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Design Fabrication And Characterization Of Rf Mems Inductors And Switches
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Book Synopsis Design, Fabrication and Characterization of RF MEMS Inductors and Switches by : Alireza Hajhosseini Mesgar
Download or read book Design, Fabrication and Characterization of RF MEMS Inductors and Switches written by Alireza Hajhosseini Mesgar and published by . This book was released on 2006 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: MicroElectroMechanical Systems (MEMS) concept covers different miniature devices in different disciplines, including but not limited to biological, chemical, electrical, fluidic, magnetic, optical, and thermal applications. Initially, the background of MEMS, RF MEMS and fabrication technologies are introduced. Then switch and inductor are introduced. Theory, different configurations, designs, and fabrication technologies are considered. Finally proposed designed components are given. Each design is verified through software simulations. Modeling and simulation is the next step. Switches are simulated by MATLAB. Inductors are designed using MATLAB and simulated by ADS-Momentum. Switches are fabricated in the Multi-User MEMS Process (MUMPs) which uses a surface micromachining technique. Inductors are fabricated in both MUMPs and CMOS processes. MUMPs chips require a simple post-fabrication processing that is soaking them in hydrofluoric acid to remove the sacrificial silicon oxide layer For CMOS inductors, bulk-micromachining required post-processing is performed after fabrication.
Book Synopsis Design, Fabrication, and Characterization of RF MEMS Variable-capacitor Phase Shifters and Prestressed-beam Switches by : Huantong Zhang
Download or read book Design, Fabrication, and Characterization of RF MEMS Variable-capacitor Phase Shifters and Prestressed-beam Switches written by Huantong Zhang and published by . This book was released on 2003 with total page 370 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis RF MEMS and Their Applications by : Vijay K. Varadan
Download or read book RF MEMS and Their Applications written by Vijay K. Varadan and published by John Wiley & Sons. This book was released on 2003-07-25 with total page 406 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectromechanical systems (MEMS) refer to a collection of micro-sensors and actuators, which can react to environmental change under micro- circuit control. The integration of MEMS into traditional Radio Frequency (RF) circuits has resulted in systems with superior performance levels and lower manufacturing costs. The incorporation of MEMS based fabrication technologies into micro and millimeter wave systems offers viable routes to ICs with MEMS actuators, antennas, switches and transmission lines. The resultant systems operate with an increased bandwidth and increased radiation efficiency and have considerable scope for implementation within the expanding area of wireless personal communication devices. This text provides leading edge coverage of this increasingly important area and highlights the overlapping information requirements of the RF and MEMS research and development communities. * Provides an introduction to micromachining techniques and their use in the fabrication of micro switches, capacitors and inductors * Includes coverage of MEMS devices for wireless and Bluetooth enabled systems Essential reading for RF Circuit design practitioners and researchers requiring an introduction to MEMS technologies, as well as practitioners and researchers in MEMS and silicon technology requiring an introduction to RF circuit design.
Book Synopsis RF MEMS Switches and Integrated Switching Circuits by : Ai-Qun Liu
Download or read book RF MEMS Switches and Integrated Switching Circuits written by Ai-Qun Liu and published by Springer Science & Business Media. This book was released on 2010-08-09 with total page 276 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectromechanical Systems (MEMS) stand poised for the next major breakthrough in the silicon revolution that began with the transistor in the 1960s and has revolutionized microelectronics. MEMS allow one to not only observe and process information of all types from small scale systems, but also to affect changes in systems and the environment at that scale. “RF MEMS Switches and Integrated Switching Circuits” builds on the extensive body of literature that exists in research papers on analytical and numerical modeling and design based on RF MEMS switches and micromachined switching circuits, and presents a unified framework of coverage. This volume includes, but is not limited to, RF MEMS approaches, developments from RF MEMS switches to RF switching circuits, and MEMS switch components in circuit systems. This book also: -Presents RF Switches and switching circuit MEMS devices in a unified framework covering all aspects of engineering innovation, design, modeling, fabrication, control and experimental implementation -Discusses RF switch devices in detail, with both system and component-level circuit integration using micro- and nano-fabrication techniques -Includes an emphasis on design innovation and experimental relevance rather than basic electromagnetic theory and device physics “RF MEMS Switches and Integrated Switching Circuits” is perfect for engineers, researchers and students working in the fields of MEMS, circuits and systems and RFs.
