Gas Flows In Microsystems

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Gas Flows in Microsystems

Author : Lucien Baldas
Publisher : MDPI
ISBN 13 : 3039215426
Total Pages : 220 pages
Book Rating : 4.0/5 (392 download)

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Book Synopsis Gas Flows in Microsystems by : Lucien Baldas

Download or read book Gas Flows in Microsystems written by Lucien Baldas and published by MDPI. This book was released on 2019-10-28 with total page 220 pages. Available in PDF, EPUB and Kindle. Book excerpt: The last two decades have witnessed a rapid development of microelectromechanical systems (MEMS) involving gas microflows in various technical fields. Gas microflows can, for example, be observed in microheat exchangers designed for chemical applications or for cooling of electronic components, in fluidic microactuators developed for active flow control purposes, in micronozzles used for the micropropulsion of nano and picosats, in microgas chromatographs, analyzers or separators, in vacuum generators and in Knudsen micropumps, as well as in some organs-on-a-chip, such as artificial lungs. These flows are rarefied due to the small MEMS dimensions, and the rarefaction can be increased by low-pressure conditions. The flows relate to the slip flow, transition or free molecular regimes and can involve monatomic or polyatomic gases and gas mixtures. Hydrodynamics and heat and mass transfer are strongly impacted by rarefaction effects, and temperature-driven microflows offer new opportunities for designing original MEMS for gas pumping or separation. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on novel theoretical and numerical models or data, as well as on new experimental results and technics, for improving knowledge on heat and mass transfer in gas microflows. Papers dealing with the development of original gas MEMS are also welcome.

Microelectronics, Microsystems and Nanotechnology

Author : Androula G. Nassiopoulou
Publisher : World Scientific
ISBN 13 : 9810247699
Total Pages : 409 pages
Book Rating : 4.8/5 (12 download)

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Book Synopsis Microelectronics, Microsystems and Nanotechnology by : Androula G. Nassiopoulou

Download or read book Microelectronics, Microsystems and Nanotechnology written by Androula G. Nassiopoulou and published by World Scientific. This book was released on 2001 with total page 409 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume contains papers on the following: CMOS devices and devices based on compound semiconductors; processing; silicon integrated technology and integrated circuit design; quantum physics; nanotechnology; nanodevices, sensors and microsystems. The latest news and future challenges in these fields are presented in invited papers.

Heat Transfer and Fluid Flow in Minichannels and Microchannels

Author : Satish Kandlikar
Publisher : Elsevier
ISBN 13 : 9780080445274
Total Pages : 492 pages
Book Rating : 4.4/5 (452 download)

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Book Synopsis Heat Transfer and Fluid Flow in Minichannels and Microchannels by : Satish Kandlikar

Download or read book Heat Transfer and Fluid Flow in Minichannels and Microchannels written by Satish Kandlikar and published by Elsevier. This book was released on 2006 with total page 492 pages. Available in PDF, EPUB and Kindle. Book excerpt: &Quot;This book explores flow through passages with hydraulic diameters from about 1 [mu]m to 3 mm, covering the range of minichannels and microchannels. Design equations along with solved examples and practice problems are also included to serve the needs of practicing engineers and students in a graduate course."--BOOK JACKET.

Analytical Heat and Fluid Flow in Microchannels and Microsystems

Author : Renato M. Cotta
Publisher : Springer
ISBN 13 : 3319233122
Total Pages : 175 pages
Book Rating : 4.3/5 (192 download)

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Book Synopsis Analytical Heat and Fluid Flow in Microchannels and Microsystems by : Renato M. Cotta

Download or read book Analytical Heat and Fluid Flow in Microchannels and Microsystems written by Renato M. Cotta and published by Springer. This book was released on 2015-10-10 with total page 175 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book focuses on the modeling and analysis of heat and fluid flow in microchannels and micro-systems, compiling a number of analytical and hybrid numerical-analytical solutions for models that account for the relevant micro-scale effects, with the corresponding experimental analysis validation when applicable. The volume stands as the only available compilation of easy to use analytically-based solutions for micro-scale heat and fluid flow problems, that systematically incorporates the most relevant micro-scale effects into the mathematical models, followed by their physical interpretation on the micro-system behavior.

