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Ellipsometry For Industrial Applications
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Book Synopsis Ellipsometry for Industrial Applications by : Karl Riedling
Download or read book Ellipsometry for Industrial Applications written by Karl Riedling and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 109 pages. Available in PDF, EPUB and Kindle. Book excerpt: During the past years, elliposometry, a non-destructive and contact-less optical surface analysis technique, has gained increased importance in industrial areas, such as the technology of electronic devices, when simple instruments, many of them computer-controlled and automated, became available. The potential users of such instruments are, however, frequently aware neither of the inherent possibilities of this technique, nor of its accuracy limitations. This book endeavors to point out some of the less obvious features and possibilities of ellipsometry, particularly of dynamic "in situ" measurements, and reviews its applications in research and manufacturing of semiconductor and thin film devices. A comprehensive discussion of various error effects typical particularly for simple ellipsometers and of their impact on measured sample parameters is provided. Error correction or (numerical) calibration procedures are given wherever possible, and design and operation guidelines for high-speed instruments suitable for dynamic "in situ" measurements are suggested.
Book Synopsis Spectroscopic Ellipsometry by : Hiroyuki Fujiwara
Download or read book Spectroscopic Ellipsometry written by Hiroyuki Fujiwara and published by John Wiley & Sons. This book was released on 2007-09-27 with total page 388 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.
Book Synopsis Spectroscopic Ellipsometry for Photovoltaics by : Hiroyuki Fujiwara
Download or read book Spectroscopic Ellipsometry for Photovoltaics written by Hiroyuki Fujiwara and published by Springer. This book was released on 2019-01-10 with total page 628 pages. Available in PDF, EPUB and Kindle. Book excerpt: Spectroscopic ellipsometry has been applied to a wide variety of material and device characterizations in solar cell research fields. In particular, device performance analyses using exact optical constants of component layers and direct analyses of complex solar cell structures are unique features of advanced ellipsometry methods. This second volume of Spectroscopic Ellipsometry for Photovoltaics presents various applications of the ellipsometry technique for device analyses, including optical/recombination loss analyses, real-time control and on-line monitoring of solar cell structures, and large-area structural mapping. Furthermore, this book describes the optical constants of 148 solar cell component layers, covering a broad range of materials from semiconductor light absorbers (inorganic, organic and hybrid perovskite semiconductors) to transparent conductive oxides and metals. The tabulated and completely parameterized optical constants described in this book are the most current resource that is vital for device simulations and solar cell structural analyses.
Book Synopsis Ellipsometry of Functional Organic Surfaces and Films by : Karsten Hinrichs
Download or read book Ellipsometry of Functional Organic Surfaces and Films written by Karsten Hinrichs and published by Springer. This book was released on 2018-05-06 with total page 549 pages. Available in PDF, EPUB and Kindle. Book excerpt: This new edition provides a state-of-the-art survey of ellipsometric methods used to study organic films and surfaces, from laboratory to synchrotron applications, with a special focus on in-situ use in processing environments and at solid-liquid interfaces. Thanks to the development of functional organic, meta- and hybrid materials for new optical, electronic, sensing and biotechnological devices, the ellipsometric analysis of optical and material properties has made tremendous strides over the past few years. The second edition has been updated to reflect the latest advances in ellipsometric methods. The new content focuses on the study of anisotropic materials, conjugated polymers, polarons, self-assembled monolayers, industrial membranes, adsorption of proteins, enzymes and RGD-peptides, as well as the correlation of ellipsometric spectra to structure and molecular interactions.
