Large Displacement Electrostatic Microactuators with Polysilicon Flexure Suspensions

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ISBN 13 :
Total Pages : 476 pages
Book Rating : 4.:/5 (33 download)

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Book Synopsis Large Displacement Electrostatic Microactuators with Polysilicon Flexure Suspensions by : Reid Alyn Brennen

Download or read book Large Displacement Electrostatic Microactuators with Polysilicon Flexure Suspensions written by Reid Alyn Brennen and published by . This book was released on 1993 with total page 476 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Simulation and Synthesis of MicroElectroMechanical Systems

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ISBN 13 :
Total Pages : 338 pages
Book Rating : 4.:/5 (34 download)

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Book Synopsis Simulation and Synthesis of MicroElectroMechanical Systems by : Ningning Zhou

Download or read book Simulation and Synthesis of MicroElectroMechanical Systems written by Ningning Zhou and published by . This book was released on 2002 with total page 338 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Dissertation Abstracts International

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ISBN 13 :
Total Pages : 874 pages
Book Rating : 4.F/5 ( download)

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Book Synopsis Dissertation Abstracts International by :

Download or read book Dissertation Abstracts International written by and published by . This book was released on 1995 with total page 874 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Microelectromechanical Systems

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ISBN 13 :
Total Pages : 478 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Microelectromechanical Systems by :

Download or read book Microelectromechanical Systems written by and published by . This book was released on 1996 with total page 478 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Design, Fabrication, Position Sensing, and Control of Electrostatic, Surface-micromachined Polysilicon Microactuators

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ISBN 13 :
Total Pages : 522 pages
Book Rating : 4.:/5 (33 download)

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Book Synopsis Design, Fabrication, Position Sensing, and Control of Electrostatic, Surface-micromachined Polysilicon Microactuators by : Patrick Ching-Pak Cheung

Download or read book Design, Fabrication, Position Sensing, and Control of Electrostatic, Surface-micromachined Polysilicon Microactuators written by Patrick Ching-Pak Cheung and published by . This book was released on 1995 with total page 522 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Micromechanics and MEMS

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Publisher : Wiley-IEEE Press
ISBN 13 :
Total Pages : 728 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Micromechanics and MEMS by : William S. Trimmer

Download or read book Micromechanics and MEMS written by William S. Trimmer and published by Wiley-IEEE Press. This book was released on 1997-01-29 with total page 728 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer.

Design, Fabrication, and Testing of a MEMS-based Tangential Tactor

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ISBN 13 :
Total Pages : 364 pages
Book Rating : 4.:/5 (89 download)

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Book Synopsis Design, Fabrication, and Testing of a MEMS-based Tangential Tactor by : Reza Ghodssi

Download or read book Design, Fabrication, and Testing of a MEMS-based Tangential Tactor written by Reza Ghodssi and published by . This book was released on 1996 with total page 364 pages. Available in PDF, EPUB and Kindle. Book excerpt:

2001 International Conference on Modeling and Simulation of Microsystems

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ISBN 13 :
Total Pages : 656 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis 2001 International Conference on Modeling and Simulation of Microsystems by : Matthew Laudon

Download or read book 2001 International Conference on Modeling and Simulation of Microsystems written by Matthew Laudon and published by . This book was released on 2001 with total page 656 pages. Available in PDF, EPUB and Kindle. Book excerpt: The worlds most comprehensive and up-to-date collection of Multidisciplinary Micro and Nano technical papers. Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems. Micro and Nano Fluidic Systems, MEMS, System Optimization, MEMS Applications and Characterization, Advanced Numerics, Process Modeling, Quantum Effects, Quantum Devices, Spintronics, Atomistic of Silicon Processing, Advanced Semiconductors, Circuit Modeling, Compact Modeling. Papers taken from the 2001 MSM, Hilton Head Island, USA, March. 2001.

Meeting Abstracts

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Publisher :
ISBN 13 :
Total Pages : 1220 pages
Book Rating : 4.:/5 (318 download)

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Book Synopsis Meeting Abstracts by : Electrochemical Society. Meeting

Download or read book Meeting Abstracts written by Electrochemical Society. Meeting and published by . This book was released on 1999 with total page 1220 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Electrical & Electronics Abstracts

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Publisher :
ISBN 13 :
Total Pages : 1860 pages
Book Rating : 4.3/5 (243 download)

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Book Synopsis Electrical & Electronics Abstracts by :

Download or read book Electrical & Electronics Abstracts written by and published by . This book was released on 1997 with total page 1860 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Japanese Journal of Applied Physics

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ISBN 13 :
Total Pages : 1886 pages
Book Rating : 4.:/5 (321 download)

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Book Synopsis Japanese Journal of Applied Physics by :

Download or read book Japanese Journal of Applied Physics written by and published by . This book was released on 2003 with total page 1886 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Analysis and Design Principles of MEMS Devices

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Publisher : Elsevier
ISBN 13 : 008045562X
Total Pages : 327 pages
Book Rating : 4.0/5 (84 download)

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Book Synopsis Analysis and Design Principles of MEMS Devices by : Minhang Bao

Download or read book Analysis and Design Principles of MEMS Devices written by Minhang Bao and published by Elsevier. This book was released on 2005-04-12 with total page 327 pages. Available in PDF, EPUB and Kindle. Book excerpt: Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field. * Presents the analysis and design principles of MEMS devices more systematically than ever before. * Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures * A problem section is included at the end of each chapter with answers provided at the end of the book.

MEMS

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Publisher : CRC Press
ISBN 13 : 1420036556
Total Pages : 576 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis MEMS by : Mohamed Gad-el-Hak

Download or read book MEMS written by Mohamed Gad-el-Hak and published by CRC Press. This book was released on 2005-11-29 with total page 576 pages. Available in PDF, EPUB and Kindle. Book excerpt: As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection

Optics Letters

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ISBN 13 :
Total Pages : 814 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Optics Letters by :

Download or read book Optics Letters written by and published by . This book was released on 2004 with total page 814 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Foundation of MEMA

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Publisher : Pearson Higher Ed
ISBN 13 : 1292013982
Total Pages : 577 pages
Book Rating : 4.2/5 (92 download)

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Book Synopsis Foundation of MEMA by : Chang Liu

Download or read book Foundation of MEMA written by Chang Liu and published by Pearson Higher Ed. This book was released on 2014-09-18 with total page 577 pages. Available in PDF, EPUB and Kindle. Book excerpt: For courses in Micro-Electro-Mechanical Systems (MEMS) taken by advanced undergraduate students, beginning graduate students, and professionals. Foundations of MEMS is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology — all in a time-efficient and methodical manner. A wealth of examples and problems solidify students’ understanding of abstract concepts and provide ample opportunities for practicing critical thinking.

Microactuators

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Publisher : Springer Science & Business Media
ISBN 13 : 1461554454
Total Pages : 297 pages
Book Rating : 4.4/5 (615 download)

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Book Synopsis Microactuators by : Massood Tabib-Azar

Download or read book Microactuators written by Massood Tabib-Azar and published by Springer Science & Business Media. This book was released on 2013-11-27 with total page 297 pages. Available in PDF, EPUB and Kindle. Book excerpt: 219 8. 2 Sensors 221 8. 3 Physical Sensors 222 8. 3. 1 Electrical Sensing Means 223 8. 3. 2 Magnetic Field Methods 231 8. 3. 3 Optical Methods 232 8. 4 Chemical Sensors 241 8. 4. 1 Electrical Gas and Chemical Sensors 243 8. 4. 2 Guided-Optics Intrinsic Chemical Sensors 246 8. 4. 3 Extrinsic Chemical Sensors 250 8. 4. 4 Polymer Waveguide Chemical Sensors 251 8. 4. 5 Surface Plasmon Chemical Sensors 252 8. 4. 6 Indicator-Mediated Extrinsic Sensing 253 8. 4. 7 Optical Biosensors 256 8. 4. 8 Ultrasonic Gas and Chemical Sensors 257 8. 4. 9 Intelligent Sensors 258 8. 5 Connections/Links and Wiring 258 8. 5. 1 Optical Links 260 8. 5. 2 Requirement on the Processing Unit/Intelligence 262 8. 6 Actuators 263 8. 7 Signal Processing/Computing 264 8. 7. 1 Implicit Computation 266 8. 7. 2 Explicit Computation 267 8. 8 References 274 Subject Index 279 Micro-Actuators (Electrical, Magnetic, Thermal, Optical, Mechanical, and Chemical) It has become quite apparent that sensors and actuators are the main bottleneck of the modem information processing and control systems. Microprocessors and computers used to be the main limiting element in most information processing systems. But thanks to the enonnous progress in the microelectronics industry, most information analysis tasks can be processed in real time. The data has to be acquired by the processor in some form and processed and used to produce some useful function in the real world.

Precision Sensors, Actuators and Systems

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Publisher : Springer Science & Business Media
ISBN 13 : 9780792320159
Total Pages : 490 pages
Book Rating : 4.3/5 (21 download)

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Book Synopsis Precision Sensors, Actuators and Systems by : Hornsen Tzou

Download or read book Precision Sensors, Actuators and Systems written by Hornsen Tzou and published by Springer Science & Business Media. This book was released on 1992-11-30 with total page 490 pages. Available in PDF, EPUB and Kindle. Book excerpt: Research into and development of high-precision systems, microelectromechanical systems, distributed sensors/actuators, smart structural systems, high-precision controls, etc. have drawn much attention in recent years. These new devices and systems will bring about a new technical revolution in modern industries and impact future human life. This book presents a unique overview of these technologies such as silicon based sensors/actuators and control piezoelectric micro sensors/actuators, micro actuation and control, micro sensor applications in robot control, optical fiber sensors/systems, etc. These are four essential subjects emphasized in the book: 1. Survey of the (current) research and development; 2. Fundamental theories and tools; 3. Practical applications. 4. Outlining future research and development.