Design Optimization and Structural Analysis of a 3D Abbe Error-free Wafer Inspection Stage

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ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (113 download)

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Book Synopsis Design Optimization and Structural Analysis of a 3D Abbe Error-free Wafer Inspection Stage by : 郭彥佐

Download or read book Design Optimization and Structural Analysis of a 3D Abbe Error-free Wafer Inspection Stage written by 郭彥佐 and published by . This book was released on 2019 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Structure Design and Improvement of Three-axis Wafer Inspection Stage Satisfying Abbe Principle

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Publisher :
ISBN 13 :
Total Pages : 0 pages
Book Rating : 4.:/5 (134 download)

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Book Synopsis Structure Design and Improvement of Three-axis Wafer Inspection Stage Satisfying Abbe Principle by : 洪瑀

Download or read book Structure Design and Improvement of Three-axis Wafer Inspection Stage Satisfying Abbe Principle written by 洪瑀 and published by . This book was released on 2022 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Precision Motion Control

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Publisher : Springer Science & Business Media
ISBN 13 : 1447136918
Total Pages : 245 pages
Book Rating : 4.4/5 (471 download)

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Book Synopsis Precision Motion Control by : Kok K. Tan

Download or read book Precision Motion Control written by Kok K. Tan and published by Springer Science & Business Media. This book was released on 2013-04-17 with total page 245 pages. Available in PDF, EPUB and Kindle. Book excerpt: Precision manufacturing is a development that has been gathering momentum over the last century and accelerating over the last 25 years in terms of research, development, and application to product innovation. The driving force in this development arises from requirements for much higher performance of products, higher reliability, longer life, lower cost, and miniaturization. This development is widely known as precision engineering and, today, it is generally defined as manufacturing to tolerances which are better than one part in 105. Applications are abound and can be found in various semiconductor processes (e.g., lithography, wafer probing, inspection), Coordinate Measuring Machines (CMMs) and precision metrology systems (e.g., Scanning Probe Microscopy (SPM)), and robot/machine tools to carry out micro-assembly (e.g., MEMS) and delicate short wavelength laser processes. As an enabling technology for precision engineering, precision instrumentation and measurement, geometrical calibration and compensation, and motion control are directly important issues to be addressed in the overall system design and realization. This book is focused on these aspects of precision engineering. It is a compilation of the major results and publications from a major project which develop a state-of-the-art high-speed, ultra-precision robotic system. A comprehensive and thorough treatment of the subject matter is provided in a manner that is amenable to a broad base of readers, ranging from the academics to the practitioners, by providing detailed experimental verifications of the developed materials.

Basics of Precision Engineering

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Publisher : CRC Press
ISBN 13 : 0429887442
Total Pages : 659 pages
Book Rating : 4.4/5 (298 download)

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Book Synopsis Basics of Precision Engineering by : Richard Leach

Download or read book Basics of Precision Engineering written by Richard Leach and published by CRC Press. This book was released on 2018-04-09 with total page 659 pages. Available in PDF, EPUB and Kindle. Book excerpt: Advances in engineering precision have tracked with technological progress for hundreds of years. Over the last few decades, precision engineering has been the specific focus of research on an international scale. The outcome of this effort has been the establishment of a broad range of engineering principles and techniques that form the foundation of precision design. Today’s precision manufacturing machines and measuring instruments represent highly specialised processes that combine deterministic engineering with metrology. Spanning a broad range of technology applications, precision engineering principles frequently bring together scientific ideas drawn from mechanics, materials, optics, electronics, control, thermo-mechanics, dynamics, and software engineering. This book provides a collection of these principles in a single source. Each topic is presented at a level suitable for both undergraduate students and precision engineers in the field. Also included is a wealth of references and example problems to consolidate ideas, and help guide the interested reader to more advanced literature on specific implementations.

Precision Machine Design

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Publisher : Society of Manufacturing Engineers
ISBN 13 : 0872634922
Total Pages : 767 pages
Book Rating : 4.8/5 (726 download)

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Book Synopsis Precision Machine Design by : Alexander H. Slocum

Download or read book Precision Machine Design written by Alexander H. Slocum and published by Society of Manufacturing Engineers. This book was released on 1992 with total page 767 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a comprehensive engineering exploration of all the aspects of precision machine design—both component and system design considerations for precision machines. It addresses both theoretical analysis and practical implementation providing many real-world design case studies as well as numerous examples of existing components and their characteristics. Fast becoming a classic, this book includes examples of analysis techniques, along with the philosophy of the solution method. It explores the physics of errors in machines and how such knowledge can be used to build an error budget for a machine, how error budgets can be used to design more accurate machines.

