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Design Fabrication And Characterization Of Rf Mems Variable Capacitor Phase Shifters And Prestressed Beam Switches
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Book Synopsis Design, Fabrication, and Characterization of RF MEMS Variable-capacitor Phase Shifters and Prestressed-beam Switches by : Huantong Zhang
Download or read book Design, Fabrication, and Characterization of RF MEMS Variable-capacitor Phase Shifters and Prestressed-beam Switches written by Huantong Zhang and published by . This book was released on 2003 with total page 370 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Practical Guide to RF-MEMS by : Jacopo Iannacci
Download or read book Practical Guide to RF-MEMS written by Jacopo Iannacci and published by John Wiley & Sons. This book was released on 2013-08-12 with total page 374 pages. Available in PDF, EPUB and Kindle. Book excerpt: Closes the gap between hardcore-theoretical and purely experimental RF-MEMS books. The book covers, from a practical viewpoint, the most critical steps that have to be taken in order to develop novel RF-MEMS device concepts. Prototypical RF-MEMS devices, both including lumped components and complex networks, are presented at the beginning of the book as reference examples, and these are then discussed from different perspectives with regard to design, simulation, packaging, testing, and post-fabrication modeling. Theoretical concepts are introduced when necessary to complement the practical hints given for all RF-MEMS development stages. Provides researchers and engineers with invaluable practical hints on how to develop novel RF-MEMS device concepts Covers all critical steps, dealing with design, simulation, optimization, characterization and fabrication of MEMS for radio-frequency applications Addresses frequently disregarded issues, explicitly treating the hard to predict interplay between the three-dimensional device structure and its electromagnetic functionality Bridges theory and experiment, fundamental concepts are introduced with the application in mind, and simulation results are validated against experimental results Appeals to the practice-oriented R&D reader: design and simulation examples are based on widely known software packages such as ANSYS and the hardware description language Verilog.
Book Synopsis RF MEMS and Their Applications by : Vijay K. Varadan
Download or read book RF MEMS and Their Applications written by Vijay K. Varadan and published by John Wiley & Sons. This book was released on 2003-07-25 with total page 406 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectromechanical systems (MEMS) refer to a collection of micro-sensors and actuators, which can react to environmental change under micro- circuit control. The integration of MEMS into traditional Radio Frequency (RF) circuits has resulted in systems with superior performance levels and lower manufacturing costs. The incorporation of MEMS based fabrication technologies into micro and millimeter wave systems offers viable routes to ICs with MEMS actuators, antennas, switches and transmission lines. The resultant systems operate with an increased bandwidth and increased radiation efficiency and have considerable scope for implementation within the expanding area of wireless personal communication devices. This text provides leading edge coverage of this increasingly important area and highlights the overlapping information requirements of the RF and MEMS research and development communities. * Provides an introduction to micromachining techniques and their use in the fabrication of micro switches, capacitors and inductors * Includes coverage of MEMS devices for wireless and Bluetooth enabled systems Essential reading for RF Circuit design practitioners and researchers requiring an introduction to MEMS technologies, as well as practitioners and researchers in MEMS and silicon technology requiring an introduction to RF circuit design.
Book Synopsis RF MEMS Switches and Integrated Switching Circuits by : Ai-Qun Liu
Download or read book RF MEMS Switches and Integrated Switching Circuits written by Ai-Qun Liu and published by Springer Science & Business Media. This book was released on 2010-08-09 with total page 276 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectromechanical Systems (MEMS) stand poised for the next major breakthrough in the silicon revolution that began with the transistor in the 1960s and has revolutionized microelectronics. MEMS allow one to not only observe and process information of all types from small scale systems, but also to affect changes in systems and the environment at that scale. “RF MEMS Switches and Integrated Switching Circuits” builds on the extensive body of literature that exists in research papers on analytical and numerical modeling and design based on RF MEMS switches and micromachined switching circuits, and presents a unified framework of coverage. This volume includes, but is not limited to, RF MEMS approaches, developments from RF MEMS switches to RF switching circuits, and MEMS switch components in circuit systems. This book also: -Presents RF Switches and switching circuit MEMS devices in a unified framework covering all aspects of engineering innovation, design, modeling, fabrication, control and experimental implementation -Discusses RF switch devices in detail, with both system and component-level circuit integration using micro- and nano-fabrication techniques -Includes an emphasis on design innovation and experimental relevance rather than basic electromagnetic theory and device physics “RF MEMS Switches and Integrated Switching Circuits” is perfect for engineers, researchers and students working in the fields of MEMS, circuits and systems and RFs.