Microsystems Mechanical Design

Author : Francesco De Bona
Publisher : Springer Science & Business Media
ISBN 13 : 321148549X
Total Pages : 219 pages
Book Rating : 4.2/5 (114 download)

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Book Synopsis Microsystems Mechanical Design by : Francesco De Bona

Download or read book Microsystems Mechanical Design written by Francesco De Bona and published by Springer Science & Business Media. This book was released on 2007-03-23 with total page 219 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces the basic tools used in the mechanical design of microsystems, the fabrication methods for these systems, and several applications of this technology. The links between micro- and nanotechnologies are also discussed and light is shed on the potential applications of microsystems to nano-scale manipulation of matter. The book is a systematic, updated and quite complete treatise of its subject.

Mechanics of Microsystems

Author : Alberto Corigliano
Publisher : John Wiley & Sons
ISBN 13 : 1119053838
Total Pages : 332 pages
Book Rating : 4.1/5 (19 download)

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Book Synopsis Mechanics of Microsystems by : Alberto Corigliano

Download or read book Mechanics of Microsystems written by Alberto Corigliano and published by John Wiley & Sons. This book was released on 2018-04-02 with total page 332 pages. Available in PDF, EPUB and Kindle. Book excerpt: Mechanics of Microsystems Alberto Corigliano, Raffaele Ardito, Claudia Comi, Attilio Frangi, Aldo Ghisi and Stefano Mariani, Politecnico di Milano, Italy A mechanical approach to microsystems, covering fundamental concepts including MEMS design, modelling and reliability Mechanics of Microsystems takes a mechanical approach to microsystems and covers fundamental concepts including MEMS design, modelling and reliability. The book examines the mechanical behaviour of microsystems from a ‘design for reliability’ point of view and includes examples of applications in industry. Mechanics of Microsystems is divided into two main parts. The first part recalls basic knowledge related to the microsystems behaviour and offers an overview on microsystems and fundamental design and modelling tools from a mechanical point of view, together with many practical examples of real microsystems. The second part covers the mechanical characterization of materials at the micro-scale and considers the most important reliability issues (fracture, fatigue, stiction, damping phenomena, etc) which are fundamental to fabricate a real working device. Key features: Provides an overview of MEMS, with special focus on mechanical-based Microsystems and reliability issues. Includes examples of applications in industry. Accompanied by a website hosting supplementary material. The book provides essential reading for researchers and practitioners working with MEMS, as well as graduate students in mechanical, materials and electrical engineering.

MEMS and Microsystems

Author : Tai-Ran Hsu
Publisher : John Wiley & Sons
ISBN 13 : 1119771161
Total Pages : 579 pages
Book Rating : 4.1/5 (197 download)

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Book Synopsis MEMS and Microsystems by : Tai-Ran Hsu

Download or read book MEMS and Microsystems written by Tai-Ran Hsu and published by John Wiley & Sons. This book was released on 2020-07-16 with total page 579 pages. Available in PDF, EPUB and Kindle. Book excerpt: Technology/Engineering/Mechanical A bestselling MEMS text...now better than ever. An engineering design approach to Microelectromechanical Systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology. In the five years since the publication of the first edition, there have been significant changes in the science and technology of miniaturization, including microsystems technology and nanotechnology. In response to the increasing needs of engineers to acquire basic knowledge and experience in these areas, this popular text has been carefully updated, including an entirely new section on the introduction of nanoscale engineering. Following a brief introduction to the history and evolution of nanotechnology, the author covers the fundamentals in the engineering design of nanostructures, including fabrication techniques for producing nanoproducts, engineering design principles in molecular dynamics, and fluid flows and heat transmission in nanoscale substances. Other highlights of the Second Edition include: * Expanded coverage of microfabrication plus assembly and packaging technologies * The introduction of microgyroscopes, miniature microphones, and heat pipes * Design methodologies for thermally actuated multilayered device components * The use of popular SU-8 polymer material Supported by numerous examples, case studies, and applied problems to facilitate understanding and real-world application, the Second Edition will be of significant value for both professionals and senior-level mechanical or electrical engineering students.

