Microsystem Technology

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Author :
Publisher : John Wiley & Sons
ISBN 13 : 3527613013
Total Pages : 512 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis Microsystem Technology by : Wolfgang Menz

Download or read book Microsystem Technology written by Wolfgang Menz and published by John Wiley & Sons. This book was released on 2008-07-11 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.

Introduction to Microsystem Packaging Technology

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Author :
Publisher : CRC Press
ISBN 13 : 1439865973
Total Pages : 232 pages
Book Rating : 4.4/5 (398 download)

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Book Synopsis Introduction to Microsystem Packaging Technology by : Yufeng Jin

Download or read book Introduction to Microsystem Packaging Technology written by Yufeng Jin and published by CRC Press. This book was released on 2017-12-19 with total page 232 pages. Available in PDF, EPUB and Kindle. Book excerpt: The multi-billion-dollar microsystem packaging business continues to play an increasingly important technical role in today’s information industry. The packaging process—including design and manufacturing technologies—is the technical foundation upon which function chips are updated for use in application systems, and it is an important guarantee of the continued growth of technical content and value of information systems. Introduction to Microsystem Packaging Technology details the latest advances in this vital area, which involves microelectronics, optoelectronics, RF and wireless, MEMS, and related packaging and assembling technologies. It is purposefully written so that each chapter is relatively independent and the book systematically presents the widest possible overview of packaging knowledge. Elucidates the evolving world of packaging technologies for manufacturing The authors begin by introducing the fundamentals, history, and technical challenges of microsystems. Addressing an array of design techniques for packaging and integration, they cover substrate and interconnection technologies, examples of device- and system-level packaging, and various MEMS packaging techniques. The book also discusses module assembly and optoelectronic packaging, reliability methodologies and analysis, and prospects for the evolution and future applications of microsystems packaging and associated environmental protection. With its research examples and targeted reference questions and answers to reinforce understanding, this text is ideal for researchers, engineers, and students involved in microelectronics and MEMS. It is also useful to those who are not directly engaged in packaging but require a solid understanding of the field and its associated technologies.

Introduction to Microsystem Technology

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Author :
Publisher : John Wiley & Sons
ISBN 13 : 0470770929
Total Pages : 376 pages
Book Rating : 4.4/5 (77 download)

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Book Synopsis Introduction to Microsystem Technology by : Gerald Gerlach

Download or read book Introduction to Microsystem Technology written by Gerald Gerlach and published by John Wiley & Sons. This book was released on 2008-04-30 with total page 376 pages. Available in PDF, EPUB and Kindle. Book excerpt: Over half a century after the discovery of the piezoresistive effect, microsystem technology has experienced considerable developments. Expanding the opportunities of microelectronics to non-electronic systems, its number of application fields continues to increase. Microsensors are one of the most important fields, used in medical applications and micromechanics. Microfluidic systems are also a significant area, most commonly used in ink-jet printer heads. This textbook focuses on the essentials of microsystems technology, providing a knowledgeable grounding and a clear path through this well-established scientific dicipline. With a methodical, student-orientated approach, Introduction to Microsystem Technology covers the following: microsystem materials (including silicon, polymers and thin films), and the scaling effects of going micro; fabrication techniques based on different material properties, descriptions of their limitations and functional and shape elements produced by these techniques; sensors and actuators based on elements such as mechanical, fluidic, and thermal (yaw rate sensor components are described); the influence of technology parameters on microsystem properties, asking, for example, when is the function of a microsystem device robust and safe? The book presents problems at the end of each chapter so that you may test your understanding of the key concepts (full solutions for these are given on an accompanying website). Practical examples are included also, as well as case studies that enable a better understanding of the technology as a whole. With its extensive treatment on the fundamentals of microsystem technology, this book also serves as a compendium for engineers and technicians working with microsystem technology.

Microsystem Technology and Microrobotics

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Author :
Publisher : Springer Science & Business Media
ISBN 13 : 3662034506
Total Pages : 420 pages
Book Rating : 4.6/5 (62 download)

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Book Synopsis Microsystem Technology and Microrobotics by : Sergej Fatikow

Download or read book Microsystem Technology and Microrobotics written by Sergej Fatikow and published by Springer Science & Business Media. This book was released on 2013-04-17 with total page 420 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.

Microsystem Design

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Publisher : Springer Science & Business Media
ISBN 13 : 0306476010
Total Pages : 699 pages
Book Rating : 4.3/5 (64 download)

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Book Synopsis Microsystem Design by : Stephen D. Senturia

Download or read book Microsystem Design written by Stephen D. Senturia and published by Springer Science & Business Media. This book was released on 2005-12-20 with total page 699 pages. Available in PDF, EPUB and Kindle. Book excerpt: It is a real pleasure to write the Foreword for this book, both because I have known and respected its author for many years and because I expect this book’s publication will mark an important milestone in the continuing worldwide development of microsystems. By bringing together all aspects of microsystem design, it can be expected to facilitate the training of not only a new generation of engineers, but perhaps a whole new type of engineer – one capable of addressing the complex range of problems involved in reducing entire systems to the micro- and nano-domains. This book breaks down disciplinary barriers to set the stage for systems we do not even dream of today. Microsystems have a long history, dating back to the earliest days of mic- electronics. While integrated circuits developed in the early 1960s, a number of laboratories worked to use the same technology base to form integrated sensors. The idea was to reduce cost and perhaps put the sensors and circuits together on the same chip. By the late-60s, integrated MOS-photodiode arrays had been developed for visible imaging, and silicon etching was being used to create thin diaphragms that could convert pressure into an electrical signal. By 1970, selective anisotropic etching was being used for diaphragm formation, retaining a thick silicon rim to absorb package-induced stresses. Impurity- and electrochemically-based etch-stops soon emerged, and "bulk micromachining" came into its own.

Fundamentals of Microsystems Packaging

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Author :
Publisher : McGraw Hill Professional
ISBN 13 : 0071500596
Total Pages : 979 pages
Book Rating : 4.0/5 (715 download)

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Book Synopsis Fundamentals of Microsystems Packaging by : Rao Tummala

Download or read book Fundamentals of Microsystems Packaging written by Rao Tummala and published by McGraw Hill Professional. This book was released on 2001-05-08 with total page 979 pages. Available in PDF, EPUB and Kindle. Book excerpt: LEARN ABOUT MICROSYSTEMS PACKAGING FROM THE GROUND UP Written by Rao Tummala, the field’s leading author, Fundamentals of Microsystems Packaging is the only book to cover the field from wafer to systems, including every major contributing technology. This rigorous and thorough introduction to electronic packaging technologies gives you a solid grounding in microelectronics, photonics, RF, packaging design, assembly, reliability, testing, and manufacturing and its relevance to both semiconductors and systems. You’ll find: *Full coverage of electrical, mechanical, chemical, and materials aspects of each technology *Easy-to-read schematics and block diagrams *Fundamental approaches to all system issues *Examples of all common configurations and technologies—wafer level packaging, single chip, multichip, RF, opto-electronic, microvia boards, thermal and others *Details on chip-to-board connections, sealing and encapsulation, and manufacturing processes *Basics of electrical and reliability testing

Introduction to Microsystem Packaging Technology

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Author :
Publisher : CRC Press
ISBN 13 : 1351832972
Total Pages : 233 pages
Book Rating : 4.3/5 (518 download)

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Book Synopsis Introduction to Microsystem Packaging Technology by : Yufeng Jin

Download or read book Introduction to Microsystem Packaging Technology written by Yufeng Jin and published by CRC Press. This book was released on 2017-12-19 with total page 233 pages. Available in PDF, EPUB and Kindle. Book excerpt: The multi-billion-dollar microsystem packaging business continues to play an increasingly important technical role in today’s information industry. The packaging process—including design and manufacturing technologies—is the technical foundation upon which function chips are updated for use in application systems, and it is an important guarantee of the continued growth of technical content and value of information systems. Introduction to Microsystem Packaging Technology details the latest advances in this vital area, which involves microelectronics, optoelectronics, RF and wireless, MEMS, and related packaging and assembling technologies. It is purposefully written so that each chapter is relatively independent and the book systematically presents the widest possible overview of packaging knowledge. Elucidates the evolving world of packaging technologies for manufacturing The authors begin by introducing the fundamentals, history, and technical challenges of microsystems. Addressing an array of design techniques for packaging and integration, they cover substrate and interconnection technologies, examples of device- and system-level packaging, and various MEMS packaging techniques. The book also discusses module assembly and optoelectronic packaging, reliability methodologies and analysis, and prospects for the evolution and future applications of microsystems packaging and associated environmental protection. With its research examples and targeted reference questions and answers to reinforce understanding, this text is ideal for researchers, engineers, and students involved in microelectronics and MEMS. It is also useful to those who are not directly engaged in packaging but require a solid understanding of the field and its associated technologies.