Book Synopsis Spectroscopic Ellipsometry for Photovoltaics by : Hiroyuki Fujiwara
Download or read book Spectroscopic Ellipsometry for Photovoltaics written by Hiroyuki Fujiwara and published by Springer. This book was released on 2019-01-10 with total page 602 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a basic understanding of spectroscopic ellipsometry, with a focus on characterization methods of a broad range of solar cell materials/devices, from traditional solar cell materials (Si, CuInGaSe2, and CdTe) to more advanced emerging materials (Cu2ZnSnSe4, organics, and hybrid perovskites), fulfilling a critical need in the photovoltaic community. The book describes optical constants of a variety of semiconductor light absorbers, transparent conductive oxides and metals that are vital for the interpretation of solar cell characteristics and device simulations. It is divided into four parts: fundamental principles of ellipsometry; characterization of solar cell materials/structures; ellipsometry applications including optical simulations of solar cell devices and online monitoring of film processing; and the optical constants of solar cell component layers.
Book Synopsis Spectroscopic Ellipsometry by : Harland G. Tompkins
Download or read book Spectroscopic Ellipsometry written by Harland G. Tompkins and published by Momentum Press. This book was released on 2015-12-16 with total page 138 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ellipsometry is an experimental technique for determining the thickness and optical properties of thin films. It is ideally suited for films ranging in thickness from sub-nanometer to several microns. Spectroscopic measurements have greatly expanded the capabilities of this technique and introduced its use into all areas where thin films are found: semiconductor devices, flat panel and mobile displays, optical coating stacks, biological and medical coatings, protective layers, and more. While several scholarly books exist on the topic, this book provides a good introduction to the basic theory of the technique and its common applications. The target audience is not the ellipsometry scholar, but process engineers and students of materials science who are experts in their own fields and wish to use ellipsometry to measure thin film properties without becoming an expert in ellipsometry itself.
Book Synopsis Introduction to Spectroscopic Ellipsometry of Thin Film Materials by : Andrew T. S. Wee
Download or read book Introduction to Spectroscopic Ellipsometry of Thin Film Materials written by Andrew T. S. Wee and published by John Wiley & Sons. This book was released on 2022-03-08 with total page 213 pages. Available in PDF, EPUB and Kindle. Book excerpt: A one-of-a-kind text offering an introduction to the use of spectroscopic ellipsometry for novel material characterization In Introduction to Spectroscopic Ellipsometry of Thin Film Materials: Instrumentation, Data Analysis and Applications, a team of eminent researchers delivers an incisive exploration of how the traditional experimental technique of spectroscopic ellipsometry is used to characterize the intrinsic properties of novel materials. The book focuses on the scientifically and technologically important two-dimensional transition metal dichalcogenides (2D-TMDs), magnetic oxides like manganite materials, and unconventional superconductors, including copper oxide systems. The distinguished authors discuss the characterization of properties, like electronic structures, interfacial properties, and the consequent quasiparticle dynamics in novel quantum materials. Along with illustrative and specific case studies on how spectroscopic ellipsometry is used to study the optical and quasiparticle properties of novel systems, the book includes: Thorough introductions to the basic principles of spectroscopic ellipsometry and strongly correlated systems, including copper oxides and manganites Comprehensive explorations of two-dimensional transition metal dichalcogenides Practical discussions of single layer graphene systems and nickelate systems In-depth examinations of potential future developments and applications of spectroscopic ellipsometry Perfect for master’s- and PhD-level students in physics and chemistry, Introduction to Spectroscopic Ellipsometry of Thin Film Materials will also earn a place in the libraries of those studying materials science seeking a one-stop reference for the applications of spectroscopic ellipsometry to novel developed materials.
Book Synopsis A User's Guide to Ellipsometry by : Harland G. Tompkins
Download or read book A User's Guide to Ellipsometry written by Harland G. Tompkins and published by Courier Corporation. This book was released on 2013-03-21 with total page 496 pages. Available in PDF, EPUB and Kindle. Book excerpt: This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. Its 14 case studies illustrate concepts and reinforce applications of ellipsometry — particularly in relation to the semiconductor industry and to studies involving corrosion and oxide growth. A User's Guide to Ellipsometry will enable readers to move beyond limited turn-key applications of ellipsometers. In addition to its comprehensive discussions of the measurement of film thickness and optical constants in film, it also considers the trajectories of the ellipsometric parameters Del and Psi and how changes in materials affect parameters. This volume also addresses the use of polysilicon, a material commonly employed in the microelectronics industry, and the effects of substrate roughness. Three appendices provide helpful references.