Book Synopsis Lifetime Characterization of Capacitive Power RF MEMS Switches by :
Download or read book Lifetime Characterization of Capacitive Power RF MEMS Switches written by and published by . This book was released on 2005 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: RF MEMS switches provide a low-cost, high performance solution to many RF/microwaveapplications and these switches will be importantbuilding blocks for designing phase shifters, switchedfilters and reflector array antennas for military andcommercial markets. In this paper, progress in characterizing of THALEScapacitive MEMS devices under high RF power ispresented. The design, fabrication and testing ofcapacitive RF MEMS switches for microwave/mm- waveapplications on high-resistivity silicon substrate ispresented .The switches tested demonstrated powerhandling capabilities of 1W (30 dbm) for continuous RFpower. The reliability of these switches was tested atvarious power levels indicating that under continuousRF power. In addition a description of the powerfailures and their associated operating conditions ispresentedThe PC-based test stations to cycle switches and measurelifetime under DC and RF loads have been developed. Best-case lifetimes of 1010 cycles have been achieved inseveral switches from different lots under 30 dbm RFpower.
Book Synopsis Practical Guide to RF-MEMS by : Jacopo Iannacci
Download or read book Practical Guide to RF-MEMS written by Jacopo Iannacci and published by John Wiley & Sons. This book was released on 2013-08-12 with total page 374 pages. Available in PDF, EPUB and Kindle. Book excerpt: Closes the gap between hardcore-theoretical and purely experimental RF-MEMS books. The book covers, from a practical viewpoint, the most critical steps that have to be taken in order to develop novel RF-MEMS device concepts. Prototypical RF-MEMS devices, both including lumped components and complex networks, are presented at the beginning of the book as reference examples, and these are then discussed from different perspectives with regard to design, simulation, packaging, testing, and post-fabrication modeling. Theoretical concepts are introduced when necessary to complement the practical hints given for all RF-MEMS development stages. Provides researchers and engineers with invaluable practical hints on how to develop novel RF-MEMS device concepts Covers all critical steps, dealing with design, simulation, optimization, characterization and fabrication of MEMS for radio-frequency applications Addresses frequently disregarded issues, explicitly treating the hard to predict interplay between the three-dimensional device structure and its electromagnetic functionality Bridges theory and experiment, fundamental concepts are introduced with the application in mind, and simulation results are validated against experimental results Appeals to the practice-oriented R&D reader: design and simulation examples are based on widely known software packages such as ANSYS and the hardware description language Verilog.
Book Synopsis Integrated Inductors and Transformers by : Egidio Ragonese
Download or read book Integrated Inductors and Transformers written by Egidio Ragonese and published by Auerbach Publications. This book was released on 2010-11-15 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: With the ability to improve performance, reduce fabrication costs, and increase integration levels of both RX and TX sections of the RF/mm-wave front-end, passive inductive components have experienced extraordinary growth in ICs. Therefore, a fundamental understanding of monolithic inductors and transformers has become essential for all process engineers and circuit designers. Supplying balanced coverage of the technology and applications, Integrated Inductors and Transformers: Characterization, Design and Modeling for RF and mm-Wave Applications provides a complete overview of the design, fabrication, and modeling of monolithic inductors and transformers. It considers the underlying physics and theoretical background of inductive components fabricated on a semiconductor substrate. Deals with both inductors and transformers and their application in RF/mm-wave ICs Focuses on silicon-based inductive components and their performance optimization in RF/mm-wave ICs Provides insight into lumped scalable modeling of both inductors and transformers Covers concepts of system calibration, test pattern parasitics, and de-embedding for on-wafer measurements of passive devices Illustrates practical applications of theoretical concepts by means of meaningful circuit design examples Highlighting the pressing requirements of the wireless market and evolving communication standards, the text provides a comprehensive review of recently developed modeling techniques and applications. It also includes helpful rule-of-thumb design guidelines and commonly employed optimization strategies to help kick-start your design, fabrication, and modeling efforts.
