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High Etching Rates Of Bulk Nb In Ar
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Book Synopsis High Etching Rates of Bulk Nb in Ar by :
Download or read book High Etching Rates of Bulk Nb in Ar written by and published by . This book was released on 2008 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Niobium is the material of choice for production of superconducting radio frequency cavities used in linear particle accelerators. In this study, plasma etching of bulk Nb is performed on the surface of disk shaped samples with the goal of eliminating non-superconductive pollutants in the penetration depth region and mechanically damaged surface layer. We have demonstrated that, in the microwave glow discharge, the etchings rates of 1.5?m/min can be achieved using Cl2 as reactive gas. The influence of plasma parameters such as input power, pressure, and concentration of the reactive gas on the etching rates is determined.
Book Synopsis PLASMA ETCHING RATES AND SURFACE COMPOSITION OF BULK NIOBIUM TREATED IN Ar by :
Download or read book PLASMA ETCHING RATES AND SURFACE COMPOSITION OF BULK NIOBIUM TREATED IN Ar written by and published by . This book was released on 2008 with total page 55203 pages. Available in PDF, EPUB and Kindle. Book excerpt: To achieve theoretically predicted values of the accelerating fields in superconducting radiofrequency (SRF) cavities, their inside surface should be fairly smooth and free of impurities. Thus, surface preparation is the critical step in production of SRF cavities. Plasma etching process is a dry chemistry technique that can be used to achieve these requirements. It is based on interaction between reactive halogen species produced in the glow discharge and the surface. During this process, volatile Nb halides are evaporated from the surface of Nb, removing the mechanically damaged and contaminated layer. We present a treatment of bulk Nb samples in the Ar/Cl2 microwave discharge. We have shown that etching rates of bulk Nb as high as 1.5 mm/min can be achieved without introducing impurities in Nb. The rate dependence on various discharge parameters and reactive gas composition is presented. Surface composition and topology measurements were carried out before and after plasma treatment.
Book Synopsis VLSI Design and Test by : S. Rajaram
Download or read book VLSI Design and Test written by S. Rajaram and published by Springer. This book was released on 2019-01-24 with total page 722 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book constitutes the refereed proceedings of the 22st International Symposium on VLSI Design and Test, VDAT 2018, held in Madurai, India, in June 2018. The 39 full papers and 11 short papers presented together with 8 poster papers were carefully reviewed and selected from 231 submissions. The papers are organized in topical sections named: digital design; analog and mixed signal design; hardware security; micro bio-fluidics; VLSI testing; analog circuits and devices; network-on-chip; memory; quantum computing and NoC; sensors and interfaces.
Book Synopsis Fundamentals of Plasma by : Herman V. Boenig
Download or read book Fundamentals of Plasma written by Herman V. Boenig and published by CRC Press. This book was released on 1988 with total page 448 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Fundamentals of Microfabrication by : Marc J. Madou
Download or read book Fundamentals of Microfabrication written by Marc J. Madou and published by CRC Press. This book was released on 2018-10-08 with total page 764 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field. Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem. New in the Second Edition Revised chapters that reflect the many recent advances in the field Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs. Many more links to the Web Problem sets in each chapter
Download or read book Metal Finishing Abstracts written by and published by . This book was released on 1985 with total page 472 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book JJAP written by and published by . This book was released on 2005 with total page 628 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis High-temperature Superconductors by : Merwyn B. Brodsky
Download or read book High-temperature Superconductors written by Merwyn B. Brodsky and published by . This book was released on 1988 with total page 1046 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis IEICE Transactions on Electronics by :
Download or read book IEICE Transactions on Electronics written by and published by . This book was released on 1994 with total page 1178 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis GaN and Related Materials by : Stephen J. Pearton
Download or read book GaN and Related Materials written by Stephen J. Pearton and published by CRC Press. This book was released on 2021-10-08 with total page 556 pages. Available in PDF, EPUB and Kindle. Book excerpt: Presents views on current developments in heat and mass transfer research related to the modern development of heat exchangers. Devotes special attention to the different modes of heat and mass transfer mechanisms in relation to the new development of heat exchangers design. Dedicates particular attention to the future needs and demands for further development in heat and mass transfer. GaN and related materials are attracting tremendous interest for their applications to high-density optical data storage, blue/green diode lasers and LEDs, high-temperature electronics for high-power microwave applications, electronics for aerospace and automobiles, and stable passivation films for semiconductors. In addition, there is great scientific interest in the nitrides, because they appear to form the first semiconductor system in which extended defects do not severely affect the optical properties of devices. This series provides a forum for the latest research in this rapidly-changing field, offering readers a basic understanding of new developments in recent research. Series volumes feature a balance between original theoretical and experimental research in basic physics, device physics, novel materials and quantum structures, processing, and systems.