Book Synopsis Handbook of Ellipsometry by : Harland Tompkins
Download or read book Handbook of Ellipsometry written by Harland Tompkins and published by William Andrew. This book was released on 2005-01-06 with total page 887 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale. With the acceleration of new instruments and applications now occurring, this book provides an essential foundation for the current science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, biotechnology, and pharmaceuticals. Divided into four parts, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas. Experts in the field contributed to its twelve chapters, covering various aspects of ellipsometry.
Book Synopsis Ellipsometry at the Nanoscale by : Maria Losurdo
Download or read book Ellipsometry at the Nanoscale written by Maria Losurdo and published by Springer Science & Business Media. This book was released on 2013-03-12 with total page 740 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents and introduces ellipsometry in nanoscience and nanotechnology making a bridge between the classical and nanoscale optical behaviour of materials. It delineates the role of the non-destructive and non-invasive optical diagnostics of ellipsometry in improving science and technology of nanomaterials and related processes by illustrating its exploitation, ranging from fundamental studies of the physics and chemistry of nanostructures to the ultimate goal of turnkey manufacturing control. This book is written for a broad readership: materials scientists, researchers, engineers, as well as students and nanotechnology operators who want to deepen their knowledge about both basics and applications of ellipsometry to nanoscale phenomena. It starts as a general introduction for people curious to enter the fields of ellipsometry and polarimetry applied to nanomaterials and progresses to articles by experts on specific fields that span from plasmonics, optics, to semiconductors and flexible electronics. The core belief reflected in this book is that ellipsometry applied at the nanoscale offers new ways of addressing many current needs. The book also explores forward-looking potential applications.
Book Synopsis Spectroscopic Ellipsometry - Application on the Classification of Diamond-Like Carbon Films by : XiaoLong Zhou
Download or read book Spectroscopic Ellipsometry - Application on the Classification of Diamond-Like Carbon Films written by XiaoLong Zhou and published by . This book was released on 2017 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Diamond-like carbon (DLC) films have been spreading from their theoretical basis to worldwide industrial applications because of their unique properties. Since their properties depend strongly on the conditions of synthesis, the effective classification of DLC films becomes quite necessary. From the ternary phase diagram to the Japan New Diamond Forum standard, the classification attempts are also accompanied by the continuous development of their applications. Generally, the hydrogen content and sp3/(sp2 + sp3) ratio are the primary parameters for their classification. However, researchers are afraid that currently sp3/(sp2 + sp3) ratio estimated included not only network sp3 but also sp3 hybrid carbons in the hydrogen-terminated cluster. Simultaneously, the above classification methods need to use the large equipment, such as the synchronous radiation source. Therefore, to realize more straightforward to classify DLC films efficiently, the optical constants (refractive index (n) and extinction coefficient (k)) have been proposed in 2013 to be effective method to classify the DLC films, for which a lot of considerable discussion in the past ISO/TC-107 meetings has been made. The purpose of this chapter is to introduce the latest developments of optical constants on the classification of DLC films and explore their relationship with the current standard.
Book Synopsis Effect of Disorder and Defects in Ion-Implanted Semiconductors: Optical and Photothermal Characterization by :
Download or read book Effect of Disorder and Defects in Ion-Implanted Semiconductors: Optical and Photothermal Characterization written by and published by Academic Press. This book was released on 1997-06-12 with total page 335 pages. Available in PDF, EPUB and Kindle. Book excerpt: Defects in ion-implanted semiconductors are important and will likely gain increased importance as annealing temperatures are reduced with successive IC generations. Novel implant approaches, such as MdV implantation, create new types of defects whose origin and annealing characteristics will need to be addressed. Publications in this field mainly focus on the effects of ion implantation on the material and the modification in the implanted layer after high temperature annealing. The editors of this volume and Volume 45 focus on the physics of the annealing kinetics of the damaged layer. An overview of characterization tehniques and a critical comparison of the information on annealing kinetics is also presented. Provides basic knowledge of ion implantation-induced defects Focuses on physical mechanisms of defect annealing Utilizes electrical, physical, and optical characterization tools for processed semiconductors Provides the basis for understanding the problems caused by the defects generated by implantation and the means for their characterization and elimination
Book Synopsis Membrane Characterization by : José Ignacio Calvo Díez
Download or read book Membrane Characterization written by José Ignacio Calvo Díez and published by Walter de Gruyter GmbH & Co KG. This book was released on 2024-10-21 with total page 347 pages. Available in PDF, EPUB and Kindle. Book excerpt: Membrane technology has become an essential tool in many industrial processes in which the separation or fractionation of various species is necessary to obtain or recover high value-added products. In these processes, the synthetic membranes usually play a filter role, being characterized by the size of the pores present in it, which delimit the size of the molecules to be separated. It is therefore necessary to have a precise knowledge of the characteristic size of said pores. In this book, the main techniques that can be used to determine the mean pore size and the pore size distribution of a synthetic membrane are analyzed and discussed, from the point of view of their theoretical basis, with special attention to equipment that should be used for each technique, as well as reviewing their advantages and disadvantages. Through this text, the researcher or responsible of the quality-control at membrane manufacturing companies will be able to know decide properly which of the porosimetric techniques is more adequate for the knowledge that needs to be obtained from their filters.
Book Synopsis Encyclopedia of Spectroscopy and Spectrometry by :
Download or read book Encyclopedia of Spectroscopy and Spectrometry written by and published by Academic Press. This book was released on 2016-09-22 with total page 3716 pages. Available in PDF, EPUB and Kindle. Book excerpt: This third edition of the Encyclopedia of Spectroscopy and Spectrometry, Three Volume Set provides authoritative and comprehensive coverage of all aspects of spectroscopy and closely related subjects that use the same fundamental principles, including mass spectrometry, imaging techniques and applications. It includes the history, theoretical background, details of instrumentation and technology, and current applications of the key areas of spectroscopy. The new edition will include over 80 new articles across the field. These will complement those from the previous edition, which have been brought up-to-date to reflect the latest trends in the field. Coverage in the third edition includes: Atomic spectroscopy Electronic spectroscopy Fundamentals in spectroscopy High-Energy spectroscopy Magnetic resonance Mass spectrometry Spatially-resolved spectroscopic analysis Vibrational, rotational and Raman spectroscopies The new edition is aimed at professional scientists seeking to familiarize themselves with particular topics quickly and easily. This major reference work continues to be clear and accessible and focus on the fundamental principles, techniques and applications of spectroscopy and spectrometry. Incorporates more than 150 color figures, 5,000 references, and 300 articles for a thorough examination of the field Highlights new research and promotes innovation in applied areas ranging from food science and forensics to biomedicine and health Presents a one-stop resource for quick access to answers and an in-depth examination of topics in the spectroscopy and spectrometry arenas
Book Synopsis Handbook of Optical Constants of Solids, Five-Volume Set by : Edward D. Palik
