Fabrication Methods of Low-loss, High-permittivity Dielectric Resonators and Their Application to UHF and Microwave Integrated Circuits

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ISBN 13 :
Total Pages : 40 pages
Book Rating : 4.:/5 (22 download)

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Book Synopsis Fabrication Methods of Low-loss, High-permittivity Dielectric Resonators and Their Application to UHF and Microwave Integrated Circuits by : Marian L. Majewski

Download or read book Fabrication Methods of Low-loss, High-permittivity Dielectric Resonators and Their Application to UHF and Microwave Integrated Circuits written by Marian L. Majewski and published by . This book was released on 1980 with total page 40 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Microwave Dielectric Resonator-tuning

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ISBN 13 :
Total Pages : 28 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Microwave Dielectric Resonator-tuning by : Uve H. W. Lammers

Download or read book Microwave Dielectric Resonator-tuning written by Uve H. W. Lammers and published by . This book was released on 1974 with total page 28 pages. Available in PDF, EPUB and Kindle. Book excerpt: Dielectric resonators have applications as low-loss compact filters in the microwave region. Tuning characteristics of dielectric resonators that might allow for temperature compensation and frequency variability were investigated both theoretically and experimentally at L band. A secondary dielectric resonator that is offset in frequency from the tuned resonator provides a maximum tuning range of approximately 10 percent before an additional filter loss of 3 dB is incurred; the rate of tuning is slow since it is done by changing the resonator coupling (spacing). For fast tuning, a varactor is used in a coupled resonant circuit. Frequency changes can then be made in a time interval approaching 1/(filter bandwidth), but in this case the maximum tuning range before an additional filter loss of 3 dB is incurred is reduced to 2 percent of the filter frequency.

Dielectric Resonators for Use in Microwave and Millimeter-Wave GaAs Circuits

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ISBN 13 :
Total Pages : 36 pages
Book Rating : 4.:/5 (227 download)

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Book Synopsis Dielectric Resonators for Use in Microwave and Millimeter-Wave GaAs Circuits by : B. E. Spielman

Download or read book Dielectric Resonators for Use in Microwave and Millimeter-Wave GaAs Circuits written by B. E. Spielman and published by . This book was released on 1983 with total page 36 pages. Available in PDF, EPUB and Kindle. Book excerpt: This report represents the results of an investigation of dielectric resonators to be processed in GaAs substrates for application to microwave and millimeter-wave monolithic integrated circuits. Zeroth-and first order analyses are described. These analyses are applied to dielectric resonator structures to be formed in GaAs substrate material by etching an annular gap in the substrate, thereby effectively leaving a circular cylindrical disc of dielectric material to function as a resonator. Plots of geometric parameter variations with frequency are provided for these resonator structures. Tables are presented to show specific resonant structures for frequency-scaled microwave and non-scaled millimeter-wave resonators. Results are discussed, conclusions drawn, and suggestions for further work set forth. (Author).

Lossy Dielectric Resonators for Microwave Absorber and Antenna Applications

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ISBN 13 : 9783985550319
Total Pages : pages
Book Rating : 4.5/5 (53 download)

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Book Synopsis Lossy Dielectric Resonators for Microwave Absorber and Antenna Applications by : Sofian Hamid

Download or read book Lossy Dielectric Resonators for Microwave Absorber and Antenna Applications written by Sofian Hamid and published by . This book was released on 2021 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

An Investigation of Microwave Dielectric Resonators

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ISBN 13 :
Total Pages : 106 pages
Book Rating : 4.F/5 ( download)

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Book Synopsis An Investigation of Microwave Dielectric Resonators by : Hung-Yuet Yee

Download or read book An Investigation of Microwave Dielectric Resonators written by Hung-Yuet Yee and published by . This book was released on 1963 with total page 106 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Development and Applications of Low-Loss Microwave Dielectric Resonators

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ISBN 13 :
Total Pages : 123 pages
Book Rating : 4.:/5 (87 download)

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Book Synopsis Development and Applications of Low-Loss Microwave Dielectric Resonators by : 曾昱瑋

Download or read book Development and Applications of Low-Loss Microwave Dielectric Resonators written by 曾昱瑋 and published by . This book was released on 2013 with total page 123 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Dielectric Resonators

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Publisher : Noble Publishing
ISBN 13 : 9781884932052
Total Pages : 547 pages
Book Rating : 4.9/5 (32 download)

