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Author : J. J. Dubowski
Publisher :
ISBN 13 :
Total Pages : 496 pages
Book Rating : 4.3/5 (91 download)
Download or read book Laser-induced Thin Film Processing written by J. J. Dubowski and published by . This book was released on 1995 with total page 496 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : J. J. Dubowski
Publisher :
ISBN 13 :
Total Pages : 476 pages
Book Rating : 4.:/5 (759 download)
Download or read book Laser-induced Thin Film Processing written by J. J. Dubowski and published by . This book was released on 1995 with total page 476 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Ian W. Boyd
Publisher : Springer Science & Business Media
ISBN 13 : 3642831362
Total Pages : 328 pages
Book Rating : 4.6/5 (428 download)
Download or read book Laser Processing of Thin Films and Microstructures written by Ian W. Boyd and published by Springer Science & Business Media. This book was released on 2013-03-08 with total page 328 pages. Available in PDF, EPUB and Kindle. Book excerpt: This text aims at providing a comprehensive and up to date treatment of the new and rapidly expanding field of laser pro cessing of thin films, particularly, though by no means exclu sively, of recent progress in the dielectrics area. The volume covers all the major aspects of laser processing technology in general, from the background and history to its many potential applications, and from the theory to the necessary experimental considerations. It highlights and compares the vast array of processing conditions now available with intense photon beams, as well as the properties of the films and microstructures pro duced. Separate chapters deal with the fundamentals of laser interactions with matter, and with experimental considerations. Detailed consideration is also given to film deposition, nuclea tion and growth, oxidation and annealing, as well as selective and localized. etching and ablation, not only in terms of the various photon-induced processes, but also with respect to traditional as well as other competing new technologies.
Author : Irving P. Herman
Publisher : Elsevier
ISBN 13 : 0080538088
Total Pages : 815 pages
Book Rating : 4.0/5 (85 download)
Download or read book Optical Diagnostics for Thin Film Processing written by Irving P. Herman and published by Elsevier. This book was released on 1996-10-23 with total page 815 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume describes the increasing role of in situ optical diagnostics in thin film processing for applications ranging from fundamental science studies to process development to control during manufacturing. The key advantage of optical diagnostics in these applications is that they are usually noninvasive and nonintrusive. Optical probes of the surface, film, wafer, and gas above the wafer are described for many processes, including plasma etching, MBE, MOCVD, and rapid thermal processing. For each optical technique, the underlying principles are presented, modes of experimental implementation are described, and applications of the diagnostic in thin film processing are analyzed, with examples drawn from microelectronics and optoelectronics. Special attention is paid to real-time probing of the surface, to the noninvasive measurement of temperature, and to the use of optical probes for process control. Optical Diagnostics for Thin Film Processing is unique. No other volume explores the real-time application of optical techniques in all modes of thin film processing. The text can be used by students and those new to the topic as an introduction and review of the subject. It also serves as a comprehensive resource for engineers, technicians, researchers, and scientists already working in the field. The only volume that comprehensively explores in situ, real-time, optical probes for all types of thin film processing Useful as an introduction to the subject or as a resource handbook Covers a wide range of thin film processes including plasma etching, MBE, MOCVD, and rapid thermal processing Examples emphasize applications in microelectronics and optoelectronics Introductory chapter serves as a guide to all optical diagnostics and their applications Each chapter presents the underlying principles, experimental implementation, and applications for a specific optical diagnostic
Author : Daniel J. Ehrlich
Publisher : Elsevier
ISBN 13 : 0080918026
Total Pages : 602 pages
Book Rating : 4.0/5 (89 download)
Download or read book Laser Microfabrication written by Daniel J. Ehrlich and published by Elsevier. This book was released on 1989-06-21 with total page 602 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher.
