Characterization Of Hf Si Oxynitride Pseudo Ternary Gate Dielectrics For The Application Of Ge Mosfets

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Materials Fundamentals of Gate Dielectrics

Author : Alexander A. Demkov
Publisher : Springer
ISBN 13 : 9789048167869
Total Pages : 0 pages
Book Rating : 4.1/5 (678 download)

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Book Synopsis Materials Fundamentals of Gate Dielectrics by : Alexander A. Demkov

Download or read book Materials Fundamentals of Gate Dielectrics written by Alexander A. Demkov and published by Springer. This book was released on 2011-02-03 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents the fundamentals of novel gate dielectrics that are being introduced into semiconductor manufacturing to ensure the continuous scaling of CMOS devices. As this is a rapidly evolving field of research we choose to focus on the materials that determine the performance of device applications. Most of these materials are transition metal oxides. Ironically, the d-orbitals responsible for the high dielectric constant cause severe integration difficulties, thus intrinsically limiting high-k dielectrics. Though new in the electronics industry many of these materials are well-known in the field of ceramics, and we describe this unique connection. The complexity of the structure-property relations in TM oxides requires the use of state-of-the-art first-principles calculations. Several chapters give a detailed description of the modern theory of polarization, and heterojunction band discontinuity within the framework of the density functional theory. Experimental methods include oxide melt solution calorimetry and differential scanning calorimetry, Raman scattering and other optical characterization techniques, transmission electron microscopy, and X-ray photoelectron spectroscopy. Many of the problems encountered in the world of CMOS are also relevant for other semiconductors such as GaAs. A comprehensive review of recent developments in this field is thus also given.

Germanium-Based Technologies

Author : Cor Claeys
Publisher : Elsevier
ISBN 13 : 008047490X
Total Pages : 476 pages
Book Rating : 4.0/5 (84 download)

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Book Synopsis Germanium-Based Technologies by : Cor Claeys

Download or read book Germanium-Based Technologies written by Cor Claeys and published by Elsevier. This book was released on 2011-07-28 with total page 476 pages. Available in PDF, EPUB and Kindle. Book excerpt: Germanium is a semiconductor material that formed the basis for the development of transistor technology. Although the breakthrough of planar technology and integrated circuits put silicon in the foreground, in recent years there has been a renewed interest in germanium, which has been triggered by its strong potential for deep submicron (sub 45 nm) technologies. Germanium-Based technologies: From Materials to Devices is the first book to provide a broad, in-depth coverage of the field, including recent advances in Ge-technology and the fundamentals in material science, device physics and semiconductor processing. The contributing authors are international experts with a world-wide recognition and involved in the leading research in the field. The book also covers applications and the use of Ge for optoelectronics, detectors and solar cells. An ideal reference work for students and scientists working in the field of physics of semiconductor devices and materials, as well as for engineers in research centres and industry. Both the newcomer and the expert should benefit from this unique book. - State-of-the-art information available for the first time as an all-in-source - Extensive reference list making it an indispensable reference book - Broad coverage from fundamental aspects up to industrial applications

Physics of Carbon Nanotube Devices

Author : Francois Leonard
Publisher : William Andrew
ISBN 13 : 0815519680
Total Pages : 411 pages
Book Rating : 4.8/5 (155 download)

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Book Synopsis Physics of Carbon Nanotube Devices by : Francois Leonard

Download or read book Physics of Carbon Nanotube Devices written by Francois Leonard and published by William Andrew. This book was released on 2008-11-18 with total page 411 pages. Available in PDF, EPUB and Kindle. Book excerpt: Possibly the most impactful material in the nanotechnology arena, carbon nanotubes have spurred a tremendous amount of scientific research and development. Their superior mechanical and chemical robustness makes them easily manipulable and allows for the assembly of various types of devices, including electronic, electromechanical, opto-electronic and sensing devices.In the field of nanotube devices, however, concepts that describe the properties of conventional devices do not apply. Carbon nanotube devices behave much differently from those using traditional materials, and offer entirely new functionality. This book – designed for researchers, engineers and graduate students alike – bridges the experimental and theoretical aspects of carbon nanotube devices. It emphasizes and explains the underlying physics that govern their working principles, including applications in electronics, nanoelectromechanical systems, field emission, optoelectronics and sensing. Other topics include: electrical contacts, p-n junctions, transistors, ballistic transport, field emission, oscillators, rotational actuators, electron-phonon scattering, photoconductivity, and light emission. Many of the aspects discussed here differ significantly from those learned in books or traditional materials, and are essential for the future development of carbon nanotube technology.• Bridges experimental and theoretical aspects of carbon nanotube devices, focusing on the underlying physics that govern their working principles • Explains applications in electronics, nanoelectromechanical systems, field emission, optoelectronics and sensing. • Other topics include: electrical contacts, p-n junctions, transistors, ballistic transport, field emission, oscillators, rotational actuators, electron-phonon scattering, photoconductivity, and light emission. • Covers aspects that significantly differ from those learned in traditional materials, yet are essential for future advancement of carbon nanotube technology.* Bridges experimental and theoretical aspects of carbon nanotube devices, focusing on the underlying physics that govern their working principles * Explains applications in electronics, nanoelectromechanical systems, field emission, optoelectronics and sensing.* Other topics include: electrical contacts, p-n junctions, transistors, ballistic transport, field emission, oscillators, rotational actuators, electron-phonon scattering, photoconductivity, and light emission* Covers aspects that significantly differ from those learned in traditional materials, yet are essential for future advancement of carbon nanotube technology.