Book Synopsis Advanced RF MEMS by : Stepan Lucyszyn
Download or read book Advanced RF MEMS written by Stepan Lucyszyn and published by Cambridge University Press. This book was released on 2010-08-19 with total page 441 pages. Available in PDF, EPUB and Kindle. Book excerpt: An up-to-date guide to the theory and applications of RF MEMS. With detailed information about RF MEMS technology as well as its reliability and applications, this is a comprehensive resource for professionals, researchers, and students alike. • Reviews RF MEMS technologies • Illustrates new techniques that solve long-standing problems associated with reliability and packaging • Provides the information needed to incorporate RF MEMS into commercial products • Describes current and future trends in RF MEMS, providing perspective on industry growth • Ideal for those studying or working in RF and microwave circuits, systems, microfabrication and manufacturing, production management and metrology, and performance evaluation
Download or read book RF MEMS written by Gabriel M. Rebeiz and published by John Wiley & Sons. This book was released on 2004-02-06 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ultrasmall Radio Frequency and Micro-wave Microelectromechanical systems (RF MEMs), such as switches, varactors, and phase shifters, exhibit nearly zero power consumption or loss. For this reason, they are being developed intensively by corporations worldwide for use in telecommunications equipment. This book acquaints readers with the basics of RF MEMs and describes how to design practical circuits and devices with them. The author, an acknowledged expert in the field, presents a range of real-world applications and shares many valuable tricks of the trade.
Book Synopsis Design, Fabrication and Characterization of RF MEMS Inductors and Switches by : Alireza Hajhosseini Mesgar
Download or read book Design, Fabrication and Characterization of RF MEMS Inductors and Switches written by Alireza Hajhosseini Mesgar and published by . This book was released on 2006 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Lifetime Characterization of Capacitive Power RF MEMS Switches by :
Download or read book Lifetime Characterization of Capacitive Power RF MEMS Switches written by and published by . This book was released on 2005 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: RF MEMS switches provide a low-cost, high performance solution to many RF/microwaveapplications and these switches will be importantbuilding blocks for designing phase shifters, switchedfilters and reflector array antennas for military andcommercial markets. In this paper, progress in characterizing of THALEScapacitive MEMS devices under high RF power ispresented. The design, fabrication and testing ofcapacitive RF MEMS switches for microwave/mm- waveapplications on high-resistivity silicon substrate ispresented .The switches tested demonstrated powerhandling capabilities of 1W (30 dbm) for continuous RFpower. The reliability of these switches was tested atvarious power levels indicating that under continuousRF power. In addition a description of the powerfailures and their associated operating conditions ispresentedThe PC-based test stations to cycle switches and measurelifetime under DC and RF loads have been developed. Best-case lifetimes of 1010 cycles have been achieved inseveral switches from different lots under 30 dbm RFpower.
