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Laser Induced Reactions Of Semiconductor Surfaces With Chlorine
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Book Synopsis Laser-Induced Reactions of Semiconductor Surfaces with Chlorine by : Qi Zong Qin
Download or read book Laser-Induced Reactions of Semiconductor Surfaces with Chlorine written by Qi Zong Qin and published by . This book was released on 1992 with total page 3 pages. Available in PDF, EPUB and Kindle. Book excerpt: Laser-induced chemical reaction of semiconductor with halogen and halogen compounds has attracted much attention in recent years due to its potential application in fabrication of microelectronic devices. We have reported UV and visible laser-induced reactions of Si and GaAs surfaces with chlorine using a CW molecular beam technique coupled with time-resolved mass spectrometry. This paper will present recent studies in our laboratory on laser-induced reactions of Ge(111), Si(111), GaAs(100) and InP(100) surfaces with chlorine molecules under 355-, 560-, and 1064-nm laser irradiations. We are particularly interested in the use of near infrared (1064-nm) laser photons as well as the promotion of reaction by raising the incident chlorine molecules' translational energy. The objective is to achieve a better understanding of the mechanism of laser-induced reaction and its potential application in the chemical etching of semiconductor.
Book Synopsis Photogenerated Carrier-induced Reaction on Semiconductor Surfaces by :
Download or read book Photogenerated Carrier-induced Reaction on Semiconductor Surfaces written by and published by . This book was released on 1990 with total page 13 pages. Available in PDF, EPUB and Kindle. Book excerpt: We have begun studying the effect of illumination on the chemical interaction of molecular chlorine with a well-defined GaAs(110) surface under ultra-high vacuum (UHV) conditions. We have found that chlorine adsorbs dissociatively at temperatures as low as 85 K. Illumination of molecular chlorine-covered surface at 85 K with 193-nm radiation led to desorption of Cl-atoms accompanied by Cl2 molecules, as well as formation of AsCl2/AsCl3, which desorbed at 180 K. Illumination with 351-nm excimer-laser radiation caused exclusively Cl-atoms ejection, at a lower rate. It also resulted in smaller amounts of arsenic chloride formed on the surface. No new species were observed when the surface was irradiated with a 535-nm laser. We suggest that the surface reaction is initiated by dissociation of adsorbed molecular chlorine, which we believe, is mediated by photoemission of electrons from the substrate upon 193-nm irradiation. Finally, we have nearly completed the construction of a second UHV system for the study of laser-induced dissociation of metal alkyls on GaAs surfaces. This system will incorporate total-internal-reflection Fourier-transform IR spectroscopy to follow reaction intermediates, a time of flight mass spectrometer, low electron energy diffraction and Auger Electron spectroscopy.
Book Synopsis Beam Processing and Laser Chemistry by : I.W. Boyd
Download or read book Beam Processing and Laser Chemistry written by I.W. Boyd and published by Elsevier. This book was released on 1990-02-01 with total page 482 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume discusses both the practical and theoretical aspects of energy beam materials processing. It highlights the recent advances in the use of beams and incoherent light sources to enhance or modify chemical processes at solid surfaces. Special attention is given to the latest developments in the use of ion, electron and photon beams, and on laser-assisted process chemistry. Thin film and surface and interface reactions as well as bulk phase transformations are discussed. Practical technological details and the criteria for present and future applications are also reviewed. The papers collected in this volume reflect the continuing strong interest and variety of development in this field.
Book Synopsis Scientific and Technical Aerospace Reports by :
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1995 with total page 702 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book NBS Special Publication written by and published by . This book was released on 1968 with total page 752 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Reaction Kinetics on Silicon Surfaces Studied Using Laser-induced Thermal Desorption and Fourier Transform Infrared Spectroscopy by : Prasenjit Gupta
Download or read book Reaction Kinetics on Silicon Surfaces Studied Using Laser-induced Thermal Desorption and Fourier Transform Infrared Spectroscopy written by Prasenjit Gupta and published by . This book was released on 1991 with total page 742 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Energy Research Abstracts written by and published by . This book was released on 1990 with total page 498 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Reduced Thermal Processing for ULSI by : R.A. Levy
Download or read book Reduced Thermal Processing for ULSI written by R.A. Levy and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 444 pages. Available in PDF, EPUB and Kindle. Book excerpt: As feature dimensions of integrated circuits shrink, the associated geometrical constraints on junction depth impose severe restrictions on the thermal budget for processing such devices. Furthermore, due to the relatively low melting point of the first aluminum metallization level, such restrictions extend to the fabrication of multilevel structures that are now essential in increasing packing density of interconnect lines. The fabrication of ultra large scale integrated (ULSI) devices under thermal budget restrictions requires the reassessment of existing and the development of new microelectronic materials and processes. This book addresses three broad but interrelated areas. The first area focuses on the subject of rapid thermal processing (RTP), a technology that allows minimization of processing time while relaxing the constraints on high temperature. Initially developed to limit dopant redistribution, current applications of RTP are shown here to encompass annealing, oxidation, nitridation, silicidation, glass reflow, and contact sintering. In a second but complementary area, advances in equipment design and performance of rapid thermal processing equipment are presented in conjunction with associated issues of temperature measurement and control. Defect mechanisms are assessed together with the resulting properties of rapidly deposited and processed films. The concept of RTP integration for a full CMOS device process is also examined together with its impact on device characteristics.
