEMS. The volume is an excellent guide for practicing engineers, researchers and students interested in this crucial aspect of actual smart sensor design.

Optimal Synthesis Methods for MEMS

Author : G. K. Ananthasuresh
Publisher : Springer Science & Business Media
ISBN 13 : 9781402076206
Total Pages : 346 pages
Book Rating : 4.0/5 (762 download)

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Book Synopsis Optimal Synthesis Methods for MEMS by : G. K. Ananthasuresh

Download or read book Optimal Synthesis Methods for MEMS written by G. K. Ananthasuresh and published by Springer Science & Business Media. This book was released on 2003-11-30 with total page 346 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a first ever collection of optimization-based synthesis methods for MEMS. Various chapters written by leading researchers in the field cover a variety of MEMS devices and actuation principles including mechanical, electrostatic, electro-thermal, and piezoelectric. Process, mask, and system-level syntheses are also addressed. Sufficient background material, algorithms, and details of implementation of the optimization procedures are included to facilitate application to practical problems by MEMS engineers and researchers as well as students. This timely book underscores the importance of synthesis in designing MEMS efficiently and economically.

Mechanics of Microelectromechanical Systems

Author : Nicolae Lobontiu
Publisher : Springer Science & Business Media
ISBN 13 : 0387230378
Total Pages : 415 pages
Book Rating : 4.3/5 (872 download)

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Book Synopsis Mechanics of Microelectromechanical Systems by : Nicolae Lobontiu

Download or read book Mechanics of Microelectromechanical Systems written by Nicolae Lobontiu and published by Springer Science & Business Media. This book was released on 2006-01-16 with total page 415 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer’s viewpoint as devices that transform an input form of energy, such as thermal, electrostatic, electromagnetic or optical, into output mechanical motion (in the case of actuation) or that can operate with the reversed functionality (as in sensors) and convert an external stimulus, such as mechanical motion, into (generally) electric energy. The impetus of this proposal stems from the perception that such an approach might contribute to a more solid understanding of the principles governing the mechanics of MEMS, and would hopefully enhance the efficiency of modeling and designing reliable and desirably-optimized microsystems. The work represents an attempt at both extending and deepening the mechanical-based approach to MEMS in the static domain by providing simple, yet reliable tools that are applicable to micromechanism design through current fabrication technologies. Lumped-parameter stiffness and compliance properties of flexible components are derived both analytically (as closed-form solutions) and as simplified (engineering) formulas. Also studied are the principal means of actuation/sensing and their integration into the overall microsystem. Various examples of MEMS are studied in order to better illustrate the presentation of the different modeling principles and algorithms. Through its objective, approach and scope, this book offers a novel and systematic insight into the MEMS domain and complements existing work in the literature addressing part of the material developed herein.

Handbook of Infrared Detection Technologies

Author : M. Henini
Publisher : Elsevier
ISBN 13 : 9781856173889
Total Pages : 536 pages
Book Rating : 4.1/5 (738 download)

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Book Synopsis Handbook of Infrared Detection Technologies by : M. Henini

Download or read book Handbook of Infrared Detection Technologies written by M. Henini and published by Elsevier. This book was released on 2002-12-11 with total page 536 pages. Available in PDF, EPUB and Kindle. Book excerpt: Introduction -- Comparison of Photon and Thermal Detectors Performance -- GaAs/AIGaAs Based Quantum Well Intra-red Photodetector Focal Plane Arrays -- GaInAs(P) Based Qwips on GaAs, InP and Si Substrates for Focal Plane Arrays -- InAs/(Galn)Sb Superlattices: A Promising Material System for Infra-red Detection -- GaSb/InAs Superlattices for Infra-red FPAs -- MCT Properties, Growth Methods and Characterization -- HgCdTe 2D Arrays -- Technology and Performance Limits -- Status of HgCdTe MBE Technology -- Silicon Infra-red Focal Plane Arrays -- PolySiGe Uncooled Microbolometers for Thermal Infra-red Detection -- Infra-red Silicon/Germanium Detectors -- Fundamentals of Spin Filtering in Ferromagnetic Metals with Application to Spin Sensors.

Nanomechanics of Materials and Structures

Author : Tze-jer Chuang
Publisher : Springer Science & Business Media
ISBN 13 : 9781402039515
Total Pages : 348 pages
Book Rating : 4.0/5 (395 download)

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Book Synopsis Nanomechanics of Materials and Structures by : Tze-jer Chuang

Download or read book Nanomechanics of Materials and Structures written by Tze-jer Chuang and published by Springer Science & Business Media. This book was released on 2006-07-11 with total page 348 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is derived from the proceedings of the International Workshop on Nanomechanics held at Asilomar Conference Grounds in Pacific Grove, California on July 14-17, 2004. Approximately 70 leading experts from academia, government and industrial sectors in semiconductors, computers, communication, information technology, defense, energy, transportation and aerospace attended the Workshop (see the workshop photo taken on July 16, 2004). The main objective was to convene leading researchers in the nanotechnology community to assess the current state-of-the-art and disseminate recent progress, critical issues, barriers to applications, and directions for future research in nanomechanics. Miniaturization of structural components and functional devices such as electronic, optical, mechanical and electric-magnetic parts has been a recent trend, and the pace has accelerated over the past few years. Advances in micromanufacturing, semiconductor processing (e.g., etching, lithography, grafting, etc.), sensors, actuators and microprocessors have opened up a revolutionary path to the development of new technologies such as micro-electro-mechanical systems (MEMS), nano-electro-mechanical systems (NEMS), micro-engines, smart structures, smart controllers, lab-- a-chip devices, and even bio-medical sensing devices which can detect, analyze, decide and activate appropriate functions in real time. The above-mentioned devices, structures, or systems, have one issue in common. In order to perform their assigned functions, they must maintain their structural integrity and be reliable and durable during their entire designed service life. Thus, strength, durability, and time-dependent mechanical property degradation are major concerns for design engineers and device manufacturers, even though the parts are designed for electronic, magnetic, optical or other functions.