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In Situ Studies Of The Growth Of Amorphous And Microcrystalline Silicon Using Real Time Spectroscopic Ellipsometry
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Book Synopsis In-Situ Studies of the Growth of Amorphous and Microcrystalline Silicon Using Real-Time Spectroscopic Ellipsometry by :
Download or read book In-Situ Studies of the Growth of Amorphous and Microcrystalline Silicon Using Real-Time Spectroscopic Ellipsometry written by and published by . This book was released on 2003 with total page 7 pages. Available in PDF, EPUB and Kindle. Book excerpt: Real-time, in-situ characterization of hot-wire chemical vapor deposition (HWCVD) growth of hydrogenated silicon (Si:H) thin films offers unique insight into the properties of the materials and mechanisms of their growth. We have used in-situ spectroscopic ellipsometry to characterize Si:H crystallinity as a function of film thickness and deposition conditions. We find that the transition from amorphous to microcrystalline growth is a strong function of film thickness and hydrogen dilution, and a weak function of substrate temperature. We have expressed this information in terms of a color-coded phase-space map of the amorphous to microcrystalline transition in HWCVD growth on crystalline Si substrates.
Book Synopsis Spectroscopic Ellipsometry by : Hiroyuki Fujiwara
Download or read book Spectroscopic Ellipsometry written by Hiroyuki Fujiwara and published by John Wiley & Sons. This book was released on 2007-09-27 with total page 388 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.
Book Synopsis In Situ Characterization of Thin Film Growth by : Gertjan Koster
Download or read book In Situ Characterization of Thin Film Growth written by Gertjan Koster and published by Elsevier. This book was released on 2011-10-05 with total page 295 pages. Available in PDF, EPUB and Kindle. Book excerpt: Advanced techniques for characterizing thin film growth in situ help to develop improved understanding and faster diagnosis of issues with the process. In situ characterization of thin film growth reviews current and developing techniques for characterizing the growth of thin films, covering an important gap in research. Part one covers electron diffraction techniques for in situ study of thin film growth, including chapters on topics such as reflection high-energy electron diffraction (RHEED) and inelastic scattering techniques. Part two focuses on photoemission techniques, with chapters covering ultraviolet photoemission spectroscopy (UPS), X-ray photoelectron spectroscopy (XPS) and in situ spectroscopic ellipsometry for characterization of thin film growth. Finally, part three discusses alternative in situ characterization techniques. Chapters focus on topics such as ion beam surface characterization, real time in situ surface monitoring of thin film growth, deposition vapour monitoring and the use of surface x-ray diffraction for studying epitaxial film growth. With its distinguished editors and international team of contributors, In situ characterization of thin film growth is a standard reference for materials scientists and engineers in the electronics and photonics industries, as well as all those with an academic research interest in this area. Chapters review electron diffraction techniques, including the methodology for observations and measurements Discusses the principles and applications of photoemission techniques Examines alternative in situ characterisation techniques
Book Synopsis Thin film transistors. 1. Amorphous silicon thin film transistors by : Yue Kuo
Download or read book Thin film transistors. 1. Amorphous silicon thin film transistors written by Yue Kuo and published by Springer Science & Business Media. This book was released on 2004 with total page 538 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the first reference on amorphous silicon and polycrystalline silicon thin film transistors that gives a systematic global review of all major topics in the field. These volumes include sections on basic materials and substrates properties, fundamental device physics, critical fabrication processes (structures, a-Si: H, dielectric, metallization, catalytic CVD), and existing and new applications. The chapters are written by leading researchers who have extensive experience with reputed track records. Thin Film Transistors provides practical information on preparing individual functional a-Si: H TFTs and poly-Si TFTs as well as large-area TFT arrays. Also covered are basic theories on the a-Si: H TFT operations and unique material characteristics. Readers are also exposed to a wide range of existing and new applications in industries.