Author : Ion N. Mihailescu
Publisher : CRC Press
ISBN 13 : 1351733532
Total Pages : 564 pages
Book Rating : 4.3/5 (517 download)
Download or read book Pulsed Laser Ablation written by Ion N. Mihailescu and published by CRC Press. This book was released on 2018-01-09 with total page 564 pages. Available in PDF, EPUB and Kindle. Book excerpt: Pulsed laser–based techniques for depositing and processing materials are an important area of modern experimental and theoretical scientific research and development, with promising, challenging opportunities in the fields of nanofabrication and nanostructuring. Understanding the interplay between deposition/processing conditions, laser parameters, as well as material properties and dimensionality is demanding for improved fundamental knowledge and novel applications. This book introduces and discusses the basic principles of pulsed laser–matter interaction, with a focus on its peculiarities and perspectives compared to other conventional techniques and state-of-the-art applications. The book starts with an overview of the growth topics, followed by a discussion of laser–matter interaction depending on laser pulse duration, background conditions, materials, and combination of materials and structures. The information outlines the foundation to introduce examples of laser nanostructuring/processing of materials, pointing out the importance of pulsed laser–based technologies in modern (nano)science. With respect to similar texts and monographs, the book offers a comprehensive review including bottom-up and top-down laser-induced processes for nanoparticles and nanomicrostructure generation. Theoretical models are discussed by correlation with advanced experimental protocols in order to account for the fundamentals and underline physical mechanisms of laser–matter interaction. Reputed, internationally recognized experts in the field have contributed to this book. In particular, this book is suitable for a reader (graduate students as well as postgraduates and more generally researchers) new to the subject of pulsed laser ablation in order to gain physical insight into and advanced knowledge of mechanisms and processes involved in any deposition/processing experiment based on pulsed laser–matter interaction. Since knowledge in the field is given step by step comprehensively, this book serves as a valid introduction to the field as well as a foundation for further specific readings.
Author : Dieter Bäuerle
Publisher : Springer Science & Business Media
ISBN 13 : 3642176135
Total Pages : 846 pages
Book Rating : 4.6/5 (421 download)
Download or read book Laser Processing and Chemistry written by Dieter Bäuerle and published by Springer Science & Business Media. This book was released on 2011-09-02 with total page 846 pages. Available in PDF, EPUB and Kindle. Book excerpt: Laser Processing and Chemistry gives an overview of the fundamentals and applications of laser-matter interactions, in particular with regard to laser material processing. Special attention is given to laser-induced physical and chemical processes at gas-solid, liquid-solid, and solid-solid interfaces. Starting with the background physics, the book proceeds to examine applications of laser techniques in micro-machining, and the patterning, coating, and modification of material surfaces. This fourth edition has been revised and enlarged to cover new topics such as 3D microfabrication, advances in nanotechnology, ultrafast laser technology and laser chemical processing (LCP). Graduate students, physicists, chemists, engineers, and manufacturers alike will find this book an invaluable reference work on laser processing.
Author : Werner Kern
Publisher : Elsevier
ISBN 13 : 0080524214
Total Pages : 881 pages
Book Rating : 4.0/5 (85 download)
Download or read book Thin Film Processes II written by Werner Kern and published by Elsevier. This book was released on 2012-12-02 with total page 881 pages. Available in PDF, EPUB and Kindle. Book excerpt: This sequel to the 1978 classic, Thin Film Processes, gives a clear, practical exposition of important thin film deposition and etching processes that have not yet been adequately reviewed. It discusses selected processes in tutorial overviews with implementation guide lines and an introduction to the literature. Though edited to stand alone, when taken together, Thin Film Processes II and its predecessor present a thorough grounding in modern thin film techniques. Provides an all-new sequel to the 1978 classic, Thin Film Processes Introduces new topics, and several key topics presented in the original volume are updated Emphasizes practical applications of major thin film deposition and etching processes Helps readers find the appropriate technology for a particular application
Author : Dongfang Yang
Publisher : BoD – Books on Demand
ISBN 13 : 9535128116
Total Pages : 430 pages
Book Rating : 4.5/5 (351 download)
Download or read book Applications of Laser Ablation written by Dongfang Yang and published by BoD – Books on Demand. This book was released on 2016-12-21 with total page 430 pages. Available in PDF, EPUB and Kindle. Book excerpt: Laser ablation refers to the phenomenon in which a low wavelength and short pulse (ns-fs) duration of laser beam irradiates the surface of a target to induce instant local vaporization of the target material generating a plasma plume consisting of photons, electrons, ions, atoms, molecules, clusters, and liquid or solid particles. This book covers various aspects of using laser ablation phenomenon for material processing including laser ablation applied for the deposition of thin films, for the synthesis of nanomaterials, and for the chemical compositional analysis and surface modification of materials. Through the 18 chapters written by experts from international scientific community, the reader will have access to the most recent research and development findings on laser ablation through original research studies and literature reviews.