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Book Synopsis Dielectric Resonators by : Darko Kajfez

Download or read book Dielectric Resonators written by Darko Kajfez and published by Noble Publishing. This book was released on 1998-01-01 with total page 547 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the definite reference text on dielectric resonators used in filters and oscillators. This second edition includes corrections and updates, a new chapter on how to use the program included on a new disk. Sections are devoted to properties of materials, coupling techniques and filter and oscillator design using dielectric resonators. Programs implement the models presented in the book and identify the frequencies of all the modes. Author's Comments After the first publication of Dielectric Resonators by Artech House ran out of print, the book was reprinted by Vector Forum, and that version is also out of print now. As the book has become a popular reference for microwave and RF engineers, it is hoped that the present second edition will be just as useful. No matter what the major use of dielectric resonators will be in the future, the prerequisite for an intelligent application is an understanding of the basic principles of these devices. This book aims to provide that understanding. Publisher's Comments With renewed interest in dielectric resonator technology for modern wireless communications equipment, this book is an excellent reference for its understanding and application. The accompanying programs provided on disk implement the models presented in the book and identify the frequencies of all resonance modes

Design, Simulation and Applications of Inductors and Transformers for Si RF ICs

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Publisher : Springer Science & Business Media
ISBN 13 : 0306470381
Total Pages : 193 pages
Book Rating : 4.3/5 (64 download)

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Book Synopsis Design, Simulation and Applications of Inductors and Transformers for Si RF ICs by : Ali M. Niknejad

Download or read book Design, Simulation and Applications of Inductors and Transformers for Si RF ICs written by Ali M. Niknejad and published by Springer Science & Business Media. This book was released on 2005-12-15 with total page 193 pages. Available in PDF, EPUB and Kindle. Book excerpt: The modern wireless communication industry has put great demands on circuit designers for smaller, cheaper transceivers in the gigahertz frequency range. One tool which has assisted designers in satisfying these requirements is the use of on-chip inductiveelements (inductors and transformers) in silicon (Si) radio-frequency (RF) integrated circuits (ICs). These elements allow greatly improved levels of performance in Si monolithic low-noise amplifiers, power amplifiers, up-conversion and down-conversion mixers and local oscillators. Inductors can be used to improve the intermodulation distortion performance and noise figure of small-signal amplifiers and mixers. In addition, the gain of amplifier stages can be enhanced and the realization of low-cost on-chip local oscillators with good phase noise characteristics is made feasible. In order to reap these benefits, it is essential that the IC designer be able to predict and optimize the characteristics of on-chip inductiveelements. Accurate knowledge of inductance values, quality factor (Q) and the influence of ad- cent elements (on-chip proximity effects) and substrate losses is essential. In this book the analysis, modeling and application of on-chip inductive elements is considered. Using analyses based on Maxwells equations, an accurate and efficient technique is developed to model these elements over a wide frequency range. Energy loss to the conductive substrate is modeled through several mechanisms, including electrically induced displacement and conductive c- rents and by magnetically induced eddy currents. These techniques have been compiled in a user-friendly software tool ASITIC (Analysis and Simulation of Inductors and Transformers for Integrated Circuits).

Fabrication and Characterization of High Frequency Devices for Monolithic Microwave Integrated Circuits (MMICs)

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ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (55 download)

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Book Synopsis Fabrication and Characterization of High Frequency Devices for Monolithic Microwave Integrated Circuits (MMICs) by : Kien Mun Lau

Download or read book Fabrication and Characterization of High Frequency Devices for Monolithic Microwave Integrated Circuits (MMICs) written by Kien Mun Lau and published by . This book was released on 2001 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Cavity Resonator Method to Measure the Complex Permittivity of Low-Loss Dielectric Plates

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ISBN 13 : 9780580611063
Total Pages : 24 pages
Book Rating : 4.6/5 (11 download)

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Book Synopsis Cavity Resonator Method to Measure the Complex Permittivity of Low-Loss Dielectric Plates by : British Standards Institute Staff

Download or read book Cavity Resonator Method to Measure the Complex Permittivity of Low-Loss Dielectric Plates written by British Standards Institute Staff and published by . This book was released on 1911-03-31 with total page 24 pages. Available in PDF, EPUB and Kindle. Book excerpt: Dielectric devices, Dielectric materials, Sheet materials, Permittivity measurement, Dielectric measurement, Microwave devices, Microwaves, Resonators, Wave properties and phenomena, Mathematical calculations, Waveguides

Multi-functional Use of Cylindrical Dielectric Resonator for Microwave Circuits and Antenna Applications

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ISBN 13 :
Total Pages : 216 pages
Book Rating : 4.:/5 (747 download)

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Book Synopsis Multi-functional Use of Cylindrical Dielectric Resonator for Microwave Circuits and Antenna Applications by : Laila K. Hady

Download or read book Multi-functional Use of Cylindrical Dielectric Resonator for Microwave Circuits and Antenna Applications written by Laila K. Hady and published by . This book was released on 2009 with total page 216 pages. Available in PDF, EPUB and Kindle. Book excerpt: The main objective of this PhD dissertation is to investigate the ability of utilizing a single cylindrical dielectric resonator in realizing multi-functional devices to be used for filtering, oscillating as well as radiating purposes by exciting multi-independent modes simultaneously. The complete work is devoted in three main categories or contributions. First contribution is mainly working on the use of dielectric resonators in multi-function realizations. A design of dielectric resonator antenna in a polarization filtering cavity for dual function applications is studied where a cylindrical dielectric resonator is enclosed by a hypothetical resonant cavity that acts as a shielding for the resonating mode while transparent for the radiating mode. A possible application of this device is a receiving antenna at the frequency of the radiating mode and can incorporate a local oscillator operating at the resonant frequency of the resonating mode. Moreover, a design of dielectric resonator antenna for GPS and WLAN applications is introduced where both a broadside circularly-polarized antenna and an omni-directional antenna are obtained simultaneously by exciting two independent modes. Since the previous work dealt with the dual use of a dielectric resonator, a new challenge was to go for the triplet functioning. Therefore, part of the work is devoted to study the triple mode operation using a single dielectric resonator for filtering and radiating purposes. The design utilized the dielectric resonator simultaneously as a dual band radiator and as a filter operating for the lower frequency radiating mode band. Traditionally, mechanical direction finding antennas were built with either loop or dipole antenna elements. In radar applications, spiral and horn antennas have been used for the precision direction finding. The second contribution of this dissertation work is studying the use of dielectric resonator antennas in the design of direction finding systems. The direction finding operation is achieved by comparing the received signal with the two generated dielectric resonator antenna patterns. Those patterns are obtained by exciting certain mode through two different ports, once out of phase and once in phase, to produce a broadside type and a monopole type of radiation patterns. Because of its small size, the DRA can be used for an approximate hand-held target tracking, but it could also be used as a feed for reflector antenna for an accurate direction finding in point-to-point applications. The intended application of this antenna is to track a position of a source of radiation. Since the previous parts of the dissertation work are mainly all about the implementation of multi-functional devices with a single dielectric resonator, it was of interest to investigate the use of higher order modes and explore the ability of incorporating such modes in the implementation of new microwave devices. Cylindrical dielectric resonators sustain high-Q electromagnetic modes called "Whispering Gallery Modes" (WGMs). Such high order modes have attracted the attention due to their intensive applications in quantum electrodynamics (QEM), photonics, and telecommunications. The third contribution of this dissertation is mainly studying the ability to excite a WGM transverse magnetic type of mode and use it for the realization of an equally distributed power dividers to be used later in the feeding of antenna array. An X-band WGM excited dielectric resonator enclosed by a cylindrical cavity was designed built and measured to perform as a 5-way uniformly distributed power divider. The excitation of the transverse magnetic WGH 3,1,1 mode was carried out by using microstrip feeding technology integrated with electric probe coupling technique or magnetic slot coupling for different design realizations.

Integration of Sol-gel Frequency Agile Materials for Tunable RF Devices

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ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (82 download)

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Book Synopsis Integration of Sol-gel Frequency Agile Materials for Tunable RF Devices by : Charalampos Fragkiadakis