Book Synopsis Silicon Anode Systems for Lithium-Ion Batteries by : Prashant N. Kumta
Download or read book Silicon Anode Systems for Lithium-Ion Batteries written by Prashant N. Kumta and published by Elsevier. This book was released on 2021-09-10 with total page 536 pages. Available in PDF, EPUB and Kindle. Book excerpt: Silicon Anode Systems for Lithium-Ion Batteries is an introduction to silicon anodes as an alternative to traditional graphite-based anodes. The book provides a comprehensive overview including abundance, system voltage, and capacity. It provides key insights into the basic challenges faced by the materials system such as new configurations and concepts for overcoming the expansion and contraction related problems. This book has been written for the practitioner, researcher or developer of commercial technologies. Provides a thorough explanation of the advantages, challenge, materials science, and commercial prospects of silicon and related anode materials for lithium-ion batteries Provides insights into practical issues including processing and performance of advanced Si-based materials in battery-relevant materials systems Discusses suppressants in electrolytes to minimize adverse effects of solid electrolyte interphase (SEI) formation and safety limitations associated with this technology
Book Synopsis A Real Time Study of Hydrogenated Amorphous Silicon, Microcrystalline Silicon, and Amorphous Silicon Carbide Growth by Optically Enhanced Infrared Reflectance Spectroscopy by : Monica Katiyar
Download or read book A Real Time Study of Hydrogenated Amorphous Silicon, Microcrystalline Silicon, and Amorphous Silicon Carbide Growth by Optically Enhanced Infrared Reflectance Spectroscopy written by Monica Katiyar and published by . This book was released on 1994 with total page 258 pages. Available in PDF, EPUB and Kindle. Book excerpt: A new, optically enhanced reflection infrared spectroscopy technique is presented to study thin film growth in real time. Here, real time means under actual processing conditions, with a short data acquisition time compared to film changes or growth rates. This technique has industrial application in monitoring and controlling processes which involve a large or complex parameter space. These include interface control and the fundamentals of crystal growth, plasma deposition, and etching. These applications are illustrated in the thesis by studying the deposition of hydrogenated amorphous silicon (a-Si:H), microcrystalline silicon ($mu$c-Si:H), and hydrogenated amorphous silicon carbide $rm (a-Sisb{1-x}Csb{x}$:H) thin films by reactive magnetron sputtering. Complimentary information about the film microstructure is obtained from real time spectroscopic ellipsometry measurements. For a-Si:H growth, we present the first detailed and quantitative set of experimental data on hydrogen incorporation and release processes. The absorption due to the stretching modes of Si-H bonds (1800-2300 cm$sp{-1}$) is used to quantify the increase or loss of H during film growth. A narrow component at $sim$2100 cm$sp{-1}$ corresponding to all SiH$sb{rm X}$ bonds on the physical surface is identified for the first time; the line width of this mode is used to distinguish signals from the bulk and the surface. Various combinations of growth flux (isotope labelling, hydrogen partial pressure between 0.1 and 2.0 mTorr) and substrate material (on SiO$sb2$, a-Si, or a-Si:D) at substrate temperatures between 120 to 350$spcirc$C are used to quantify surface hydrogen coverage, hydrogen implantation, and H removal from surface and sub-surface. We analyze the growth of $mu$c-Si:H on SiO$sb2$ substrate; no evidence of etching during $mu$c-Si deposition is found. We also study the phase transformation of amorphous to microcrystalline silicon when an a-Si film is exposed to a pure H$sb2$ plasma. The a-Si is first heavily hydrogenated and then transforms to $mu$c-Si with a concomitant decrease in H content. During a-Si$rmsb{1-x}$C$rmsb{x}$:H growth, a transition layer rich in hydrogen and carbon is observed between the film and the substrate; steady state growth is not achieved until $>$250 on A SiO$sb2$, and $sim$70 A on a-Si:H substrates.