Book Synopsis Handbook of Chemicals and Gases for the Semiconductor Industry by : Ashutosh Misra
Download or read book Handbook of Chemicals and Gases for the Semiconductor Industry written by Ashutosh Misra and published by John Wiley & Sons. This book was released on 2002-03-22 with total page 386 pages. Available in PDF, EPUB and Kindle. Book excerpt: The first comprehensive guide to the chemicals and gases used in semiconductor manufacturing The fabrication of semiconductor devices involves a series of complex chemical processes such as photolithography, etching, cleaning, thin film deposition, and polishing. Until now, there has been no convenient source of information on the properties, applications, and health and safety considerations of the chemicals used in these processes. The Handbook of Chemicals and Gases for the Semiconductor Industry meets this need. Each of the Handbook's eight chapters is related to a specific area of semiconductor processing. The authors provide a brief overview of each step in the process, followed by tables containing physical properties, handling, safety, and other pertinent information on chemicals and gases typically used in these processes. The 270 chemical and gas entries include data on physical properties, emergency treatment procedures, waste disposal, and incompatible materials, as well as descriptions of applications, chemical mechanisms involved, and references to the literature. Appendices cross-reference entries by process, chemical name, and CAS number. The Handbook's eight chapters are: Thin Film Deposition Materials Wafer Cleaning Materials Photolithography Materials Wet and Dry Etching Materials Chemical Mechanical Planarizing Methods Carrier Gases Uncategorized Materials Semiconductor Chemicals Analysis No other single source brings together these useful and important data on chemicals and gases used in the manufacture of semiconductor devices. The Handbook of Chemicals and Gases for the Semiconductor Industry will be a valuable reference for process engineers, scientists, suppliers to the semiconductor industry, microelectronics researchers, and students.
Download or read book Science Abstracts written by and published by . This book was released on 1995 with total page 1990 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Applied superconductivity by : Vernon Newhouse
Download or read book Applied superconductivity written by Vernon Newhouse and published by Elsevier. This book was released on 2012-12-02 with total page 417 pages. Available in PDF, EPUB and Kindle. Book excerpt: Applied Superconductivity, Volume 1 serves as a reference material to existing superconductivity techniques and a guide to future research. This book deals with electronic application, as well as radiation detection in superconducting films. Organized into five chapters, this volume begins with an overview of superconductivity, particularly the superconducting elements that exhibit an intrinsic quantum electronic behavior. This book then discusses the critical values of the parameters of all superconductive materials, which include the magnetic field, current density, and temperature. Other chapters examine the dynamic and static characteristics of several bolometers. This text also compares the sensitivity of the nonthermal current mode with other wavelength detectors. The final chapter explores the practical thermodynamics of refrigeration and low-temperature refrigeration techniques. This book is intended for those seeking to enrich their background in the physics of superconductivity. Students and researchers in any branch of physics and engineering will find this book extremely useful.
Download or read book Physics Briefs written by and published by . This book was released on 1994 with total page 1118 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Japanese Journal of Applied Physics by :
Download or read book Japanese Journal of Applied Physics written by and published by . This book was released on 1986 with total page 1158 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Metals Abstracts written by and published by . This book was released on 1992 with total page 1592 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Energy Research Abstracts written by and published by . This book was released on 1989 with total page 1398 pages. Available in PDF, EPUB and Kindle. Book excerpt:
