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Fabrication And Microstructural Characterization Of Superconductive Yba2cu3o7 X Thin Films Grown By Dc Reactive Magnetron Sputtering
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Book Synopsis Fabrication and Microstructural Characterization of Superconductive YBa2Cu3O7-x Thin Films Grown by Dc Reactive Magnetron Sputtering by : Torbjörn I. Selinder
Download or read book Fabrication and Microstructural Characterization of Superconductive YBa2Cu3O7-x Thin Films Grown by Dc Reactive Magnetron Sputtering written by Torbjörn I. Selinder and published by . This book was released on 1992 with total page 221 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Fabrisation and Microstructural Characterization of Superconductive YBa2Cu3O7-x Thin Films Grown by Dc Reactive Magnetron Sputtering by :
Download or read book Fabrisation and Microstructural Characterization of Superconductive YBa2Cu3O7-x Thin Films Grown by Dc Reactive Magnetron Sputtering written by and published by . This book was released on 1992 with total page 221 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Physics Briefs written by and published by . This book was released on 1994 with total page 1118 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Engineered Materials Abstracts written by and published by . This book was released on 1993-04 with total page 850 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Electrical & Electronics Abstracts by :
Download or read book Electrical & Electronics Abstracts written by and published by . This book was released on 1997 with total page 2304 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Fabrication and Characterization of Epitaxial Yba2cu3oy Thin Films on Double-Buffered Silicon Substrates by : Ho-Yi Eric Wong
Download or read book Fabrication and Characterization of Epitaxial Yba2cu3oy Thin Films on Double-Buffered Silicon Substrates written by Ho-Yi Eric Wong and published by . This book was released on 2017-01-27 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: This dissertation, "Fabrication and Characterization of Epitaxial YBa2Cu3Oy Thin Films on Double-buffered Silicon Substrates" by Ho-yi, Eric, Wong, 黃灝頤, was obtained from The University of Hong Kong (Pokfulam, Hong Kong) and is being sold pursuant to Creative Commons: Attribution 3.0 Hong Kong License. The content of this dissertation has not been altered in any way. We have altered the formatting in order to facilitate the ease of printing and reading of the dissertation. All rights not granted by the above license are retained by the author. Abstract: Abstract of thesis entitled FABRICATION AND CHARACTERIZATION OF EPITAXIAL YBa Cu O 2 3 y THIN FILMS ON DOUBLE-BUFFERED SILICON SUBSTRATES submitted by WONG HO YI ERIC for the degree of Master of Philosophy at The University of Hong Kong in August 2003 The discovery of perovskite copper oxide YBa Cu O (YBCO) has aroused a 2 3 y constantly increasing interest in this material due to the potential applications in microelectronics devices, such as microwave elements, multilayer junctions, etc. Suitable substrates with a low dielectric constant, good high frequency properties, large size and low cost are necessary. Silicon substrates are widely used and well developed in the semiconductor industry and microwave device applications. Therefore, successful fabrication of high T YBCO films on silicon is of interest for various applications of hybrid superconductor-semiconductor devices and interconnected circuits. In such applications, the epitaxial growth of YBCO on silicon is extremely important. This thesis presents a systematic investigation of the fabrication and characterization of epitaxial YBCO thin films on silicon substrates with a double buffer of Eu CuO (ECO)/YSZ(Yttria-Stabilized Zirconia). Silicon (001) substrates 2 4 were prepared using a chemical etch by dilute HF acid prior to thin film deposition. The YBCO thin films were grown via an entirely in situ process using an on-axis rf magnetron sputtering method with optimized deposition parameters including the deposition temperature, operating pressure and partial oxygen pressure. The crystallinity, surface morphology, electrical properties, and interface of the obtained YBCO/ECO/YSZ thin films were studied by x-ray diffraction, surface profiler, atomic force microscope, optical microscope, standard dc four-probe measurements and small angle x-ray reflection. The X-ray diffraction patterns showed that all the thin films were highly c-axis oriented. A full width of 0.69 at half maximum of the YBCO(005) peak was obtained. This was smaller than reported in previous studies of YBCO thin films on double buffered silicon or nickel substrates. The atomic force microscopy image showed that the ECO buffer surface was flat and smooth. The average roughness over a wide scanning region of 2000m was less than 25nm. The optical microscope images showed that the surface morphology of the grown YBCO thin films was significantly improved by the ECO buffer layer since ECO had a very stable 214-T' crystal structure and very small lattice mismatch with YBCO. The YBCO/ECO/YSZ multilayers were further characterized by small angle x-ray reflection. The surface roughness of the YBCO layers decreased when an ECO buffer was added. No intermediate layer was found at the YBCO/ECO and ECO/YSZ interfaces. The results suggest that ECO is chemically compatible with YBCO and YSZ. The superconductivity of YBCO films was significantly improved by the ECO/YSZ double buffer. This is indicated by the fact that YBCO thin films on silicon substrates with an ECO/YSZ double buffer showed a higher T than that grown on YSZ/Si without the ECO layer. The advantages of using ECO/YSZ double buffer layers in deposition of YBCO on silicon were clearly demonstrated. It would provide a good basis for the potential applications of YBCO on other semiconductors, metallic or me
Book Synopsis Microstructural Characterization and Hardening Behavior of Reactive Magnetron Sputtered TiN/Si3N4 Multilayer Thin Films by : Hans Söderberg
Download or read book Microstructural Characterization and Hardening Behavior of Reactive Magnetron Sputtered TiN/Si3N4 Multilayer Thin Films written by Hans Söderberg and published by . This book was released on 2004 with total page 64 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book INIS Atomindex written by and published by . This book was released on 1988 with total page 988 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Comparative Characterization of Superconducting Thin Films Fabricated by Different Techniques by : Padma Prasuna S. Vemulakonda
Download or read book Comparative Characterization of Superconducting Thin Films Fabricated by Different Techniques written by Padma Prasuna S. Vemulakonda and published by . This book was released on 2007 with total page 84 pages. Available in PDF, EPUB and Kindle. Book excerpt: The goal of this thesis is to compare the chemical and compositional profiles, grain structure and critical current densities of superconducting Yttrium Barium Copper Oxide(Y1Ba2Cu3O7-x or YBCO) layers grown by different competing techniques on a variety of substrates and buffer layers. The idea is to check if there can be variation of cationic ratios, impurities, possible diffusion of substrate/buffer layer atoms into the YBCO for different processing methods and microstructures. Pulsed Laser Deposition (PLD), Metal Organic Deposition (MOD) and Metal Organic Chemical Vapor Deposition (MOCVD) films on Ion Beam Assisted Deposited (IBAD)-textured buffer layers and, Rolling Assisted Biaxial textured substrate (RABiTS) combinations have been compared. X-ray Photoelectron Spectroscopy (XPS) has been used in conjunction with ion beam sputtering as well as gentle chemical etching to obtain composition and chemistry information at different depths into the film. Correlation with Secondary Ion Mass Spectroscopy (SIMS) has been obtained as needed. Top view as well as cross section Scanning Electron Microscope (SEM) was performed for microstructure analysis. Using the gentle chemical etching method, depth profiling of composition and microstructure of the films has been achieved. It is seen that variations in microstructure occur along the depth of the superconducting layer even when the composition is uniform. The density and the micro-structural uniformity vary significantly from one deposition technique to other. The durability and stability of these films, microstructure, depth profiling have been compared and will be presented. This thesis provides important information on variations of the YBCO films from one deposition technique to another.
Book Synopsis Reactive Direct Current Magnetron Sputtering of Ultrathin Superconducting Niobium Nitride Films by : Andrew Edward Dane
Download or read book Reactive Direct Current Magnetron Sputtering of Ultrathin Superconducting Niobium Nitride Films written by Andrew Edward Dane and published by . This book was released on 2015 with total page 101 pages. Available in PDF, EPUB and Kindle. Book excerpt: DC reactive magnetron sputtering was used to deposit few-nanometer-thick films of niobium nitride for fabrication of superconducting devices. Over 1000 samples were deposited on a variety of substrates, under various chamber conditions. Sheet resistance, thickness and superconducting critical temperature were measured for a large number of samples. Film Tc was improved by changing the way the samples were heated during the deposition, by ex situ rapid thermal processing, and in some cases by the addition of an RF bias to the substrate holder during the sputter deposition. These improvements to the deposition of NbN have enabled the production of superconducting nanowire single photon detectors whose quantum efficiency saturates and was the starting point for work on the superconductor-insulator transition.
Download or read book Chemical Abstracts written by and published by . This book was released on 2002 with total page 2566 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Advanced Strategies in Thin Film Engineering by Magnetron Sputtering by : Alberto Palmero
Download or read book Advanced Strategies in Thin Film Engineering by Magnetron Sputtering written by Alberto Palmero and published by MDPI. This book was released on 2020-12-10 with total page 148 pages. Available in PDF, EPUB and Kindle. Book excerpt: Recent years have witnessed the flourishing of numerous novel strategies based on the magnetron sputtering technique aimed at the advanced engineering of thin films, such as HiPIMS, combined vacuum processes, the implementation of complex precursor gases or the inclusion of particle guns in the reactor, among others. At the forefront of these approaches, investigations focused on nanostructured coatings appear today as one of the priorities in many scientific and technological communities: The science behind them appears in most of the cases as a "terra incognita", fascinating both the fundamentalist, who imagines new concepts, and the experimenter, who is able to create and study new films with as of yet unprecedented performances. These scientific and technological challenges, along with the existence of numerous scientific issues that have yet to be clarified in classical magnetron sputtering depositions (e.g., process control and stability, nanostructuration mechanisms, connection between film morphology and properties or upscaling procedures from the laboratory to industrial scales) have motivated us to edit a specialized volume containing the state-of-the art that put together these innovative fundamental and applied research topics. These include, but are not limited to: • Nanostructure-related properties; • Atomistic processes during film growth; • Process control, process stability, and in situ diagnostics; • Fundamentals and applications of HiPIMS; • Thin film nanostructuration phenomena; • Tribological, anticorrosion, and mechanical properties; • Combined procedures based on the magnetron sputtering technique; • Industrial applications; • Devices.
Download or read book Ceramic Abstracts written by and published by . This book was released on 1994 with total page 972 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Microstructure Characterization of High Tc Superconducting Thin Films and Multilayer Josephson Junctions by : YE. YANG
Download or read book Microstructure Characterization of High Tc Superconducting Thin Films and Multilayer Josephson Junctions written by YE. YANG and published by . This book was released on 2017-01-27 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: This dissertation, "Microstructure Characterization of High Tc Superconducting Thin Films and Multilayer Josephson Junctions" by 楊曄, Ye, Yang, was obtained from The University of Hong Kong (Pokfulam, Hong Kong) and is being sold pursuant to Creative Commons: Attribution 3.0 Hong Kong License. The content of this dissertation has not been altered in any way. We have altered the formatting in order to facilitate the ease of printing and reading of the dissertation. All rights not granted by the above license are retained by the author. DOI: 10.5353/th_b3122018 Subjects: Thin films High temperature superconductors Josephson junctions
Book Synopsis Pulsed DC Reactive Magnetron Sputtering of Aluminum Nitride Thin Films by :
Download or read book Pulsed DC Reactive Magnetron Sputtering of Aluminum Nitride Thin Films written by and published by . This book was released on 2003 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Aluminum nitride thin films have been deposited by pulsed DC reactive magnetron sputtering. The pulsed DC power provides arc-free deposition of insulating films. Two types of pulsed DC (unipolar and asymmetric bipolar) were studied with respect to characteristics and properties of resultant films. The unipolar power supply generates a series of 75 kHz DC pulses modulated with 2.5 kHz frequency. The frequency of asymmetric power supply can be varied from 50 kHz to 250 kHz. The duty cycle, which is a ratio of negative pulse time to total time, can be varied from 60% to 98%. Very fast oscillation and overshoot were observed when the polarity of the target voltage was changed. The control of crystal orientation of deposited film is important since the properties of AlN film is related with the orientation. For example, the acoustic velocity is high along the c-axis. The electromechanical coupling coefficient is large in a-axis direction. The crystal orientation and microstructure of the AlN films were strongly affected by the deposition conditions such as sputtering power, growth temperature, sputtering gas pressure and frequency/duty cycle. The crystal orientation of AlN films was closely related with the energy of sputtered atoms and mobility of adatoms on substrate. The c-axis oriented films were obtained when the target power and growth temperature were high. This provided higher energy of sputtered atoms and mobility of adatoms. The deposited AlN films have a columnar structure. The crystal orientation of the AlN films was changed from (101) to (002) by applying an RF bias was applied to the substrate in unipolar pulsed DC sputtering. The columnar structure disappeared when the RF bias was applied to the substrate. Applying bias was thought to increase mobility of adatoms by ion bombardment. MIM (aluminum-AlN-aluminum or molybdenum) structure was fabricated to measure electric properties of AlN films. Dielectric constants of 8.5 to 11.5 were obtained at 100 kHz. Th.