Optical Sensors and Microsystems

Author : S. Martellucci
Publisher : Springer Science & Business Media
ISBN 13 : 0306470993
Total Pages : 312 pages
Book Rating : 4.3/5 (64 download)

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Book Synopsis Optical Sensors and Microsystems by : S. Martellucci

Download or read book Optical Sensors and Microsystems written by S. Martellucci and published by Springer Science & Business Media. This book was released on 2007-05-08 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt: Proceedings of the 22nd Course of the International School of Quantum Electronics, held 27 November-2 December 1997, in Erice, Italy. In recent years, fiber optical sensors and optical microsystems have assumed a significant role in sensing and measurement of many kinds. These optical techniques are utilised in a wide range of fields, including biomedicine, environmental sensing, mechanical and industrial measurement, and art preservation. This volume, an up-to-date survey of optical sensors and optical microsystems, aims at combining a tutorial foundation with analysis of current research in this area, and an extensive coverage of both technology and applications.

Microsystems and Nanotechnology

Author : Zhaoying Zhou
Publisher : Springer Science & Business Media
ISBN 13 : 3642182933
Total Pages : 1011 pages
Book Rating : 4.6/5 (421 download)

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Book Synopsis Microsystems and Nanotechnology by : Zhaoying Zhou

Download or read book Microsystems and Nanotechnology written by Zhaoying Zhou and published by Springer Science & Business Media. This book was released on 2012-08-30 with total page 1011 pages. Available in PDF, EPUB and Kindle. Book excerpt: “Microsystems and Nanotechnology” presents the latest science and engineering research and achievements in the fields of microsystems and nanotechnology, bringing together contributions by authoritative experts from the United States, Germany, Great Britain, Japan and China to discuss the latest advances in microelectromechanical systems (MEMS) technology and micro/nanotechnology. The book is divided into five parts – the fundamentals of microsystems and nanotechnology, microsystems technology, nanotechnology, application issues, and the developments and prospects – and is a valuable reference for students, teachers and engineers working with the involved technologies. Professor Zhaoying Zhou is a professor at the Department of Precision Instruments & Mechanology , Tsinghua University , and the Chairman of the MEMS & NEMS Society of China. Dr. Zhonglin Wang is the Director of the Center for Nanostructure Characterization, Georgia Tech, USA. Dr. Liwei Lin is a Professor at the Department of Mechanical Engineering, University of California at Berkeley, USA.

Microtas 2004

Author : Thomas Laurell
Publisher : Royal Society of Chemistry
ISBN 13 : 9780854046430
Total Pages : 732 pages
Book Rating : 4.0/5 (464 download)

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Book Synopsis Microtas 2004 by : Thomas Laurell

Download or read book Microtas 2004 written by Thomas Laurell and published by Royal Society of Chemistry. This book was released on 2004 with total page 732 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Eighth International Conference on Miniaturized Systems in Chemistry and Life Science - B5Tas 2004 - is an annual meeting focusing on the research, development and application of miniaturized technologies and methodologies in chemistry and life science. The conference is celebrating its tenth anniversary after the first workshop at the University of Twente, The Netherlands in 1994. This research field is rapidly developing and changing towards a domain where core competence areas such as microfluidics, micro- and nanotechnology, materials science, chemistry, biology, and medicine are melting together to a truly interdisciplinary meeting place. This volume is the first in a two volume set, a valuable reference collection to all working in this field.