Selected Semiconductor Research

Author : Ming Fu Li
Publisher : World Scientific
ISBN 13 : 1908978384
Total Pages : 529 pages
Book Rating : 4.9/5 (89 download)

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Book Synopsis Selected Semiconductor Research by : Ming Fu Li

Download or read book Selected Semiconductor Research written by Ming Fu Li and published by World Scientific. This book was released on 2011-02-28 with total page 529 pages. Available in PDF, EPUB and Kindle. Book excerpt: This unique volume assembles the author's scientific and engineering achievements of the past three decades in the areas of (1) semiconductor physics and materials, including topics in deep level defects and band structures, (2) CMOS devices, including the topics in device technology, CMOS device reliability, and nano CMOS device quantum modeling, and (3) Analog Integrated circuit design. It reflects the scientific career of a semiconductor researcher educated in China during the 20th century. The book can be referenced by research scientists, engineers, and graduate students working in the areas of solid state and semiconductor physics and materials, electrical engineering and semiconductor devices, and chemical engineering./a

High Dielectric Constant Materials

Author : Howard Huff
Publisher : Springer Science & Business Media
ISBN 13 : 9783540210818
Total Pages : 740 pages
Book Rating : 4.2/5 (18 download)

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Book Synopsis High Dielectric Constant Materials by : Howard Huff

Download or read book High Dielectric Constant Materials written by Howard Huff and published by Springer Science & Business Media. This book was released on 2005 with total page 740 pages. Available in PDF, EPUB and Kindle. Book excerpt: Issues relating to the high-K gate dielectric are among the greatest challenges for the evolving International Technology Roadmap for Semiconductors (ITRS). More than just an historical overview, this book will assess previous and present approaches related to scaling the gate dielectric and their impact, along with the creative directions and forthcoming challenges that will define the future of gate dielectric scaling technology. Topics include: an extensive review of Moore's Law, the classical regime for SiO2 gate dielectrics; the transition to silicon oxynitride gate dielectrics; the transition to high-K gate dielectrics (including the drive towards equivalent oxide thickness in the single-digit nanometer regime); and future directions and issues for ultimate technology generation scaling. The vision, wisdom, and experience of the team of authors will make this book a timely, relevant, and interesting, resource focusing on fundamentals of the 45 nm Technology Generation and beyond.

CRC Handbook of Metal Etchants

Author : Perrin Walker
Publisher : CRC Press
ISBN 13 : 9781439822531
Total Pages : 1434 pages
Book Rating : 4.8/5 (225 download)

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Book Synopsis CRC Handbook of Metal Etchants by : Perrin Walker

Download or read book CRC Handbook of Metal Etchants written by Perrin Walker and published by CRC Press. This book was released on 1990-12-11 with total page 1434 pages. Available in PDF, EPUB and Kindle. Book excerpt: This publication presents cleaning and etching solutions, their applications, and results on inorganic materials. It is a comprehensive collection of etching and cleaning solutions in a single source. Chemical formulas are presented in one of three standard formats - general, electrolytic or ionized gas formats - to insure inclusion of all necessary operational data as shown in references that accompany each numbered formula. The book describes other applications of specific solutions, including their use on other metals or metallic compounds. Physical properties, association of natural and man-made minerals, and materials are shown in relationship to crystal structure, special processing techniques and solid state devices and assemblies fabricated. This publication also presents a number of organic materials which are widely used in handling and general processing...waxes, plastics, and lacquers for example. It is useful to individuals involved in study, development, and processing of metals and metallic compounds. It is invaluable for readers from the college level to industrial R & D and full-scale device fabrication, testing and sales. Scientific disciplines, work areas and individuals with great interest include: chemistry, physics, metallurgy, geology, solid state, ceramic and glass, research libraries, individuals dealing with chemical processing of inorganic materials, societies and schools.

