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Author : Linlin Wang
Publisher :
ISBN 13 :
Total Pages : 552 pages
Book Rating : 4.E/5 ( download)
Download or read book Dry Etching of Glass and Its Use to Study Near Surface Mass Transport written by Linlin Wang and published by . This book was released on 2005 with total page 552 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Kazuo Nojiri
Publisher : Springer
ISBN 13 : 3319102958
Total Pages : 126 pages
Book Rating : 4.3/5 (191 download)
Download or read book Dry Etching Technology for Semiconductors written by Kazuo Nojiri and published by Springer. This book was released on 2014-10-25 with total page 126 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniaturization and integration of semiconductor integrated circuits. The author describes the device manufacturing flow, and explains in which part of the flow dry etching is actually used. The content is designed as a practical guide for engineers working at chip makers, equipment suppliers and materials suppliers, and university students studying plasma, focusing on the topics they need most, such as detailed etching processes for each material (Si, SiO2, Metal etc) used in semiconductor devices, etching equipment used in manufacturing fabs, explanation of why a particular plasma source and gas chemistry are used for the etching of each material, and how to develop etching processes. The latest, key technologies are also described, such as 3D IC Etching, Dual Damascene Etching, Low-k Etching, Hi-k/Metal Gate Etching, FinFET Etching, Double Patterning etc.
Author : Robert A. Capp
Publisher : Courier Corporation
ISBN 13 : 0486245780
Total Pages : 66 pages
Book Rating : 4.4/5 (862 download)
Download or read book Glass Etching written by Robert A. Capp and published by Courier Corporation. This book was released on 1984-01-01 with total page 66 pages. Available in PDF, EPUB and Kindle. Book excerpt: Easy-to-use guide with complete instructions for etching on any glass — panes, panels, bottles, stained glass, more — using acid cream and sandblasting techniques. Includes 46 full-size patterns of birds, butterflies, animals, florals, geometrics, and Art-Nouveau-Style abstracts. Instructions. 46 patterns. 27 illustrations.
Author : R.A. Powell
Publisher : Elsevier
ISBN 13 : 0080983588
Total Pages : 312 pages
Book Rating : 4.0/5 (89 download)
Download or read book Dry Etching for Microelectronics written by R.A. Powell and published by Elsevier. This book was released on 2012-12-02 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume collects together for the first time a series of in-depth, critical reviews of important topics in dry etching, such as dry processing of III-V compound semiconductors, dry etching of refractory metal silicides and dry etching aluminium and aluminium alloys. This topical format provides the reader with more specialised information and references than found in a general review article. In addition, it presents a broad perspective which would otherwise have to be gained by reading a large number of individual research papers. An additional important and unique feature of this book is the inclusion of an extensive literature review of dry processing, compiled by search of computerized data bases. A subject index allows ready access to the key points raised in each of the chapters.
Author : Dagmar Hülsenberg
Publisher : Springer Science & Business Media
ISBN 13 : 3540498885
Total Pages : 339 pages
Book Rating : 4.5/5 (44 download)
Download or read book Microstructuring of Glasses written by Dagmar Hülsenberg and published by Springer Science & Business Media. This book was released on 2008-06-24 with total page 339 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the first book that explains how to structure glass for micro- and nanophotonic applications. It deals with various glass compositions and their properties, and the interactions between glass and the electromagnetic waves used to modify it. The book also explores methods for influencing the geometrical microstructure of glass as well as methods to produce actual microdevices. It also details methods for influencing the geometrical microstructure of glasses.
Author : Dongqing Li
Publisher : Springer Science & Business Media
ISBN 13 : 0387324682
Total Pages : 2242 pages
Book Rating : 4.3/5 (873 download)
Download or read book Encyclopedia of Microfluidics and Nanofluidics written by Dongqing Li and published by Springer Science & Business Media. This book was released on 2008-08-06 with total page 2242 pages. Available in PDF, EPUB and Kindle. Book excerpt: Covering all aspects of transport phenomena on the nano- and micro-scale, this encyclopedia features over 750 entries in three alphabetically-arranged volumes including the most up-to-date research, insights, and applied techniques across all areas. Coverage includes electrical double-layers, optofluidics, DNC lab-on-a-chip, nanosensors, and more.
Author : Michael Köhler
Publisher : John Wiley & Sons
ISBN 13 : 352761379X
Total Pages : 384 pages
Book Rating : 4.5/5 (276 download)
Download or read book Etching in Microsystem Technology written by Michael Köhler and published by John Wiley & Sons. This book was released on 2008-07-11 with total page 384 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microcomponents and microdevices are increasingly finding application in everyday life. The specific functions of all modern microdevices depend strongly on the selection and combination of the materials used in their construction, i.e., the chemical and physical solid-state properties of these materials, and their treatment. The precise patterning of various materials, which is normally performed by lithographic etching processes, is a prerequisite for the fabrication of microdevices. The microtechnical etching of functional patterns is a multidisciplinary area, the basis for the etching processes coming from chemistry, physics, and engineering. The book is divided into two sections: the wet and dry etching processes are presented in the first, general, section, which provides the scientific fundamentals, while a catalog of etching bath composition, etching instructions, and parameters can be found in the second section. This section will enhance the comprehension of the general section and also give an overview of data that are essential in practice.
Author : Raymond Davis
Publisher :
ISBN 13 :
Total Pages : 44 pages
Book Rating : 4.3/5 (243 download)
Download or read book Techniques for Ruling and Etching Precise Scales in Glass and Their Reproduction by Photoetching with a New Light-sensitive Resist written by Raymond Davis and published by . This book was released on 1955 with total page 44 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Sami Franssila
Publisher : John Wiley & Sons
ISBN 13 : 1119991897
Total Pages : 534 pages
Book Rating : 4.1/5 (199 download)
Download or read book Introduction to Microfabrication written by Sami Franssila and published by John Wiley & Sons. This book was released on 2010-10-29 with total page 534 pages. Available in PDF, EPUB and Kindle. Book excerpt: This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer probe tips to meter scale solar cells, and a host of microelectronic, mechanical, optical and fluidic devices in between. Latest developments in wafer engineering, patterning, thin films, surface preparation and bonding are covered. This second edition includes: expanded sections on MEMS and microfluidics related fabrication issues new chapters on polymer and glass microprocessing, as well as serial processing techniques 200 completely new and 200 modified figures more coverage of imprinting techniques, process integration and economics of microfabrication 300 homework exercises including conceptual thinking assignments, order of magnitude estimates, standard calculations, and device design and process analysis problems solutions to homework problems on the complementary website, as well as PDF slides of the figures and tables within the book With clear sections separating basic principles from more advanced material, this is a valuable textbook for senior undergraduate and beginning graduate students wanting to understand the fundamentals of microfabrication. The book also serves as a handy desk reference for practicing electrical engineers, materials scientists, chemists and physicists alike. www.wiley.com/go/Franssila_Micro2e
Author : Bastian E. Rapp
Publisher : Elsevier
ISBN 13 : 0323854893
Total Pages : 298 pages
Book Rating : 4.3/5 (238 download)
Download or read book Additive Manufacturing of Glass written by Bastian E. Rapp and published by Elsevier. This book was released on 2024-09-20 with total page 298 pages. Available in PDF, EPUB and Kindle. Book excerpt: Additive Manufacturing of Glass: From Science to Applications is a joint effort by the global glass 3D printing community, highlighting the current state of the art, its various applications, as well as its game-changing potential for a wide array of industries in the coming decades. The book starts with separate overviews of glass and additive manufacturing, gradually tying the two together to discuss topics such as melt-derived additive manufacturing of glass, sol-gel chemistry, direct ink deposition techniques, etching-based glass structuring, and slurry-based glass 3D printing. The book then concludes with various case studies and applications for 3D-printed glass, highlighting individual companies producing it and product applications such as bioactive glasses and micro-optics. - Outlines various techniques for additive manufacturing of glass - Includes case studies and applications, highlighting real-world use and commercial opportunities - Covers melt-derived, sol-gel chemistry, photochemical, multiphoton-based etching, and various other additive manufacturing techniques for producing glass
Author : Boyd Graham
Publisher : Courier Corporation
ISBN 13 : 0486144151
Total Pages : 132 pages
Book Rating : 4.4/5 (861 download)
Download or read book Engraving Glass written by Boyd Graham and published by Courier Corporation. This book was released on 2014-05-05 with total page 132 pages. Available in PDF, EPUB and Kindle. Book excerpt: Step-by-step instructions for diamond burr engraving. Four complete projects plus expert advice on choosing glass, lighting and arranging finished pieces, much more. 117 illustrations. List of Supply Sources.
Author : Perrin Walker
Publisher : CRC Press
ISBN 13 : 9781439822531
Total Pages : 1434 pages
Book Rating : 4.8/5 (225 download)
Download or read book CRC Handbook of Metal Etchants written by Perrin Walker and published by CRC Press. This book was released on 1990-12-11 with total page 1434 pages. Available in PDF, EPUB and Kindle. Book excerpt: This publication presents cleaning and etching solutions, their applications, and results on inorganic materials. It is a comprehensive collection of etching and cleaning solutions in a single source. Chemical formulas are presented in one of three standard formats - general, electrolytic or ionized gas formats - to insure inclusion of all necessary operational data as shown in references that accompany each numbered formula. The book describes other applications of specific solutions, including their use on other metals or metallic compounds. Physical properties, association of natural and man-made minerals, and materials are shown in relationship to crystal structure, special processing techniques and solid state devices and assemblies fabricated. This publication also presents a number of organic materials which are widely used in handling and general processing...waxes, plastics, and lacquers for example. It is useful to individuals involved in study, development, and processing of metals and metallic compounds. It is invaluable for readers from the college level to industrial R & D and full-scale device fabrication, testing and sales. Scientific disciplines, work areas and individuals with great interest include: chemistry, physics, metallurgy, geology, solid state, ceramic and glass, research libraries, individuals dealing with chemical processing of inorganic materials, societies and schools.
Author : Giancarlo C. Righini
Publisher : MDPI
ISBN 13 : 3038976180
Total Pages : 284 pages
Book Rating : 4.0/5 (389 download)
Download or read book Glassy Materials Based Microdevices written by Giancarlo C. Righini and published by MDPI. This book was released on 2019-02-28 with total page 284 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microtechnology has changed our world since the last century, when silicon microelectronics revolutionized sensor, control and communication areas, with applications extending from domotics to automotive, and from security to biomedicine. The present century, however, is also seeing an accelerating pace of innovation in glassy materials; as an example, glass-ceramics, which successfully combine the properties of an amorphous matrix with those of micro- or nano-crystals, offer a very high flexibility of design to chemists, physicists and engineers, who can conceive and implement advanced microdevices. In a very similar way, the synthesis of glassy polymers in a very wide range of chemical structures offers unprecedented potential of applications. The contemporary availability of microfabrication technologies, such as direct laser writing or 3D printing, which add to the most common processes (deposition, lithography and etching), facilitates the development of novel or advanced microdevices based on glassy materials. Biochemical and biomedical sensors, especially with the lab-on-a-chip target, are one of the most evident proofs of the success of this material platform. Other applications have also emerged in environment, food, and chemical industries. The present Special Issue of Micromachines aims at reviewing the current state-of-the-art and presenting perspectives of further development. Contributions related to the technologies, glassy materials, design and fabrication processes, characterization, and, eventually, applications are welcome.
Author : Yung-cheng Lee
Publisher : World Scientific
ISBN 13 : 9813229373
Total Pages : 363 pages
Book Rating : 4.8/5 (132 download)
Download or read book Mems Packaging written by Yung-cheng Lee and published by World Scientific. This book was released on 2018-01-03 with total page 363 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS sensors and actuators are enabling components for smartphones, AR/VR, and wearable electronics. MEMS packaging is recognized as one of the most critical activities to design and manufacture reliable MEMS. A unique challenge to MEMS packaging is how to protect moving MEMS devices during manufacturing and operation. With the introduction of wafer level capping and encapsulation processes, this barrier is removed successfully. In addition, MEMS devices should be integrated with their electronic chips with the smallest footprint possible. As a result, 3D packaging is applied to connect the devices vertically for the most effective integration. Such 3D packaging also paves the way for further heterogenous integration of MEMS devices, electronics, and other functional devices.This book consists of chapters written by leaders developing products in a MEMS industrial setting and faculty members conducting research in an academic setting. After an introduction chapter, the practical issues are covered: through-silicon vias (TSVs), vertical interconnects, wafer level packaging, motion sensor-to-CMOS bonding, and use of printed circuit board technology to fabricate MEMS. These chapters are written by leaders developing MEMS products. Then, fundamental issues are discussed, topics including encapsulation of MEMS, heterogenous integration, microfluidics, solder bonding, localized sealing, microsprings, and reliability.
Author : Reza Ghodssi
Publisher : Springer Science & Business Media
ISBN 13 : 0387473181
Total Pages : 1211 pages
Book Rating : 4.3/5 (874 download)
Download or read book MEMS Materials and Processes Handbook written by Reza Ghodssi and published by Springer Science & Business Media. This book was released on 2011-03-18 with total page 1211 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.
Download or read book Graduating, Engraving and Etching written by and published by . This book was released on 1921 with total page 74 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : ASM International. Handbook Committee
Publisher : ASM International
ISBN 13 : 0871702835
Total Pages : 1313 pages
Book Rating : 4.8/5 (717 download)
Download or read book Engineered Materials Handbook, Desk Edition written by ASM International. Handbook Committee and published by ASM International. This book was released on 1995-11-01 with total page 1313 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive reference on the properties, selection, processing, and applications of the most widely used nonmetallic engineering materials. Section 1, General Information and Data, contains information applicable both to polymers and to ceramics and glasses. It includes an illustrated glossary, a collection of engineering tables and data, and a guide to materials selection. Sections 2 through 7 focus on polymeric materials--plastics, elastomers, polymer-matrix composites, adhesives, and sealants--with the information largely updated and expanded from the first three volumes of the Engineered Materials Handbook. Ceramics and glasses are covered in Sections 8 through 12, also with updated and expanded information. Annotation copyright by Book News, Inc., Portland, OR