Author : Alberto Piqué
Publisher : John Wiley & Sons
ISBN 13 : 3527805117
Total Pages : 573 pages
Book Rating : 4.5/5 (278 download)
Download or read book Laser Printing of Functional Materials written by Alberto Piqué and published by John Wiley & Sons. This book was released on 2017-12-20 with total page 573 pages. Available in PDF, EPUB and Kindle. Book excerpt: The first book on this hot topic includes such major research areas as printed electronics, sensors, biomaterials and 3D cell printing. Well-structured and with a strong focus on applications, the text is divided in three sections with the first describing the fundamentals of laser transfer. The second provides an overview of the wide variety of materials that can be used for laser transfer processing, while the final section comprehensively discusses a number of practical uses, including printing of electronic materials, printing of 3D structures as well as large-area, high-throughput applications. The book is rounded off by a look at the future for laser printed materials. Invaluable reading for a broad audience ranging from material developers to mechanical engineers, from academic researchers to industrial developers and for those interested in the development of micro-scale additive manufacturing techniques.
Author : Y. Pauleau
Publisher : Springer Science & Business Media
ISBN 13 : 940100353X
Total Pages : 372 pages
Book Rating : 4.4/5 (1 download)
Download or read book Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies written by Y. Pauleau and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 372 pages. Available in PDF, EPUB and Kindle. Book excerpt: An up-to-date collection of tutorial papers on the latest advances in the deposition and growth of thin films for micro and nano technologies. The emphasis is on fundamental aspects, principles and applications of deposition techniques used for the fabrication of micro and nano devices. The deposition of thin films is described, emphasising the gas phase and surface chemistry and its effects on the growth rates and properties of films. Gas-phase phenomena, surface chemistry, growth mechanisms and the modelling of deposition processes are thoroughly described and discussed to provide a clear understanding of the growth of thin films and microstructures via thermally activated, laser induced, photon assisted, ion beam assisted, and plasma enhanced vapour deposition processes. A handbook for engineers and scientists and an introduction for students of microelectronics.
Author : Douglas B. Chrisey
Publisher : Wiley-Interscience
ISBN 13 : 9780471592181
Total Pages : 0 pages
Book Rating : 4.5/5 (921 download)
Download or read book Pulsed Laser Deposition of Thin Films written by Douglas B. Chrisey and published by Wiley-Interscience. This book was released on 1994-06-21 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive overview of what is required to set up and begin research in this newly developing technology and understand the basics of the process. Internationally recognized experts in their fields cover such fundamentals as history, theory, film characteristics, surface modification, laser technology, materials and applications including excellent reviews regarding the entire areas of semiconductor buffer layers, thin-film ferroelectrics and ferrites along with the work involving films deposited by PLD.
Author :
Publisher :
ISBN 13 :
Total Pages : 568 pages
Book Rating : 4.3/5 (91 download)
Download or read book Laser Induced Damage in Optical Materials written by and published by . This book was released on 1980 with total page 568 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : I.W. Boyd
Publisher : Elsevier
ISBN 13 : 0444596801
Total Pages : 552 pages
Book Rating : 4.4/5 (445 download)
Download or read book Laser Surface Processing and Characterization written by I.W. Boyd and published by Elsevier. This book was released on 1992-03-09 with total page 552 pages. Available in PDF, EPUB and Kindle. Book excerpt: The contributions in this volume reflect not only the growing understanding of the underlying mechanisms controlling the various reactions in laser surface processing, but also the potential of several developing applications of direct processing. The most notable trend in the field currently is the technique of laser ablation, which is reported in almost a quarter of the papers in this volume. Whilst by no means a new phenomenon, attention has until recent years remained in the area of lithography and UV-sensitive materials. The growth in interest lies in the use of the technique to grow multi-component thin films and multi-layers. A number of papers on the topic of process diagnostics and in-situ measurements are also included. The theme of these annual meetings is centred around the physical and chemical modification of thin films and surfaces induced by the action of photon, ion, neutral, or electron beams in a variety of environments. Consequently these proceedings provide a comprehensive and unified presentation of the latest developments in this field.