Materials Chemistry

Author : Bradley D. Fahlman
Publisher : Springer
ISBN 13 : 9402412557
Total Pages : 817 pages
Book Rating : 4.4/5 (24 download)

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Book Synopsis Materials Chemistry by : Bradley D. Fahlman

Download or read book Materials Chemistry written by Bradley D. Fahlman and published by Springer. This book was released on 2018-08-28 with total page 817 pages. Available in PDF, EPUB and Kindle. Book excerpt: The 3rd edition of this successful textbook continues to build on the strengths that were recognized by a 2008 Textbook Excellence Award from the Text and Academic Authors Association (TAA). Materials Chemistry addresses inorganic-, organic-, and nano-based materials from a structure vs. property treatment, providing a suitable breadth and depth coverage of the rapidly evolving materials field — in a concise format. The 3rd edition offers significant updates throughout, with expanded sections on sustainability, energy storage, metal-organic frameworks, solid electrolytes, solvothermal/microwave syntheses, integrated circuits, and nanotoxicity. Most appropriate for Junior/Senior undergraduate students, as well as first-year graduate students in chemistry, physics, or engineering fields, Materials Chemistry may also serve as a valuable reference to industrial researchers. Each chapter concludes with a section that describes important materials applications, and an updated list of thought-provoking questions.

The Physics and Chemistry of SiO2 and the Si-SiO2 Interface 2

Author : B.E. Deal
Publisher : Springer Science & Business Media
ISBN 13 : 1489915885
Total Pages : 505 pages
Book Rating : 4.4/5 (899 download)

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Book Synopsis The Physics and Chemistry of SiO2 and the Si-SiO2 Interface 2 by : B.E. Deal

Download or read book The Physics and Chemistry of SiO2 and the Si-SiO2 Interface 2 written by B.E. Deal and published by Springer Science & Business Media. This book was released on 2013-11-09 with total page 505 pages. Available in PDF, EPUB and Kindle. Book excerpt: The first international symposium on the subject "The Physics and Chemistry of Si02 and the Si-Si02 Interface," organized in association with the Electrochemical Society, Inc. , was held in Atlanta, Georgia on May 15- 20, 1988. This symposium contained sixty papers and was so successful that the sponsoring divisions decided to schedule it on a regular basis every four years. Thus, the second symposium on "The Physics and Chemistry of Si02 and the Si02 Interface was held May 18-21, 1992 in St. Louis, Missouri, again sponsored by the Electronics and Dielectrics Science and Technology Divisions of The Electrochemical Society. This volume contains manuscripts of most of the fifty nine papers presented at the 1992 symposium, and is divided into eight chapters - approximating the organization of the symposium. Each chapter is preceded with an introduction by the session organizers. It is appropriate to provide a general assessment of the current status and understanding of the physics and chemistry of Si02 and the Si02 interface before proceeding with a brief overview of the individual chapters. Semiconductor devices have continued to scale down in both horizontal and vertical dimensions. This has resulted in thinner gate and field oxides as well as much closer spacing of individual device features. As a result, surface condition, native oxide composition, and cleaning and impurity effects now provide a much more significant contribution to the properties of oxides and their interfaces.

The Computer Engineering Handbook

Author : Vojin G. Oklobdzija
Publisher : CRC Press
ISBN 13 : 1420041541
Total Pages : 1409 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis The Computer Engineering Handbook by : Vojin G. Oklobdzija

Download or read book The Computer Engineering Handbook written by Vojin G. Oklobdzija and published by CRC Press. This book was released on 2001-12-26 with total page 1409 pages. Available in PDF, EPUB and Kindle. Book excerpt: There is arguably no field in greater need of a comprehensive handbook than computer engineering. The unparalleled rate of technological advancement, the explosion of computer applications, and the now-in-progress migration to a wireless world have made it difficult for engineers to keep up with all the developments in specialties outside their own

Integrated Silicon Optoelectronics

Author : Horst Zimmermann
Publisher : Springer
ISBN 13 : 3642015212
Total Pages : 397 pages
Book Rating : 4.6/5 (42 download)