Micro and Smart Systems

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Author :
Publisher : Wiley Global Education
ISBN 13 : 1118213904
Total Pages : 498 pages
Book Rating : 4.1/5 (182 download)

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Book Synopsis Micro and Smart Systems by : G. K. Ananthasuresh

Download or read book Micro and Smart Systems written by G. K. Ananthasuresh and published by Wiley Global Education. This book was released on 2012-04-13 with total page 498 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microsystems are systems that integrate, on a chip or a package, one or more of many different categories of microdevices. As the past few decades were dominated by the development and rapid miniaturization of circuitry, the current and coming decades are witnessing a similar revolution in the miniaturization of sensors, actuators, and electronics; and communication, control and power devices. Applications ranging from biomedicine to warfare are driving rapid innovation and growth in the field, which is pushing this topic into graduate and undergraduate curricula in electrical, mechanical, and biomedical engineering.

Semiconductors for Micro- and Nanotechnology

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Publisher : Wiley-VCH
ISBN 13 :
Total Pages : 348 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Semiconductors for Micro- and Nanotechnology by : Jan G. Korvink

Download or read book Semiconductors for Micro- and Nanotechnology written by Jan G. Korvink and published by Wiley-VCH. This book was released on 2002-07-19 with total page 348 pages. Available in PDF, EPUB and Kindle. Book excerpt: Semiconductors play a major role in modern microtechnology, especially in microelectronics. Since the dimensions of new microelectronic components, e.g. computer chips, now reach nanometer size, semiconductor research moves from microtechnology to nanotechnology. An understanding of the semiconductor physics involved in this new technology is of great importance for every student in engineering, especially electrical engineering, microsystem technology and physics. This textbook emphasizes a system-oriented view of semiconductor physics for applications in microsystem technology. While existing books only cover electronic device physics and are mainly written for physics students, this text gives a more hands-on approach to semiconductor physics and so avoids overloading engineering students with mathematical formulas not essential for their studies.

Mechanics of Microsystems

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Publisher : John Wiley & Sons
ISBN 13 : 1119053838
Total Pages : 332 pages
Book Rating : 4.1/5 (19 download)

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Book Synopsis Mechanics of Microsystems by : Alberto Corigliano

Download or read book Mechanics of Microsystems written by Alberto Corigliano and published by John Wiley & Sons. This book was released on 2018-04-02 with total page 332 pages. Available in PDF, EPUB and Kindle. Book excerpt: Mechanics of Microsystems Alberto Corigliano, Raffaele Ardito, Claudia Comi, Attilio Frangi, Aldo Ghisi and Stefano Mariani, Politecnico di Milano, Italy A mechanical approach to microsystems, covering fundamental concepts including MEMS design, modelling and reliability Mechanics of Microsystems takes a mechanical approach to microsystems and covers fundamental concepts including MEMS design, modelling and reliability. The book examines the mechanical behaviour of microsystems from a ‘design for reliability’ point of view and includes examples of applications in industry. Mechanics of Microsystems is divided into two main parts. The first part recalls basic knowledge related to the microsystems behaviour and offers an overview on microsystems and fundamental design and modelling tools from a mechanical point of view, together with many practical examples of real microsystems. The second part covers the mechanical characterization of materials at the micro-scale and considers the most important reliability issues (fracture, fatigue, stiction, damping phenomena, etc) which are fundamental to fabricate a real working device. Key features: Provides an overview of MEMS, with special focus on mechanical-based Microsystems and reliability issues. Includes examples of applications in industry. Accompanied by a website hosting supplementary material. The book provides essential reading for researchers and practitioners working with MEMS, as well as graduate students in mechanical, materials and electrical engineering.

An Introduction to Microelectromechanical Systems Engineering

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Author :
Publisher : Artech House
ISBN 13 : 9781580535915
Total Pages : 312 pages
Book Rating : 4.5/5 (359 download)

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Book Synopsis An Introduction to Microelectromechanical Systems Engineering by : Nadim Maluf

Download or read book An Introduction to Microelectromechanical Systems Engineering written by Nadim Maluf and published by Artech House. This book was released on 2004 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt: Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of MEMS materials, design, and manufacturing, and learn how it is being applied in industrial, optical, medical and electronic markets. The second edition features brand new sections on RF MEMS, photo MEMS, micromachining on materials other than silicon, reliability analysis, plus an expanded reference list. With an emphasis on commercialized products, this unique resource helps you determine whether your application can benefit from a MEMS solution, understand how other applications and companies have benefited from MEMS, and select and define a manufacturable MEMS process for your application. You discover how to use MEMS technology to enable new functionality, improve performance, and reduce size and cost. The book teaches you the capabilities and limitations of MEMS devices and processes, and helps you communicate the relative merits of MEMS to your company's management. From critical discussions on design operation and process fabrication of devices and systems, to a thorough explanation of MEMS packaging, this easy-to-understand book clearly explains the basics of MEMS engineering, making it an invaluable reference for your work in the field.

Microsystem Technology in Chemistry and Life Sciences

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Author :
Publisher : Springer Science & Business Media
ISBN 13 : 3540695443
Total Pages : 269 pages
Book Rating : 4.5/5 (46 download)

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Book Synopsis Microsystem Technology in Chemistry and Life Sciences by : Andreas Manz

Download or read book Microsystem Technology in Chemistry and Life Sciences written by Andreas Manz and published by Springer Science & Business Media. This book was released on 2003-09-05 with total page 269 pages. Available in PDF, EPUB and Kindle. Book excerpt: "WHAT DOES NOT NEED TO BE BIG, WILL BE SMALL", a word by an engineer at a recent conference on chips technology. This sentence is particularly true for chemistry. Microfabrication technology emerged from microelectronics into areas like mechanics and now chemistry and biology. The engineering of micron and submicron sized features on the surface of silicon, glass and polymers opens a whole new world. Micromotors smaller than human hair have been fabricated and they work fine. It is the declared goal of the authors to bring these different worlds together in this volume. Authors have been carefully chosen to guarantee for the quality of the contents. An engineer, a chemist or a biologist will find new impulses from the various chapters in this book.

MEMS and MOEMS Technology and Applications

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Author :
Publisher : SPIE Press
ISBN 13 : 9780819437167
Total Pages : 544 pages
Book Rating : 4.4/5 (371 download)

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Book Synopsis MEMS and MOEMS Technology and Applications by : P. Rai-Choudhury

Download or read book MEMS and MOEMS Technology and Applications written by P. Rai-Choudhury and published by SPIE Press. This book was released on 2000 with total page 544 pages. Available in PDF, EPUB and Kindle. Book excerpt: The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate. Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. Many of these technologies are based on surface micromachining, which has evolved from silicon integrated circuit technology. This book is written by experts in the field. It contains useful details in design and processing and can be utilized as a reference book or as a textbook.

Silicon Carbide Microsystems for Harsh Environments

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Publisher : Springer Science & Business Media
ISBN 13 : 1441971211
Total Pages : 247 pages
Book Rating : 4.4/5 (419 download)

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Book Synopsis Silicon Carbide Microsystems for Harsh Environments by : Muthu Wijesundara

Download or read book Silicon Carbide Microsystems for Harsh Environments written by Muthu Wijesundara and published by Springer Science & Business Media. This book was released on 2011-05-17 with total page 247 pages. Available in PDF, EPUB and Kindle. Book excerpt: Silicon Carbide Microsystems for Harsh Environments reviews state-of-the-art Silicon Carbide (SiC) technologies that, when combined, create microsystems capable of surviving in harsh environments, technological readiness of the system components, key issues when integrating these components into systems, and other hurdles in harsh environment operation. The authors use the SiC technology platform suite the model platform for developing harsh environment microsystems and then detail the current status of the specific individual technologies (electronics, MEMS, packaging). Additionally, methods towards system level integration of components and key challenges are evaluated and discussed based on the current state of SiC materials processing and device technology. Issues such as temperature mismatch, process compatibility and temperature stability of individual components and how these issues manifest when building the system receive thorough investigation. The material covered not only reviews the state-of-the-art MEMS devices, provides a framework for the joining of electronics and MEMS along with packaging into usable harsh-environment-ready sensor modules.

Implantable Biomedical Microsystems

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Publisher : Elsevier
ISBN 13 : 0323261906
Total Pages : 337 pages
Book Rating : 4.3/5 (232 download)

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Book Synopsis Implantable Biomedical Microsystems by : Swarup Bhunia

Download or read book Implantable Biomedical Microsystems written by Swarup Bhunia and published by Elsevier. This book was released on 2015-01-28 with total page 337 pages. Available in PDF, EPUB and Kindle. Book excerpt: Research and innovation in areas such as circuits, microsystems, packaging, biocompatibility, miniaturization, power supplies, remote control, reliability, and lifespan are leading to a rapid increase in the range of devices and corresponding applications in the field of wearable and implantable biomedical microsystems, which are used for monitoring, diagnosing, and controlling the health conditions of the human body. This book provides comprehensive coverage of the fundamental design principles and validation for implantable microsystems, as well as several major application areas. Each component in an implantable device is described in details, and major case studies demonstrate how these systems can be optimized for specific design objectives. The case studies include applications of implantable neural signal processors, brain-machine interface (BMI) systems intended for both data recording and treatment, neural prosthesis, bladder pressure monitoring for treating urinary incontinence, implantable imaging devices for early detection and diagnosis of diseases as well as electrical conduction block of peripheral nerve for chronic pain management. Implantable Biomedical Microsystems is the first comprehensive coverage of bioimplantable system design providing an invaluable information source for researchers in Biomedical, Electrical, Computer, Systems, and Mechanical Engineering as well as engineers involved in design and development of wearable and implantable bioelectronic devices and, more generally, teams working on low-power microsystems and their corresponding wireless energy and data links. - First time comprehensive coverage of system-level and component-level design and engineering aspects for implantable microsystems. - Provides insight into a wide range of proven applications and application specific design trade-offs of bioimplantable systems, including several major case studies - Enables Engineers involved in development of implantable electronic systems to optimize applications for specific design objectives.

Design and Manufacturing of Active Microsystems

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Publisher : Springer Science & Business Media
ISBN 13 : 364212903X
Total Pages : 447 pages
Book Rating : 4.6/5 (421 download)

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Book Synopsis Design and Manufacturing of Active Microsystems by : Stephanus Büttgenbach

Download or read book Design and Manufacturing of Active Microsystems written by Stephanus Büttgenbach and published by Springer Science & Business Media. This book was released on 2011-03-04 with total page 447 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.

Microsystems Dynamics

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Publisher : Springer Science & Business Media
ISBN 13 : 9048197015
Total Pages : 222 pages
Book Rating : 4.0/5 (481 download)

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Book Synopsis Microsystems Dynamics by : Vytautas Ostasevicius

Download or read book Microsystems Dynamics written by Vytautas Ostasevicius and published by Springer Science & Business Media. This book was released on 2010-11-01 with total page 222 pages. Available in PDF, EPUB and Kindle. Book excerpt: In recent years microelectromechanical systems (MEMS) have emerged as a new technology with enormous application potential. MEMS manufacturing techniques are essentially the same as those used in the semiconductor industry, therefore they can be produced in large quantities at low cost. The added benefits of lightweight, miniature size and low energy consumption make MEMS commercialization very attractive. Modeling and simulation is an indispensable tool in the process of studying these new dynamic phenomena, development of new microdevices and improvement of the existing designs. MEMS technology is inherently multidisciplinary since operation of microdevices involves interaction of several energy domains of different physical nature, for example, mechanical, fluidic and electric forces. Dynamic behavior of contact-type electrostatic microactuators, such as a microswitches, is determined by nonlinear fluidic-structural, electrostatic-structural and vibro-impact interactions. The latter is particularly important: Therefore it is crucial to develop accurate computational models for numerical analysis of the aforementioned interactions in order to better understand coupled-field effects, study important system dynamic characteristics and thereby formulate guidelines for the development of more reliable microdevices with enhanced performance, reliability and functionality.