Microsystems Dynamics

Author : Vytautas Ostasevicius
Publisher : Springer Science & Business Media
ISBN 13 : 9048197015
Total Pages : 222 pages
Book Rating : 4.0/5 (481 download)

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Book Synopsis Microsystems Dynamics by : Vytautas Ostasevicius

Download or read book Microsystems Dynamics written by Vytautas Ostasevicius and published by Springer Science & Business Media. This book was released on 2010-11-01 with total page 222 pages. Available in PDF, EPUB and Kindle. Book excerpt: In recent years microelectromechanical systems (MEMS) have emerged as a new technology with enormous application potential. MEMS manufacturing techniques are essentially the same as those used in the semiconductor industry, therefore they can be produced in large quantities at low cost. The added benefits of lightweight, miniature size and low energy consumption make MEMS commercialization very attractive. Modeling and simulation is an indispensable tool in the process of studying these new dynamic phenomena, development of new microdevices and improvement of the existing designs. MEMS technology is inherently multidisciplinary since operation of microdevices involves interaction of several energy domains of different physical nature, for example, mechanical, fluidic and electric forces. Dynamic behavior of contact-type electrostatic microactuators, such as a microswitches, is determined by nonlinear fluidic-structural, electrostatic-structural and vibro-impact interactions. The latter is particularly important: Therefore it is crucial to develop accurate computational models for numerical analysis of the aforementioned interactions in order to better understand coupled-field effects, study important system dynamic characteristics and thereby formulate guidelines for the development of more reliable microdevices with enhanced performance, reliability and functionality.

Micro Instrumentation

Author : Melvin V. Koch
Publisher : John Wiley & Sons
ISBN 13 : 3527610618
Total Pages : 520 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis Micro Instrumentation by : Melvin V. Koch

Download or read book Micro Instrumentation written by Melvin V. Koch and published by John Wiley & Sons. This book was released on 2007-06-27 with total page 520 pages. Available in PDF, EPUB and Kindle. Book excerpt: This first comprehensive treatment of the intertwined roles of micro-instrumentation, high throughput experimentation and process intensification as valuable tools for process analytical technology covers both industrial as well as academic aspects. First class editors and authors from top companies and universities provide interdisciplinary coverage ranging from chemistry and analytics to process design and engineering, supported throughout by case studies and ample analytical data.

Sensors and Microsystems

Author : A. D'Amico
Publisher : World Scientific
ISBN 13 : 9812381813
Total Pages : 419 pages
Book Rating : 4.8/5 (123 download)

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Book Synopsis Sensors and Microsystems by : A. D'Amico

Download or read book Sensors and Microsystems written by A. D'Amico and published by World Scientific. This book was released on 2002 with total page 419 pages. Available in PDF, EPUB and Kindle. Book excerpt: "Papers presented at the 7th edition of the Italian Conference on Sensors and Microsystems ..."--Foreword.

Microfluidics Based Microsystems

Author : S. Kakaç
Publisher : Springer
ISBN 13 : 9048190290
Total Pages : 621 pages
Book Rating : 4.0/5 (481 download)

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Book Synopsis Microfluidics Based Microsystems by : S. Kakaç

Download or read book Microfluidics Based Microsystems written by S. Kakaç and published by Springer. This book was released on 2010-06-30 with total page 621 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume contains an archival record of the NATO Advanced Study Institute on Microfluidics Based Microsystems – Fundamentals and App- cations held in Çe ?me-Izmir, Turkey, August 23–September 4, 2009. ASIs are intended to be high-level teaching activity in scientific and technical areas of current concern. In this volume, the reader may find interesting chapters and various microsystems fundamentals and applications. As the world becomes increasingly concerned with terrorism, early - spot detection of terrorist’s weapons, particularly bio-weapons agents such as bacteria and viruses are extremely important. NATO Public Diplomacy division, Science for Peace and Security section support research, Advanced Study Institutes and workshops related to security. Keeping this policy of NATO in mind, we made such a proposal on Microsystems for security. We are very happy that leading experts agreed to come and lecture in this important NATO ASI. We will see many examples that will show us Microfluidics usefulness for rapid diagnostics following a bioterrorism attack. For the applications in national security and anti-terrorism, microfluidic system technology must meet the challenges. To develop microsystems for security and to provide a comprehensive state-of-the-art assessment of the existing research and applications by treating the subject in considerable depth through lectures from eminent professionals in the field, through discussions and panel sessions are very beneficial for young scientists in the field.