Download or read book Thin Film Growth written by Zexian Cao and published by Elsevier. This book was released on 2011-07-18 with total page 433 pages. Available in PDF, EPUB and Kindle. Book excerpt: Thin film technology is used in many applications such as microelectronics, optics, hard and corrosion resistant coatings and micromechanics, and thin films form a uniquely versatile material base for the development of novel technologies within these industries. Thin film growth provides an important and up-to-date review of the theory and deposition techniques used in the formation of thin films. Part one focuses on the theory of thin film growth, with chapters covering nucleation and growth processes in thin films, phase-field modelling of thin film growth and surface roughness evolution. Part two covers some of the techniques used for thin film growth, including oblique angle deposition, reactive magnetron sputtering and epitaxial growth of graphene films on single crystal metal surfaces. This section also includes chapters on the properties of thin films, covering topics such as substrate plasticity and buckling of thin films, polarity control, nanostructure growth dynamics and network behaviour in thin films. With its distinguished editor and international team of contributors, Thin film growth is an essential reference for engineers in electronics, energy materials and mechanical engineering, as well as those with an academic research interest in the topic. Provides an important and up-to-date review of the theory and deposition techniques used in the formation of thin films Focusses on the theory and modelling of thin film growth, techniques and mechanisms used for thin film growth and properties of thin films An essential reference for engineers in electronics, energy materials and mechanical engineering
Book Synopsis Amorphous and Microcrystalline Silicon Technology by :
Download or read book Amorphous and Microcrystalline Silicon Technology written by and published by . This book was released on 1999 with total page 1046 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Thin Film Solar Cells by : Jef Poortmans
Download or read book Thin Film Solar Cells written by Jef Poortmans and published by John Wiley & Sons. This book was released on 2006-10-16 with total page 504 pages. Available in PDF, EPUB and Kindle. Book excerpt: Thin-film solar cells are either emerging or about to emerge from the research laboratory to become commercially available devices finding practical various applications. Currently no textbook outlining the basic theoretical background, methods of fabrication and applications currently exist. Thus, this book aims to present for the first time an in-depth overview of this topic covering a broad range of thin-film solar cell technologies including both organic and inorganic materials, presented in a systematic fashion, by the scientific leaders in the respective domains. It covers a broad range of related topics, from physical principles to design, fabrication, characterization, and applications of novel photovoltaic devices.
Book Synopsis Amorphous and Nanocrystalline Silicon Science and Technology ... by :
Download or read book Amorphous and Nanocrystalline Silicon Science and Technology ... written by and published by . This book was released on 2005 with total page 760 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Amorphous and Nanocrystalline Silicon Science and Technology 2004: Volume 808 by : Materials Research Society. Meeting
Download or read book Amorphous and Nanocrystalline Silicon Science and Technology 2004: Volume 808 written by Materials Research Society. Meeting and published by . This book was released on 2004-09-03 with total page 776 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book celebrates 20 years of MRS symposia on the topic of amorphous silicon. Contributors showed that the simplified theories developed to explain the limited experimental information available in the early eighties have spurred more sophisticated experimentation - either refining the early understanding or making it irrelevant. The differences of opinion that continue to exist and emerge are probably the hallmark of the amazing vitality of this field. Applications range from 'mature' thin-film transistors, solar cells and image sensors, to the 'emerging' possibility of erbium-doped nanocrystalline silicon-based materials for lasers and amorphous silicon quantum dots for luminescent devices. The book discusses material characterization, growth processes and devices. Each chapter is further subdivided into sections that group papers around common themes. Topics include: nanomaterials; electronic structure; metastable effects; understanding of growth processes; laser-induced crystallization; metal-induced crystallization; other growth techniques; newer devices; solar cells and thin-film transistors.
Book Synopsis Semiconductor Materials Analysis and Fabrication Process Control by : G.M. Crean
Download or read book Semiconductor Materials Analysis and Fabrication Process Control written by G.M. Crean and published by Elsevier. This book was released on 2012-12-02 with total page 352 pages. Available in PDF, EPUB and Kindle. Book excerpt: There is a growing awareness that the successful implementation of novel material systems and technology steps in the fabrication of microelectronic and optoelectronic devices, is critically dependent on the understanding and control of the materials, the process steps and their interactions. The contributions in this volume demonstrate that characterisation and analysis techniques are an essential support mechanism for research in these fields. Current major research themes are reviewed both in the development and application of diagnostic techniques for advanced materials analysis and fabrication process control. Two distinct trends are elucidated: the emergence and evaluation of sophisticated in situ optical diagnostic techniques such as photoreflectance and spectroellipsometry and the industrial application of ultra-high sensitivity chemical analysis techniques for contamination monitoring. The volume will serve as a useful and timely overview of this increasingly important field.