Book Synopsis Dissertation Abstracts International by :
Download or read book Dissertation Abstracts International written by and published by . This book was released on 2003 with total page 580 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis American Doctoral Dissertations by :
Download or read book American Doctoral Dissertations written by and published by . This book was released on 2002 with total page 776 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis RF MEMS Circuit Design for Wireless Communications by : Héctor J. de los Santos
Download or read book RF MEMS Circuit Design for Wireless Communications written by Héctor J. de los Santos and published by Artech House. This book was released on 2002 with total page 298 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the first comprehensive book to address the design of RF MEMS-based circuits for use in high performance wireless systems. A groundbreaking research and reference tool, the book enables you to understand the realm of applications of RF MEMS technology; become knowledgeable of the wide variety and performance levels of RF MEMS devices; and partition the architecture of wireless systems to achieve greater levels of performance. This innovative resource also guides you through the design process of RF MEMS-based circuits, and establishes a practical knowledge base for the design of high-yield RF MEMS-based circuits. The book features exercises and detailed case studies on working RF MEMS circuits that help you decide what approaches best fit your design constraints. This unified treatment of RF MEMS-based circuit technology opens up a new world of solutions for meeting the unique challenges of low power/portable wireless products.
Book Synopsis High-performance RF MEMS Circuits and Phase Shifters by : Guan Leng Tan
Download or read book High-performance RF MEMS Circuits and Phase Shifters written by Guan Leng Tan and published by . This book was released on 2002 with total page 402 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis RF MEMS Switching and Integrated Switching Circuits by : Ai-Qun Liu
Download or read book RF MEMS Switching and Integrated Switching Circuits written by Ai-Qun Liu and published by . This book was released on 2010 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Design and Fabrication of Multi-dimensional RF MEMS Variable Capacitors by : Hariharasudhan T. Kannan
Download or read book Design and Fabrication of Multi-dimensional RF MEMS Variable Capacitors written by Hariharasudhan T. Kannan and published by . This book was released on 2003 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: ABSTRACT: Full-wave electromagnetic simulations are performed from 1 - 25GHz to accurately predict the frequency response of the varactors. The EM simulations and the measurement results compare favorably. A series RLC equivalent circuit is used to model the varactor and used to extract the parasitics associated with the capacitor by optimizing the model with the measurement results. The measured capacitance ratio is approximately 12:1 with a tuning range from 0.5 - 6pF. Furthermore, the measured S-parameter data is used to extract the unloaded Q of the varactor (at 1GHz) and is found to be 234 in the up state and 27 in the down state. An improved anodic bonding technique to bond high resistivity Si substrate and low alkali borax glass substrate that finds potential application towards packaging of MEMS varactors is investigated. To facilitate the packaging of the varactors the temperature is maintained at 400p0.
Book Synopsis Modeling, Design and Fabrication of MEMS Filters for RF Applications by : Siamak Fouladi Azarnaminy
Download or read book Modeling, Design and Fabrication of MEMS Filters for RF Applications written by Siamak Fouladi Azarnaminy and published by . This book was released on 2005 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Currently, micro electro mechanical systems (MEMS) technology has been used in the fabrication and development of several micro devices which cover a broad range of applications. One of these application areas is the telecommunication industry. Current multi-band communication systems depend on off-chip components for frequency selection stages. Since the fabrication of these off-chip components are not compatible with IC fabrication, the electrical connection has to be in the board level, increasing the cost, size and system complexity. Recently MEMS technology has been used in constructing tunable IC components for RF and wireless transceivers, such as resonators, variable capacitors and inductors. These on-chip components can be utilized to implement system on chip (SOC) transceiver architectures with a better performance. This project is focused on modeling, design, and fabrication of band-pass filters for RF applications using MEMS components. The first class of filters is based on MEMS resonators covering a frequency range from 1MHz to 10MHz and the second class of filters use RF MEMS tunable capacitors. The project has two main parts; the first part is dedicated to the behavioral modeling and generating macro models for MEMS resonators that will be used in system level simulation of the final filter, and the second part discusses the design, fabrication, and post processing of both the MEMS resonators and MEMS variable capacitor, besides the experimental results.
Book Synopsis RF MEMS Switches and Phase Shifters for 3D MMIC Phased Array Antenna Systems by : Yu Albert Wang
Download or read book RF MEMS Switches and Phase Shifters for 3D MMIC Phased Array Antenna Systems written by Yu Albert Wang and published by . This book was released on 2002 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: In order to incorporate the RF MEMS technology with the 3D MMICs technology, a novel RF MEMS switch was designed and implemented in a 3D MMIC circuit environment. RF MEMS switches possess many advantages compared to traditional solid-state switches, such as high electromechanical isolation, and ultra-low power consumption. The novelty of this switch was that it was based on low temperature processing techniques. Design equations for a shielded coplanar waveguide were derived for the switch. Traditional lumped element capacitor model and this newly developed distributed transmission line models were compared against measured data to verify their validity. While measurement results show good agreement with both models, the distributed model consistently demonstrated better match than its lumped element counterpart. Test and measurement results showed that a typical RF MEMS switch was capable of delivering less than 0.2dB insertion loss and more than 14.1dB isolation between input and output ports at X-band (8GHz-12GHz). This RF MEMS switch required only 12V actuation voltage while it was capable of handling 2.88W RF power before "hot-switching" occurs. Hysteretic phenomenon of RF MEMS switches was observed; release voltage threshold was found to be around 2V 4V, much lower than the one required for pulling down the structure. Switching speeds of RF MEMS switches with different beam strength were measured using a novel experimental setup utilizing couplers as bias networks. The fastest switches demonstrated maximum switching speed of 3.571 kHz and more than 10,800,000 life cycles. As the application of RF MEMS switches, a 4-bit digital phase shifter was designed and fabricated. 180ʻ bit and 90ʻ bits were realized using reflection type phase shifters, while the 45ʻ and 22.5ʻ bits were achieved using loaded-line type phase shifters. A novel reflection type phase shifter loaded with multiple switch pairs was developed and was capable of delivering multiple phase shift angles within one circuit stage. Phase shifter measurement results were consistent with simulated results.
Book Synopsis Development of Monolithic SiGe and Packaged RF MEMS High-linearity Five-bit High-low Pass Phase Shifters for SoC X-band T/R Modules by : Matthew A. Morton
Download or read book Development of Monolithic SiGe and Packaged RF MEMS High-linearity Five-bit High-low Pass Phase Shifters for SoC X-band T/R Modules written by Matthew A. Morton and published by . This book was released on 2007 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive study of the High-pass/Low-pass topology has been performed, increasing the understanding of error sources arising from bit layout issues and fabrication tolerances. This included a detailed analysis of error sources in monolithic microwave phase shifters due to device size limitations, inductor parasitics, loading effects, and non-ideal switches. Each component utilized in the implementation of a monolithic high-low pass phase shifter was analyzed, with its influence on phase behavior shown in detail. An emphasis was placed on the net impact on absolute phase variation, which is critical to the system performance of a phased array radar system. The design of the individual phase shifter filter sections, and the influence of bit ordering on overall performance was also addressed. A variety of X-band four- and five-bit phase shifters were fabricated in a 200 GHz SiGe HBT BiCMOS technology platform, and further served to validate the analysis and design methodology. The SiGe phase shifter can be successfully incorporated into a single-chip T/R module forming a system-on-a-chip (SoC). Reduction in the physical size of transmission lines was shown to be a possibility with spinel magnetic nanoparticle films. The signal transmission properties of phase lines treated with nanoparticle thin films were examined, showing the potential for significant size reduction in both delay line and High-pass/Low-pass phase topologies. Wide-band, low-loss, and near-hermetic packaging techniques for RF MEMS devices were presented. A thermal compression bonding technique compatible with standard IC fabrication techniques was shown, that uses a low temperature thermal compression bonding method that avoids plastic deformations of the MEMS membrane. Ultimately, a system-on-a-package (SoP) approach was demonstrated that utilized packaged RF MEMS switches to maintain the performance of the SiGe phase shifter with much lower loss. The extremely competitive performance of the MEMS-based High-pass/Low-pass phase shifter, despite the lack of the extensive toolkits and commercial fabrication facilities employed with the active-based SiGe phase shifters, confirms both the effectiveness of the detailed phase error analysis presented in this work and the robust nature of the High-pass/Low-pass topology.