Book Synopsis Publications of the National Institute of Standards and Technology ... Catalog by : National Institute of Standards and Technology (U.S.)
Download or read book Publications of the National Institute of Standards and Technology ... Catalog written by National Institute of Standards and Technology (U.S.) and published by . This book was released on 1977 with total page 746 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Publications by : United States. National Bureau of Standards
Download or read book Publications written by United States. National Bureau of Standards and published by . This book was released on 1975 with total page 540 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Publications of the National Bureau of Standards by : United States. National Bureau of Standards
Download or read book Publications of the National Bureau of Standards written by United States. National Bureau of Standards and published by . This book was released on 1974 with total page 544 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Publications of the National Bureau of Standards ... Catalog by : United States. National Bureau of Standards
Download or read book Publications of the National Bureau of Standards ... Catalog written by United States. National Bureau of Standards and published by . This book was released on 1974 with total page 548 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Publications of the National Bureau of Standards, 1976 Catalog by : United States. National Bureau of Standards
Download or read book Publications of the National Bureau of Standards, 1976 Catalog written by United States. National Bureau of Standards and published by . This book was released on 1977 with total page 742 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Desorption Induced by Electronic Transitions DIET V by : Alan R. Burns
Download or read book Desorption Induced by Electronic Transitions DIET V written by Alan R. Burns and published by Springer Science & Business Media. This book was released on 2013-03-07 with total page 344 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume in the Springer Series on Surface Sciences presents a recent account of advances in the ever-broadening field of electron-and photon-stimulated sur face processes. As in previous volumes, these advances are presented as the proceedings of the International Workshop on Desorption Induced by Electronic Transitions; the fifth workshop (DIET V) was held in Taos, New Mexico, April 1-4, 1992. It will be abundantly clear to the reader that "DIET" is not restricted to desorption, but has for several years included photochemistry, non-thermal surface modification, exciton self-trapping, and many other phenomena that are induced by electron or photon bombardment. However, most stimulated surface processes do share a common physics: initial electronic excitation, localization of the excitation, and conversion of electronic energy into nuclear kinetic energy. It is the rich variation of this theme which makes the field so interesting and fruitful. We have divided the book into eleven parts in order to emphasize the wide range of materials that are examined and to highlight recent experimental and theoretical advances. Naturally, there is considerable overlap between sections, and many papers would be appropriate in more than one part. Part I focuses on perhaps the most active area in the field today: electron attachment. Here the detection and characterization of negative ions formed by attachment of elec trons supplied externally from the vacuum are discussed. In addition, the first observations of negative ions formed by substrate photoelectrons are presented.
Author :United States. Congress. House. Committee on Science and Technology. Subcommittee on Energy Development and Applications Publisher : ISBN 13 : Total Pages :1160 pages Book Rating :4.:/5 (319 download)
Book Synopsis Fiscal Year 1986 Department of Energy Authorization (basic Research Programs) by : United States. Congress. House. Committee on Science and Technology. Subcommittee on Energy Development and Applications
Download or read book Fiscal Year 1986 Department of Energy Authorization (basic Research Programs) written by United States. Congress. House. Committee on Science and Technology. Subcommittee on Energy Development and Applications and published by . This book was released on 1985 with total page 1160 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Europhysics Conference Abstracts by : European Physical Society
Download or read book Europhysics Conference Abstracts written by European Physical Society and published by . This book was released on 1975 with total page 1158 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Catalog of National Bureau of Standards Publications, 1966-1976 by : United States. National Bureau of Standards
Download or read book Catalog of National Bureau of Standards Publications, 1966-1976 written by United States. National Bureau of Standards and published by . This book was released on 1978 with total page 844 pages. Available in PDF, EPUB and Kindle. Book excerpt:
