Design And Fabrication Of Self Packaged Flexible Mems Accelerometer And Aluminum Nitride Tactile Sensors

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Mems for Biomedical Applications

Author : Shekhar Bhansali
Publisher : Elsevier
ISBN 13 : 0857096273
Total Pages : 511 pages
Book Rating : 4.8/5 (57 download)

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Book Synopsis Mems for Biomedical Applications by : Shekhar Bhansali

Download or read book Mems for Biomedical Applications written by Shekhar Bhansali and published by Elsevier. This book was released on 2012-07-18 with total page 511 pages. Available in PDF, EPUB and Kindle. Book excerpt: The application of Micro Electro Mechanical Systems (MEMS) in the biomedical field is leading to a new generation of medical devices. MEMS for biomedical applications reviews the wealth of recent research on fabrication technologies and applications of this exciting technology.The book is divided into four parts: Part one introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms. Part two describes applications of MEMS for biomedical sensing and diagnostic applications. MEMS for in vivo sensing and electrical impedance spectroscopy are investigated, along with ultrasonic transducers, and lab-on-chip devices. MEMS for tissue engineering and clinical applications are the focus of part three, which considers cell culture and tissue scaffolding devices, BioMEMS for drug delivery and minimally invasive medical procedures. Finally, part four reviews emerging biomedical applications of MEMS, from implantable neuroprobes and ocular implants to cellular microinjection and hybrid MEMS.With its distinguished editors and international team of expert contributors, MEMS for biomedical applications provides an authoritative review for scientists and manufacturers involved in the design and development of medical devices as well as clinicians using this important technology. - Reviews the wealth of recent research on fabrication technologies and applications of Micro Electro Mechanical Systems (MEMS) in the biomedical field - Introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms - Considers MEMS for biomedical sensing and diagnostic applications, along with MEMS for in vivo sensing and electrical impedance spectroscopy

MEMS Materials and Processes Handbook

Author : Reza Ghodssi
Publisher : Springer Science & Business Media
ISBN 13 : 0387473181
Total Pages : 1211 pages
Book Rating : 4.3/5 (874 download)

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Book Synopsis MEMS Materials and Processes Handbook by : Reza Ghodssi

Download or read book MEMS Materials and Processes Handbook written by Reza Ghodssi and published by Springer Science & Business Media. This book was released on 2011-03-18 with total page 1211 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.

MEMS and Microsystems

Author : Tai-Ran Hsu
Publisher : McGraw-Hill Science, Engineering & Mathematics
ISBN 13 :
Total Pages : 456 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis MEMS and Microsystems by : Tai-Ran Hsu

Download or read book MEMS and Microsystems written by Tai-Ran Hsu and published by McGraw-Hill Science, Engineering & Mathematics. This book was released on 2002 with total page 456 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microsystems and MEMS technology is one of the biggest breakthroughs in the area of mechanical and electronic technology in recent years. This is the technology of extremely small and powerful devices, and systems built around them, which have mechanical and electrical components. MEMS technology is expanding rapidly, with major application areas being telecommunications, biomedical technology, manufacturing and robotic systems, transportation and aerospace. Academics are desperate for texts to familiarise future engineers with this broad-ranging technology. This text provides an engineering design approach to MEMS and microsystems which is appropriate for professionals and senior level students. This design approach is conveyed through good examples, cases and applied problems. The book is appropriate for mechanical and aerospace engineers, since it carefully explains the electrical/electronic aspects of the subject. Electrical engineering students will be given strong coverage of the mechanical side of MEMS, something they may not receive elsewhere.

Handbook of Modern Sensors

Author : Jacob Fraden
Publisher : Springer Science & Business Media
ISBN 13 : 0387216049
Total Pages : 596 pages
Book Rating : 4.3/5 (872 download)

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Book Synopsis Handbook of Modern Sensors by : Jacob Fraden

Download or read book Handbook of Modern Sensors written by Jacob Fraden and published by Springer Science & Business Media. This book was released on 2006-04-29 with total page 596 pages. Available in PDF, EPUB and Kindle. Book excerpt: Seven years have passed since the publication of the previous edition of this book. During that time, sensor technologies have made a remarkable leap forward. The sensitivity of the sensors became higher, the dimensions became smaller, the sel- tivity became better, and the prices became lower. What have not changed are the fundamental principles of the sensor design. They are still governed by the laws of Nature. Arguably one of the greatest geniuses who ever lived, Leonardo Da Vinci, had his own peculiar way of praying. He was saying, “Oh Lord, thanks for Thou do not violate your own laws. ” It is comforting indeed that the laws of Nature do not change as time goes by; it is just our appreciation of them that is being re?ned. Thus, this new edition examines the same good old laws of Nature that are employed in the designs of various sensors. This has not changed much since the previous edition. Yet, the sections that describe the practical designs are revised substantially. Recent ideas and developments have been added, and less important and nonessential designs were dropped. Probably the most dramatic recent progress in the sensor technologies relates to wide use of MEMS and MEOMS (micro-electro-mechanical systems and micro-electro-opto-mechanical systems). These are examined in this new edition with greater detail. This book is about devices commonly called sensors. The invention of a - croprocessor has brought highly sophisticated instruments into our everyday lives.

Piezoelectric Energy Harvesting

Author : Alper Erturk
Publisher : John Wiley & Sons
ISBN 13 : 1119991358
Total Pages : 377 pages
Book Rating : 4.1/5 (199 download)

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Book Synopsis Piezoelectric Energy Harvesting by : Alper Erturk

Download or read book Piezoelectric Energy Harvesting written by Alper Erturk and published by John Wiley & Sons. This book was released on 2011-04-04 with total page 377 pages. Available in PDF, EPUB and Kindle. Book excerpt: The transformation of vibrations into electric energy through the use of piezoelectric devices is an exciting and rapidly developing area of research with a widening range of applications constantly materialising. With Piezoelectric Energy Harvesting, world-leading researchers provide a timely and comprehensive coverage of the electromechanical modelling and applications of piezoelectric energy harvesters. They present principal modelling approaches, synthesizing fundamental material related to mechanical, aerospace, civil, electrical and materials engineering disciplines for vibration-based energy harvesting using piezoelectric transduction. Piezoelectric Energy Harvesting provides the first comprehensive treatment of distributed-parameter electromechanical modelling for piezoelectric energy harvesting with extensive case studies including experimental validations, and is the first book to address modelling of various forms of excitation in piezoelectric energy harvesting, ranging from airflow excitation to moving loads, thus ensuring its relevance to engineers in fields as disparate as aerospace engineering and civil engineering. Coverage includes: Analytical and approximate analytical distributed-parameter electromechanical models with illustrative theoretical case studies as well as extensive experimental validations Several problems of piezoelectric energy harvesting ranging from simple harmonic excitation to random vibrations Details of introducing and modelling piezoelectric coupling for various problems Modelling and exploiting nonlinear dynamics for performance enhancement, supported with experimental verifications Applications ranging from moving load excitation of slender bridges to airflow excitation of aeroelastic sections A review of standard nonlinear energy harvesting circuits with modelling aspects.

Robotic Tactile Sensing

Author : Ravinder S. Dahiya
Publisher : Springer Science & Business Media
ISBN 13 : 9400705794
Total Pages : 258 pages
Book Rating : 4.4/5 (7 download)

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Book Synopsis Robotic Tactile Sensing by : Ravinder S. Dahiya

Download or read book Robotic Tactile Sensing written by Ravinder S. Dahiya and published by Springer Science & Business Media. This book was released on 2012-07-29 with total page 258 pages. Available in PDF, EPUB and Kindle. Book excerpt: Future robots are expected to work closely and interact safely with real-world objects and humans alike. Sense of touch is important in this context, as it helps estimate properties such as shape, texture, hardness, material type and many more; provides action related information, such as slip detection; and helps carrying out actions such as rolling an object between fingers without dropping it. This book presents an in-depth description of the solutions available for gathering tactile data, obtaining aforementioned tactile information from the data and effectively using the same in various robotic tasks. The efforts during last four decades or so have yielded a wide spectrum of tactile sensing technologies and engineered solutions for both intrinsic and extrinsic touch sensors. Nowadays, new materials and structures are being explored for obtaining robotic skin with physical features like bendable, conformable, and stretchable. Such features are important for covering various body parts of robots or 3D surfaces. Nonetheless, there exist many more hardware, software and application related issues that must be considered to make tactile sensing an effective component of future robotic platforms. This book presents an in-depth analysis of various system related issues and presents the trade-offs one may face while developing an effective tactile sensing system. For this purpose, human touch sensing has also been explored. The design hints coming out of the investigations into human sense of touch can be useful in improving the effectiveness of tactile sensory modality in robotics and other machines. Better integration of tactile sensors on a robot’s body is prerequisite for the effective utilization of tactile data. The concept of semiconductor devices based sensors is an interesting one, as it allows compact and fast tactile sensing systems with capabilities such as human-like spatio-temporal resolution. This book presents a comprehensive description of semiconductor devices based tactile sensing. In particular, novel Piezo Oxide Semiconductor Field Effect Transistor (POSFET) based approach for high resolution tactile sensing has been discussed in detail. Finally, the extension of semiconductors devices based sensors concept to large and flexile areas has been discussed for obtaining robotic or electronic skin. With its multidisciplinary scope, this book is suitable for graduate students and researchers coming from diverse areas such robotics (bio-robots, humanoids, rehabilitation etc.), applied materials, humans touch sensing, electronics, microsystems, and instrumentation. To better explain the concepts the text is supported by large number of figures.

Semiconductor Packaging

Author : Andrea Chen
Publisher : CRC Press
ISBN 13 : 1439862079
Total Pages : 216 pages
Book Rating : 4.4/5 (398 download)

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Book Synopsis Semiconductor Packaging by : Andrea Chen

Download or read book Semiconductor Packaging written by Andrea Chen and published by CRC Press. This book was released on 2016-04-19 with total page 216 pages. Available in PDF, EPUB and Kindle. Book excerpt: In semiconductor manufacturing, understanding how various materials behave and interact is critical to making a reliable and robust semiconductor package. Semiconductor Packaging: Materials Interaction and Reliability provides a fundamental understanding of the underlying physical properties of the materials used in a semiconductor package. By tying together the disparate elements essential to a semiconductor package, the authors show how all the parts fit and work together to provide durable protection for the integrated circuit chip within as well as a means for the chip to communicate with the outside world. The text also covers packaging materials for MEMS, solar technology, and LEDs and explores future trends in semiconductor packages.

CMOS - MEMS

Author : Henry Baltes
Publisher : John Wiley & Sons
ISBN 13 : 3527616934
Total Pages : 612 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis CMOS - MEMS by : Henry Baltes

Download or read book CMOS - MEMS written by Henry Baltes and published by John Wiley & Sons. This book was released on 2008-07-11 with total page 612 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microstructures, electronics, nanotechnology - these vast fields of research are growing together as the size gap narrows and many different materials are combined. Current research, engineering sucesses and newly commercialized products hint at the immense innovative potentials and future applications that open up once mankind controls shape and function from the atomic level right up to the visible world without any gaps. Sensor systems, microreactors, nanostructures, nanomachines, functional surfaces, integrated optics, displays, communications technology, biochips, human/machine interfaces, prosthetics, miniaturized medical and surgery equipment and many more opportunities are being explored. This new series, Advanced Micro and Nano Systems, provides cutting-edge reviews from top authors on technologies, devices and advanced systems from the micro and nano worlds.

Principles of Deglutition

Author : Reza Shaker
Publisher : Springer Science & Business Media
ISBN 13 : 1461437938
Total Pages : 994 pages
Book Rating : 4.4/5 (614 download)

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Book Synopsis Principles of Deglutition by : Reza Shaker

Download or read book Principles of Deglutition written by Reza Shaker and published by Springer Science & Business Media. This book was released on 2012-09-20 with total page 994 pages. Available in PDF, EPUB and Kindle. Book excerpt: Principles of Deglutition is the first in class comprehensive multidisciplinary textbook to encompass the entire field of normal and disordered deglutition. It is designed as the definitive text for all those who desire to further their knowledge of the dynamic and expanding field of deglutology. The text is created to serve as a treasured reference for clinicians, educators and trainees from such diverse backgrounds as gastroenterology, speech language pathology, otolaryngology, rehabilitation medicine, radiology and others. Principles of Deglutition brings together the state-of-knowledge from 12 disciplines involved in dysphagia through contributions of over one hundred thought leaders and master clinicians for the benefit of patients and providers alike. It concisely organizes the wealth of knowledge that exists in each of the contributing disciplines into one comprehensive information platform. Principles of Deglutition provides a one-stop destination for members of all specialties to obtain state-of-the-art and critically reviewed information regarding deglutition physiology, pathophysiology, diagnosis and management. It delivers a comprehensive and in depth review of deglutition related cerebral cortical, brainstem, peripheral nerves, and neuromuscular mechanisms, advanced diagnostic modalities and standard of care and cutting edge medical, rehabilitative and surgical treatments. It is an essential reference for all deglutologists.

MEMS

Author : Mohamed Gad-el-Hak
Publisher : CRC Press
ISBN 13 : 1420036556
Total Pages : 576 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis MEMS by : Mohamed Gad-el-Hak

Download or read book MEMS written by Mohamed Gad-el-Hak and published by CRC Press. This book was released on 2005-11-29 with total page 576 pages. Available in PDF, EPUB and Kindle. Book excerpt: As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection

Understanding Smart Sensors

Author : Randy Frank
Publisher : Artech House Publishers
ISBN 13 :
Total Pages : 296 pages
Book Rating : 4.4/5 (91 download)

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Book Synopsis Understanding Smart Sensors by : Randy Frank

Download or read book Understanding Smart Sensors written by Randy Frank and published by Artech House Publishers. This book was released on 1996 with total page 296 pages. Available in PDF, EPUB and Kindle. Book excerpt: "Two of the most important trends in sensor development in recent years have been advances in micromachined sensing elements of all kinds, and the increase in intelligence applied at the sensor level. This book addresses both, and provides a good overview of current technology". -- I&CS

Sensors for Automotive Applications

Author : Jiri Marek
Publisher : John Wiley & Sons
ISBN 13 : 352760507X
Total Pages : 584 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis Sensors for Automotive Applications by : Jiri Marek

Download or read book Sensors for Automotive Applications written by Jiri Marek and published by John Wiley & Sons. This book was released on 2006-03-06 with total page 584 pages. Available in PDF, EPUB and Kindle. Book excerpt: Taken as a whole, this series covers all major fields of application for commercial sensors, as well as their manufacturing techniques and major types. As such the series does not treat bulk sensors, but rather places strong emphasis on microsensors, microsystems and integrated electronic sensor packages. Each of the individual volumes is tailored to the needs and queries of readers from the relevant branch of industry. An international team of experts from the leading companies in this field gives a detailed picture of existing as well as future applications. They discuss in detail current technologies, design and construction concepts, market considerations and commercial developments. Topics covered include vehicle safety, fuel consumption, air conditioning, emergency control, traffic control systems, and electronic guidance using radar and video.

Fundamentals of Materials Science

Author : Eric J. Mittemeijer
Publisher : Springer Nature
ISBN 13 : 3030600564
Total Pages : 754 pages
Book Rating : 4.0/5 (36 download)

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Book Synopsis Fundamentals of Materials Science by : Eric J. Mittemeijer

Download or read book Fundamentals of Materials Science written by Eric J. Mittemeijer and published by Springer Nature. This book was released on 2022-01-01 with total page 754 pages. Available in PDF, EPUB and Kindle. Book excerpt: This textbook offers a strong introduction to the fundamental concepts of materials science. It conveys the quintessence of this interdisciplinary field, distinguishing it from merely solid-state physics and solid-state chemistry, using metals as model systems to elucidate the relation between microstructure and materials properties. Mittemeijer's Fundamentals of Materials Science provides a consistent treatment of the subject matter with a special focus on the microstructure-property relationship. Richly illustrated and thoroughly referenced, it is the ideal adoption for an entire undergraduate, and even graduate, course of study in materials science and engineering. It delivers a solid background against which more specialized texts can be studied, covering the necessary breadth of key topics such as crystallography, structure defects, phase equilibria and transformations, diffusion and kinetics, and mechanical properties. The success of the first edition has led to this updated and extended second edition, featuring detailed discussion of electron microscopy, supermicroscopy and diffraction methods, an extended treatment of diffusion in solids, and a separate chapter on phase transformation kinetics. “In a lucid and masterly manner, the ways in which the microstructure can affect a host of basic phenomena in metals are described.... By consistently staying with the postulated topic of the microstructure - property relationship, this book occupies a singular position within the broad spectrum of comparable materials science literature .... it will also be of permanent value as a reference book for background refreshing, not least because of its unique annotated intermezzi; an ambitious, remarkable work.” G. Petzow in International Journal of Materials Research. “The biggest strength of the book is the discussion of the structure-property relationships, which the author has accomplished admirably.... In a nutshell, the book should not be looked at as a quick ‘cook book’ type text, but as a serious, critical treatise for some significant time to come.” G.S. Upadhyaya in Science of Sintering. “The role of lattice defects in deformation processes is clearly illustrated using excellent diagrams . Included are many footnotes, ‘Intermezzos’, ‘Epilogues’ and asides within the text from the author’s experience. This ..... soon becomes valued for the interesting insights into the subject and shows the human side of its history. Overall this book provides a refreshing treatment of this important subject and should prove a useful addition to the existing text books available to undergraduate and graduate students and researchers in the field of materials science.” M. Davies in Materials World.

Microsystem Design

Author : Stephen D. Senturia
Publisher : Springer Science & Business Media
ISBN 13 : 0306476010
Total Pages : 699 pages
Book Rating : 4.3/5 (64 download)

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Book Synopsis Microsystem Design by : Stephen D. Senturia

Download or read book Microsystem Design written by Stephen D. Senturia and published by Springer Science & Business Media. This book was released on 2005-12-20 with total page 699 pages. Available in PDF, EPUB and Kindle. Book excerpt: It is a real pleasure to write the Foreword for this book, both because I have known and respected its author for many years and because I expect this book’s publication will mark an important milestone in the continuing worldwide development of microsystems. By bringing together all aspects of microsystem design, it can be expected to facilitate the training of not only a new generation of engineers, but perhaps a whole new type of engineer – one capable of addressing the complex range of problems involved in reducing entire systems to the micro- and nano-domains. This book breaks down disciplinary barriers to set the stage for systems we do not even dream of today. Microsystems have a long history, dating back to the earliest days of mic- electronics. While integrated circuits developed in the early 1960s, a number of laboratories worked to use the same technology base to form integrated sensors. The idea was to reduce cost and perhaps put the sensors and circuits together on the same chip. By the late-60s, integrated MOS-photodiode arrays had been developed for visible imaging, and silicon etching was being used to create thin diaphragms that could convert pressure into an electrical signal. By 1970, selective anisotropic etching was being used for diaphragm formation, retaining a thick silicon rim to absorb package-induced stresses. Impurity- and electrochemically-based etch-stops soon emerged, and "bulk micromachining" came into its own.

MEMS and NEMS

Author : Sergey Edward Lyshevski
Publisher : CRC Press
ISBN 13 : 1420040510
Total Pages : 461 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis MEMS and NEMS by : Sergey Edward Lyshevski

Download or read book MEMS and NEMS written by Sergey Edward Lyshevski and published by CRC Press. This book was released on 2018-10-03 with total page 461 pages. Available in PDF, EPUB and Kindle. Book excerpt: The development of micro- and nano-mechanical systems (MEMS and NEMS) foreshadows momentous changes not only in the technological world, but in virtually every aspect of human life. The future of the field is bright with opportunities, but also riddled with challenges, ranging from further theoretical development through advances in fabrication technologies, to developing high-performance nano- and microscale systems, devices, and structures, including transducers, switches, logic gates, actuators and sensors. MEMS and NEMS: Systems, Devices, and Structures is designed to help you meet those challenges and solve fundamental, experimental, and applied problems. Written from a multi-disciplinary perspective, this book forms the basis for the synthesis, modeling, analysis, simulation, control, prototyping, and fabrication of MEMS and NEMS. The author brings together the various paradigms, methods, and technologies associated with MEMS and NEMS to show how to synthesize, analyze, design, and fabricate them. Focusing on the basics, he illustrates the development of NEMS and MEMS architectures, physical representations, structural synthesis, and optimization. The applications of MEMS and NEMS in areas such as biotechnology, medicine, avionics, transportation, and defense are virtually limitless. This book helps prepare you to take advantage of their inherent opportunities and effectively solve problems related to their configurations, systems integration, and control.

MEMS Pressure Sensors: Fabrication and Process Optimization

Author : Parvej Ahmad Alvi
Publisher : Lulu.com
ISBN 13 : 8461622073
Total Pages : 176 pages
Book Rating : 4.4/5 (616 download)

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Book Synopsis MEMS Pressure Sensors: Fabrication and Process Optimization by : Parvej Ahmad Alvi

Download or read book MEMS Pressure Sensors: Fabrication and Process Optimization written by Parvej Ahmad Alvi and published by Lulu.com. This book was released on 2014-07-14 with total page 176 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS Pressure Sensors: Fabrication and Process Optimization - describs the step by step fabrication process sequence along with flow chart for fabrication of micro pressure sensors taking into account various aspects of fabrication and designing of the pressure sensors as well as fabrication process optimization. A complete experimental detail before and after each step of fabrication of the sensor has also been discussed. This leads to the uniqueness of the book. MEMS Pressure Sensors: Fabrication and Process Optimization will greatly benefit undergraduate and postgraduate students of MEMS and NEMS courses. Process engineers and technologists in the microelectronics industry including MEMS-based sensors manufacturers.

MEMS Linear and Nonlinear Statics and Dynamics

Author : Mohammad I. Younis
Publisher : Springer Science & Business Media
ISBN 13 : 1441960201
Total Pages : 463 pages
Book Rating : 4.4/5 (419 download)

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Book Synopsis MEMS Linear and Nonlinear Statics and Dynamics by : Mohammad I. Younis

Download or read book MEMS Linear and Nonlinear Statics and Dynamics written by Mohammad I. Younis and published by Springer Science & Business Media. This book was released on 2011-06-27 with total page 463 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS Linear and Nonlinear Statics and Dynamics presents the necessary analytical and computational tools for MEMS designers to model and simulate most known MEMS devices, structures, and phenomena. This book also provides an in-depth analysis and treatment of the most common static and dynamic phenomena in MEMS that are encountered by engineers. Coverage also includes nonlinear modeling approaches to modeling various MEMS phenomena of a nonlinear nature, such as those due to electrostatic forces, squeeze-film damping, and large deflection of structures. The book also: Includes examples of numerous MEMS devices and structures that require static or dynamic modeling Provides code for programs in Matlab, Mathematica, and ANSYS for simulating the behavior of MEMS structures Provides real world problems related to the dynamics of MEMS such as dynamics of electrostatically actuated devices, stiction and adhesion of microbeams due to electrostatic and capillary forces MEMS Linear and Nonlinear Statics and Dynamics is an ideal volume for researchers and engineers working in MEMS design and fabrication.