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Book Synopsis Integrated Silicon Optoelectronics by : Horst Zimmermann

Download or read book Integrated Silicon Optoelectronics written by Horst Zimmermann and published by Springer. This book was released on 2009-10-03 with total page 397 pages. Available in PDF, EPUB and Kindle. Book excerpt: Integrated Silicon Optoelectronics synthesizes topics from optoelectronics and microelectronics. The book concentrates on silicon as the major base of modern semiconductor devices and circuits. Starting from the basics of optical emission and absorption, as well as from the device physics of photodetectors, the aspects of the integration of photodetectors in modern bipolar, CMOS, and BiCMOS technologies are discussed. Detailed descriptions of fabrication technologies and applications of optoelectronic integrated circuits are included. The book, furthermore, contains a review of the newest state of research on eagerly anticipated silicon light emitters. In order to cover the topics comprehensively, also included are integrated waveguides, gratings, and optoelectronic power devices. Numerous elaborate illustrations facilitate and enhance comprehension. This extended edition will be of value to engineers, physicists, and scientists in industry and at universities. The book is also recommended to graduate students specializing on microelectronics or optoelectronics.

Hard X-ray Photoelectron Spectroscopy (HAXPES)

Author : Joseph Woicik
Publisher : Springer
ISBN 13 : 3319240439
Total Pages : 576 pages
Book Rating : 4.3/5 (192 download)

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Book Synopsis Hard X-ray Photoelectron Spectroscopy (HAXPES) by : Joseph Woicik

Download or read book Hard X-ray Photoelectron Spectroscopy (HAXPES) written by Joseph Woicik and published by Springer. This book was released on 2015-12-26 with total page 576 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides the first complete and up-to-date summary of the state of the art in HAXPES and motivates readers to harness its powerful capabilities in their own research. The chapters are written by experts. They include historical work, modern instrumentation, theory and applications. This book spans from physics to chemistry and materials science and engineering. In consideration of the rapid development of the technique, several chapters include highlights illustrating future opportunities as well.

Methods for Phase Diagram Determination

Author : Ji-Cheng Zhao
Publisher : Elsevier
ISBN 13 : 0080549969
Total Pages : 522 pages
Book Rating : 4.0/5 (85 download)

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Book Synopsis Methods for Phase Diagram Determination by : Ji-Cheng Zhao

Download or read book Methods for Phase Diagram Determination written by Ji-Cheng Zhao and published by Elsevier. This book was released on 2011-05-05 with total page 522 pages. Available in PDF, EPUB and Kindle. Book excerpt: Phase diagrams are "maps" materials scientists often use to design new materials. They define what compounds and solutions are formed and their respective compositions and amounts when several elements are mixed together under a certain temperature and pressure. This monograph is the most comprehensive reference book on experimental methods for phase diagram determination. It covers a wide range of methods that have been used to determine phase diagrams of metals, ceramics, slags, and hydrides.* Extensive discussion on methodologies of experimental measurements and data assessments * Written by experts around the world, covering both traditional and combinatorial methodologies* A must-read for experimental measurements of phase diagrams

Copper Interconnect Technology

Author : Tapan Gupta
Publisher : Springer Science & Business Media
ISBN 13 : 1441900764
Total Pages : 433 pages
Book Rating : 4.4/5 (419 download)

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Book Synopsis Copper Interconnect Technology by : Tapan Gupta

Download or read book Copper Interconnect Technology written by Tapan Gupta and published by Springer Science & Business Media. This book was released on 2010-01-22 with total page 433 pages. Available in PDF, EPUB and Kindle. Book excerpt: Since overall circuit performance has depended primarily on transistor properties, previous efforts to enhance circuit and system speed were focused on transistors as well. During the last decade, however, the parasitic resistance, capacitance, and inductance associated with interconnections began to influence circuit performance and will be the primary factors in the evolution of nanoscale ULSI technology. Because metallic conductivity and resistance to electromigration of bulk copper (Cu) are better than aluminum, use of copper and low-k materials is now prevalent in the international microelectronics industry. As the feature size of the Cu-lines forming interconnects is scaled, resistivity of the lines increases. At the same time electromigration and stress-induced voids due to increased current density become significant reliability issues. Although copper/low-k technology has become fairly mature, there is no single book available on the promise and challenges of these next-generation technologies. In this book, a leader in the field describes advanced laser systems with lower radiation wavelengths, photolithography materials, and mathematical modeling approaches to address the challenges of Cu-interconnect technology.