Author : D. Bäuerle
Publisher : Springer Science & Business Media
ISBN 13 : 3642823815
Total Pages : 561 pages
Book Rating : 4.6/5 (428 download)
Download or read book Laser Processing and Diagnostics written by D. Bäuerle and published by Springer Science & Business Media. This book was released on 2013-11-11 with total page 561 pages. Available in PDF, EPUB and Kindle. Book excerpt: Laser processing is now a rapidly increasing field with many real and potential applications in different areas of technology such as micromecha nics, metallurgy, integrated optics, and semiconductor device fabrication. The neces s ity for such soph i st i cated 1 i ght sources as 1 asers is based on the spatial coherence and the monochromaticity of laser light. The spatial coherence permits extreme focussing of the laser light resulting in the availability of high energy densities which can be used for strongly loca lized heat- and chemical-treatment of materials, with a resolution down to 1 ess than 1 lJIll. When us i ng pul sed or scanned cw-l asers, 1 oca 1 i zat i on in time is also possible. Additionally, the monochromaticity of laser light allows for control of the depth of heat treatment and/or selective, nonthermal bond breaking - within the surface of the material or within the molecules of the surrounding reactive atmosphere - simply by tuning the laser wavelength. These inherent advantages of laser light permit micromachining of materials (drilling, cutting, welding etc.) and also allow single-step controlled area processing of thin films and surfaces. Processes include structural transformation (removal of residual damage, grain growth in polycrystalline material, amorphization, surface hardening etc.), etching, doping, alloying, or deposition. In addition, laser processing is not 1 imited to planar substrates.
Author :
Publisher :
ISBN 13 :
Total Pages : 424 pages
Book Rating : 4.3/5 (91 download)
Download or read book Laser Induced Damage in Optical Materials written by and published by . This book was released on 1994 with total page 424 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Ion N. Mihailescu
Publisher : CRC Press
ISBN 13 : 1351733524
Total Pages : 334 pages
Book Rating : 4.3/5 (517 download)
Download or read book Pulsed Laser Ablation written by Ion N. Mihailescu and published by CRC Press. This book was released on 2018-01-09 with total page 334 pages. Available in PDF, EPUB and Kindle. Book excerpt: Pulsed laser–based techniques for depositing and processing materials are an important area of modern experimental and theoretical scientific research and development, with promising, challenging opportunities in the fields of nanofabrication and nanostructuring. Understanding the interplay between deposition/processing conditions, laser parameters, as well as material properties and dimensionality is demanding for improved fundamental knowledge and novel applications. This book introduces and discusses the basic principles of pulsed laser–matter interaction, with a focus on its peculiarities and perspectives compared to other conventional techniques and state-of-the-art applications. The book starts with an overview of the growth topics, followed by a discussion of laser–matter interaction depending on laser pulse duration, background conditions, materials, and combination of materials and structures. The information outlines the foundation to introduce examples of laser nanostructuring/processing of materials, pointing out the importance of pulsed laser–based technologies in modern (nano)science. With respect to similar texts and monographs, the book offers a comprehensive review including bottom-up and top-down laser-induced processes for nanoparticles and nanomicrostructure generation. Theoretical models are discussed by correlation with advanced experimental protocols in order to account for the fundamentals and underline physical mechanisms of laser–matter interaction. Reputed, internationally recognized experts in the field have contributed to this book. In particular, this book is suitable for a reader (graduate students as well as postgraduates and more generally researchers) new to the subject of pulsed laser ablation in order to gain physical insight into and advanced knowledge of mechanisms and processes involved in any deposition/processing experiment based on pulsed laser–matter interaction. Since knowledge in the field is given step by step comprehensively, this book serves as a valid introduction to the field as well as a foundation for further specific readings.