Download or read book Si-RF Technology written by Ayan Karmakar and published by Springer. This book was released on 2019-05-10 with total page 144 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book discusses the recent research developments of various passive microwave circuits on silicon substrate and demonstrated operations catering for multiple frequency bands. It covers the design, modelling, process fabrication and characterization aspects with practical examples. The book will be of use to researchers and engineers working in the field of RF or microwave engineering, who can use the techniques and approaches effectively without having to refer to multiple sources.
Book Synopsis Micromachined Circuits and Devices by : Shiban Kishen Koul
Download or read book Micromachined Circuits and Devices written by Shiban Kishen Koul and published by Springer Nature. This book was released on 2022-02-07 with total page 386 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents the design of different switching and resonant devices using the present state-of-the-art radio frequency (RF) micromachining (MEMS) technology. Different topologies of MEMS switches have been discussed considering optimum performances over microwave to millimeter wave frequency range. Wide varieties of micromachined switching networks starting from single-pole-double-throw (SPDT) to single-pole-fourteen-throw (SP14T) are discussed utilizing vertical and lateral actuation movements of the switch. Different transduction mechanisms of micromachined resonators are highlighted that includes capacitive, piezoelectric, and piezoresistive types. The book provides major design guidelines for the development of MEMS-based digital phase shifters, tunable filters, and antennas with extensive measurement data. Apart from the radio frequency (RF) requirements, an extensive guideline is given for the improvement of the reliability of micromachined switches and digital phase shifters where multiple switches are operating simultaneously. It takes multiple iterations and extensive characterizations to conclude with a reliable MEMS digital phase shifter, and these aspects are given one of the prime attentions in this book. Detailed performance analysis of metamaterial inspired MEMS switches is then discussed for application in millimeter wave frequency bands up to about 170 GHz. The book concludes with future research activities of RF MEMS technology and its potential in space, defense, sensors, and biomedical applications.
Book Synopsis RF MEMS Circuit Design for Wireless Communications by : Héctor J. de los Santos
Download or read book RF MEMS Circuit Design for Wireless Communications written by Héctor J. de los Santos and published by Artech House. This book was released on 2002 with total page 298 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the first comprehensive book to address the design of RF MEMS-based circuits for use in high performance wireless systems. A groundbreaking research and reference tool, the book enables you to understand the realm of applications of RF MEMS technology; become knowledgeable of the wide variety and performance levels of RF MEMS devices; and partition the architecture of wireless systems to achieve greater levels of performance. This innovative resource also guides you through the design process of RF MEMS-based circuits, and establishes a practical knowledge base for the design of high-yield RF MEMS-based circuits. The book features exercises and detailed case studies on working RF MEMS circuits that help you decide what approaches best fit your design constraints. This unified treatment of RF MEMS-based circuit technology opens up a new world of solutions for meeting the unique challenges of low power/portable wireless products.