The Glossary of Prosthodontic Terms

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Publisher :
ISBN 13 :
Total Pages : 80 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis The Glossary of Prosthodontic Terms by :

Download or read book The Glossary of Prosthodontic Terms written by and published by . This book was released on 1994 with total page 80 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Design and Applications of Coordinate Measuring Machines

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Publisher : MDPI
ISBN 13 : 3038422762
Total Pages : 1 pages
Book Rating : 4.0/5 (384 download)

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Book Synopsis Design and Applications of Coordinate Measuring Machines by : Kuang-Chao Fan

Download or read book Design and Applications of Coordinate Measuring Machines written by Kuang-Chao Fan and published by MDPI. This book was released on 2018-09-27 with total page 1 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a printed edition of the Special Issue "Design and Applications of Coordinate Measuring Machines" that was published in Applied Sciences

Proceedings of the 34th International MATADOR Conference

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Publisher : Springer Science & Business Media
ISBN 13 : 9781852338800
Total Pages : 516 pages
Book Rating : 4.3/5 (388 download)

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Book Synopsis Proceedings of the 34th International MATADOR Conference by : Srichand Hinduja

Download or read book Proceedings of the 34th International MATADOR Conference written by Srichand Hinduja and published by Springer Science & Business Media. This book was released on 2004-09-23 with total page 516 pages. Available in PDF, EPUB and Kindle. Book excerpt: Presented here are 73 refereed papers given at the 34th MATADOR Conference held at UMIST in July 2004. The MATADOR series of conferences covers the topics of Manufacturing Automation and Systems Technology, Applications, Design, Organisation and Management, and Research. The 34th proceedings contains original papers contributed by researchers from many countries on different continents. The papers cover both the technological aspect of manufacturing processes; and the systems, business and management features of manufacturing enterprise. The papers in this volume reflect: - the importance of manufacturing to international wealth creation; - the necessity of responsiveness and agility of manufacturing companies to meet market-led requirements and international chan≥ - the role of information technology and electronic communications in the growth of global manufacturing enterprises; - the impact of new technologies, new materials and processes, on the ability to produce goods of higher quality, more quickly, to meet markets needs at a lower cost. Some of the major generic developments which have taken place in these areas since the 33rd MATADOR conference was held in 2000 are reported in this volume.

X-Ray Metrology in Semiconductor Manufacturing

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Publisher : CRC Press
ISBN 13 : 1420005650
Total Pages : 296 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis X-Ray Metrology in Semiconductor Manufacturing by : D. Keith Bowen

Download or read book X-Ray Metrology in Semiconductor Manufacturing written by D. Keith Bowen and published by CRC Press. This book was released on 2018-10-03 with total page 296 pages. Available in PDF, EPUB and Kindle. Book excerpt: The scales involved in modern semiconductor manufacturing and microelectronics continue to plunge downward. Effective and accurate characterization of materials with thicknesses below a few nanometers can be achieved using x-rays. While many books are available on the theory behind x-ray metrology (XRM), X-Ray Metrology in Semiconductor Manufacturing is the first book to focus on the practical aspects of the technology and its application in device fabrication and solving new materials problems. Following a general overview of the field, the first section of the book is organized by application and outlines the techniques that are best suited to each. The next section delves into the techniques and theory behind the applications, such as specular x-ray reflectivity, diffraction imaging, and defect mapping. Finally, the third section provides technological details of each technique, answering questions commonly encountered in practice. The authors supply real examples from the semiconductor and magnetic recording industries as well as more than 150 clearly drawn figures to illustrate the discussion. They also summarize the principles and key information about each method with inset boxes found throughout the text. Written by world leaders in the field, X-Ray Metrology in Semiconductor Manufacturing provides real solutions with a focus on accuracy, repeatability, and throughput.

Handbook of Monochromatic XPS Spectra

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Publisher : John Wiley & Sons
ISBN 13 : 0471492655
Total Pages : 562 pages
Book Rating : 4.4/5 (714 download)

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Book Synopsis Handbook of Monochromatic XPS Spectra by : B. Vincent Crist

Download or read book Handbook of Monochromatic XPS Spectra written by B. Vincent Crist and published by John Wiley & Sons. This book was released on 2000-10-19 with total page 562 pages. Available in PDF, EPUB and Kindle. Book excerpt: These three volumes provide comprehensive information about the instrument, the samples, and the methods used to collect the spectra. The spectra are presented on a landscape format and cover a wide variety of elements,polymers, semiconductors, and other materials. Offers a clear presentation of spectra with the rightamount of experimental detail. All of the experiments have been conducted under controlled conditions on the same instrument by aworld-renowned expert.

Precision Manufacturing

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Publisher : Springer Science & Business Media
ISBN 13 : 0387682082
Total Pages : 785 pages
Book Rating : 4.3/5 (876 download)

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Book Synopsis Precision Manufacturing by : David A. Dornfeld

Download or read book Precision Manufacturing written by David A. Dornfeld and published by Springer Science & Business Media. This book was released on 2007-11-22 with total page 785 pages. Available in PDF, EPUB and Kindle. Book excerpt: Precision Manufacturing provides an introduction to precision engineering for manufacturing. With an emphasis on design and performance of precision machinery for manufacturing – machine tool elements and structure, sources of error, precision machining processes and process models sensors for process monitoring and control, metrology, actuators, and machine design. This book will be of interest to design engineers, quality engineers and manufacturing engineers, academics and those who may or may not have previous experience with precision manufacturing, but want to learn more.

Electrospun Nanofibers

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Publisher : Woodhead Publishing
ISBN 13 : 0081009119
Total Pages : 650 pages
Book Rating : 4.0/5 (81 download)

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Book Synopsis Electrospun Nanofibers by : Mehdi Afshari

Download or read book Electrospun Nanofibers written by Mehdi Afshari and published by Woodhead Publishing. This book was released on 2016-09-13 with total page 650 pages. Available in PDF, EPUB and Kindle. Book excerpt: Electrospun Nanofibers covers advances in the electrospinning process including characterization, testing and modeling of electrospun nanofibers, and electrospinning for particular fiber types and applications. Electrospun Nanofibers offers systematic and comprehensive coverage for academic researchers, industry professionals, and postgraduate students working in the field of fiber science. Electrospinning is the most commercially successful process for the production of nanofibers and rising demand is driving research and development in this field. Rapid progress is being made both in terms of the electrospinning process and in the production of nanofibers with superior chemical and physical properties. Electrospinning is becoming more efficient and more specialized in order to produce particular fiber types such as bicomponent and composite fibers, patterned and 3D nanofibers, carbon nanofibers and nanotubes, and nanofibers derived from chitosan. - Provides systematic and comprehensive coverage of the manufacture, properties, and applications of nanofibers - Covers recent developments in nanofibers materials including electrospinning of bicomponent, chitosan, carbon, and conductive fibers - Brings together expertise from academia and industry to provide comprehensive, up-to-date information on nanofiber research and development - Offers systematic and comprehensive coverage for academic researchers, industry professionals, and postgraduate students working in the field of fiber science

Microelectronics Fialure Analysis Desk Reference, Seventh Edition

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Publisher : ASM International
ISBN 13 : 1627082468
Total Pages : 750 pages
Book Rating : 4.6/5 (27 download)

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Book Synopsis Microelectronics Fialure Analysis Desk Reference, Seventh Edition by : Tejinder Gandhi

Download or read book Microelectronics Fialure Analysis Desk Reference, Seventh Edition written by Tejinder Gandhi and published by ASM International. This book was released on 2019-11-01 with total page 750 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Electronic Device Failure Analysis Society proudly announces the Seventh Edition of the Microelectronics Failure Analysis Desk Reference, published by ASM International. The new edition will help engineers improve their ability to verify, isolate, uncover, and identify the root cause of failures. Prepared by a team of experts, this updated reference offers the latest information on advanced failure analysis tools and techniques, illustrated with numerous real-life examples. This book is geared to practicing engineers and for studies in the major area of power plant engineering. For non-metallurgists, a chapter has been devoted to the basics of material science, metallurgy of steels, heat treatment, and structure-property correlation. A chapter on materials for boiler tubes covers composition and application of different grades of steels and high temperature alloys currently in use as boiler tubes and future materials to be used in supercritical, ultra-supercritical and advanced ultra-supercritical thermal power plants. A comprehensive discussion on different mechanisms of boiler tube failure is the heart of the book. Additional chapters detailing the role of advanced material characterization techniques in failure investigation and the role of water chemistry in tube failures are key contributions to the book.

Schlieren and Shadowgraph Techniques

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Publisher : Springer Science & Business Media
ISBN 13 : 3642566405
Total Pages : 388 pages
Book Rating : 4.6/5 (425 download)

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Book Synopsis Schlieren and Shadowgraph Techniques by : G.S. Settles

Download or read book Schlieren and Shadowgraph Techniques written by G.S. Settles and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 388 pages. Available in PDF, EPUB and Kindle. Book excerpt: Schlieren and shadowgraph techniques are basic and valuable tools in various scientific and engineering disciplines. They allow us to see the invisible: the optical inhomogeneities in transparent media like air, water, and glass that otherwise cause only ghostly distortions of our normal vision. These techniques are discussed briefly in many books and papers, but there is no up-to-date complete treatment of the subject before now. The book is intended as a practical guide for those who want to use these methods, as well as a resource for a broad range of disciplines where scientific visualization is important. The colorful 400-year history of these methods is covered in an extensive introductory chapter accessible to all readers.

Metrology and Properties of Engineering Surfaces

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Publisher : Springer Science & Business Media
ISBN 13 : 1475733690
Total Pages : 470 pages
Book Rating : 4.4/5 (757 download)

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Book Synopsis Metrology and Properties of Engineering Surfaces by : E. Mainsah

Download or read book Metrology and Properties of Engineering Surfaces written by E. Mainsah and published by Springer Science & Business Media. This book was released on 2013-03-14 with total page 470 pages. Available in PDF, EPUB and Kindle. Book excerpt: Metrology and Properties of Engineering Surfaces provides in a single volume a comprehensive and authoritative treatment of the crucial topics involved in the metrology and properties of engineering surfaces. The subject matter is a central issue in manufacturing technology, since the quality and reliability of manufactured components depend greatly upon the selection and qualities of the appropriate materials as ascertained through measurement. The book can in broad terms be split into two parts; the first deals with the metrology of engineering surfaces and covers the important issues relating to the measurement and characterization of surfaces in both two and three dimensions. This covers topics such as filtering, power spectral densities, autocorrelation functions and the use of Fractals in topography. A significant proportion is dedicated to the calibration of scanning probe microscopes using the latest techniques. The remainder of the book deals with the properties of engineering surfaces and covers a wide range of topics including hardness (measurement and relevance), surface damage and the machining of brittle surfaces, the characterization of automobile cylinder bores using different techniques including artificial neural networks and the design and use of polymer bearings in microelectromechanical devices. Edited by three practitioners with a wide knowledge of the subject and the community, Metrology and Properties of Engineering Surfaces brings together leading academics and practitioners in a comprehensive and insightful treatment of the subject. The book is an essential reference work both for researchers working and teaching in the technology and for industrial users who need to be aware of current developments of the technology and new areas of application.

Science of Microscopy

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Publisher : Springer Science & Business Media
ISBN 13 : 0387497625
Total Pages : 1336 pages
Book Rating : 4.3/5 (874 download)

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Book Synopsis Science of Microscopy by : P.W. Hawkes

Download or read book Science of Microscopy written by P.W. Hawkes and published by Springer Science & Business Media. This book was released on 2008-08-29 with total page 1336 pages. Available in PDF, EPUB and Kindle. Book excerpt: This fully corrected second impression of the classic 2006 text on microscopy runs to more than 1,000 pages and covers up-to-the-minute developments in the field. The two-volume work brings together a slew of experts who present comprehensive reviews of all the latest instruments and new versions of the older ones, as well as their associated operational techniques. The chapters draw attention to their principal areas of application. A huge range of subjects are benefiting from these new tools, including semiconductor physics, medicine, molecular biology, the nanoworld in general, magnetism, and ferroelectricity. This fascinating book will be an indispensable guide for a wide range of scientists in university laboratories as well as engineers and scientists in industrial R&D departments.

Lab-on-Fiber Technology

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Publisher : Springer
ISBN 13 : 3319069985
Total Pages : 377 pages
Book Rating : 4.3/5 (19 download)

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Book Synopsis Lab-on-Fiber Technology by : Andrea Cusano

Download or read book Lab-on-Fiber Technology written by Andrea Cusano and published by Springer. This book was released on 2014-07-29 with total page 377 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book focuses on a research field that is rapidly emerging as one of the most promising ones for the global optics and photonics community: the “lab-on-fiber” technology. Inspired by the well-established "lab on-a-chip" concept, this new technology essentially envisages novel and highly functionalized devices completely integrated into a single optical fiber for both communication and sensing applications. Based on the R&D experience of some of the world's leading authorities in the fields of optics, photonics, nanotechnology, and material science, this book provides a broad and accurate description of the main developments and achievements in the lab-on-fiber technology roadmap, also highlighting the new perspectives and challenges to be faced. This book is essential for scientists interested in the cutting-edge fiber optic technology, but also for graduate students.