Download or read book Handbook of Optical Constants of Solids, Five-Volume Set written by Edward D. Palik and published by Elsevier. This book was released on 1997-12-10 with total page 3437 pages. Available in PDF, EPUB and Kindle. Book excerpt: This set of five volumes, four volumes edited by Edward D. Palik and a volume by Gorachand Ghosh, is a unique resource for any science and technology library. It provides materials researchers and optical device designers with reference facts in a context not available anywhere else. The singular functionality of the set derives from the unique format for the three core volumes that comprise the Handbook of Optical Constants of Solids. The Handbook satisfies several essential needs: first, it affords the most comprehensive database of the refractive index and extinction (or loss) coefficient of technically important and scientifically interesting dielectrics. This data has been critically selected and evaluated by authorities on each material. Second, the dielectric constant database is supplemented by tutorial chapters covering the basics of dielectric theory and reviews of experimental techniques for each wavelength region and material characteristic. As an additional resource, two of the tutorial chapters summarize the relevant characteristics of each of the materials in the database.The data in the core volumes have been collected and analyzed over a period of twelve years, with the most recent completed in 1997. The volumes systematically define the dielectric properties of 143 of the most engaging materials, including metals, semiconductors, and insulators. Together, the three Palik books contain nearly 3,000 pages, with about 2/3 devoted to the dielectric constant data. The tutorial chapters in the remaining 1/3 of the pages contain a wealth of information, including some dielectric data. Hence, the separate volume, Index to Handbook of Optical Constants of Solids, which is included as part of the set, substantially enhances the utility of the Handbook and in essence, joins all the Palik volumes into one unit. It isthen of great importance to users of the set. A final volume rounds out the set. The Handbook of Thermo-Optic Coefficients of Optical Materials with Applications collects refractive index measurements and their temperature dependence for a large number of crystals and glasses. Mathematical models represent these data, and in turn are used in the design of nonlinear optical devices. * Unique source of extremely useful optical data for a very broad community of scientists, researchers, and practitioners* Will be of great practical applicability to both industry and research* Presents optical constants for a broadest spectral range, for a very large number of materials: Paliks three volumes include 143 materials including 43 elements; Ghoshs volume includes some 70 technologically interesting crystals and many commercial glasses* Includes a special index volume that enables the user to search for the information in the three Palik volumes easily and quickly* Critique chapters in the Palik volumes discuss the data and give reference to most of the literature available for each material* Presents various techniques for measuring the optical constants and mathematical models for analytical calculations of some data
Book Synopsis Harnessing Light by : National Research Council
Download or read book Harnessing Light written by National Research Council and published by National Academies Press. This book was released on 1998-09-25 with total page 358 pages. Available in PDF, EPUB and Kindle. Book excerpt: Optical science and engineering affect almost every aspect of our lives. Millions of miles of optical fiber carry voice and data signals around the world. Lasers are used in surgery of the retina, kidneys, and heart. New high-efficiency light sources promise dramatic reductions in electricity consumption. Night-vision equipment and satellite surveillance are changing how wars are fought. Industry uses optical methods in everything from the production of computer chips to the construction of tunnels. Harnessing Light surveys this multitude of applications, as well as the status of the optics industry and of research and education in optics, and identifies actions that could enhance the field's contributions to society and facilitate its continued technical development.
Book Synopsis A Practical Guide to Surface Metrology by : Michael Quinten
Download or read book A Practical Guide to Surface Metrology written by Michael Quinten and published by Springer Nature. This book was released on 2020-01-01 with total page 247 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book offers a genuinely practical introduction to the most commonly encountered optical and non-optical systems used for the metrology and characterization of surfaces, including guidance on best practice, calibration, advantages and disadvantages, and interpretation of results. It enables the user to select the best approach in a given context. Most methods in surface metrology are based upon the interaction of light or electromagnetic radiation (UV, NIR, IR), and different optical effects are utilized to get a certain optical response from the surface; some of them record only the intensity reflected or scattered by the surface, others use interference of EM waves to obtain a characteristic response from the surface. The book covers techniques ranging from microscopy (including confocal, SNOM and digital holographic microscopy) through interferometry (including white light, multi-wavelength, grazing incidence and shearing) to spectral reflectometry and ellipsometry. The non-optical methods comprise tactile methods (stylus tip, AFM) as well as capacitive and inductive methods (capacitive sensors, eddy current sensors). The book provides: Overview of the working principles Description of advantages and disadvantages Currently achievable numbers for resolutions, repeatability, and reproducibility Examples of real-world applications A final chapter discusses examples where the combination of different surface metrology techniques in a multi-sensor system can reasonably contribute to a better understanding of surface properties as well as a faster characterization of surfaces in industrial applications. The book is aimed at scientists and engineers who use such methods for the measurement and characterization of surfaces across a wide range of fields and industries, including electronics, energy, automotive and medical engineering.