Author :Uwe F. W. Behringer Publisher :SPIE-International Society for Optical Engineering ISBN 13 : Total Pages :460 pages Book Rating :4.3/5 (91 download)
Book Synopsis MEMS Design, Fabrication, Characterization, and Packaging by : Uwe F. W. Behringer
Download or read book MEMS Design, Fabrication, Characterization, and Packaging written by Uwe F. W. Behringer and published by SPIE-International Society for Optical Engineering. This book was released on 2001 with total page 460 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis RF MEMS Switching and Integrated Switching Circuits by : Ai-Qun Liu
Download or read book RF MEMS Switching and Integrated Switching Circuits written by Ai-Qun Liu and published by . This book was released on 2010 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Design and Fabrication of High Performance RF MEMS Devices by : Thomas David Kudrle
Download or read book Design and Fabrication of High Performance RF MEMS Devices written by Thomas David Kudrle and published by . This book was released on 2000 with total page 230 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Advanced RF MEMS by : Stepan Lucyszyn
Download or read book Advanced RF MEMS written by Stepan Lucyszyn and published by Cambridge University Press. This book was released on 2010-08-19 with total page 441 pages. Available in PDF, EPUB and Kindle. Book excerpt: An up-to-date guide to the theory and applications of RF MEMS. With detailed information about RF MEMS technology as well as its reliability and applications, this is a comprehensive resource for professionals, researchers, and students alike. • Reviews RF MEMS technologies • Illustrates new techniques that solve long-standing problems associated with reliability and packaging • Provides the information needed to incorporate RF MEMS into commercial products • Describes current and future trends in RF MEMS, providing perspective on industry growth • Ideal for those studying or working in RF and microwave circuits, systems, microfabrication and manufacturing, production management and metrology, and performance evaluation
Download or read book RF MEMS written by Gabriel M. Rebeiz and published by John Wiley & Sons. This book was released on 2004-02-06 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ultrasmall Radio Frequency and Micro-wave Microelectromechanical systems (RF MEMs), such as switches, varactors, and phase shifters, exhibit nearly zero power consumption or loss. For this reason, they are being developed intensively by corporations worldwide for use in telecommunications equipment. This book acquaints readers with the basics of RF MEMs and describes how to design practical circuits and devices with them. The author, an acknowledged expert in the field, presents a range of real-world applications and shares many valuable tricks of the trade.
Book Synopsis Handbook of Mems for Wireless and Mobile Applications by : Deepak Uttamchandani
Download or read book Handbook of Mems for Wireless and Mobile Applications written by Deepak Uttamchandani and published by Elsevier. This book was released on 2013-08-31 with total page 640 pages. Available in PDF, EPUB and Kindle. Book excerpt: The increasing demand for mobile and wireless sensing necessitates the use of highly integrated technology featuring small size, low weight, high performance and low cost: micro-electro-mechanical systems (MEMS) can meet this need. The Handbook of MEMS for wireless and mobile applications provides a comprehensive overview of radio frequency (RF) MEMS technologies and explores the use of these technologies over a wide range of application areas.Part one provides an introduction to the use of RF MEMS as an enabling technology for wireless applications. Chapters review RF MEMS technology and applications as a whole before moving on to describe specific technologies for wireless applications including passive components, phase shifters and antennas. Packaging and reliability of RF MEMS is also discussed. Chapters in part two focus on wireless techniques and applications of wireless MEMS including biomedical applications, such as implantable MEMS, intraocular pressure sensors and wireless drug delivery. Further chapters highlight the use of RF MEMS for automotive radar, the monitoring of telecommunications reliability using wireless MEMS and the use of optical MEMS displays in portable electronics.With its distinguished editor and international team of expert authors, the Handbook of MEMS for wireless and mobile applications is a technical resource for MEMS manufacturers, the electronics industry, and scientists, engineers and academics working on MEMS and wireless systems. - Reviews the use of radio frequency (RF) MEMS as an enabling technology for wireless applications - Discusses wireless techniques and applications of wireless MEMS, including biomedical applications - Describes monitoring structures and the environment with wireless MEMS
Book Synopsis Design and Test of Integrated Inductors for RF Applications by : Jaime Aguilera
Download or read book Design and Test of Integrated Inductors for RF Applications written by Jaime Aguilera and published by Springer Science & Business Media. This book was released on 2003-11-30 with total page 203 pages. Available in PDF, EPUB and Kindle. Book excerpt: Intended for engineers who are starting out in the design of integrated inductors, this book describes the whole design flow, basic selection of the geometry and optimisation of the quality by redesigning the geometry, measurement and de-embedding and characterisation.