Download or read book Integration of Sol-gel Frequency Agile Materials for Tunable RF Devices written by Charalampos Fragkiadakis and published by . This book was released on 2012 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis focuses on the use of high permittivity tunable dielectrics and more specifically sol-gel ferroelectric thin films for low cost, high performance tunable devices such as varactors and filters at RF and microwave frequencies. The top- ics covered include measurement techniques for the characterization of tunable dielectrics at low and microwave frequencies, fabrication processes, electrical and acoustic modeling of thin film ferroelectric varactors, performance optimization using conductive electrodes, realization of tunable microwave circuits and inte- gration of tunable dielectrics with conventional bulk acoustic wave resonators (FBAR). A lead strontium titanate (PST) sol-gel ferroelectric varactor is designed, elec- trically and acoustically modeled and fabricated, displaying dielectric tunability of "'-'75%. A two port automatic extraction technique using MATLAB allowing the de-embedding of parasitic connecting transmission lines, as well as parasitic pads has been developed and presented, yielding accurate dielectric permittivity values in good agreement with literature. The potential factors that may compro- mise the electrical performance of the ferroelectric tunable varactor are analyzed and a novel Au/Ti02 bottom electrode stack process is proposed and shown to improve the RF performance of the tunable varactor lowering the overall metaliza- tion resistance and improving performance, compared to the commonly used Pt electrodes. To establish the possibility of tunable microwave systems integrating sol-gel ferroelectric tunable varactors the following novel microwave devices are designed, modeled and fabricated: A ferroelectric varactor-based RF resonant switch, integrating a thin film sol- gel PST ferroelectric varactor with a high Q micro-machined inductor is fabri- cated. An insertion loss of ",1.5 dB and isolation of ",18 dB have been achieved for a single 7 GHz resonant switch with a device area of 0.6 mm x 1 mm. The intrinsic performance limitations of this type of device due to the ferroelectric thin film are discussed and the implementation of cascaded switches and state-of-the- art ferroelectric materials for further improvement of performance of this device, have been considered and simulated. Tunable band-stop resonators and notch filters using sol-gel PST ferroelectric varactors in a coplanar waveguide (CPW) defected ground structure are fabricated and measured. The PST varactors tune single resonators and 3-pole band-stop filters, operating at the center frequency of 4 and 8 GHz, having a maximum rejection of more than 13.8 dB at the stop band, while the insertion loss at the pass band is less than 3 dB. Full-wave analysis is performed to identify the critical points, where PST varactors are implemented to adjust the resonance frequency of the devices. An optimized fabrication process allows for fabrication of a 3-stage filter with a maximum rejection of 28 dB, albeit with a reduced tuning range, possibly due to DC bias path leakage. Finally, a fabrication approach where a ferroelectric varactor is integrated with a conventional zinc oxide (ZnO) acoustic wave resonator is presented. The approach avoids the piezoelectric thin film degradation due to the ferroelectric annealing by first fabricating the ferroelectric varactor and superimposing the conventional FBAR on top of it. The tuning of the series resonant frequency of a conventional ZnO FBAR with a ferroelectric varactor is demonstrated. Field induced deformation limits the maximum shift of the resonance to 0.45% at 1.5 GHz, for 41% tunability of the ferroelectric varactor, suggesting a big scope for possible improvements in performance by improving the design and fabrication. VIII.

Cavity Resonator Method to Measure the Complex Permittivity of Low-loss Dielectric Plates

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ISBN 13 : 9788326674846
Total Pages : pages
Book Rating : 4.6/5 (748 download)

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Book Synopsis Cavity Resonator Method to Measure the Complex Permittivity of Low-loss Dielectric Plates by :

Download or read book Cavity Resonator Method to Measure the Complex Permittivity of Low-loss Dielectric Plates written by and published by . This book was released on 2011 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Whispering Gallery Mode Dielectric Resonator Oscillators

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ISBN 13 :
Total Pages : 206 pages
Book Rating : 4.:/5 (117 download)

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Book Synopsis Whispering Gallery Mode Dielectric Resonator Oscillators by : Imtiaz U. Khairuddin

Download or read book Whispering Gallery Mode Dielectric Resonator Oscillators written by Imtiaz U. Khairuddin and published by . This book was released on 1994 with total page 206 pages. Available in PDF, EPUB and Kindle. Book excerpt: In recent years high permittivity whispering gallery mode (WGM) dielectric resonators (DR's) are showing more flexibility over their counterpart fundamental mode dielectric resonators. This is because of their high quality factors, good suppression of spurious modes and reasonable mechanical dimensions even at millimetres wavelength frequencies. For practical use, DR's are normally placed on top of substrates in order to couple with external microstrip lines. For this case a simple model based on dielectric waveguide is used in order to predict the microwave resonant frequencies of whispering gallery mode planar structured DRs. The measured resonant frequencies have shown an accuracy up to half a percent in most cases. A relatively simple mathematical model of the coupling between a dielectric resonator acting in WGE mode and a quasi-TEM mode microstrip line is proposed. Measured quality factors are found to be in good agreement with the proposed model. A relatively simple configuration of a WGM dielectric resonator oscillator employing shunt feedback and commercially available GaAs FET at 6.44 GHz is presented. Apart from having good efficiency, low frequency pushing and no hysteresis effect it features a low phase noise comparable to conventional dielectric resonator oscillators. Due to the restrictions imposed by conventional resonators, a stable low frequency source normally is multiplied up to millimetric frequencies. The characteristics of commercially available low parasitic mm-wave beam lead varactors have been employed for a simulated design of a frequency tripler from 18 GHz to 55 GHz. This design proved to be not only highly efficient, it most importantly could solve the design problems imposed by shunt-mounted packaged and chip varactor diodes in practice. The merits and de-merits of this conventional technique are then compared with the whispering gallery dielectric resonator mode oscillator.