Space Microsystems and Micro/Nano Satellites

Author : Zheng You
Publisher : Butterworth-Heinemann
ISBN 13 : 0128126736
Total Pages : 441 pages
Book Rating : 4.1/5 (281 download)

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Book Synopsis Space Microsystems and Micro/Nano Satellites by : Zheng You

Download or read book Space Microsystems and Micro/Nano Satellites written by Zheng You and published by Butterworth-Heinemann. This book was released on 2017-11-22 with total page 441 pages. Available in PDF, EPUB and Kindle. Book excerpt: Space Microsystems and Micro/Nano Satellites covers the various reasoning and diverse applications of small satellites in both technical and regulatory aspects, also exploring the technical and operational innovations that are being introduced in the field. The Space Microsystem developed by the author is systematically introduced in this book, providing information on such topics as MEMS micro-magnetometers, MIMUs (Micro-inertia-measurement unit), micro-sun sensors, micro-star sensors, micro-propellers, micro-relays, etc. The book also examines the new technical standards, removal techniques or other methods that might help to address current problems, regulatory issues and procedures to ameliorate problems associated with small satellites, especially mounting levels of orbital debris and noncompliance with radio frequency and national licensing requirements, liabilities and export controls, Summarizing the scientific research experiences of the author and his team, this book holds a high scientific reference value as it gives readers comprehensive and thorough introductions to the micro/nano satellite and space applications of MEMS technology. - Covers various reasoning and diverse applications for small satellites in both technical and regulatory aspects - Represents the first publication that systematically introduces the Space Microsystem developed by the author - Examines new technical standards, removal techniques and other methods that might help to address current problems, regulatory issues and procedures

Optical Inspection of Microsystems, Second Edition

Author : Wolfgang Osten
Publisher : CRC Press
ISBN 13 : 1498779506
Total Pages : 585 pages
Book Rating : 4.4/5 (987 download)

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Book Synopsis Optical Inspection of Microsystems, Second Edition by : Wolfgang Osten

Download or read book Optical Inspection of Microsystems, Second Edition written by Wolfgang Osten and published by CRC Press. This book was released on 2019-06-21 with total page 585 pages. Available in PDF, EPUB and Kindle. Book excerpt: Where conventional testing and inspection techniques fail at the microscale, optical techniques provide a fast, robust, noninvasive, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems, Second Edition, extends and updates the first comprehensive survey of the most important optical measurement techniques to be successfully used for the inspection of microsystems. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image processing, image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moire techniques, interference microscopy, laser-Doppler vibrometry, digital holography, speckle metrology, spectroscopy, and sensor fusion technologies. They also examine modern approaches to data acquisition and processing, such as the determination of surface features and the estimation of uncertainty of measurement results. The book emphasizes the evaluation of various system properties and considers encapsulated components to increase quality and reliability. Numerous practical examples and illustrations of optical testing reinforce the concepts. Supplying effective tools for increased quality and reliability, this book Provides a comprehensive, up-to-date overview of optical techniques for the measurement and inspection of microsystems Discusses image correlation, displacement and strain measurement, electro-optic holography, and speckle metrology techniques Offers numerous practical examples and illustrations Includes calibration of optical measurement systems for the inspection of MEMS Presents the characterization of dynamics of MEMS

2001 International Conference on Modeling and Simulation of Microsystems

Author : Matthew Laudon
Publisher :
ISBN 13 :
Total Pages : 656 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis 2001 International Conference on Modeling and Simulation of Microsystems by : Matthew Laudon

Download or read book 2001 International Conference on Modeling and Simulation of Microsystems written by Matthew Laudon and published by . This book was released on 2001 with total page 656 pages. Available in PDF, EPUB and Kindle. Book excerpt: The worlds most comprehensive and up-to-date collection of Multidisciplinary Micro and Nano technical papers. Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems. Micro and Nano Fluidic Systems, MEMS, System Optimization, MEMS Applications and Characterization, Advanced Numerics, Process Modeling, Quantum Effects, Quantum Devices, Spintronics, Atomistic of Silicon Processing, Advanced Semiconductors, Circuit Modeling, Compact Modeling. Papers taken from the 2001 MSM, Hilton Head Island, USA, March. 2001.