Book Synopsis Advances in Photovoltaics: Part 3 by :
Download or read book Advances in Photovoltaics: Part 3 written by and published by Academic Press. This book was released on 2014-12-01 with total page 178 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume is the third of a set of seven on the topic of photovoltaics. Solar cell-related technologies covered here include: ribbon silicon; heterojunction crystalline silicon; wafer equivalent crystalline silicon; and other advanced silicon solar cell structures and processes. Semiconductors and Semimetals has distinguished itself through the careful selection of well-known authors, editors, and contributors. Originally widely known as the "Willardson and Beer" Series, it has succeeded in publishing numerous landmark volumes and chapters. The series publishes timely, highly relevant volumes intended for long-term impact and reflecting the truly interdisciplinary nature of the field. The volumes in Semiconductors and Semimetals have been and will continue to be of great interest to physicists, chemists, materials scientists, and device engineers in academia, scientific laboratories and modern industry. Written and edited by internationally renowned experts Relevant to a wide readership: physicists, chemists, materials scientists, and device engineers in academia, scientific laboratories and modern industry
Download or read book Ceramic Abstracts written by and published by . This book was released on 1994 with total page 972 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Amorphous Silicon Technology, 1992 by : M. J. Thompson
Download or read book Amorphous Silicon Technology, 1992 written by M. J. Thompson and published by . This book was released on 1992 with total page 1274 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Encyclopedia of Spectroscopy and Spectrometry by :
Download or read book Encyclopedia of Spectroscopy and Spectrometry written by and published by Academic Press. This book was released on 2016-09-22 with total page 3716 pages. Available in PDF, EPUB and Kindle. Book excerpt: This third edition of the Encyclopedia of Spectroscopy and Spectrometry, Three Volume Set provides authoritative and comprehensive coverage of all aspects of spectroscopy and closely related subjects that use the same fundamental principles, including mass spectrometry, imaging techniques and applications. It includes the history, theoretical background, details of instrumentation and technology, and current applications of the key areas of spectroscopy. The new edition will include over 80 new articles across the field. These will complement those from the previous edition, which have been brought up-to-date to reflect the latest trends in the field. Coverage in the third edition includes: Atomic spectroscopy Electronic spectroscopy Fundamentals in spectroscopy High-Energy spectroscopy Magnetic resonance Mass spectrometry Spatially-resolved spectroscopic analysis Vibrational, rotational and Raman spectroscopies The new edition is aimed at professional scientists seeking to familiarize themselves with particular topics quickly and easily. This major reference work continues to be clear and accessible and focus on the fundamental principles, techniques and applications of spectroscopy and spectrometry. Incorporates more than 150 color figures, 5,000 references, and 300 articles for a thorough examination of the field Highlights new research and promotes innovation in applied areas ranging from food science and forensics to biomedicine and health Presents a one-stop resource for quick access to answers and an in-depth examination of topics in the spectroscopy and spectrometry arenas
Book Synopsis Silicon Based Thin Film Solar Cells by : Roberto Murri
Download or read book Silicon Based Thin Film Solar Cells written by Roberto Murri and published by Bentham Science Publishers. This book was released on 2013-03-20 with total page 524 pages. Available in PDF, EPUB and Kindle. Book excerpt: Silicon Based Thin Film Solar Cells explains concepts related to technologies for silicon (Si) based photovoltaic applications. Topics in this book focus on ‘new concept’ solar cells. These kinds of cells can make photovoltaic power production an economically viable option in comparison to the bulk crystalline semiconductor technology industry. A transition from bulk crystalline Si solar cells toward thin-film technologies reduces usage of active material and introduces new concepts based on nanotechnologies. Despite its importance, the scientific development and understanding of new solar cells is not very advanced, and educational resources for specialized engineers and scientists are required. This textbook presents the fundamental scientific aspects of Si thin films growth technology, together with a clear understanding of the properties of the material and how this is employed in new generation photovoltaic solar cells. The textbook is a valuable resource for graduate students working on their theses, young researchers and all people approaching problems and fundamental aspects of advanced photovoltaic conversion.