Wafer Bonding

Author : Marin Alexe
Publisher : Springer Science & Business Media
ISBN 13 : 9783540210498
Total Pages : 524 pages
Book Rating : 4.2/5 (14 download)

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Book Synopsis Wafer Bonding by : Marin Alexe

Download or read book Wafer Bonding written by Marin Alexe and published by Springer Science & Business Media. This book was released on 2004-05-14 with total page 524 pages. Available in PDF, EPUB and Kindle. Book excerpt: During the past decade direct wafer bonding has developed into a mature materials integration technology. This book presents state-of-the-art reviews of the most important applications of wafer bonding written by experts from industry and academia. The topics include bonding-based fabrication methods of silicon-on-insulator, photonic crystals, VCSELs, SiGe-based FETs, MEMS together with hybrid integration and laser lift-off. The non-specialist will learn about the basics of wafer bonding and its various application areas, while the researcher in the field will find up-to-date information about this fast-moving area, including relevant patent information.

Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set

Author : Marc J. Madou
Publisher : CRC Press
ISBN 13 : 1482274663
Total Pages : 1983 pages
Book Rating : 4.4/5 (822 download)

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Book Synopsis Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set by : Marc J. Madou

Download or read book Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set written by Marc J. Madou and published by CRC Press. This book was released on 2018-12-14 with total page 1983 pages. Available in PDF, EPUB and Kindle. Book excerpt: Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.

Nanoelectronic Materials

Author : Loutfy H. Madkour
Publisher : Springer
ISBN 13 : 3030216217
Total Pages : 814 pages
Book Rating : 4.0/5 (32 download)

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Book Synopsis Nanoelectronic Materials by : Loutfy H. Madkour

Download or read book Nanoelectronic Materials written by Loutfy H. Madkour and published by Springer. This book was released on 2019-06-27 with total page 814 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents synthesis techniques for the preparation of low-dimensional nanomaterials including 0D (quantum dots), 1D (nanowires, nanotubes) and 2D (thin films, few layers), as well as their potential applications in nanoelectronic systems. It focuses on the size effects involved in the transition from bulk materials to nanomaterials; the electronic properties of nanoscale devices; and different classes of nanomaterials from microelectronics to nanoelectronics, to molecular electronics. Furthermore, it demonstrates the structural stability, physical, chemical, magnetic, optical, electrical, thermal, electronic and mechanical properties of the nanomaterials. Subsequent chapters address their characterization, fabrication techniques from lab-scale to mass production, and functionality. In turn, the book considers the environmental impact of nanotechnology and novel applications in the mechanical industries, energy harvesting, clean energy, manufacturing materials, electronics, transistors, health and medical therapy. In closing, it addresses the combination of biological systems with nanoelectronics and highlights examples of nanoelectronic–cell interfaces and other advanced medical applications. The book answers the following questions: • What is different at the nanoscale? • What is new about nanoscience? • What are nanomaterials (NMs)? • What are the fundamental issues in nanomaterials? • Where are nanomaterials found? • What nanomaterials exist in nature? • What is the importance of NMs in our lives? • Why so much interest in nanomaterials? • What is at nanoscale in nanomaterials? • What is graphene? • Are pure low-dimensional systems interesting and worth pursuing? • Are nanotechnology products currently available? • What are sensors? • How can Artificial Intelligence (AI) and nanotechnology work together? • What are the recent advances in nanoelectronic materials? • What are the latest applications of NMs?

Sensors and Sensory Systems for an Electronic Nose

Author : J. Gardner
Publisher : Springer Science & Business Media
ISBN 13 : 9401579857
Total Pages : 327 pages
Book Rating : 4.4/5 (15 download)

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Book Synopsis Sensors and Sensory Systems for an Electronic Nose by : J. Gardner

Download or read book Sensors and Sensory Systems for an Electronic Nose written by J. Gardner and published by Springer Science & Business Media. This book was released on 2013-04-17 with total page 327 pages. Available in PDF, EPUB and Kindle. Book excerpt: Sensors and Sensory Systems for an Electronic Nose reviews the current state of progress in the development of an electronic instrument capable of olfaction. The instrument -- the so-called electronic nose -- has enormous potential for application in such areas as product flavor control and environmental monitoring. The book discusses the essential elements of an electronic nose, such as chemical sensors, signal processing, and pattern recoginiton techniques. It is also one of the first contributions to the new and exciting field of machine olfaction.