Lithographic And Micromachining Techniques For Optical Component Fabrication

Author : Nan Liu (Chemical engineer)
Publisher :
ISBN 13 :
Total Pages : 0 pages
Book Rating : 4.:/5 (134 download)

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Download or read book Advanced Manufacturing of Optical and Electronic Devices Using Novel Lithographic and Contact Transfer Techniques written by Nan Liu (Chemical engineer) and published by . This book was released on 2022 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: "This study focuses on the application of silicon-based micromachining techniques for fabrication of novel materials and opto-electronic devices. Micro/nano scale structures generated via surface patterning techniques are commonly used in various materials and devices due to their unique surface geometries or the flexible materials integration of the structure itself. Our study demonstrates the applications of silicon-based microstructures in the field of contact transfer printing, microparticles generation and optics, as well as the study on the structure fabrication processes including lithography, deposition, and etching. Contact transfer printing is a patterning technique, which is used to transfer ink materials between surfaces. It achieves clean and efficient generation of microfeature arrays with high resolution and fidelity. In our study, we demonstrated a transfer printing process using polyurethane acrylate (PUA) stamps to preform programmable adhesions via thermo-mechanical cycles to enable transfer printing with high precision and low defect density. Our process relies on reusable donor substrates with under-cut microfeatures to achieve selective picking-up of organic/inorganic multilayer stacks by pre-separating target materials from rigid continuous layers. We also applied maskless holographic lithography and parallel patterning techniques to produce oriented magnetic micro-particles (OMMPs), which are sensitive to both optical trapping and magnetic field alignment. Such particles can potentially be used in opto-magnetic trapping applications. For demonstration, we developed holographic lithography and parallel patterning techniques to produce both organic and inorganic particles with high yield. We also built an optical system with the capability of both holographic lithography and optical trapping to demonstrate the particle generation and trapping. We also studied the manufacturing process of optical silica-based structures. In particular, we studied how the micro-manufacturing techniques affect the surface composition of optical grating devices and their performance in high power laser application. The cleaning of optical gratings plays a significant role in the optical performance since the organic residues on the surface can reduce the laser induced damage threshold (LIDT) of the gratings by heat accumulation and phase changes. Thus, we studied the origin of the organic contaminants during manufacturing, their impact on the LIDT, and methods to remove such contaminants. To enable these studies, we developed a deep silica etching process to create mm-wide grating-like structures. Characterization techniques including XPS, SEM, EDX, etc. were applied for the analysis"--Pages viii-ix