Fabrication, Development and Analysis of Film Bulk Acoustic Resonators on Flexible Polymer Substrates

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ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (757 download)

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Book Synopsis Fabrication, Development and Analysis of Film Bulk Acoustic Resonators on Flexible Polymer Substrates by : Ghazal Hakemi

Download or read book Fabrication, Development and Analysis of Film Bulk Acoustic Resonators on Flexible Polymer Substrates written by Ghazal Hakemi and published by . This book was released on 2010 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: It is the focus of this project to explore the possibility of achieving Radio Fre?quency (RF) micro-devices on flexible polymer substrates. To this end standard MEMS fabrication methods have been tailored to allow the integration of func?tional materials and device patterning for production of RF MEMS devices with flexible organic substrates. Material quality, device yield, performance and re-liability are critical aspects of our study. The project encompasses the use of a direct integration method for the creation of Film Bulk Acoustic Resonators (FBARs) on Liquid Crystal Polymer (LCP) substrates. An FBAR is a passive component used for resonance and filtering purposes. Its production on organic substrates would lead to a number of ad-vantages including: overall cost savings, size reduction and ability of the device to be directly integrated on the printed circuit board (PCB) front-end with the other essential components (i.e. antenna) without the use of wiring and inter-connections. New fabrication process flows have been developed to allow the creation of FBAR microwave devices on LCP. First of all pre-processing of the polymer substrate is carried out to make it rigid and smooth. Substrate smoothness and stiffness are necessary in order to obtain functioning devices and for the substrate to comply to the standard fabrication methods. Rigidity is achieved through a backing method whereby silicon or glass are attached to LCP with an intermediate adhesive layer. The best way to achieve smoothness was found to be Chemical Mechanical Polishing (CMP). Standard fabrication techniques were then employed to deposit the metal and piezoelectric material and pattern them. Both bulk and surface micromachining were used and, in some cases, tailored to suit the new substrates (LCP) tolerance limits (such as temperature and flexibility). Zinc Oxide (ZnO) piezoelectric is the preferred functional material and it is chosen due to its relatively low deposition temperature re?quirements (below 300C) and its high frequency characteristics. The creation of a front-to-back processed FBAR on LCP is successfully carried out at relatively low temperatures since the Zinc oxide (ZnO) functional mate?rial is proven to yield good crystallinity at a deposition temperature of 100C and also because micromachining temperatures do not generally exceed 115C. The final device is characterized through RF measurements, compared with sim?ulations and standard FBARs and the polymer/ceramic integration reliability for device creation is briefly addressed. In conclusion FBARs are successfully created on LCP with only minor compli?cations related to LCP surface roughness and RIE etch of the polymer. The project lays promising prospects for RF MEMS devices on compliant organic substrates.

Internal Electrostatic Transduction of Micromechanical Resonators

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ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (747 download)

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Book Synopsis Internal Electrostatic Transduction of Micromechanical Resonators by : Maryam Ziaei-Moayyed

Download or read book Internal Electrostatic Transduction of Micromechanical Resonators written by Maryam Ziaei-Moayyed and published by . This book was released on 2009 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Micromechanical signal processors have a great potential to revolutionize the wireless system architectures by offering a pathway toward full system integration, miniaturization, and lower power consumption. Laterally driven electrostatic micromechanical resonators with high quality factors and frequencies beyond 1GHz have been previously demonstrated. One of the major challenges in the integration of electrostatic MEMS resonators with integrated circuits has been their high motional resistance. Internal electrostatic transduction is introduced as a solution to achieve micromechanical resonators in the radio and microwave frequencies, with low motional resistances, and high quality factors in air. A manufacturable double nanogap process introduced in this thesis allows for fabrication of many high aspect-ratio nano-scale dielectric "gaps" within a single resonator using a combination of lithography and dielectric deposition. Quartz is introduced as a desirable substrate for MEMS resonators, allowing for direct two-port measurements at RF and microwave frequencies. Higher-order mode internally transduced ring resonators are designed, fabricated, and tested in this work. A fifth order dielectrically transduced ring resonator at 1.95GHz is measured on a quartz substrate using direct two-port transmission measurement. The proper placement of dielectric within the resonating structure allowed for a Q of greater than 9000 in air. The concept of serpentine internal electrostatic transduction is introduced, which allows for many capacitances to be transduced in parallel, resulting in a lower motional resistance. The 41st radial bulk mode of a two-port serpentine ring resonator was demonstrated at 2.74 GHz, with a quality factor of 7000 in air. This resonator has a high f x Q product of 1.93x1013, with a low motional resistance of less than 500W. This is the highest f x Q product demonstrated for a polysilicon MEMS resonator in air. This resonator also exhibited the lowest motional resistance demonstrated for an electrostatic polysilicon MEMS resonator in the GHz frequency range. These results demonstrate that internal electrostatic transduction is suitable for the efficient, selective excitation of higher-order lateral bulk modes in resonators. The concept of parallel internal electrostatic transduction is introduced, where a Lamé-mode resonator with integrated electrodes was designed, fabricated, and tested successfully. The integrated electrodes were placed within the resonating plate to efficiently couple to the Lamé mode of resonance, which allows for a fully differential drive/sense scheme. This measurement method allows for lower ohmic losses and helps to suppress the feedthrough significantly. This resonator demonstrated a high quality factor of> 12000 in air at 128.15MHz. Such a high quality factor makes this resonator attractive for different applications. These results validate internal electrostatic transduction of bulk-mode resonators as a viable method for efficient transduction of MEMS resonators in RF and microwave regime. The resonators in this thesis demonstrate the capacity of internal electrostatic transduction to achieve high quality factor, high frequency microresonators with low motional resistance that can be integrated with CMOS technology to achieve fully integrated communication systems.

Development of UHF Micromechanical Resonators and Arrays Based on Silicon-on-insulator (SOI) Technology

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Book Rating : 4.:/5 (68 download)

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Book Synopsis Development of UHF Micromechanical Resonators and Arrays Based on Silicon-on-insulator (SOI) Technology by : Mingke Xiong

Download or read book Development of UHF Micromechanical Resonators and Arrays Based on Silicon-on-insulator (SOI) Technology written by Mingke Xiong and published by . This book was released on 2010 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: ABSTRACT: A novel micromachining technology on SOI substrates is presented that is capable of producing on-chip high-Q resonators and resonator arrays equipped with high aspect-ratio (30:1) microstructures and nano-gap capacitive transducers filled with high-k dielectrics. The newly developed IC-compatible MEMS microfabrication process consists of merely three standard photolithography steps, which is much simpler than the other SOI-based resonator device technologies. In order to achieve the optimum performance and yield of the resonators and resonator arrays, this SOI-based fabrication process has been carefully designed and investigated step by step. For capacitively-transduced extensional mode (e.g., radial-contour and wine-glass mode) resonators, formation of nano-scale capacitive gaps and large resonator-to-electrode overlap area is essential for reducing the motional resistance Rx and DC bias voltage by strengthening the capacitive transduction. Atomic Layer Deposition (ALD) technology with superb conformability and uniformity as well as outstanding thickness controllability is used to deposit the ultra-thin layer (~10 nm) of high-k dielectric material that acts as the solid capacitive gaps, which allows the mass production of on-chip capacitively-transduced resonators and resonator arrays with greatly enhanced electromechancial coupling coefficient, and thus lower motional resistance and DC bias voltage. Using this technique, high-Q micromechanical resonators and resonator arrays on SOI substrates operating at ultra-high frequencies (UHF) have been developed. The ultimate goal of this project is to implement on-chip narrow-band micromechanical filters with unprecedented frequency selectivity and ultra-low insertion loss. By fine-tuning the nonlinear characteristics of the capacitive transducers enabled by the new SOI technology, novel on-chip mechanical signal processors for frequency manipulation, such as mixer and multiplier, will be investigated.