Book Synopsis Microstructure and Phase Development in Yttrium Barium(2) Copper(3) Oxygen(7) Superconducting Films Prepared from Carboxylate Precursors by : Peir-Yung Chu
Download or read book Microstructure and Phase Development in Yttrium Barium(2) Copper(3) Oxygen(7) Superconducting Films Prepared from Carboxylate Precursors written by Peir-Yung Chu and published by . This book was released on 1992 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Superconducting $rm YBasb2Cusb3Osb{7-x}$ thin films, 0.1-1.5 $mu$m thick, were prepared from carboxylate precursors by reactive liquid phase sintering. Processing effects on phase development, microstructure evolution, and important film properties, such as transition temperature, critical current density, and weak-link behavior, were investigated. The precursor trimethylacetate salts were dissolved in propionic acid/amylamine mixed solvent system, resulting in stable solutions suitable for coatings. Thin films were deposited onto LaAlO$sb3$ single crystal substrates by spin-coating and were fired at 740-950$spcirc$C under O$sb2$, N$sb2$, or mixed $rm Nsb2/Osb2$ atmosphere. The phase formation map for BaO-CuO binary compound was constructed for the films processed in flowing N$sb2$ atmosphere, showing liquid phase formation at 640$spcirc$C. Molecular level mixing in the precursor solution and processing under flowing N$sb2$ were the two contributing factors for this low temperature liquid phase formation. The use of N$sb2$ atmosphere also facilitated the decomposition of BaCO$sb3$ and the formation of the 123 phase. A two-step firing program was developed to optimize the processing based on the reactive liquid phase sintering. The films were first fired at 800$spcirc$C/40 min in N$sb2$ for crystallization and grain growth, and then at 920$spcirc$C/10 min in a low P$sb{{rm O}sb2}$ atmosphere (P$sb{{rm N}sb2}$/P$sb{{rm O}sb2}$ = 100) for densification and orientation by capillary forces. Based on the experimental results and observations, reaction mechanisms and densification models were developed for the reactive liquid phase sintering process. The films prepared by reactive liquid phase sintering showed essential epitaxial growth and excellent preferred orientation with T$sb{rm c(zero)}$ = 87.8 K and $rm Jsb{c} > 10sp5$ A/cm$sp2$ at 77 K. Due to capillary action, any residual liquid phase or second phase materials were extruded from grains and located on the film surface, resulting in clean grain boundaries. SIMS analysis indicated uniform cation concentration profile throughout the films and insignificant film/substrate interdiffusions. Major findings in this work include: (1) successful development in the solution chemistry for thin film fabrication based on trimethylacetate precursors, (2) construction of phase formation map, showing low temperature liquid phase formation in N$sb2$ during the processing of the 123 films, and (3) development of a new operative reactive liquid phase sintering mechanism to prepare high quality 123 thin films in controlled atmosphere.
Book Synopsis The Fabrication and the Characterization of Hg-based Cuprate Superconducting Thin Films by : Sang-Ho Yun
Download or read book The Fabrication and the Characterization of Hg-based Cuprate Superconducting Thin Films written by Sang-Ho Yun and published by . This book was released on 1996 with total page 178 pages. Available in PDF, EPUB and Kindle. Book excerpt:
